DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Micron-gap spacers with ultrahigh thermal resistance and mechanical robustness for direct energy conversion

Abstract

Abstract In thermionic energy converters, the absolute efficiency can be increased up to 40% if space-charge losses are eliminated by using a sub-10-µm gap between the electrodes. One practical way to achieve such small gaps over large device areas is to use a stiff and thermally insulating spacer between the two electrodes. We report on the design, fabrication and characterization of thin-film alumina-based spacers that provided robust 3–8 μm gaps between planar substrates and had effective thermal conductivities less than those of aerogels. The spacers were fabricated on silicon molds and, after release, could be manually transferred onto any substrate. In large-scale compression testing, they sustained compressive stresses of 0.4–4 MPa without fracture. Experimentally, the thermal conductance was 10–30 mWcm −2 K −1 and, surprisingly, independent of film thickness (100–800 nm) and spacer height. To explain this independence, we developed a model that includes the pressure-dependent conductance of locally distributed asperities and sparse contact points throughout the spacer structure, indicating that only 0.1–0.5% of the spacer-electrode interface was conducting heat. Our spacers show remarkable functionality over multiple length scales, providing insulating micrometer gaps over centimeter areas using nanoscale films. These innovations can be applied to other technologies requiring high thermal resistance in small spaces,more » such as thermophotovoltaic converters, insulation for spacecraft and cryogenic devices.« less

Authors:
; ORCiD logo; ; ; ; ; ; ORCiD logo; ; ; ; ;
Publication Date:
Research Org.:
Stanford Univ., CA (United States)
Sponsoring Org.:
USDOE Advanced Research Projects Agency - Energy (ARPA-E); National Science Foundation (NSF)
OSTI Identifier:
1619804
Alternate Identifier(s):
OSTI ID: 1613675
Grant/Contract Number:  
AR0000664; ECCS-1542153
Resource Type:
Published Article
Journal Name:
Microsystems & Nanoengineering (Online)
Additional Journal Information:
Journal Name: Microsystems & Nanoengineering (Online) Journal Volume: 5 Journal Issue: 1; Journal ID: ISSN 2055-7434
Publisher:
Nature Publishing Group
Country of Publication:
United Kingdom
Language:
English
Subject:
42 ENGINEERING; science & technology; instruments & instrumentation; electrical and electronic engineering; electronic properties and materials; NEMS

Citation Formats

Nicaise, Samuel M., Lin, Chen, Azadi, Mohsen, Bozorg-Grayeli, Tara, Adebayo-Ige, Promise, Lilley, Drew E., Pfitzer, Yann, Cha, Wujoon, Van Houten, Kyana, Melosh, Nicholas A., Howe, Roger T., Schwede, Jared W., and Bargatin, Igor. Micron-gap spacers with ultrahigh thermal resistance and mechanical robustness for direct energy conversion. United Kingdom: N. p., 2019. Web. doi:10.1038/s41378-019-0071-4.
Nicaise, Samuel M., Lin, Chen, Azadi, Mohsen, Bozorg-Grayeli, Tara, Adebayo-Ige, Promise, Lilley, Drew E., Pfitzer, Yann, Cha, Wujoon, Van Houten, Kyana, Melosh, Nicholas A., Howe, Roger T., Schwede, Jared W., & Bargatin, Igor. Micron-gap spacers with ultrahigh thermal resistance and mechanical robustness for direct energy conversion. United Kingdom. https://doi.org/10.1038/s41378-019-0071-4
Nicaise, Samuel M., Lin, Chen, Azadi, Mohsen, Bozorg-Grayeli, Tara, Adebayo-Ige, Promise, Lilley, Drew E., Pfitzer, Yann, Cha, Wujoon, Van Houten, Kyana, Melosh, Nicholas A., Howe, Roger T., Schwede, Jared W., and Bargatin, Igor. Mon . "Micron-gap spacers with ultrahigh thermal resistance and mechanical robustness for direct energy conversion". United Kingdom. https://doi.org/10.1038/s41378-019-0071-4.
@article{osti_1619804,
title = {Micron-gap spacers with ultrahigh thermal resistance and mechanical robustness for direct energy conversion},
author = {Nicaise, Samuel M. and Lin, Chen and Azadi, Mohsen and Bozorg-Grayeli, Tara and Adebayo-Ige, Promise and Lilley, Drew E. and Pfitzer, Yann and Cha, Wujoon and Van Houten, Kyana and Melosh, Nicholas A. and Howe, Roger T. and Schwede, Jared W. and Bargatin, Igor},
abstractNote = {Abstract In thermionic energy converters, the absolute efficiency can be increased up to 40% if space-charge losses are eliminated by using a sub-10-µm gap between the electrodes. One practical way to achieve such small gaps over large device areas is to use a stiff and thermally insulating spacer between the two electrodes. We report on the design, fabrication and characterization of thin-film alumina-based spacers that provided robust 3–8 μm gaps between planar substrates and had effective thermal conductivities less than those of aerogels. The spacers were fabricated on silicon molds and, after release, could be manually transferred onto any substrate. In large-scale compression testing, they sustained compressive stresses of 0.4–4 MPa without fracture. Experimentally, the thermal conductance was 10–30 mWcm −2 K −1 and, surprisingly, independent of film thickness (100–800 nm) and spacer height. To explain this independence, we developed a model that includes the pressure-dependent conductance of locally distributed asperities and sparse contact points throughout the spacer structure, indicating that only 0.1–0.5% of the spacer-electrode interface was conducting heat. Our spacers show remarkable functionality over multiple length scales, providing insulating micrometer gaps over centimeter areas using nanoscale films. These innovations can be applied to other technologies requiring high thermal resistance in small spaces, such as thermophotovoltaic converters, insulation for spacecraft and cryogenic devices.},
doi = {10.1038/s41378-019-0071-4},
journal = {Microsystems & Nanoengineering (Online)},
number = 1,
volume = 5,
place = {United Kingdom},
year = {2019},
month = {7}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
https://doi.org/10.1038/s41378-019-0071-4

