skip to main content
DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

This content will become publicly available on February 21, 2021

Title: Multi-layering of SU-8 exhibits distinct geometrical transitions from circular to planarized profiles

Authors:
 [1];  [1];  [1];  [2]; ORCiD logo [3]
  1. Department of Biomedical Engineering, Stony Brook University, Stony Brook, New York 11794, USA
  2. Department of Biomedical Engineering, Stony Brook University, Stony Brook, New York 11794, USA, Laufer Center for Physical and Quantitative Biology, Stony Brook University, Stony Brook, New York 11794, USA
  3. Department of Biomedical Engineering, Stony Brook University, Stony Brook, New York 11794, USA, Laufer Center for Physical and Quantitative Biology, Stony Brook University, Stony Brook, New York 11794, USA, Cancer Center, Stony Brook School of Medicine, Stony Brook, New York 11794, USA, Institute for Engineering Driven Medicine, Stony Brook University, Stony Brook, New York 11794, USA
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1601032
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Biomicrofluidics
Additional Journal Information:
Journal Name: Biomicrofluidics Journal Volume: 14 Journal Issue: 1; Journal ID: ISSN 1932-1058
Publisher:
American Institute of Physics
Country of Publication:
United States
Language:
English

Citation Formats

Sauzade, Martin, Li, Ling, Bakowski, Tomasz, Strey, Helmut H., and Brouzes, Eric. Multi-layering of SU-8 exhibits distinct geometrical transitions from circular to planarized profiles. United States: N. p., 2020. Web. doi:10.1063/1.5139031.
Sauzade, Martin, Li, Ling, Bakowski, Tomasz, Strey, Helmut H., & Brouzes, Eric. Multi-layering of SU-8 exhibits distinct geometrical transitions from circular to planarized profiles. United States. doi:10.1063/1.5139031.
Sauzade, Martin, Li, Ling, Bakowski, Tomasz, Strey, Helmut H., and Brouzes, Eric. Wed . "Multi-layering of SU-8 exhibits distinct geometrical transitions from circular to planarized profiles". United States. doi:10.1063/1.5139031.
@article{osti_1601032,
title = {Multi-layering of SU-8 exhibits distinct geometrical transitions from circular to planarized profiles},
author = {Sauzade, Martin and Li, Ling and Bakowski, Tomasz and Strey, Helmut H. and Brouzes, Eric},
abstractNote = {},
doi = {10.1063/1.5139031},
journal = {Biomicrofluidics},
number = 1,
volume = 14,
place = {United States},
year = {2020},
month = {1}
}

Journal Article:
Free Publicly Available Full Text
This content will become publicly available on February 21, 2021
Publisher's Version of Record

Save / Share:

Works referenced in this record:

Precise pooling and dispensing of microfluidic droplets towards micro- to macro-world interfacing
journal, January 2014

  • Brouzes, Eric; Carniol, April; Bakowski, Tomasz
  • RSC Adv., Vol. 4, Issue 73
  • DOI: 10.1039/C4RA07110G

Two-step photolithography to fabricate multilevel microchannels
journal, December 2010

  • Choi, Sungyoung; Park, Je-Kyun
  • Biomicrofluidics, Vol. 4, Issue 4
  • DOI: 10.1063/1.3517230

The limits of edge bead planarization and surface levelling in spin-coated liquid films
journal, January 2020


Fabricating microfluidic valve master molds in SU-8 photoresist
journal, April 2014

  • Dy, Aaron J.; Cosmanescu, Alin; Sluka, James
  • Journal of Micromechanics and Microengineering, Vol. 24, Issue 5
  • DOI: 10.1088/0960-1317/24/5/057001

Spin coating over topography
journal, January 1993

  • Peurrung, L. M.; Graves, D. B.
  • IEEE Transactions on Semiconductor Manufacturing, Vol. 6, Issue 1
  • DOI: 10.1109/66.210660

Planarization during spin coating
journal, May 1992

  • Stillwagon, L. E.; Larson, R. G.
  • Physics of Fluids A: Fluid Dynamics, Vol. 4, Issue 5
  • DOI: 10.1063/1.858269

Multi-layer SU-8 lift-off technology for microfluidic devices
journal, April 2005

  • Bohl, Benjamin; Steger, Reinhard; Zengerle, Roland
  • Journal of Micromechanics and Microengineering, Vol. 15, Issue 6
  • DOI: 10.1088/0960-1317/15/6/002

