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Title: Multi-layering of SU-8 exhibits distinct geometrical transitions from circular to planarized profiles

Abstract

The negative tone photoresist SU-8 permits the creation of micrometer-scale structures by optical lithography. It is also the most used photoresist in soft lithography for the fast-prototyping of microfluidic devices. Despite its importance, the effect of capillary forces on SU-8 multi-layering onto topographical features has not been thoroughly studied. In particular, the profile of the added layer has not been examined in detail. The overlaying process exhibits a set of distinct behaviors, or regimes, depending on the relative thickness of the overlay and the underlying rectangular pattern. We demonstrate how capillary effects control the profile of multi-layer microchannels in a predictable manner. We derive a simple static model to describe the evolution of the overlay as a function of dimensionless geometric parameters. Our study provides a critical understanding of the parameters that govern multi-layer spin coating.

Authors:
; ; ; ; ORCiD logo
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1601032
Grant/Contract Number:  
SC0012704
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Biomicrofluidics
Additional Journal Information:
Journal Name: Biomicrofluidics Journal Volume: 14 Journal Issue: 1; Journal ID: ISSN 1932-1058
Publisher:
American Institute of Physics
Country of Publication:
United States
Language:
English

Citation Formats

Sauzade, Martin, Li, Ling, Bakowski, Tomasz, Strey, Helmut H., and Brouzes, Eric. Multi-layering of SU-8 exhibits distinct geometrical transitions from circular to planarized profiles. United States: N. p., 2020. Web. doi:10.1063/1.5139031.
Sauzade, Martin, Li, Ling, Bakowski, Tomasz, Strey, Helmut H., & Brouzes, Eric. Multi-layering of SU-8 exhibits distinct geometrical transitions from circular to planarized profiles. United States. https://doi.org/10.1063/1.5139031
Sauzade, Martin, Li, Ling, Bakowski, Tomasz, Strey, Helmut H., and Brouzes, Eric. Fri . "Multi-layering of SU-8 exhibits distinct geometrical transitions from circular to planarized profiles". United States. https://doi.org/10.1063/1.5139031.
@article{osti_1601032,
title = {Multi-layering of SU-8 exhibits distinct geometrical transitions from circular to planarized profiles},
author = {Sauzade, Martin and Li, Ling and Bakowski, Tomasz and Strey, Helmut H. and Brouzes, Eric},
abstractNote = {The negative tone photoresist SU-8 permits the creation of micrometer-scale structures by optical lithography. It is also the most used photoresist in soft lithography for the fast-prototyping of microfluidic devices. Despite its importance, the effect of capillary forces on SU-8 multi-layering onto topographical features has not been thoroughly studied. In particular, the profile of the added layer has not been examined in detail. The overlaying process exhibits a set of distinct behaviors, or regimes, depending on the relative thickness of the overlay and the underlying rectangular pattern. We demonstrate how capillary effects control the profile of multi-layer microchannels in a predictable manner. We derive a simple static model to describe the evolution of the overlay as a function of dimensionless geometric parameters. Our study provides a critical understanding of the parameters that govern multi-layer spin coating.},
doi = {10.1063/1.5139031},
journal = {Biomicrofluidics},
number = 1,
volume = 14,
place = {United States},
year = {2020},
month = {2}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
https://doi.org/10.1063/1.5139031

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Cited by: 2 works
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Works referenced in this record:

Precise pooling and dispensing of microfluidic droplets towards micro- to macro-world interfacing
journal, January 2014

  • Brouzes, Eric; Carniol, April; Bakowski, Tomasz
  • RSC Adv., Vol. 4, Issue 73
  • DOI: 10.1039/C4RA07110G

Two-step photolithography to fabricate multilevel microchannels
journal, December 2010

  • Choi, Sungyoung; Park, Je-Kyun
  • Biomicrofluidics, Vol. 4, Issue 4
  • DOI: 10.1063/1.3517230

The limits of edge bead planarization and surface levelling in spin-coated liquid films
journal, January 2020


Fabricating microfluidic valve master molds in SU-8 photoresist
journal, April 2014

  • Dy, Aaron J.; Cosmanescu, Alin; Sluka, James
  • Journal of Micromechanics and Microengineering, Vol. 24, Issue 5
  • DOI: 10.1088/0960-1317/24/5/057001

Spin coating over topography
journal, January 1993

  • Peurrung, L. M.; Graves, D. B.
  • IEEE Transactions on Semiconductor Manufacturing, Vol. 6, Issue 1
  • DOI: 10.1109/66.210660

Planarization during spin coating
journal, May 1992

  • Stillwagon, L. E.; Larson, R. G.
  • Physics of Fluids A: Fluid Dynamics, Vol. 4, Issue 5
  • DOI: 10.1063/1.858269

Multi-layer SU-8 lift-off technology for microfluidic devices
journal, April 2005

