Effects of Silicon Content on the Microstructures and Mechanical Properties of (AlCrTiZrV)-Six-N High-Entropy Alloy Films

Niu, Jingrui; Li, Wei; Liu, Ping; Zhang, Ke; Ma, Fengcang; Chen, Xiaohong; Feng, Rui; Liaw, Peter

doi:10.3390/e21010075

Title: Effects of Silicon Content on the Microstructures and Mechanical Properties of (AlCrTiZrV)-Si_x-N High-Entropy Alloy Films

Journal Article · 15 January 2019 · Entropy

DOI: https://doi.org/10.3390/e21010075 · OSTI ID:1614165

Niu, Jingrui ^[1]; Li, Wei ^[2]; Liu, Ping ^[2]; Zhang, Ke ^[2]; Ma, Fengcang ^[2]; Chen, Xiaohong ^[2]; Feng, Rui ^[3];

^[3]

Univ. of Shanghai for Science and Technology, Shanghai (China); DOE/OSTI
Univ. of Shanghai for Science and Technology, Shanghai (China)
Univ. of Tennessee, Knoxville, TN (United States)

A series of (AlCrTiZrV)-Si_x-N films with different silicon contents were deposited on monocrystalline silicon substrates by direct-current (DC) magnetron sputtering. The films were characterized by the X-ray diffractometry (XRD), scanning electron microscopy (SEM), high-resolution transmission electron microscopy (HRTEM), and nano-indentation techniques. The effects of the silicon content on the microstructures and mechanical properties of the films were investigated. The experimental results show that the (AlCrTiZrV)N films grow in columnar grains and present a (200) preferential growth orientation. The addition of the silicon element leads to the disappearance of the (200) peak, and the grain refinement of the (AlCrTiZrV)-Si_x-N films. Meanwhile, the reticular amorphous phase is formed, thus developing the nanocomposite structure with the nanocrystalline structures encapsulated by the amorphous phase. With the increase of the silicon content, the mechanical properties first increase and then decrease. The maximal hardness and modulus of the film reach 34.3 GPa and 301.5 GPa, respectively, with the silicon content (x) of 8% (volume percent). The strengthening effect of the (AlCrTiZrV)-S_ix-N film can be mainly attributed to the formation of the nanocomposite structure.

View Accepted Manuscript (DOE)

Cite

Export

Save

Research Organization:: Univ. of Illinois at Urbana-Champaign, IL (United States)

Sponsoring Organization:: USDOE Office of Fossil Energy (FE); National Science Foundation (NSF); National Nature Science Foundation of China (NSFC)

Grant/Contract Number:: FE0011194

OSTI ID:: 1614165

Journal Information:: Entropy, Journal Name: Entropy Journal Issue: 1 Vol. 21; ISSN ENTRFG; ISSN 1099-4300

Publisher:: MDPICopyright Statement

Country of Publication:: United States

Language:: English

References (42)

