Improved control of electron computer-generated holographic grating groove profiles using ion beam gas-assisted etching
- Authors:
- Publication Date:
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1598750
- Grant/Contract Number:
- SC0010466
- Resource Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Applied Optics
- Additional Journal Information:
- Journal Name: Applied Optics Journal Volume: 59 Journal Issue: 6; Journal ID: ISSN 1559-128X
- Publisher:
- Optical Society of America
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Johnson, Cameron W., Bauer, Dylan H., and McMorran, Benjamin J. Improved control of electron computer-generated holographic grating groove profiles using ion beam gas-assisted etching. United States: N. p., 2020.
Web. doi:10.1364/AO.376876.
Johnson, Cameron W., Bauer, Dylan H., & McMorran, Benjamin J. Improved control of electron computer-generated holographic grating groove profiles using ion beam gas-assisted etching. United States. https://doi.org/10.1364/AO.376876
Johnson, Cameron W., Bauer, Dylan H., and McMorran, Benjamin J. Wed .
"Improved control of electron computer-generated holographic grating groove profiles using ion beam gas-assisted etching". United States. https://doi.org/10.1364/AO.376876.
@article{osti_1598750,
title = {Improved control of electron computer-generated holographic grating groove profiles using ion beam gas-assisted etching},
author = {Johnson, Cameron W. and Bauer, Dylan H. and McMorran, Benjamin J.},
abstractNote = {},
doi = {10.1364/AO.376876},
journal = {Applied Optics},
number = 6,
volume = 59,
place = {United States},
year = {2020},
month = {2}
}
Free Publicly Available Full Text
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https://doi.org/10.1364/AO.376876
https://doi.org/10.1364/AO.376876
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Cited by: 2 works
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