Citation Metrics:
Cited by: 1 work
Citation information provided by
Web of Science

Save / Share:

Works referenced in this record:

Optimal emitter-collector gap for thermionic energy converters
journal, April 2012

  • Lee, Jae-Hyung; Bargatin, Igor; Melosh, Nicholas A.
  • Applied Physics Letters, Vol. 100, Issue 17
  • DOI: 10.1063/1.4707379

Negative space charge effects in photon-enhanced thermionic emission solar converters
journal, July 2015

  • Segev, G.; Weisman, D.; Rosenwaks, Y.
  • Applied Physics Letters, Vol. 107, Issue 1
  • DOI: 10.1063/1.4926625

A high-precision apparatus for the characterization of thermal interface materials
journal, September 2009

  • Kempers, R.; Kolodner, P.; Lyons, A.
  • Review of Scientific Instruments, Vol. 80, Issue 9
  • DOI: 10.1063/1.3193715

High-performance near-field thermophotovoltaics for waste heat recovery
journal, November 2017


Ultra-low thermal conductivity of high-interface density Si/Ge amorphous multilayers
journal, March 2018

  • Goto, Masahiro; Xu, Yibin; Zhan, Tianzhuo
  • Applied Physics Express, Vol. 11, Issue 4
  • DOI: 10.7567/APEX.11.045202

Density dependence of the room temperature thermal conductivity of atomic layer deposition-grown amorphous alumina (Al2O3)
journal, June 2014

  • Gorham, Caroline S.; Gaskins, John T.; Parsons, Gregory N.
  • Applied Physics Letters, Vol. 104, Issue 25
  • DOI: 10.1063/1.4885415

Microfabricated Thermally Isolated Low Work-Function Emitter
journal, October 2014

  • Lee, Jae-Hyung; Bargatin, Igor; Vancil, Bernard K.
  • Journal of Microelectromechanical Systems, Vol. 23, Issue 5
  • DOI: 10.1109/JMEMS.2014.2307882

Parallel-plate submicron gap formed by micromachined low-density pillars for near-field radiative heat transfer
journal, February 2015

  • Ito, Kota; Miura, Atsushi; Iizuka, Hideo
  • Applied Physics Letters, Vol. 106, Issue 8
  • DOI: 10.1063/1.4913692

Mechanical properties of silica aerogels
journal, January 1998


Surface modes for near field thermophotovoltaics
journal, May 2003

  • Narayanaswamy, Arvind; Chen, Gang
  • Applied Physics Letters, Vol. 82, Issue 20
  • DOI: 10.1063/1.1575936

Mechanical strength of silica aerogels
journal, March 1988


Ultralight shape-recovering plate mechanical metamaterials
journal, December 2015

  • Davami, Keivan; Zhao, Lin; Lu, Eric
  • Nature Communications, Vol. 6, Issue 1
  • DOI: 10.1038/ncomms10019

Micron-gap ThermoPhotoVoltaics (MTPV)
conference, January 2004

  • DiMatteo, R.
  • THERMOPHOTOVOLTAIC GENERATION OF ELECTRICITY: Sixth Conference on Thermophotovoltaic Generation of Electricity: TPV6, AIP Conference Proceedings
  • DOI: 10.1063/1.1841878

Transient Thermo-Reflectance Method for Characterization of Thermal Interface Material Based on Carbon Nanotube Array
conference, October 2010

  • Zhao, Yang; Chu, Rong-Shiuan; Majumdar, Arun
  • ASME 2009 Second International Conference on Micro/Nanoscale Heat and Mass Transfer, Volume 2
  • DOI: 10.1115/MNHMT2009-18306

