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Title: A low cost and large-scale synthesis of 3D photonic crystal with SP2 lattice symmetry

Abstract

In this work, a novel lithographic method is proposed to prepare three-dimensional (3D) photonic crystal (PC) that is different from conventional top-down and bottom-up approaches. The method combines a 2D optical mask and off-the-axis double optical exposures to create a desirable 3D PC structure. Since the method uses only two optical exposures of a photo-resist layer, it is inherently a low-cost, high throughput and wafer-scale lithographic method. The method is implemented to make a slanted post 3D PC having the SP2 lattice symmetry. Three types of SP2 3D PC structures were successfully fabricated with a minimum feature size of d=1.5 μm over a large scale of 8x10 mm2, without any observable fabrication defects. The SP2 PCs are: (i) SU8 posts in air background, (ii) air pores in CdS background and (iii) Pt coated on SU8 SP2 templates. A spectroscopic study of the SP2 PCs shows select spectral regions of high reflectance, indicating the existence of a photonic stop band. This low-cost and large-scale method could enable broader technological impacts of 3D PC materials in areas such as thermo-photovoltaics and above room-temperature Bose-Einstein Condensation. Furthermore, this off-axis method could lead to the creation of an entirely new class of slanted-rod basedmore » photonic crystals, such as topological photonic crystal in 3D.« less

Authors:
 [1];  [2];  [3];  [2];  [3];  [3]; ORCiD logo [3];  [4];  [4]; ORCiD logo [3]
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  1. National Chiao Tung Univ., Hsinchu (Taiwan); Rensselaer Polytechnic Inst., Troy, NY (United States)
  2. National Chiao Tung Univ., Hsinchu (Taiwan)
  3. Rensselaer Polytechnic Inst., Troy, NY (United States)
  4. Univ. of Toronto, ON (Canada)
Publication Date:
Research Org.:
Rensselaer Polytechnic Inst., Troy, NY (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES); National Science Foundation (NSF)
OSTI Identifier:
1609765
Alternate Identifier(s):
OSTI ID: 1549198
Grant/Contract Number:  
FG02-06ER46347
Resource Type:
Accepted Manuscript
Journal Name:
AIP Advances
Additional Journal Information:
Journal Volume: 9; Journal Issue: 8; Journal ID: ISSN 2158-3226
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; Science & Technology - Other Topics; Materials Science; Physics

Citation Formats

Hsieh, Mei-Li, Chen, Shu-Yu, Kaiser, Alex, Yan, Yang-Jhe, Frey, B., Bhat, Ishwara, Dahal, Rajendra, Bhattacharya, Sayak, John, Sajeev, and Lin, Shawn-Yu. A low cost and large-scale synthesis of 3D photonic crystal with SP2 lattice symmetry. United States: N. p., 2019. Web. doi:10.1063/1.5113549.
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Hsieh, Mei-Li, Chen, Shu-Yu, Kaiser, Alex, Yan, Yang-Jhe, Frey, B., Bhat, Ishwara, Dahal, Rajendra, Bhattacharya, Sayak, John, Sajeev, & Lin, Shawn-Yu. A low cost and large-scale synthesis of 3D photonic crystal with SP2 lattice symmetry. United States. https://doi.org/10.1063/1.5113549
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Hsieh, Mei-Li, Chen, Shu-Yu, Kaiser, Alex, Yan, Yang-Jhe, Frey, B., Bhat, Ishwara, Dahal, Rajendra, Bhattacharya, Sayak, John, Sajeev, and Lin, Shawn-Yu. Fri . "A low cost and large-scale synthesis of 3D photonic crystal with SP2 lattice symmetry". United States. https://doi.org/10.1063/1.5113549. https://www.osti.gov/servlets/purl/1609765.
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@article{osti_1609765,
title = {A low cost and large-scale synthesis of 3D photonic crystal with SP2 lattice symmetry},
author = {Hsieh, Mei-Li and Chen, Shu-Yu and Kaiser, Alex and Yan, Yang-Jhe and Frey, B. and Bhat, Ishwara and Dahal, Rajendra and Bhattacharya, Sayak and John, Sajeev and Lin, Shawn-Yu},
abstractNote = {In this work, a novel lithographic method is proposed to prepare three-dimensional (3D) photonic crystal (PC) that is different from conventional top-down and bottom-up approaches. The method combines a 2D optical mask and off-the-axis double optical exposures to create a desirable 3D PC structure. Since the method uses only two optical exposures of a photo-resist layer, it is inherently a low-cost, high throughput and wafer-scale lithographic method. The method is implemented to make a slanted post 3D PC having the SP2 lattice symmetry. Three types of SP2 3D PC structures were successfully fabricated with a minimum feature size of d=1.5 μm over a large scale of 8x10 mm2, without any observable fabrication defects. The SP2 PCs are: (i) SU8 posts in air background, (ii) air pores in CdS background and (iii) Pt coated on SU8 SP2 templates. A spectroscopic study of the SP2 PCs shows select spectral regions of high reflectance, indicating the existence of a photonic stop band. This low-cost and large-scale method could enable broader technological impacts of 3D PC materials in areas such as thermo-photovoltaics and above room-temperature Bose-Einstein Condensation. Furthermore, this off-axis method could lead to the creation of an entirely new class of slanted-rod based photonic crystals, such as topological photonic crystal in 3D.},
doi = {10.1063/1.5113549},
journal = {AIP Advances},
number = 8,
volume = 9,
place = {United States},
year = {2019},
month = {8}
}
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Works referenced in this record:

Two- and Three-Dimensional Photonic Crystals Built with VLSI Tools
journal, August 2001

  • Lin, Shawn-Yu; Fleming, J. G.; Chow, E.
  • MRS Bulletin, Vol. 26, Issue 8
  • DOI: 10.1557/mrs2001.157

