High Strength and Deformation Mechanisms of Al0.3CoCrFeNi High-Entropy Alloy Thin Films Fabricated by Magnetron Sputtering
Abstract
Recently, high-entropy alloy thin films (HEATFs) with nanocrystalline structures and high hardness were developed by magnetron sputtering technique and have exciting potential to make small structure devices and precision instruments with sizes ranging from nanometers to micrometers. However, the strength and deformation mechanisms are still unclear. In this work, nanocrystalline Al0.3CoCrFeNi HEATFs with a thickness of ~4 μm were prepared. The microstructures of the thin films were comprehensively characterized, and the mechanical properties were systematically studied. It was found that the thin film was smooth, with a roughness of less than 5 nm. The chemical composition of the high entropy alloy thin film was homogeneous with a main single face-centered cubic (FCC) structure. Furthermore, it was observed that the hardness and the yield strength of the high-entropy alloy thin film was about three times that of the bulk samples, and the plastic deformation was inhomogeneous. Our results could provide an in-depth understanding of the mechanics and deformation mechanism for future design of nanocrystalline HEATFs with desired properties.
- Authors:
-
- Shenzhen Univ. (China)
- City Univ. of Hong Kong (China); Shanghai Tech Univ. (China)
- City Univ. of Hong Kong (China); City Univ. of Hong Kong Shenzhen Research Inst. (China)
- Publication Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
- Sponsoring Org.:
- National Natural Science Foundation of China (NSFC); Youth Innovation Talent Project of Guangdong Province; Shenzhen University; Shenzhen Science and Technology Innovation Committee
- OSTI Identifier:
- 1614938
- Grant/Contract Number:
- 51801128; 51701125; 2017KQNCX175; 2017069; 201553; 827-000180; JG2018090; JCYJ20170413141157573
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Entropy
- Additional Journal Information:
- Journal Volume: 21; Journal Issue: 2; Journal ID: ISSN 1099-4300
- Publisher:
- MDPI
- Country of Publication:
- United States
- Language:
- ENGLISH
- Subject:
- 36 MATERIALS SCIENCE; high-entropy alloys; thin films; hardness; deformation behaviors; nanocrystalline
Citation Formats
Liao, Wei-Bing, Zhang, Hongti, Liu, Zhi-Yuan, Li, Pei-Feng, Huang, Jian-Jun, Yu, Chun-Yan, and Lu, Yang. High Strength and Deformation Mechanisms of Al0.3CoCrFeNi High-Entropy Alloy Thin Films Fabricated by Magnetron Sputtering. United States: N. p., 2019.
Web. doi:10.3390/e21020146.
Liao, Wei-Bing, Zhang, Hongti, Liu, Zhi-Yuan, Li, Pei-Feng, Huang, Jian-Jun, Yu, Chun-Yan, & Lu, Yang. High Strength and Deformation Mechanisms of Al0.3CoCrFeNi High-Entropy Alloy Thin Films Fabricated by Magnetron Sputtering. United States. https://doi.org/10.3390/e21020146
Liao, Wei-Bing, Zhang, Hongti, Liu, Zhi-Yuan, Li, Pei-Feng, Huang, Jian-Jun, Yu, Chun-Yan, and Lu, Yang. Mon .
"High Strength and Deformation Mechanisms of Al0.3CoCrFeNi High-Entropy Alloy Thin Films Fabricated by Magnetron Sputtering". United States. https://doi.org/10.3390/e21020146. https://www.osti.gov/servlets/purl/1614938.
@article{osti_1614938,
title = {High Strength and Deformation Mechanisms of Al0.3CoCrFeNi High-Entropy Alloy Thin Films Fabricated by Magnetron Sputtering},
author = {Liao, Wei-Bing and Zhang, Hongti and Liu, Zhi-Yuan and Li, Pei-Feng and Huang, Jian-Jun and Yu, Chun-Yan and Lu, Yang},
abstractNote = {Recently, high-entropy alloy thin films (HEATFs) with nanocrystalline structures and high hardness were developed by magnetron sputtering technique and have exciting potential to make small structure devices and precision instruments with sizes ranging from nanometers to micrometers. However, the strength and deformation mechanisms are still unclear. In this work, nanocrystalline Al0.3CoCrFeNi HEATFs with a thickness of ~4 μm were prepared. The microstructures of the thin films were comprehensively characterized, and the mechanical properties were systematically studied. It was found that the thin film was smooth, with a roughness of less than 5 nm. The chemical composition of the high entropy alloy thin film was homogeneous with a main single face-centered cubic (FCC) structure. Furthermore, it was observed that the hardness and the yield strength of the high-entropy alloy thin film was about three times that of the bulk samples, and the plastic deformation was inhomogeneous. Our results could provide an in-depth understanding of the mechanics and deformation mechanism for future design of nanocrystalline HEATFs with desired properties.},
doi = {10.3390/e21020146},
journal = {Entropy},
number = 2,
volume = 21,
place = {United States},
year = {Mon Feb 04 00:00:00 EST 2019},
month = {Mon Feb 04 00:00:00 EST 2019}
}
Web of Science
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