Optimized oxygen deprived low temperature sputtered WO3 thin films for crystalline structures

Farid, Sidra; Hsu, Bo; Stan, Liliana; Stroscio, Michael; Dutta, Mitra

doi:10.1088/1361-6528/ab560f

Title: Optimized oxygen deprived low temperature sputtered WO3 thin films for crystalline structures

Journal Article · 08 December 2019 · Nanotechnology

DOI: https://doi.org/10.1088/1361-6528/ab560f · OSTI ID:1607425

^[1]; Hsu, Bo ^[1]; Stan, Liliana ^[2]; Stroscio, Michael ^[1]; Dutta, Mitra ^[1]

Univ. of Illinois at Chicago, IL (United States)
Argonne National Lab. (ANL), Lemont, IL (United States). Center for Nanoscale Materials

In this work, we report a detailed analysis on the effects of processing parameters for sputtered tungsten trioxide (WO₃) thin nanoscale films on their structural, vibrational and electrical properties. The research aims to understand the fundamental aspects of WO3 sputtering at relatively low temperatures and in an oxygen deprived environment targeting applications of temperature and oxygen sensitive substrates. Structural analysis indicates that films deposited at room temperature, or substrate temperatures at or below 400 degrees C with low oxygen partial pressure are amorphous. Furthermore, crystallization of the films was observed with distinct Raman peaks when the films were annealed at 300 degrees C or above using rapid thermal annealing for 10 min. Films revealed monoclinic phases of WO₃ with the presence of W-O-W stretching, bending and lattice vibrational modes in the Raman spectra. Interestingly, a change of transport behavior from insulating to semiconducting was observed for as deposited films on post annealing. Annealed films revealed stoichiometric WO₃ phases with no external defects detected. The present study adopts a route to intercalate WO₃ in a variety of applications from electrochromic coloration to a nanocrystalline thin film for electronic devices sensitive to higher temperatures and gas flow in the sputtering system.

View Accepted Manuscript (DOE)

Cite

Export

Save

Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Organization:: US Army Research Laboratory (ARL); USDOE Office of Science (SC), Office of Basic Energy Sciences (BES), Scientific User Facilities Division

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1607425

Journal Information:: Nanotechnology, Journal Name: Nanotechnology Journal Issue: 9 Vol. 31; ISSN 0957-4484

Publisher:: IOP PublishingCopyright Statement

Country of Publication:: United States

Language:: English

References (24)