Nanostructured High-Entropy Alloys with Multiple Principal Elements: Novel Alloy Design Concepts and Outcomes Yeh, J.-W.; Chen, S.-K.; Lin, S.-J. Advanced Engineering Materials, Vol. 6, Issue 5, p. 299-303 https://doi.org/10.1002/adem.200300567	journal	May 2004
Ti-Si-N films prepared by plasma-enhanced chemical vapor deposition Shizhi, Li; Yulong, Shi; Hongrui, Peng Plasma Chemistry and Plasma Processing, Vol. 12, Issue 3 https://doi.org/10.1007/BF01447027	journal	September 1992
Fatigue behavior of high-entropy alloys: A review Chen, PeiYong; Lee, Chanho; Wang, Shao-Yu Science China Technological Sciences, Vol. 61, Issue 2 https://doi.org/10.1007/s11431-017-9137-4	journal	November 2017
Fracture Toughness and Fatigue Crack Growth Behavior of As-Cast High-Entropy Alloys Seifi, Mohsen; Li, Dongyue; Yong, Zhang JOM, Vol. 67, Issue 10 https://doi.org/10.1007/s11837-015-1563-9	journal	August 2015
Micro structure and properties of TiSiN films prepared by plasma-enhanced chemical vapor deposition He, J. L.; Chen, C. K.; Hon, M. H. Materials Chemistry and Physics, Vol. 44, Issue 1 https://doi.org/10.1016/0254-0584(95)01655-E	journal	April 1996
Composition, nanostructure and origin of the ultrahardness in nc-TiN/a-Si3N4/a- and nc-TiSi2 nanocomposites with HV=80 to ≥105 GPa Veprek, S.; Niederhofer, A.; Moto, K. Surface and Coatings Technology, Vol. 133-134 https://doi.org/10.1016/S0257-8972(00)00957-9	journal	November 2000
Microstructure and mechanical/thermal properties of Cr–N coatings deposited by reactive unbalanced magnetron sputtering Mayrhofer, P. H.; Tischler, G.; Mitterer, C. Surface and Coatings Technology, Vol. 142-144 https://doi.org/10.1016/S0257-8972(01)01090-8	journal	July 2001
Structure–performance relations in nanocomposite coatings Patscheider, Jörg; Zehnder, Thomas; Diserens, Matthieu Surface and Coatings Technology, Vol. 146-147 https://doi.org/10.1016/S0257-8972(01)01389-5	journal	September 2001
Superhard Ti–Si–N coatings by a hybrid system of arc ion plating and sputtering techniques Kim, Kwang Ho; Choi, Sung-ryong; Yoon, Soon-young Surface and Coatings Technology, Vol. 161, Issue 2-3 https://doi.org/10.1016/S0257-8972(02)00499-1	journal	December 2002
Microstructure and wear behavior of AlxCo1.5CrFeNi1.5Tiy high-entropy alloys Chuang, Ming-Hao; Tsai, Ming-Hung; Wang, Woei-Ren Acta Materialia, Vol. 59, Issue 16 https://doi.org/10.1016/j.actamat.2011.06.041	journal	September 2011
Fatigue behavior of Al0.5CoCrCuFeNi high entropy alloys Hemphill, M. A.; Yuan, T.; Wang, G. Y. Acta Materialia, Vol. 60, Issue 16 https://doi.org/10.1016/j.actamat.2012.06.046	journal	September 2012
Fatigue behavior of a wrought Al0.5CoCrCuFeNi two-phase high-entropy alloy Tang, Zhi; Yuan, Tao; Tsai, Che-Wei Acta Materialia, Vol. 99 https://doi.org/10.1016/j.actamat.2015.07.004	journal	October 2015
A lightweight single-phase AlTiVCr compositionally complex alloy Qiu, Y.; Hu, Y. J.; Taylor, A. Acta Materialia, Vol. 123 https://doi.org/10.1016/j.actamat.2016.10.037	journal	January 2017
In-situ electrochemical-AFM study of localized corrosion of Al CoCrFeNi high-entropy alloys in chloride solution Shi, Yunzhu; Collins, Liam; Balke, Nina Applied Surface Science, Vol. 439 https://doi.org/10.1016/j.apsusc.2018.01.047	journal	May 2018
Corrosion of Al CoCrFeNi high-entropy alloys: Al-content and potential scan-rate dependent pitting behavior Shi, Yunzhu; Yang, Bin; Xie, Xie Corrosion Science, Vol. 119 https://doi.org/10.1016/j.corsci.2017.02.019	journal	May 2017
Homogenization of Al CoCrFeNi high-entropy alloys with improved corrosion resistance Shi, Yunzhu; Collins, Liam; Feng, Rui Corrosion Science, Vol. 133 https://doi.org/10.1016/j.corsci.2018.01.030	journal	April 2018
Effect of temperature on the fatigue-crack growth behavior of the high-entropy alloy CrMnFeCoNi Thurston, Keli V. S.; Gludovatz, Bernd; Hohenwarter, Anton Intermetallics, Vol. 88 https://doi.org/10.1016/j.intermet.2017.05.009	journal	September 2017
Equilibrium phase of high-entropy FeCoNiCrCu0.5 alloy at elevated temperature Lin, Chun-Ming; Tsai, Hsien-Lung Journal of Alloys and Compounds, Vol. 489, Issue 1 https://doi.org/10.1016/j.jallcom.2009.09.041	journal	January 2010
Effect of temperature on mechanical properties of Al0.5CoCrCuFeNi wrought alloy Tsai, Che-Wei; Tsai, Ming-Hung; Yeh, Jien-Wei Journal of Alloys and Compounds, Vol. 490, Issue 1-2 https://doi.org/10.1016/j.jallcom.2009.10.088	journal	February 2010
The effects of secondary elemental Mo or Ti addition in Al0.3CoCrFeNi high-entropy alloy on age hardening at 700°C Shun, Tao-Tsung; Hung, Cheng-Hsin; Lee, Che-Fu Journal of Alloys and Compounds, Vol. 495, Issue 1 https://doi.org/10.1016/j.jallcom.2010.02.032	journal	April 2010
Effects of silicon content on the structure and properties of (AlCrMoTaTi)N coatings by reactive magnetron sputtering Tsai, Du-Cheng; Chang, Zue-Chin; Kuo, Bing-Hau Journal of Alloys and Compounds, Vol. 616 https://doi.org/10.1016/j.jallcom.2014.07.095	journal	December 2014