SU-8: a low-cost negative resist for MEMS
journal, September 1997

  • Lorenz, H.; Despont, M.; Fahrni, N.
  • Journal of Micromechanics and Microengineering, Vol. 7, Issue 3
  • DOI: 10.1088/0960-1317/7/3/010

Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane)
journal, October 1998

  • Duffy, David C.; McDonald, J. Cooper; Schueller, Olivier J. A.
  • Analytical Chemistry, Vol. 70, Issue 23, p. 4974-4984
  • DOI: 10.1021/ac980656z

Film Thickness Profiles over Topography in Spin Coating
journal, January 1991

  • Peurrung, L. M.
  • Journal of The Electrochemical Society, Vol. 138, Issue 7
  • DOI: 10.1149/1.2085935

Fundamentals of topographic substrate leveling
journal, June 1988

  • Stillwagon, L. E.; Larson, R. G.
  • Journal of Applied Physics, Vol. 63, Issue 11, p. 5251-5258
  • DOI: 10.1063/1.340388

Spin coating: One‐dimensional model
journal, December 1989

  • Bornside, D. E.; Macosko, C. W.; Scriven, L. E.
  • Journal of Applied Physics, Vol. 66, Issue 11
  • DOI: 10.1063/1.343754

A snake-based approach to accurate determination of both contact points and contact angles
journal, September 2006

  • Stalder, A. F.; Kulik, G.; Sage, D.
  • Colloids and Surfaces A: Physicochemical and Engineering Aspects, Vol. 286, Issue 1-3
  • DOI: 10.1016/j.colsurfa.2006.03.008

Complete Analytical Solutions of Film Planarization during Spin Coating
journal, January 1999

  • Wu, Pei-Ying
  • Journal of The Electrochemical Society, Vol. 146, Issue 10
  • DOI: 10.1149/1.1392558

Rounding of Negative Dry Film Resist by Diffusive Backside Exposure Creating Rounded Channels for Pneumatic Membrane Valves
journal, October 2015

  • Frank, Philipp; Haefner, Sebastian; Paschew, Georgi
  • Micromachines, Vol. 6, Issue 11
  • DOI: 10.3390/mi6111442

Planarization of Substrate Topography by Spin Coating
journal, January 1987

  • Stillwagon, L. E.; Larson, R. G.; Taylor, G. N.
  • Journal of The Electrochemical Society, Vol. 134, Issue 8, p. 2030-2037
  • DOI: 10.1149/1.2100813

Fiji: an open-source platform for biological-image analysis
journal, June 2012

  • Schindelin, Johannes; Arganda-Carreras, Ignacio; Frise, Erwin
  • Nature Methods, Vol. 9, Issue 7
  • DOI: 10.1038/nmeth.2019

Click chemistry approaches to expand the repertoire of PEG-based fluorinated surfactants for droplet microfluidics
journal, January 2018

  • Scanga, Randall; Chrastecka, Lucie; Mohammad, Ridhwan
  • RSC Advances, Vol. 8, Issue 23
  • DOI: 10.1039/C8RA01254G

SU-8 as a material for lab-on-a-chip-based mass spectrometry
journal, January 2014


Leveling of thin films over uneven substrates during spin coating
journal, November 1990

  • Stillwagon, L. E.; Larson, R. G.
  • Physics of Fluids A: Fluid Dynamics, Vol. 2, Issue 11
  • DOI: 10.1063/1.857669

NIH Image to ImageJ: 25 years of image analysis
journal, June 2012

  • Schneider, Caroline A.; Rasband, Wayne S.; Eliceiri, Kevin W.
  • Nature Methods, Vol. 9, Issue 7
  • DOI: 10.1038/nmeth.2089

Flow of a Viscous Liquid on a Rotating Disk
journal, May 1958

  • Emslie, Alfred G.; Bonner, Francis T.; Peck, Leslie G.
  • Journal of Applied Physics, Vol. 29, Issue 5
  • DOI: 10.1063/1.1723300

Droplet microfluidic technology for single-cell high-throughput screening
journal, July 2009

  • Brouzes, E.; Medkova, M.; Savenelli, N.
  • Proceedings of the National Academy of Sciences, Vol. 106, Issue 34
  • DOI: 10.1073/pnas.0903542106

SU-8 based microprobes with integrated planar electrodes for enhanced neural depth recording
journal, August 2012

  • Altuna, Ane; Menendez de la Prida, Liset; Bellistri, Elisa
  • Biosensors and Bioelectronics, Vol. 37, Issue 1
  • DOI: 10.1016/j.bios.2012.03.039