Title: Three-dimensional piezoelectric polymer microsystems for vibrational energy harvesting, robotic interfaces and biomedical implants

Abstract

Piezoelectric microsystems are of use in areas such as mechanical sensing, energy conversion and robotics. The systems typically have a planar structure, but transforming them into complex three-dimensional (3D) frameworks could enhance and extend their various modes of operation. Here, we report a controlled, nonlinear buckling process to convert lithographically defined two-dimensional patterns of electrodes and thin films of piezoelectric polymers into sophisticated 3D piezoelectric microsystems. To illustrate the engineering versatility of the approach, we create more than twenty different 3D geometries. With these structures, we then demonstrate applications in energy harvesting with tailored mechanical properties and root-mean-square voltages ranging from 2 mV to 790 mV, in multifunctional sensors for robotic prosthetic interfaces with improved responsivity (for example, anisotropic responses and sensitivity of 60 mV N^-1 for normal force), and in bio-integrated devices with in vivo operational capabilities. We note the 3D geometries, especially those with ultralow stiffnesses or asymmetric layouts, yield unique mechanical attributes and levels of functionality that would be difficult or impossible to achieve with conventional two-dimensional designs.

Authors:

Han, Mengdi ^[1]; Wang, Heling  ^[1];

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• Search DOE PAGES for ORCID "0000-0001-7859-5153"

Yang, Yiyuan ^[1]; Liang, Cunman ^[2]; Bai, Wubin ^[1]; Yan, Zheng ^[3]; Li, Haibo ^[4]; Xue, Yeguang ^[1]; Wang, Xinlong ^[1]; Akar, Banu ^[1]; Zhao, Hangbo  ^[1];

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• Search DOE PAGES for ORCID "0000-0001-5229-4192"

Luan, Haiwen ^[1]; Lim, Jaeman ^[1]; Kandela, Irawati ^[1]; Ameer, Guillermo A. ^[5]; Zhang, Yihui  ^[6];

• Search DOE PAGES for author "Zhang, Yihui"
• Search DOE PAGES for ORCID "0000-0003-0885-2067"

Huang, Yonggang  ^[1];

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• Search DOE PAGES for ORCID "0000-0002-0483-8359"

Rogers, John A.  ^[1]

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• Search DOE PAGES for ORCID "0000-0002-2980-3961"

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+ Show Author Affiliations

1. Northwestern Univ., Evanston, IL (United States)
2. Northwestern Univ., Evanston, IL (United States); Tianjin Univ. (China)
3. Univ. of Missouri, Columbia, MO (United States)
4. Northwestern Univ., Evanston, IL (United States); Shanghai Jiaotong Univ. (China)
5. Northwestern Univ., Evanston, IL (United States); Northwestern Univ. Feinberg School of Medicine, Chicago, IL (United States)
6. Tsinghua Univ., Beijing (China)

Publication Date:

Wed Jan 16 00:00:00 EST 2019

Research Org.:

Univ. of Illinois at Urbana-Champaign, IL (United States)

Sponsoring Org.:

USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Materials Sciences & Engineering Division; National Natural Science Foundation of China (NSFC); National Science Foundation (NSF); Ryan Fellowship; Northwestern University International Institute for Nanotechnology

OSTI Identifier:

1607431

Grant/Contract Number:  

FG02-07ER46471

Resource Type:

Accepted Manuscript

Journal Name:

Nature Electronics

Additional Journal Information:

Journal Volume: 2; Journal Issue: 1; Journal ID: ISSN 2520-1131

Publisher:

Springer Nature

Country of Publication:

United States

Language:

English

Subject:

42 ENGINEERING; Devices for energy harvesting; Electrical and electronic engineering; Sensors and biosensors