Controlled removal of hydrogen atoms from H-terminated silicon surfaces
[1];
[2];
[3];
- Univ. of Texas at Dallas, Richardson, TX (United States). Erik Jonsson School of Engineering and Computer Science; University of Texas at Dallas
- Univ. of Texas at Dallas, Richardson, TX (United States). Erik Jonsson School of Engineering and Computer Science
- Zyvex Labs LLC, Richardson, TX (United States)
The controlled formation of dangling bond structures on a H-terminated silicon surface is the first step in an atomically precise method of fabrication of silicon quantum electronic devices. An ultrahigh vacuum scanning tunneling microscope (STM) tip is used to selectively desorb hydrogen atoms from a Si(100)-2x1:H surface by injecting electrons with the sample held at a positive bias voltage. The authors propose a lithography method that allows the STM to operate under negative bias imaging conditions and simultaneously desorb H atoms as required. A high frequency signal is added to the negative bias voltage to deliver the required energy for hydrogen removal. The resulting current at this frequency and its harmonics are filtered to minimize their effect on the operation of the STM’s feedback control loop. The authors show that the chance of tip-sample crash during the lithography process is reduced by employing this method. They also demonstrate that this approach offers a significant potential for controlled and precise removal of H atoms from a H-terminated silicon surface and thus may be used for the fabrication of practical silicon-based atomic-scale devices.
- Research Organization:
- Univ. of Texas at Dallas, Richardson, TX (United States); Zyvex Labs LLC, Richardson, TX (United States)
- Sponsoring Organization:
- USDOE Office of Energy Efficiency and Renewable Energy (EERE), Advanced Manufacturing Office (EE-5A)
- Grant/Contract Number:
- EE0008322
- OSTI ID:
- 1631084
- Alternate ID(s):
- OSTI ID: 1631177
- Journal Information:
- Journal of Vacuum Science and Technology B, Journal Name: Journal of Vacuum Science and Technology B Journal Issue: 4 Vol. 38; ISSN 2166-2746
- Publisher:
- American Vacuum Society / AIPCopyright Statement
- Country of Publication:
- United States
- Language:
- English
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