Scaling growth rates for perovskite oxide virtual substrates on silicon

Lapano, Jason; Brahlek, Matthew; Zhang, Lei; Roth, Joseph; Pogrebnyakov, Alexej; Engel-Herbert, Roman

doi:10.1038/s41467-019-10273-2

Title: Scaling growth rates for perovskite oxide virtual substrates on silicon

Journal Article · 05 June 2019 · Nature Communications

DOI: https://doi.org/10.1038/s41467-019-10273-2 · OSTI ID:1619519

Lapano, Jason ^[1]; Brahlek, Matthew ^[2];

^[1]; Roth, Joseph ^[1]; Pogrebnyakov, Alexej ^[1]; Engel-Herbert, Roman ^[3]

Department of Materials Science and Engineering, Pennsylvania State University, University Park, PA, 16802, USA
Materials Science and Technology, Oak Ridge National Lab, Oak Ridge, TN, 37831, USA; Department of Materials Science and Engineering, Pennsylvania State University, University Park, PA, 16802, USA
Department of Materials Science and Engineering, Pennsylvania State University, University Park, PA, 16802, USA; Department of Physics, Pennsylvania State University, University Park, PA, 16802, USA; Department of Chemistry, Pennsylvania State University, University Park, PA, 16802, USA

The availability of native substrates is a cornerstone in the development of microelectronic technologies relying on epitaxial films. If native substrates are not available, virtual substrates - crystalline buffer layers epitaxially grown on a structurally dissimilar substrate - offer a solution. Realizing commercially viable virtual substrates requires the growth of high-quality films at high growth rates for large-scale production. We report the stoichiometric growth of SrTiO₃ exceeding 600 nm hr^-1. This tenfold increase in growth rate compared to SrTiO₃ grown on silicon by conventional methods is enabled by a self-regulated growth window accessible in hybrid molecular beam epitaxy. Overcoming the materials integration challenge for complex oxides on silicon using virtual substrates opens a path to develop new electronic devices in the More than Moore era and silicon integrated quantum computation hardware.

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Research Organization:: Pennsylvania State Univ., University Park, PA (United States)

Sponsoring Organization:: USDOE Office of Science (SC); National Science Foundation (NSF); Pennsylvania State University; USDOE

