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Title: Investigation on lateral resolution of surface slope profilers

Abstract

Here, we investigate and compare the spatial (lateral) resolution, or more generally, the optical/instrumental transfer function (OTF/ITF) of surface slope measuring profilometers of two different types that are commonly used for high accuracy characterization of x-ray optics at the long-spatial-wavelength range. These are an autocollimator based profiler, Optical Surface Measuring System (OSMS), and a long trace profiler, LTP-II, both available at the Advanced Light Source (ALS) X-Ray Optics Lab (XROL). In the OSMS, an ELCOMAT-3000 electronic auto-collimator, vertically mounted to the translation carriage and equipped with an aperture of 2.5 mm diameter, is scanned along the surface under test. The LTP-II OTF has been measured for two different configurations, a classical two-beam pencil-beam-interferometry and a single-Gaussian-beam deflectometry. For the ITF calibration, we apply a recently developed method based on test surfaces with one-dimensional (1D) linear chirped height profiles of constant slope amplitude. Analytical expressions for the OTFs, empirically deduced based on the experimental results, are presented. We also discuss the application of the results of the ITF measurements and modeling to improve the surface slope metrology with state-of-the-art x-ray mirrors.

Authors:
 [1];  [1];  [2];  [3];  [4];  [5];  [6]
  1. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
  2. Leibniz Inst. of Surface Engineering (IOM) (Germany); Technische Univ., Dresden (Germany)
  3. Leibniz Inst. of Surface Engineering (IOM) (Germany)
  4. Technische Univ., Dresden (Germany)
  5. Helmholtz Zentrum Berlin für Materialien und Energie, Berlin (Germany)
  6. Surface Metrology Solutions, LLC, Minneapolis, MN (United States)
Publication Date:
Research Org.:
aBeam Technologies, Inc., Hayward, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
1608216
Grant/Contract Number:  
SC0011352; AC02-05CH11231
Resource Type:
Accepted Manuscript
Journal Name:
Proceedings of SPIE - The International Society for Optical Engineering
Additional Journal Information:
Journal Volume: 11109; Conference: SPIE Optical Engineering + Applications, San Diego, CA (United States), 11-15 Aug 2019; Related Information: ISBN 9781510629127; Journal ID: ISSN 0277-786X
Publisher:
SPIE
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; synchrotron radiation; spatial resolution; point spread function; PSF; instrument's transfer function; ITF; calibration; metrology of x-ray optics; surface metrology; slope profilometry

Citation Formats

Yashchuk, Valeriy V., Lacey, Ian, Arnold, Thomas, Paetzelt, Hendrik, Rochester, Simon M., Siewert, Frank, and Takacs, Peter Z. Investigation on lateral resolution of surface slope profilers. United States: N. p., 2019. Web. https://doi.org/10.1117/12.2539527.
Yashchuk, Valeriy V., Lacey, Ian, Arnold, Thomas, Paetzelt, Hendrik, Rochester, Simon M., Siewert, Frank, & Takacs, Peter Z. Investigation on lateral resolution of surface slope profilers. United States. https://doi.org/10.1117/12.2539527
Yashchuk, Valeriy V., Lacey, Ian, Arnold, Thomas, Paetzelt, Hendrik, Rochester, Simon M., Siewert, Frank, and Takacs, Peter Z. Mon . "Investigation on lateral resolution of surface slope profilers". United States. https://doi.org/10.1117/12.2539527. https://www.osti.gov/servlets/purl/1608216.
@article{osti_1608216,
title = {Investigation on lateral resolution of surface slope profilers},
author = {Yashchuk, Valeriy V. and Lacey, Ian and Arnold, Thomas and Paetzelt, Hendrik and Rochester, Simon M. and Siewert, Frank and Takacs, Peter Z.},
abstractNote = {Here, we investigate and compare the spatial (lateral) resolution, or more generally, the optical/instrumental transfer function (OTF/ITF) of surface slope measuring profilometers of two different types that are commonly used for high accuracy characterization of x-ray optics at the long-spatial-wavelength range. These are an autocollimator based profiler, Optical Surface Measuring System (OSMS), and a long trace profiler, LTP-II, both available at the Advanced Light Source (ALS) X-Ray Optics Lab (XROL). In the OSMS, an ELCOMAT-3000 electronic auto-collimator, vertically mounted to the translation carriage and equipped with an aperture of 2.5 mm diameter, is scanned along the surface under test. The LTP-II OTF has been measured for two different configurations, a classical two-beam pencil-beam-interferometry and a single-Gaussian-beam deflectometry. For the ITF calibration, we apply a recently developed method based on test surfaces with one-dimensional (1D) linear chirped height profiles of constant slope amplitude. Analytical expressions for the OTFs, empirically deduced based on the experimental results, are presented. We also discuss the application of the results of the ITF measurements and modeling to improve the surface slope metrology with state-of-the-art x-ray mirrors.},
doi = {10.1117/12.2539527},
journal = {Proceedings of SPIE - The International Society for Optical Engineering},
number = ,
volume = 11109,
place = {United States},
year = {2019},
month = {9}
}

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    Works referencing / citing this record:

    Transfer of autocollimator calibration for use with scanning gantry profilometers for accurate determination of surface slope and curvature of state-of-the-art x-ray mirrors
    conference, October 2019

    • Lacey, Ian; Anderson, Kevan; Dickert, Jeff M.
    • Advances in Metrology for X-Ray and EUV Optics VIII
    • DOI: 10.1117/12.2529519