Hierarchical WO ₃ Hollow Shells: Dendrite, Sphere, Dumbbell, and Their Photocatalytic Properties Chen, Di; Ye, Jinhua Advanced Functional Materials, Vol. 18, Issue 13 https://doi.org/10.1002/adfm.200701468	journal	July 2008
Highly Crystalline WO ₃ Thin Films with Ordered 3D Mesoporosity and Improved Electrochromic Performance Brezesinski, Torsten; Fattakhova Rohlfing, Dina; Sallard, Sébastien Small, Vol. 2, Issue 10 https://doi.org/10.1002/smll.200600176	journal	August 2006
Electrochromism in materials prepared by the sol-gel process Aegerter, Michel A.; Avellaneda, Cesar O.; Pawlicka, Agniezska Journal of Sol-Gel Science and Technology, Vol. 8, Issue 1-3 https://doi.org/10.1007/BF02436924	journal	February 1997
Electrochromic coatings for smart windows: Crystalline and amorphous WO3 films Svensson, J. S. E. M.; Granqvist, C. G. Thin Solid Films, Vol. 126, Issue 1-2 https://doi.org/10.1016/0040-6090(85)90171-3	journal	April 1985
Highly oriented WSe2 thin films prepared by selenization of evaporated WO3 Salitra, G.; Hodes, G.; Klein, E. Thin Solid Films, Vol. 245, Issue 1-2 https://doi.org/10.1016/0040-6090(94)90896-6	journal	June 1994
NO2 sensitivity of WO3 thin film obtained by high vacuum thermal evaporation Cantalini, C.; Sun, H. T.; Faccio, M. Sensors and Actuators B: Chemical, Vol. 31, Issue 1-2 https://doi.org/10.1016/0925-4005(96)80020-7	journal	February 1996
Electrochromic performance of sol-gel deposited WO3–V2O5 films Ozer, N.; Lampert, C. M. Thin Solid Films, Vol. 349, Issue 1-2 https://doi.org/10.1016/S0040-6090(99)00144-3	journal	July 1999
Tungsten trioxide (WO3) sputtered thin films for a NOx gas sensor Penza, M.; Tagliente, M. A.; Mirenghi, L. Sensors and Actuators B: Chemical, Vol. 50, Issue 1 https://doi.org/10.1016/S0925-4005(98)00149-X	journal	July 1998
Thermally induced evolution of sol–gel grown WO3 films on ITO/glass substrates Caruso, T.; Castriota, M.; Policicchio, A. Applied Surface Science, Vol. 297 https://doi.org/10.1016/j.apsusc.2014.01.154	journal	April 2014
Studies on the effect of substrate temperature on (VI–VI) textured tungsten oxide (WO3) thin films on glass, SnO2:F substrates by PVD:EBE technique for electrochromic devices Sivakumar, R.; Jayachandran, M.; Sanjeeviraja, C. Materials Chemistry and Physics, Vol. 87, Issue 2-3 https://doi.org/10.1016/j.matchemphys.2004.06.028	journal	October 2004
Studies on Electrochromic Properties of RF Sputtered Vanadium Oxide: Tungsten Oxide Thin Films Meenakshi, M.; Sivakumar, R.; Perumal, P. Materials Today: Proceedings, Vol. 3 https://doi.org/10.1016/j.matpr.2016.01.005	journal	January 2016
Review on electrochromic property for WO3 thin films using different deposition techniques Buch, Vyomesh R.; Chawla, Amit Kumar; Rawal, Sushant K. Materials Today: Proceedings, Vol. 3, Issue 6 https://doi.org/10.1016/j.matpr.2016.04.025	journal	January 2016
Opportunities and challenges in science and technology of WO3 for electrochromic and related applications Deb, Satyen K. Solar Energy Materials and Solar Cells, Vol. 92, Issue 2 https://doi.org/10.1016/j.solmat.2007.01.026	journal	February 2008
Influence of sputter oxygen partial pressure on photoelectrochemical performance of tungsten oxide films Marsen, Bjorn; Cole, Brian; Miller, Eric L. Solar Energy Materials and Solar Cells, Vol. 91, Issue 20 https://doi.org/10.1016/j.solmat.2007.08.008	journal	December 2007
Multiphonon Raman scattering and photoluminescence studies of CdS nanocrystals grown by thermal evaporation Farid, Sidra; Stroscio, Michael A.; Dutta, Mitra Superlattices and Microstructures, Vol. 115 https://doi.org/10.1016/j.spmi.2018.01.024	journal	March 2018
Enhanced performance of organic light emitting device by insertion of conducting/insulating WO3 anodic buffer layer Li, Jingze; Yahiro, Masayuki; Ishida, Kenji Synthetic Metals, Vol. 151, Issue 2 https://doi.org/10.1016/j.synthmet.2005.03.019	journal	June 2005
The structure and electrical conductivity of vacuum-annealed WO3 thin films Gillet, M.; Aguir, K.; Lemire, C. Thin Solid Films, Vol. 467, Issue 1-2 https://doi.org/10.1016/j.tsf.2004.04.018	journal	November 2004
Low Temperature Annealing Improves the Electrochromic and Degradation Behavior of Tungsten Oxide (WO _x ) Thin Films Thummavichai, Kunyapat; Trimby, Liam; Wang, Nannan The Journal of Physical Chemistry C, Vol. 121, Issue 37 https://doi.org/10.1021/acs.jpcc.7b06300	journal	September 2017
Highly Sensitive WO ₃ Hollow-Sphere Gas Sensors Li, Xiao-Lin; Lou, Tian-Jun; Sun, Xiao-Ming Inorganic Chemistry, Vol. 43, Issue 17 https://doi.org/10.1021/ic049522w	journal	August 2004
Thermal stability and electrical characteristics of ultrathin hafnium oxide gate dielectric reoxidized with rapid thermal annealing Lee, Byoung Hun; Kang, Laegu; Nieh, Renee Applied Physics Letters, Vol. 76, Issue 14 https://doi.org/10.1063/1.126214	journal	April 2000
Boosting surface charge-transfer doping efficiency and robustness of diamond with WO ₃ and ReO ₃ Tordjman, Moshe; Weinfeld, Kamira; Kalish, Rafi Applied Physics Letters, Vol. 111, Issue 11 https://doi.org/10.1063/1.4986339	journal	September 2017
Raman Scattering by Silicon and Germanium Parker, J. H.; Feldman, D. W.; Ashkin, M. Physical Review, Vol. 155, Issue 3 https://doi.org/10.1103/PhysRev.155.712	journal	March 1967
A Diamond:H/WO ₃ Metal–Oxide–Semiconductor Field-Effect Transistor Yin, Zongyou; Tordjman, Moshe; Vardi, Alon IEEE Electron Device Letters, Vol. 39, Issue 4 https://doi.org/10.1109/LED.2018.2808463	journal	April 2018
Electrochromism in materials prepared by the sol-gel process Aegerter, Michel A.; Pawlicka, Agnieszka; Avellaneda, César O. Universität des Saarlandes https://doi.org/10.22028/d291-24251	collection	January 1997

Similar Records

Correlation between surface chemistry, density and band gap in nanocrystalline WO3 thin films

Journal Article · 2012 · ACS Applied Materials and Interfaces · OSTI ID:1039121

Vemuri, Venkata Rama Ses; Engelhard, Mark H; Ramana, C V

The Piezoresponse in WO3 Thin Films Due to N2-Filled Nanovoids Enrichment by Atom Probe Tomography

Journal Article · 2023 · Materials · OSTI ID:1923807

Pineda-Domínguez, Pamela M.; Boll, Torben; Nogan, John; +3 more

Annealing effect on structural, morphological, and optical properties of reactive sputtered WO{sub 3} films for mediated heterogeneous photocatalyst

Journal Article · 2007 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films · OSTI ID:20979457

Prabakar, K; Takahashi, T; Takahashi, K; +4 more

Related Subjects

77 NANOSCIENCE AND NANOTECHNOLOGY
Raman
sputtering
tungsten trioxide

Title: Optimized oxygen deprived low temperature sputtered WO3 thin films for crystalline structures

Citation Formats

References (24)

Similar Records

Related Subjects