Grant/Contract Number:: SC0012375; DMR-1420620; DMR-1629477; DMR-1352502

OSTI ID:: 1619519

Alternate ID(s):: OSTI ID: 1624157

Journal Information:: Nature Communications, Vol. 10, Issue 1; ISSN 2041-1723

Publisher:: Nature Publishing GroupCopyright Statement

Country of Publication:: United States

Language:: English

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Antimonide-based compound semiconductors for electronic devices: A review Bennett, Brian R.; Magno, Richard; Boos, J. Brad Solid-State Electronics, Vol. 49, Issue 12 https://doi.org/10.1016/j.sse.2005.09.008	journal	December 2005
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Stoichiometric, nonstoichiometric, and locally nonstoichiometric SrTiO3 films grown by molecular beam epitaxy Fisher, P.; Du, H.; Skowronski, M. Journal of Applied Physics, Vol. 103, Issue 1 https://doi.org/10.1063/1.2827992	journal	January 2008
Growth of homoepitaxial SrTiO3 thin films by molecular-beam epitaxy Brooks, C. M.; Kourkoutis, L. Fitting; Heeg, T. Applied Physics Letters, Vol. 94, Issue 16 https://doi.org/10.1063/1.3117365	journal	April 2009
Molecular beam epitaxy of SrTiO3 with a growth window Jalan, Bharat; Moetakef, Pouya; Stemmer, Susanne Applied Physics Letters, Vol. 95, Issue 3 https://doi.org/10.1063/1.3184767	journal	July 2009
Stoichiometry optimization of homoepitaxial oxide thin films using x-ray diffraction LeBeau, James M.; Engel-Herbert, Roman; Jalan, Bharat Applied Physics Letters, Vol. 95, Issue 14 https://doi.org/10.1063/1.3243696	journal	October 2009
Critical thickness and strain relaxation in molecular beam epitaxy-grown SrTiO ₃ films Wang, Tianqi; Ganguly, Koustav; Marshall, Patrick Applied Physics Letters, Vol. 103, Issue 21 https://doi.org/10.1063/1.4833248	journal	November 2013
Characteristics and applications of micro-pixelated GaN-based light emitting diodes on Si substrates Tian, Pengfei; McKendry, Jonathan J. D.; Gong, Zheng Journal of Applied Physics, Vol. 115, Issue 3 https://doi.org/10.1063/1.4862298	journal	January 2014
Stoichiometry-driven metal-to-insulator transition in NdTiO ₃ /SrTiO ₃ heterostructures Xu, Peng; Phelan, Daniel; Seok Jeong, Jong Applied Physics Letters, Vol. 104, Issue 8 https://doi.org/10.1063/1.4866867	journal	February 2014
Surface reconstructions in molecular beam epitaxy of SrTiO ₃ Kajdos, Adam P.; Stemmer, Susanne Applied Physics Letters, Vol. 105, Issue 19 https://doi.org/10.1063/1.4901726	journal	November 2014
Self-regulated growth of LaVO3 thin films by hybrid molecular beam epitaxy Zhang, Hai-Tian; Dedon, Liv R.; Martin, Lane W. Applied Physics Letters, Vol. 106, Issue 23 https://doi.org/10.1063/1.4922213	journal	June 2015
Accessing a growth window for SrVO3 thin films Brahlek, Matthew; Zhang, Lei; Eaton, Craig Applied Physics Letters, Vol. 107, Issue 14 https://doi.org/10.1063/1.4932198	journal	October 2015
Improving the structural quality and electrical resistance of SrTiO ₃ thin films on Si (001) via a two-step anneal Zhang, Lei; Wang, Yaqiang; Engel-Herbert, Roman Journal of Applied Physics, Vol. 119, Issue 4 https://doi.org/10.1063/1.4939760	journal	January 2016
Defects, stoichiometry, and electronic transport in SrTiO3-δ epilayers: A high pressure oxygen sputter deposition study Ambwani, P.; Xu, P.; Haugstad, G. Journal of Applied Physics, Vol. 120, Issue 5 https://doi.org/10.1063/1.4960343	journal	August 2016
History and current status of commercial pulsed laser deposition equipment Greer, James A. Journal of Physics D: Applied Physics, Vol. 47, Issue 3 https://doi.org/10.1088/0022-3727/47/3/034005	journal	December 2013
Growth of high-quality SrTiO3 films using a hybrid molecular beam epitaxy approach Jalan, Bharat; Engel-Herbert, Roman; Wright, Nicholas J. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 27, Issue 3 https://doi.org/10.1116/1.3106610	journal	May 2009
Analysis of carbon in SrTiO3 grown by hybrid molecular beam epitaxy Jalan, Bharat; Cagnon, Joël; Mates, Thomas E. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 27, Issue 6 https://doi.org/10.1116/1.3253355	journal	November 2009
Growth, characterization, and uniformity analysis of 200 mm wafer-scale SrTiO3/Si Gu, X.; Lubyshev, D.; Batzel, J. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 28, Issue 3 https://doi.org/10.1116/1.3292509	journal	May 2010
Simple self-gettering differential-pump for minimizing source oxidation in oxide-MBE environment Kim, Yong-Seung; Bansal, Namrata; Oh, Seongshik Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 29, Issue 4 https://doi.org/10.1116/1.3591384	journal	July 2011
Growth of SrVO ₃ thin films by hybrid molecular beam epitaxy Eaton, Craig; Moyer, Jarrett A.; Alipour, Hamideh M. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 33, Issue 6 https://doi.org/10.1116/1.4927439	journal	November 2015
Hybrid molecular beam epitaxy for the growth of stoichiometric BaSnO ₃ Prakash, Abhinav; Dewey, John; Yun, Hwanhui Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 33, Issue 6 https://doi.org/10.1116/1.4933401	journal	November 2015
Isotopically enhanced triple-quantum-dot qubit Eng, Kevin; Ladd, Thaddeus D.; Smith, Aaron Science Advances, Vol. 1, Issue 4 https://doi.org/10.1126/sciadv.1500214	journal	May 2015
Emerging heterogeneous integrated photonic platforms on silicon Fathpour, Sasan Nanophotonics, Vol. 4, Issue 1 https://doi.org/10.1515/nanoph-2014-0024	journal	May 2015
Metamorphic III–V semiconductor lasers grown on silicon Tournié, Eric; Cerutti, Laurent; Rodriguez, Jean-Baptiste MRS Bulletin, Vol. 41, Issue 3 https://doi.org/10.1557/mrs.2016.24	journal	March 2016
Metamorphic epitaxial materials Richardson, Christopher J. K.; Lee, Minjoo Larry MRS Bulletin, Vol. 41, Issue 3 https://doi.org/10.1557/mrs.2016.7	journal	March 2016
Growth of strontium ruthenate films by hybrid molecular beam epitaxy Marshall, Patrick B.; Kim, Honggyu; Ahadi, Kaveh arXiv https://doi.org/10.48550/arxiv.1709.01166	text	January 2017
Torsional Periodic Lattice Distortions and Diffraction of Twisted 2D Materials Sung, Suk Hyun; Goh, Yin Min; Yoo, Hyobin arXiv https://doi.org/10.48550/arxiv.2203.06510	text	January 2022

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