Thermal conductivity of amorphous Al 2 O 3 /TiO 2 nanolaminates deposited by atomic layer deposition
journal, September 2016


Ultra-Low Thermal Conductivity in W/Al2O3 Nanolaminates
journal, February 2004


Aerogel-based thermal superinsulation: an overview
journal, May 2012

  • Koebel, Matthias; Rigacci, Arnaud; Achard, Patrick
  • Journal of Sol-Gel Science and Technology, Vol. 63, Issue 3
  • DOI: 10.1007/s10971-012-2792-9

Cylindrical cryogenic calorimeter testing of six types of multilayer insulation systems
journal, January 2018


Comparison of Test Methods for High Performance Thermal Interface Materials
conference, March 2007

  • Jarrett, R. N.; Merritt, C. K.; Ross, J. P.
  • Twenty-Third Annual IEEE Semiconductor Thermal Measurement and Management Symposium
  • DOI: 10.1109/STHERM.2007.352391

Impact of thermal contact resistances on micro-gap heat losses for microthermionic power generators
journal, June 2015

  • Belbachir, Remi Yacine; An, Zhonglie; Ono, Takahito
  • Microsystem Technologies, Vol. 22, Issue 12
  • DOI: 10.1007/s00542-015-2591-7

Microbead-separated thermionic energy converter with enhanced emission current
journal, January 2013

  • Littau, Karl A.; Sahasrabuddhe, Kunal; Barfield, Dustin
  • Physical Chemistry Chemical Physics, Vol. 15, Issue 34
  • DOI: 10.1039/c3cp52895b

3-Omega Measurements of Vertically Oriented Carbon Nanotubes on Silicon
journal, November 2005

  • Hu, X. Jack; Padilla, Antonio A.; Xu, Jun
  • Journal of Heat Transfer, Vol. 128, Issue 11
  • DOI: 10.1115/1.2352778

Lower limit to the thermal conductivity of disordered crystals
journal, September 1992

  • Cahill, David G.; Watson, S. K.; Pohl, R. O.
  • Physical Review B, Vol. 46, Issue 10, p. 6131-6140
  • DOI: 10.1103/PhysRevB.46.6131

High Temperature Thermal Conductivity of Amorphous Al 2 O 3 Thin Films Grown by Low Temperature ALD : High Temperature Thermal Conductivity of α-Al
journal, August 2013

  • Cappella, Andrea; Battaglia, Jean-Luc; Schick, Vincent
  • Advanced Engineering Materials, Vol. 15, Issue 11
  • DOI: 10.1002/adem.201300132

Photon-enhanced thermionic emission for solar concentrator systems
journal, August 2010

  • Schwede, Jared W.; Bargatin, Igor; Riley, Daniel C.
  • Nature Materials, Vol. 9, Issue 9
  • DOI: 10.1038/nmat2814

Thermal investigation of a micro-gap thermionic power generator
journal, July 2014

  • Belbachir, Remi Yacine; An, Zhonglie; Ono, Takahito
  • Journal of Micromechanics and Microengineering, Vol. 24, Issue 8
  • DOI: 10.1088/0960-1317/24/8/085009

Compression of aerogels
journal, June 1995


Nanogap near-field thermophotovoltaics
journal, June 2018


Thermionic Energy Conversion in the Twenty-first Century: Advances and Opportunities for Space and Terrestrial Applications
journal, November 2017

  • Go, David B.; Haase, John R.; George, Jeffrey
  • Frontiers in Mechanical Engineering, Vol. 3
  • DOI: 10.3389/fmech.2017.00013

Thermal properties of organic and inorganic aerogels
journal, March 1994

  • Hrubesh, Lawrence W.; Pekala, Richard W.
  • Journal of Materials Research, Vol. 9, Issue 3
  • DOI: 10.1557/JMR.1994.0731

A Hybrid Electric and Thermal Solar Receiver
journal, May 2018


Ultra-Low Thermal Conductivity in Nanoscale Layered Oxides
journal, December 2009

  • Alvarez-Quintana, J.; Peralba-Garcia, Ll.; Lábár, J. L.
  • Journal of Heat Transfer, Vol. 132, Issue 3
  • DOI: 10.1115/1.4000052

Minimized thermal conductivity in highly stable thermal barrier W/ZrO2 multilayers
journal, September 2016


Optimization of a near-field thermophotovoltaic system operating at low temperature and large vacuum gap
journal, May 2018

  • Lim, Mikyung; Song, Jaeman; Kim, Jihoon
  • Journal of Quantitative Spectroscopy and Radiative Transfer, Vol. 210
  • DOI: 10.1016/j.jqsrt.2018.02.006

Encapsulated Thermionic Energy Converter with Stiffened Suspension
conference, May 2012

  • Lee, J. H.; Bargatin, I.; Iwami, K.
  • 2012 Solid-State, Actuators, and Microsystems Workshop Technical Digest
  • DOI: 10.31438/trf.hh2012.130