Oxidation resistance and characterization of (AlCrMoTaTi)-Six-N coating deposited via magnetron sputtering Tsai, Du-Cheng; Deng, Min-Jen; Chang, Zue-Chin Journal of Alloys and Compounds, Vol. 647 https://doi.org/10.1016/j.jallcom.2015.06.025	journal	October 2015
A hexagonal close-packed high-entropy alloy: The effect of entropy Zhao, Y. J.; Qiao, J. W.; Ma, S. G. Materials & Design, Vol. 96 https://doi.org/10.1016/j.matdes.2016.01.149	journal	April 2016
Microstructural development in equiatomic multicomponent alloys Cantor, B.; Chang, I. T. H.; Knight, P. Materials Science and Engineering: A, Vol. 375-377 https://doi.org/10.1016/j.msea.2003.10.257	journal	July 2004
Conditions required for achieving superhardness of ≥45GPa in nc-TiN/a-Si3N4 nanocomposites Procházka, Jan; Karvánková, Pavla; Vepřek-Heijman, Maritza G. J. Materials Science and Engineering: A, Vol. 384, Issue 1-2 https://doi.org/10.1016/j.msea.2004.05.046	journal	October 2004
Processing and properties of nanocrystalline CuNiCoZnAlTi high entropy alloys by mechanical alloying Varalakshmi, S.; Kamaraj, M.; Murty, B. S. Materials Science and Engineering: A, Vol. 527, Issue 4-5 https://doi.org/10.1016/j.msea.2009.09.019	journal	February 2010
On the superior hot hardness and softening resistance of AlCoCrxFeMo0.5Ni high-entropy alloys Hsu, Chin-You; Juan, Chien-Chang; Wang, Woei-Ren Materials Science and Engineering: A, Vol. 528, Issue 10-11 https://doi.org/10.1016/j.msea.2011.01.072	journal	April 2011
Structure and mechanical properties of B2 ordered refractory AlNbTiVZr x (x = 0–1.5) high-entropy alloys Yurchenko, N. Yu.; Stepanov, N. D.; Zherebtsov, S. V. Materials Science and Engineering: A, Vol. 704 https://doi.org/10.1016/j.msea.2017.08.019	journal	September 2017
Characteristics of multi-element (ZrTaNbTiW)N films prepared by magnetron sputtering and plasma based ion implantation Feng, Xingguo; Tang, Guangze; Ma, Xinxin Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 301 https://doi.org/10.1016/j.nimb.2013.03.001	journal	April 2013
Microstructures and properties of high-entropy alloys Zhang, Yong; Zuo, Ting Ting; Tang, Zhi Progress in Materials Science, Vol. 61 https://doi.org/10.1016/j.pmatsci.2013.10.001	journal	April 2014
Grain growth and the Hall–Petch relationship in a high-entropy FeCrNiCoMn alloy Liu, W. H.; Wu, Y.; He, J. Y. Scripta Materialia, Vol. 68, Issue 7 https://doi.org/10.1016/j.scriptamat.2012.12.002	journal	April 2013
Structural changes in Zr–Si–N films vs. their silicon content Pilloud, D.; Pierson, J. F.; Marques, A. P. Surface and Coatings Technology, Vol. 180-181 https://doi.org/10.1016/j.surfcoat.2003.10.087	journal	March 2004
Industrial applications of superhard nanocomposite coatings Veprek, Stan; Veprek-Heijman, Maritza J. G. Surface and Coatings Technology, Vol. 202, Issue 21 https://doi.org/10.1016/j.surfcoat.2008.05.038	journal	July 2008
Effects of nitrogen content on structure and mechanical properties of multi-element (AlCrNbSiTiV)N coating Huang, Ping-Kang; Yeh, Jien-Wei Surface and Coatings Technology, Vol. 203, Issue 13 https://doi.org/10.1016/j.surfcoat.2009.01.016	journal	March 2009
Effects of substrate temperature and post-annealing on microstructure and properties of (AlCrNbSiTiV)N coatings Huang, Ping-Kang; Yeh, Jien-Wei Thin Solid Films, Vol. 518, Issue 1 https://doi.org/10.1016/j.tsf.2009.06.020	journal	November 2009
A Novel Low-Density, High-Hardness, High-entropy Alloy with Close-packed Single-phase Nanocrystalline Structures Youssef, Khaled M.; Zaddach, Alexander J.; Niu, Changning Materials Research Letters, Vol. 3, Issue 2 https://doi.org/10.1080/21663831.2014.985855	journal	December 2014
Microstructures and properties of high-entropy alloy films and coatings: a review Li, Wei; Liu, Ping; Liaw, Peter K. Materials Research Letters, Vol. 6, Issue 4 https://doi.org/10.1080/21663831.2018.1434248	journal	February 2018
Effects of silicon content on the structure and mechanical properties of (AlCrTaTiZr)–Si _x –N coatings by reactive RF magnetron sputtering Cheng, Keng-Hao; Tsai, Che-Wei; Lin, Su-Jien Journal of Physics D: Applied Physics, Vol. 44, Issue 20 https://doi.org/10.1088/0022-3727/44/20/205405	journal	May 2011
An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments Oliver, W. C.; Pharr, G. M. Journal of Materials Research, Vol. 7, Issue 06, p. 1564-1583 https://doi.org/10.1557/JMR.1992.1564	journal	June 1992
Wear behavior of Al _0.6 CoCrFeNi high-entropy alloys: Effect of environments Chen, Ming; Shi, Xiao Hui; Yang, Huijun Journal of Materials Research, Vol. 33, Issue 19 https://doi.org/10.1557/jmr.2018.279	journal	September 2018
Nanomechanical Properties and Deformation Behaviors of Multi-Component (AlCrTaTiZr)NxSiy High-Entropy Coatings Lin, Shao-Yi; Chang, Shou-Yi; Chang, Chia-Jung Entropy, Vol. 16, Issue 1 https://doi.org/10.3390/e16010405	journal	December 2013
Corrosion-Resistant High-Entropy Alloys: A Review Shi, Yunzhu; Yang, Bin; Liaw, Peter Metals, Vol. 7, Issue 2 https://doi.org/10.3390/met7020043	journal	February 2017

