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Title: A low cost and large-scale synthesis of 3D photonic crystal with SP2 lattice symmetry

Abstract

In this work, a novel lithographic method is proposed to prepare three-dimensional (3D) photonic crystal (PC) that is different from conventional top-down and bottom-up approaches. The method combines a 2D optical mask and off-the-axis double optical exposures to create a desirable 3D PC structure. Since the method uses only two optical exposures of a photo-resist layer, it is inherently a low-cost, high throughput and wafer-scale lithographic method. The method is implemented to make a slanted post 3D PC having the SP2 lattice symmetry. Three types of SP2 3D PC structures were successfully fabricated with a minimum feature size of d=1.5 μm over a large scale of 8x10 mm2, without any observable fabrication defects. The SP2 PCs are: (i) SU8 posts in air background, (ii) air pores in CdS background and (iii) Pt coated on SU8 SP2 templates. A spectroscopic study of the SP2 PCs shows select spectral regions of high reflectance, indicating the existence of a photonic stop band. This low-cost and large-scale method could enable broader technological impacts of 3D PC materials in areas such as thermo-photovoltaics and above room-temperature Bose-Einstein Condensation. Furthermore, this off-axis method could lead to the creation of an entirely new class of slanted-rod basedmore » photonic crystals, such as topological photonic crystal in 3D.« less

Authors:
 [1];  [2];  [3];  [2];  [3];  [3]; ORCiD logo [3];  [4];  [4]; ORCiD logo [3]
  1. National Chiao Tung Univ., Hsinchu (Taiwan); Rensselaer Polytechnic Inst., Troy, NY (United States)
  2. National Chiao Tung Univ., Hsinchu (Taiwan)
  3. Rensselaer Polytechnic Inst., Troy, NY (United States)
  4. Univ. of Toronto, ON (Canada)
Publication Date:
Research Org.:
Rensselaer Polytechnic Inst., Troy, NY (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES); National Science Foundation (NSF)
OSTI Identifier:
1609765
Alternate Identifier(s):
OSTI ID: 1549198
Grant/Contract Number:  
FG02-06ER46347
Resource Type:
Accepted Manuscript
Journal Name:
AIP Advances
Additional Journal Information:
Journal Volume: 9; Journal Issue: 8; Journal ID: ISSN 2158-3226
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; Science & Technology - Other Topics; Materials Science; Physics

Citation Formats

Hsieh, Mei-Li, Chen, Shu-Yu, Kaiser, Alex, Yan, Yang-Jhe, Frey, B., Bhat, Ishwara, Dahal, Rajendra, Bhattacharya, Sayak, John, Sajeev, and Lin, Shawn-Yu. A low cost and large-scale synthesis of 3D photonic crystal with SP2 lattice symmetry. United States: N. p., 2019. Web. doi:10.1063/1.5113549.
Hsieh, Mei-Li, Chen, Shu-Yu, Kaiser, Alex, Yan, Yang-Jhe, Frey, B., Bhat, Ishwara, Dahal, Rajendra, Bhattacharya, Sayak, John, Sajeev, & Lin, Shawn-Yu. A low cost and large-scale synthesis of 3D photonic crystal with SP2 lattice symmetry. United States. https://doi.org/10.1063/1.5113549
Hsieh, Mei-Li, Chen, Shu-Yu, Kaiser, Alex, Yan, Yang-Jhe, Frey, B., Bhat, Ishwara, Dahal, Rajendra, Bhattacharya, Sayak, John, Sajeev, and Lin, Shawn-Yu. Fri . "A low cost and large-scale synthesis of 3D photonic crystal with SP2 lattice symmetry". United States. https://doi.org/10.1063/1.5113549. https://www.osti.gov/servlets/purl/1609765.
@article{osti_1609765,
title = {A low cost and large-scale synthesis of 3D photonic crystal with SP2 lattice symmetry},
author = {Hsieh, Mei-Li and Chen, Shu-Yu and Kaiser, Alex and Yan, Yang-Jhe and Frey, B. and Bhat, Ishwara and Dahal, Rajendra and Bhattacharya, Sayak and John, Sajeev and Lin, Shawn-Yu},
abstractNote = {In this work, a novel lithographic method is proposed to prepare three-dimensional (3D) photonic crystal (PC) that is different from conventional top-down and bottom-up approaches. The method combines a 2D optical mask and off-the-axis double optical exposures to create a desirable 3D PC structure. Since the method uses only two optical exposures of a photo-resist layer, it is inherently a low-cost, high throughput and wafer-scale lithographic method. The method is implemented to make a slanted post 3D PC having the SP2 lattice symmetry. Three types of SP2 3D PC structures were successfully fabricated with a minimum feature size of d=1.5 μm over a large scale of 8x10 mm2, without any observable fabrication defects. The SP2 PCs are: (i) SU8 posts in air background, (ii) air pores in CdS background and (iii) Pt coated on SU8 SP2 templates. A spectroscopic study of the SP2 PCs shows select spectral regions of high reflectance, indicating the existence of a photonic stop band. This low-cost and large-scale method could enable broader technological impacts of 3D PC materials in areas such as thermo-photovoltaics and above room-temperature Bose-Einstein Condensation. Furthermore, this off-axis method could lead to the creation of an entirely new class of slanted-rod based photonic crystals, such as topological photonic crystal in 3D.},
doi = {10.1063/1.5113549},
journal = {AIP Advances},
number = 8,
volume = 9,
place = {United States},
year = {2019},
month = {8}
}

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