Atomic layer deposition of cubic tin–calcium sulfide alloy films
Abstract
Here, we deposit films of tin–calcium sulfide by atomic layer deposition (ALD) and demonstrate the metastability of this material. Rough and spiky films are obtained by using Sn and Ca precursors with different ligands, whereas compact and smooth films are obtained when the two metal sources share the same ligands. Compositional and quartz crystal microbalance results indicate that part of the underlaying SnS film is replaced and/or removed during the CaS ALD cycle during the ternary film deposition, possibly via a temperature-dependent cation exchange mechanism. The crystal structure transforms from orthorhombic to cubic as the calcium content increases. Furthermore, resistivity increases with calcium content in the alloy films, whereas optical band gap only depends weakly on Ca content. After annealing at 400 °C in an H2S environment, the cubic alloy film undergoes a phase transition into the orthorhombic phase and its resistivity also decreases. Both phenomena could be explained by phase separation of the metastable alloy.
- Authors:
-
[1];
- Harvard Univ., Cambridge, MA (United States)
- SLAC National Accelerator Lab., Menlo Park, CA (United States). Stanford Synchrotron Radiation Lightsource (SSRL)
- Publication Date:
- Research Org.:
- Energy Frontier Research Centers (EFRC) (United States). Center for Next Generation of Materials by Design: Incorporating Metastability (CNGMD); SLAC National Accelerator Lab., Menlo Park, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1616742
- Grant/Contract Number:
- AC02-76SF00515
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Journal of Materials Research
- Additional Journal Information:
- Journal Volume: 35; Journal Issue: 7; Journal ID: ISSN 0884-2914
- Publisher:
- Materials Research Society
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Yang, Chuanxi, Zhao, Xizhu, Kim, Sang Bok, Schelhas, Laura T., Lou, Xiabing, and G. Gordon, Roy. Atomic layer deposition of cubic tin–calcium sulfide alloy films. United States: N. p., 2019.
Web. doi:10.1557/jmr.2019.337.
Yang, Chuanxi, Zhao, Xizhu, Kim, Sang Bok, Schelhas, Laura T., Lou, Xiabing, & G. Gordon, Roy. Atomic layer deposition of cubic tin–calcium sulfide alloy films. United States. https://doi.org/10.1557/jmr.2019.337
Yang, Chuanxi, Zhao, Xizhu, Kim, Sang Bok, Schelhas, Laura T., Lou, Xiabing, and G. Gordon, Roy. Fri .
"Atomic layer deposition of cubic tin–calcium sulfide alloy films". United States. https://doi.org/10.1557/jmr.2019.337. https://www.osti.gov/servlets/purl/1616742.
@article{osti_1616742,
title = {Atomic layer deposition of cubic tin–calcium sulfide alloy films},
author = {Yang, Chuanxi and Zhao, Xizhu and Kim, Sang Bok and Schelhas, Laura T. and Lou, Xiabing and G. Gordon, Roy},
abstractNote = {Here, we deposit films of tin–calcium sulfide by atomic layer deposition (ALD) and demonstrate the metastability of this material. Rough and spiky films are obtained by using Sn and Ca precursors with different ligands, whereas compact and smooth films are obtained when the two metal sources share the same ligands. Compositional and quartz crystal microbalance results indicate that part of the underlaying SnS film is replaced and/or removed during the CaS ALD cycle during the ternary film deposition, possibly via a temperature-dependent cation exchange mechanism. The crystal structure transforms from orthorhombic to cubic as the calcium content increases. Furthermore, resistivity increases with calcium content in the alloy films, whereas optical band gap only depends weakly on Ca content. After annealing at 400 °C in an H2S environment, the cubic alloy film undergoes a phase transition into the orthorhombic phase and its resistivity also decreases. Both phenomena could be explained by phase separation of the metastable alloy.},
doi = {10.1557/jmr.2019.337},
journal = {Journal of Materials Research},
number = 7,
volume = 35,
place = {United States},
year = {2019},
month = {11}
}
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