Similar Records

High-flux ion irradiation with energy of {approx}20 eV affecting phase segregation and low-temperature growth of nc-TiN/a-Si{sub 3}N{sub 4} nanocomposite films

Journal Article · 2007 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films · OSTI ID:21020884

Li, Z G; Wu, Y X; Miyake, S

Microstructures, mechanical behavior and strengthening mechanism of TiSiCN nanocomposite films

Journal Article · 2017 · Scientific Reports · OSTI ID:1389777

Li, Wei; Liu, Ping; Xue, Zenghui; +5 more

Microstructure and mechanical properties of Ti–B–C–N–Si nanocomposite films deposited by unbalanced magnetron sputtering

Journal Article · 2013 · Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films · OSTI ID:22224110

Jang, Jaeho; An, Eunsol; Park, In-Wook; +6 more

Related Subjects

(AlCrTiZrV)-Six-N films
36 MATERIALS SCIENCE
Physics
mechanical property
microstructure
nanocomposite structure

Title: Effects of Silicon Content on the Microstructures and Mechanical Properties of (AlCrTiZrV)-Six-N High-Entropy Alloy Films

Citation Formats

References (42)

Similar Records

Related Subjects

Title: Effects of Silicon Content on the Microstructures and Mechanical Properties of (AlCrTiZrV)-Si_x-N High-Entropy Alloy Films