Multi-layering of SU-8 exhibits distinct geometrical transitions from circular to planarized profiles

Sauzade, Martin; Li, Ling; Bakowski, Tomasz; Strey, Helmut H.; Brouzes, Eric

doi:10.1063/1.5139031

Title: Multi-layering of SU-8 exhibits distinct geometrical transitions from circular to planarized profiles

Journal Article · 21 February 2020 · Biomicrofluidics

DOI: https://doi.org/10.1063/1.5139031 · OSTI ID:1601032

Sauzade, Martin; Li, Ling; Bakowski, Tomasz; Strey, Helmut H.;

The negative tone photoresist SU-8 permits the creation of micrometer-scale structures by optical lithography. It is also the most used photoresist in soft lithography for the fast-prototyping of microfluidic devices. Despite its importance, the effect of capillary forces on SU-8 multi-layering onto topographical features has not been thoroughly studied. In particular, the profile of the added layer has not been examined in detail. The overlaying process exhibits a set of distinct behaviors, or regimes, depending on the relative thickness of the overlay and the underlying rectangular pattern. We demonstrate how capillary effects control the profile of multi-layer microchannels in a predictable manner. We derive a simple static model to describe the evolution of the overlay as a function of dimensionless geometric parameters. Our study provides a critical understanding of the parameters that govern multi-layer spin coating.

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Sponsoring Organization:: USDOE

Grant/Contract Number:: SC0012704

OSTI ID:: 1601032

Journal Information:: Biomicrofluidics, Journal Name: Biomicrofluidics Journal Issue: 1 Vol. 14; ISSN 1932-1058

Publisher:: American Institute of PhysicsCopyright Statement

Country of Publication:: United States

Language:: English

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