  • Bohl, Benjamin; Steger, Reinhard; Zengerle, Roland
  • Journal of Micromechanics and Microengineering, Vol. 15, Issue 6
  • DOI: 10.1088/0960-1317/15/6/002

SU-8: a low-cost negative resist for MEMS
journal, September 1997

  • Lorenz, H.; Despont, M.; Fahrni, N.
  • Journal of Micromechanics and Microengineering, Vol. 7, Issue 3
  • DOI: 10.1088/0960-1317/7/3/010

Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane)
journal, October 1998

  • Duffy, David C.; McDonald, J. Cooper; Schueller, Olivier J. A.
  • Analytical Chemistry, Vol. 70, Issue 23, p. 4974-4984
  • DOI: 10.1021/ac980656z

Film Thickness Profiles over Topography in Spin Coating
journal, January 1991

  • Peurrung, L. M.
  • Journal of The Electrochemical Society, Vol. 138, Issue 7
  • DOI: 10.1149/1.2085935

Fundamentals of topographic substrate leveling
journal, June 1988

  • Stillwagon, L. E.; Larson, R. G.
  • Journal of Applied Physics, Vol. 63, Issue 11, p. 5251-5258
  • DOI: 10.1063/1.340388

Spin coating: One‐dimensional model
journal, December 1989

  • Bornside, D. E.; Macosko, C. W.; Scriven, L. E.
  • Journal of Applied Physics, Vol. 66, Issue 11
  • DOI: 10.1063/1.343754

A snake-based approach to accurate determination of both contact points and contact angles
journal, September 2006

  • Stalder, A. F.; Kulik, G.; Sage, D.
  • Colloids and Surfaces A: Physicochemical and Engineering Aspects, Vol. 286, Issue 1-3
  • DOI: 10.1016/j.colsurfa.2006.03.008

Complete Analytical Solutions of Film Planarization during Spin Coating
journal, January 1999

  • Wu, Pei-Ying
  • Journal of The Electrochemical Society, Vol. 146, Issue 10
  • DOI: 10.1149/1.1392558

Rounding of Negative Dry Film Resist by Diffusive Backside Exposure Creating Rounded Channels for Pneumatic Membrane Valves
journal, October 2015

  • Frank, Philipp; Haefner, Sebastian; Paschew, Georgi
  • Micromachines, Vol. 6, Issue 11
  • DOI: 10.3390/mi6111442

Planarization of Substrate Topography by Spin Coating
journal, January 1987

  • Stillwagon, L. E.; Larson, R. G.; Taylor, G. N.
  • Journal of The Electrochemical Society, Vol. 134, Issue 8, p. 2030-2037
  • DOI: 10.1149/1.2100813

Fiji: an open-source platform for biological-image analysis
journal, June 2012

  • Schindelin, Johannes; Arganda-Carreras, Ignacio; Frise, Erwin
  • Nature Methods, Vol. 9, Issue 7
  • DOI: 10.1038/nmeth.2019

Click chemistry approaches to expand the repertoire of PEG-based fluorinated surfactants for droplet microfluidics
journal, January 2018

  • Scanga, Randall; Chrastecka, Lucie; Mohammad, Ridhwan
  • RSC Advances, Vol. 8, Issue 23
  • DOI: 10.1039/C8RA01254G

SU-8 as a material for lab-on-a-chip-based mass spectrometry
journal, January 2014


Leveling of thin films over uneven substrates during spin coating
journal, November 1990

  • Stillwagon, L. E.; Larson, R. G.
  • Physics of Fluids A: Fluid Dynamics, Vol. 2, Issue 11
  • DOI: 10.1063/1.857669

NIH Image to ImageJ: 25 years of image analysis
journal, June 2012

  • Schneider, Caroline A.; Rasband, Wayne S.; Eliceiri, Kevin W.
  • Nature Methods, Vol. 9, Issue 7
  • DOI: 10.1038/nmeth.2089

Flow of a Viscous Liquid on a Rotating Disk
journal, May 1958

  • Emslie, Alfred G.; Bonner, Francis T.; Peck, Leslie G.
  • Journal of Applied Physics, Vol. 29, Issue 5
  • DOI: 10.1063/1.1723300

Droplet microfluidic technology for single-cell high-throughput screening
journal, July 2009

  • Brouzes, E.; Medkova, M.; Savenelli, N.
  • Proceedings of the National Academy of Sciences, Vol. 106, Issue 34
  • DOI: 10.1073/pnas.0903542106

SU-8 based microprobes with integrated planar electrodes for enhanced neural depth recording
journal, August 2012

  • Altuna, Ane; Menendez de la Prida, Liset; Bellistri, Elisa
  • Biosensors and Bioelectronics, Vol. 37, Issue 1
  • DOI: 10.1016/j.bios.2012.03.039