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Title: Crystallization of TiO2 polymorphs from RF-sputtered, amorphous thin-film precursors

Abstract

Crystalline TiO2 films of anatase, brookite, and rutile are reproducibly made from amorphous precursors deposited by RF magnetron sputtering, producing large-area, single phase films of uniform thickness. Sputtered amorphous TiO2 precursor thin films follow the general behavior observed for amorphous precursor thin films generated by pulsed laser deposition, namely, that oxygen deficiency is necessary for the formation of brookite and rutile. We quantify the oxygen deficiency and correlate it with the long wavelength optical absorption. We find that the precursor deposition rate is also a contributing factor to phase selection and that brookite and rutile form from films deposited more rapidly and anatase from films deposited more slowly. Sputtered and pulsed laser deposited amorphous precursor films prepared with similar oxygen deficiency and similar thickness result in the same final state after annealing, but the rate for sputtered precursors is slower.

Authors:
 [1]; ORCiD logo [1];  [1]; ORCiD logo [1];  [1];  [1];  [1];  [2]; ORCiD logo [2];  [3];  [4]; ORCiD logo [4]; ORCiD logo [1]
  1. Oregon State Univ., Corvallis, OR (United States)
  2. Colorado School of Mines, Golden, CO (United States)
  3. National Renewable Energy Lab. (NREL), Golden, CO (United States)
  4. SLAC National Accelerator Lab., Menlo Park, CA (United States)
Publication Date:
Research Org.:
National Renewable Energy Lab. (NREL), Golden, CO (United States); SLAC National Accelerator Lab., Menlo Park, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
OSTI Identifier:
1602697
Alternate Identifier(s):
OSTI ID: 1598071; OSTI ID: 1633974
Report Number(s):
NREL-JA-5K00-76206
Journal ID: ISSN 2158-3226
Grant/Contract Number:  
AC36-08GO28308; AC3608GO28308; AC02-76SF00515; SURE Science Award
Resource Type:
Accepted Manuscript
Journal Name:
AIP Advances
Additional Journal Information:
Journal Volume: 10; Journal Issue: 2; Journal ID: ISSN 2158-3226
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
14 SOLAR ENERGY; 36 MATERIALS SCIENCE; optical imaging; pulsed laser deposition; x-ray diffraction; raman spectroscopy; sputter deposition; optical absorption; magnetron sputtering; polymorphism; thin films; crystallization

Citation Formats

Agirseven, O., Rivella, D. T., Haggerty, J. E. S., Berry, P. O., Diffendaffer, K., Patterson, A., Kreb, J., Mangum, J. S., Gorman, B. P., Perkins, J. D., Chen, B. R., Schelhas, L. T., and Tate, J. Crystallization of TiO2 polymorphs from RF-sputtered, amorphous thin-film precursors. United States: N. p., 2020. Web. doi:10.1063/1.5140368.
Agirseven, O., Rivella, D. T., Haggerty, J. E. S., Berry, P. O., Diffendaffer, K., Patterson, A., Kreb, J., Mangum, J. S., Gorman, B. P., Perkins, J. D., Chen, B. R., Schelhas, L. T., & Tate, J. Crystallization of TiO2 polymorphs from RF-sputtered, amorphous thin-film precursors. United States. doi:https://doi.org/10.1063/1.5140368
Agirseven, O., Rivella, D. T., Haggerty, J. E. S., Berry, P. O., Diffendaffer, K., Patterson, A., Kreb, J., Mangum, J. S., Gorman, B. P., Perkins, J. D., Chen, B. R., Schelhas, L. T., and Tate, J. Thu . "Crystallization of TiO2 polymorphs from RF-sputtered, amorphous thin-film precursors". United States. doi:https://doi.org/10.1063/1.5140368. https://www.osti.gov/servlets/purl/1602697.
@article{osti_1602697,
title = {Crystallization of TiO2 polymorphs from RF-sputtered, amorphous thin-film precursors},
author = {Agirseven, O. and Rivella, D. T. and Haggerty, J. E. S. and Berry, P. O. and Diffendaffer, K. and Patterson, A. and Kreb, J. and Mangum, J. S. and Gorman, B. P. and Perkins, J. D. and Chen, B. R. and Schelhas, L. T. and Tate, J.},
abstractNote = {Crystalline TiO2 films of anatase, brookite, and rutile are reproducibly made from amorphous precursors deposited by RF magnetron sputtering, producing large-area, single phase films of uniform thickness. Sputtered amorphous TiO2 precursor thin films follow the general behavior observed for amorphous precursor thin films generated by pulsed laser deposition, namely, that oxygen deficiency is necessary for the formation of brookite and rutile. We quantify the oxygen deficiency and correlate it with the long wavelength optical absorption. We find that the precursor deposition rate is also a contributing factor to phase selection and that brookite and rutile form from films deposited more rapidly and anatase from films deposited more slowly. Sputtered and pulsed laser deposited amorphous precursor films prepared with similar oxygen deficiency and similar thickness result in the same final state after annealing, but the rate for sputtered precursors is slower.},
doi = {10.1063/1.5140368},
journal = {AIP Advances},
number = 2,
volume = 10,
place = {United States},
year = {2020},
month = {2}
}

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