Crystallization of TiO2 polymorphs from RF-sputtered, amorphous thin-film precursors

Agirseven, O.; Rivella, D. T.; Haggerty, J. E.  S.; Berry, P. O.; Diffendaffer, K.; Patterson, A.; Kreb, J.; Mangum, J. S.; Gorman, B. P.; Perkins, J. D.; Chen, B. R.; Schelhas, L. T.; Tate, J.

doi:10.1063/1.5140368

Title: Crystallization of TiO₂ polymorphs from RF-sputtered, amorphous thin-film precursors

Journal Article · 05 February 2020 · AIP Advances

DOI: https://doi.org/10.1063/1.5140368 · OSTI ID:1602697

Agirseven, O. ^[1];

^[1]; Haggerty, J. E. S. ^[1];

^[1]; Diffendaffer, K. ^[1]; Patterson, A. ^[1]; Kreb, J. ^[1]; Mangum, J. S. ^[2];

^[2]; Perkins, J. D. ^[3]; Chen, B. R. ^[4];

^[4];

^[1]

Oregon State Univ., Corvallis, OR (United States)
Colorado School of Mines, Golden, CO (United States)
National Renewable Energy Lab. (NREL), Golden, CO (United States)
SLAC National Accelerator Lab., Menlo Park, CA (United States)

Crystalline TiO₂ films of anatase, brookite, and rutile are reproducibly made from amorphous precursors deposited by RF magnetron sputtering, producing large-area, single phase films of uniform thickness. Sputtered amorphous TiO₂ precursor thin films follow the general behavior observed for amorphous precursor thin films generated by pulsed laser deposition, namely, that oxygen deficiency is necessary for the formation of brookite and rutile. We quantify the oxygen deficiency and correlate it with the long wavelength optical absorption. We find that the precursor deposition rate is also a contributing factor to phase selection and that brookite and rutile form from films deposited more rapidly and anatase from films deposited more slowly. Sputtered and pulsed laser deposited amorphous precursor films prepared with similar oxygen deficiency and similar thickness result in the same final state after annealing, but the rate for sputtered precursors is slower.

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Research Organization:: National Renewable Energy Laboratory (NREL), Golden, CO (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)

Grant/Contract Number:: AC36-08GO28308

OSTI ID:: 1602697

Report Number(s):: NREL-JA--5K00-76206

Journal Information:: AIP Advances, Journal Name: AIP Advances Journal Issue: 2 Vol. 10; ISSN 2158-3226

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Title: Crystallization of TiO2 polymorphs from RF-sputtered, amorphous thin-film precursors

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Title: Crystallization of TiO₂ polymorphs from RF-sputtered, amorphous thin-film precursors