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Title: Investigation on lateral resolution of surface slope profilers

Journal Article · · Proceedings of SPIE - The International Society for Optical Engineering
DOI: https://doi.org/10.1117/12.2539527 · OSTI ID:1608216
 [1];  [2];  [3];  [4];  [5];  [6];  [7]
  1. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States); aBeam Technologies.
  2. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
  3. Leibniz Inst. of Surface Engineering (IOM) (Germany); Technische Univ., Dresden (Germany)
  4. Leibniz Inst. of Surface Engineering (IOM) (Germany)
  5. Technische Univ., Dresden (Germany)
  6. Helmholtz Zentrum Berlin für Materialien und Energie, Berlin (Germany)
  7. Surface Metrology Solutions, LLC, Minneapolis, MN (United States)
+ Show Author Affiliations

Here, we investigate and compare the spatial (lateral) resolution, or more generally, the optical/instrumental transfer function (OTF/ITF) of surface slope measuring profilometers of two different types that are commonly used for high accuracy characterization of x-ray optics at the long-spatial-wavelength range. These are an autocollimator based profiler, Optical Surface Measuring System (OSMS), and a long trace profiler, LTP-II, both available at the Advanced Light Source (ALS) X-Ray Optics Lab (XROL). In the OSMS, an ELCOMAT-3000 electronic auto-collimator, vertically mounted to the translation carriage and equipped with an aperture of 2.5 mm diameter, is scanned along the surface under test. The LTP-II OTF has been measured for two different configurations, a classical two-beam pencil-beam-interferometry and a single-Gaussian-beam deflectometry. For the ITF calibration, we apply a recently developed method based on test surfaces with one-dimensional (1D) linear chirped height profiles of constant slope amplitude. Analytical expressions for the OTFs, empirically deduced based on the experimental results, are presented. We also discuss the application of the results of the ITF measurements and modeling to improve the surface slope metrology with state-of-the-art x-ray mirrors.

Research Organization:
aBeam Technologies, Inc., Hayward, CA (United States)
Sponsoring Organization:
USDOE Office of Science (SC)
Grant/Contract Number:
SC0011352; AC02-05CH11231
OSTI ID:
1608216
Journal Information:
Proceedings of SPIE - The International Society for Optical Engineering, Journal Name: Proceedings of SPIE - The International Society for Optical Engineering Vol. 11109; ISSN 0277-786X
Publisher:
SPIECopyright Statement
Country of Publication:
United States
Language:
English

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Cited By (1)

Transfer of autocollimator calibration for use with scanning gantry profilometers for accurate determination of surface slope and curvature of state-of-the-art x-ray mirrors conference October 2019

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42 ENGINEERING
ITF
PSF
calibration
instrument's transfer function
metrology of x-ray optics
point spread function
slope profilometry
spatial resolution
surface metrology
synchrotron radiation