Atomic layer deposition of cubic tin–calcium sulfide alloy films

Yang, Chuanxi; Zhao, Xizhu; Kim, Sang Bok; Schelhas, Laura T.; Lou, Xiabing; G. Gordon, Roy

doi:10.1557/jmr.2019.337

Title: Atomic layer deposition of cubic tin–calcium sulfide alloy films

Journal Article · 22 November 2019 · Journal of Materials Research

DOI: https://doi.org/10.1557/jmr.2019.337 · OSTI ID:1616742

^[1]; Zhao, Xizhu ^[1]; Kim, Sang Bok ^[1]; Schelhas, Laura T. ^[2]; Lou, Xiabing ^[1]; G. Gordon, Roy ^[1]

Harvard Univ., Cambridge, MA (United States)
SLAC National Accelerator Lab., Menlo Park, CA (United States). Stanford Synchrotron Radiation Lightsource (SSRL)

Here, we deposit films of tin–calcium sulfide by atomic layer deposition (ALD) and demonstrate the metastability of this material. Rough and spiky films are obtained by using Sn and Ca precursors with different ligands, whereas compact and smooth films are obtained when the two metal sources share the same ligands. Compositional and quartz crystal microbalance results indicate that part of the underlaying SnS film is replaced and/or removed during the CaS ALD cycle during the ternary film deposition, possibly via a temperature-dependent cation exchange mechanism. The crystal structure transforms from orthorhombic to cubic as the calcium content increases. Furthermore, resistivity increases with calcium content in the alloy films, whereas optical band gap only depends weakly on Ca content. After annealing at 400 °C in an H₂S environment, the cubic alloy film undergoes a phase transition into the orthorhombic phase and its resistivity also decreases. Both phenomena could be explained by phase separation of the metastable alloy.

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Research Organization:: Energy Frontier Research Centers (EFRC) (United States). Center for Next Generation of Materials by Design: Incorporating Metastability (CNGMD); SLAC National Accelerator Laboratory (SLAC), Menlo Park, CA (United States)

Sponsoring Organization:: USDOE

Grant/Contract Number:: AC02-76SF00515

OSTI ID:: 1616742

Journal Information:: Journal of Materials Research, Vol. 35, Issue 7; ISSN 0884-2914

Publisher:: Materials Research SocietyCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 5 works

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