Two- and Three-Dimensional Photonic Crystals in III–V Semiconductors
journal, August 2001

Strong localization of photons in certain disordered dielectric superlattices
journal, June 1987

Photonic Crystals Made by Holographic Lithography
journal, August 2001

From Opals to Optics: Colloidal Photonic Crystals
journal, August 2001

Direct laser writing and characterization of “Slanted Pore” Photonic Crystals
journal, September 2004

  • Deubel, Markus; Wegener, Martin; Kaso, Artan
  • Applied Physics Letters, Vol. 85, Issue 11
  • DOI: 10.1063/1.1792802

Block-iterative frequency-domain methods for Maxwell's equations in a planewave basis
journal, January 2001

  • Johnson, Steven; Joannopoulos, John
  • Optics Express, Vol. 8, Issue 3, p. 173-190
  • DOI: 10.1364/oe.8.000173

Photonic Architectures for Equilibrium High-Temperature Bose-Einstein Condensation in Dichalcogenide Monolayers
journal, December 2014

  • Jiang, Jian-Hua; John, Sajeev
  • Scientific Reports, Vol. 4, Issue 1
  • DOI: 10.1038/srep07432

Metallic-tilted woodpile photonic crystals in the midinfrared
journal, April 2010

  • Williams, John D.
  • Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 9, Issue 2
  • DOI: 10.1117/1.3427162

Effectively infinite optical path-length created using a simple cubic photonic crystal for extreme light trapping
journal, June 2017

Slanted-pore photonic band-gap materials
journal, March 2005

Symmetry-protected topological photonic crystal in three dimensions
journal, January 2016

  • Lu, Ling; Fang, Chen; Fu, Liang
  • Nature Physics, Vol. 12, Issue 4
  • DOI: 10.1038/nphys3611

Three-dimensional control of light in a two-dimensional photonic crystal slab
journal, October 2000

  • Chow, Edmond; Lin, S. Y.; Johnson, S. G.
  • Nature, Vol. 407, Issue 6807, p. 983-986
  • DOI: 10.1038/35039583

Diffractionless Flow of Light in All-Optical Microchips
journal, March 2003

Inhibited Spontaneous Emission in Solid-State Physics and Electronics
journal, May 1987

Micromachined millimeter‐wave photonic band‐gap crystals
journal, April 1994

  • Özbay, E.; Michel, E.; Tuttle, G.
  • Applied Physics Letters, Vol. 64, Issue 16
  • DOI: 10.1063/1.111736

Direct laser writing and characterization of "Slanted Pore" Photonic Crystals
text, January 2004

Solar energy trapping with modulated silicon nanowire photonic crystals
journal, October 2012

  • Demésy, Guillaume; John, Sajeev
  • Journal of Applied Physics, Vol. 112, Issue 7
  • DOI: 10.1063/1.4752775

A three-dimensional photonic crystal operating at infrared wavelengths
journal, July 1998

  • Lin, S. Y.; Fleming, J. G.; Hetherington, D. L.
  • Nature, Vol. 394, Issue 6690, p. 251-253
  • DOI: 10.1038/28343

Optical Probes inside Photonic Crystals
journal, August 2001

Photonic band gaps in three dimensions: New layer-by-layer periodic structures
journal, February 1994

Compact holographic lithography system for photonic-crystal structure
journal, January 2011

  • Hsieh, Mei-Li; Lin, Shawn-Yu
  • Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 29, Issue 1
  • DOI: 10.1116/1.3522658

Meep: A flexible free-software package for electromagnetic simulations by the FDTD method
journal, March 2010

  • Oskooi, Ardavan F.; Roundy, David; Ibanescu, Mihai
  • Computer Physics Communications, Vol. 181, Issue 3, p. 687-702
  • DOI: 10.1016/j.cpc.2009.11.008

Three-dimensional photonic-crystal emitter for thermal photovoltaic power generation
journal, July 2003

  • Lin, S. Y.; Moreno, J.; Fleming, J. G.
  • Applied Physics Letters, Vol. 83, Issue 2, p. 380-382
  • DOI: 10.1063/1.1592614

Microassembly of semiconductor three-dimensional photonic crystals
journal, January 2003

  • Aoki, Kanna; Miyazaki, Hideki T.; Hirayama, Hideki
  • Nature Materials, Vol. 2, Issue 2, p. 117-121
  • DOI: 10.1038/nmat802

Guiding, bending, and splitting of electromagnetic waves in highly confined photonic crystal waveguides
journal, February 2001

New Route to Three-Dimensional Photonic Bandgap Materials: Silicon Double Inversion of Polymer Templates
journal, February 2006

  • Tétreault, N.; von Freymann, G.; Deubel, M.
  • Advanced Materials, Vol. 18, Issue 4
  • DOI: 10.1002/adma.200501674

Photonic crystals: putting a new twist on light
journal, March 1997

  • Joannopoulos, J. D.; Villeneuve, Pierre R.; Fan, Shanhui
  • Nature, Vol. 386, Issue 6621
  • DOI: 10.1038/386143a0

Woodpile photonic crystal fabricated in GaAs by two-directional etching method
journal, March 2010

  • Tang, Lingling; Yoshie, Tomoyuki
  • Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 28, Issue 2
  • DOI: 10.1116/1.3308972

Photonic Band Gaps Based on Tetragonal Lattices of Slanted Pores
journal, June 2003

Optical properties of metallic films for vertical-cavity optoelectronic devices
journal, January 1998

  • Rakić, Aleksandar D.; Djurišić, Aleksandra B.; Elazar, Jovan M.
  • Applied Optics, Vol. 37, Issue 22, p. 5271-5283
  • DOI: 10.1364/ao.37.005271
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