Improved control of electron computer-generated holographic grating groove profiles using ion beam gas-assisted etching

Johnson, Cameron W.; Bauer, Dylan H.; McMorran, Benjamin J.

doi:10.1364/AO.376876

Title: Improved control of electron computer-generated holographic grating groove profiles using ion beam gas-assisted etching

Abstract

In a transmission electron microscope, electrons are described by matter-waves with wavelengths five orders of magnitude smaller than optical electromagnetic waves. Analogous to optical holography, electron wavefronts can be shaped using nanoscale holographic gratings. Here we demonstrate a novel, scalable nanofabrication method for creating off-axis holographic gratings that demonstrate near ideal diffraction efficiencies for binary, sinusoidal, and blazed grating groove profiles. We show that this method can produce up to 50 µm diameter area gratings that diffract up to 68% of the transmitted electron wave into a desired diffraction order with less than 7% into any other order. Additionally, we find that the amount of inelastically scattered electrons from the material gratings remaining in the coherent diffraction orders from the gratings is negligible in the far field.

Authors:: Johnson, Cameron W.; Bauer, Dylan H.; McMorran, Benjamin J.

Publication Date:: Wed Feb 12 00:00:00 EST 2020

Sponsoring Org.:: USDOE

OSTI Identifier:: 1598750

Grant/Contract Number:: SC0010466

Resource Type:: Publisher's Accepted Manuscript

Journal Name:: Applied Optics

Additional Journal Information:: Journal Name: Applied Optics Journal Volume: 59 Journal Issue: 6; Journal ID: ISSN 1559-128X

Publisher:: Optical Society of America

Country of Publication:: United States

Language:: English

Citation Formats


                    Johnson, Cameron W., Bauer, Dylan H., and McMorran, Benjamin J. Improved control of electron computer-generated holographic grating groove profiles using ion beam gas-assisted etching.  United States: N. p., 2020. 
Web.  doi:10.1364/AO.376876.

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                    Johnson, Cameron W., Bauer, Dylan H., & McMorran, Benjamin J. Improved control of electron computer-generated holographic grating groove profiles using ion beam gas-assisted etching.  United States.  https://doi.org/10.1364/AO.376876

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                    Johnson, Cameron W., Bauer, Dylan H., and McMorran, Benjamin J. Wed .  
"Improved control of electron computer-generated holographic grating groove profiles using ion beam gas-assisted etching".  United States.  https://doi.org/10.1364/AO.376876.

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@article{osti_1598750,

  title        = {Improved control of electron computer-generated holographic grating groove profiles using ion beam gas-assisted etching},

  author       = {Johnson, Cameron W. and Bauer, Dylan H. and McMorran, Benjamin J.},

  abstractNote = {In a transmission electron microscope, electrons are described by matter-waves with wavelengths five orders of magnitude smaller than optical electromagnetic waves. Analogous to optical holography, electron wavefronts can be shaped using nanoscale holographic gratings. Here we demonstrate a novel, scalable nanofabrication method for creating off-axis holographic gratings that demonstrate near ideal diffraction efficiencies for binary, sinusoidal, and blazed grating groove profiles. We show that this method can produce up to 50 µm diameter area gratings that diffract up to 68% of the transmitted electron wave into a desired diffraction order with less than 7% into any other order. Additionally, we find that the amount of inelastically scattered electrons from the material gratings remaining in the coherent diffraction orders from the gratings is negligible in the far field.},

  doi          = {10.1364/AO.376876},

  journal      = {Applied Optics},

  number       = 6,

  volume       = 59,

  place        = {United States},

  year         = {Wed Feb 12 00:00:00 EST 2020},

  month        = {Wed Feb 12 00:00:00 EST 2020}

}

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Title: Improved control of electron computer-generated holographic grating groove profiles using ion beam gas-assisted etching

Abstract

Citation Formats

Highly efficient electron vortex beams generated by nanofabricated phase holograms journal, January 2014

Dichroism in the Interaction between Vortex Electron Beams, Plasmons, and Molecules journal, August 2014

Probing the localization of magnetic dichroism by atomic-size astigmatic and vortex electron beams journal, March 2018

Sculpturing the electron wave function using nanoscale phase masks journal, September 2014

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Gas-assisted focused electron beam and ion beam processing and fabrication journal, January 2008

How to Manipulate Nanoparticles with an Electron Beam? journal, November 2012

Focused electron beam induced deposition as a tool to create electron vortices journal, January 2016

Realization of electron vortices with large orbital angular momentum using miniature holograms fabricated by electron beam lithography journal, February 2017

Interpretable and Efficient Interferometric Contrast in Scanning Transmission Electron Microscopy with a Diffraction-Grating Beam Splitter journal, December 2018

Complex Spatial Filtering with Binary Masks journal, January 1966

Diffraction of 0.5keV electrons from free-standing transmission gratings journal, March 2006

Innovative Phase Plates for Beam Shaping journal, August 2014

Grating mirror for diffraction of electrons journal, December 2018

Efficient linear phase contrast in scanning transmission electron microscopy with matched illumination and detector interferometry journal, February 2016

Laguerre–Gauss and Hermite–Gauss soft X-ray states generated using diffractive optics journal, January 2019

Characteristics of gas-assisted focused ion beam etching journal, March 1993

Computer generated holograms: an historical review journal, January 1987

Aberration corrected STEM by means of diffraction gratings journal, November 2017

Spherical aberration correction in a scanning transmission electron microscope using a sculpted thin film journal, June 2018

Demonstration of a 2 × 2 programmable phase plate for electrons journal, July 2018

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Efficient diffractive phase optics for electrons journal, September 2014

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Towards a holographic approach to spherical aberration correction in scanning transmission electron microscopy journal, January 2017

A tunable path-separated electron interferometer with an amplitude-dividing grating beamsplitter journal, December 2018

Phase masks for electron microscopy fabricated by thermal scanning probe lithography journal, December 2019

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Electron Vortex Beams with High Quanta of Orbital Angular Momentum journal, January 2011

Projected potential profiles across interfaces obtained by reconstructing the exit face wave function from through focal series journal, April 2006

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Fabrication of phase masks from amorphous carbon thin films for electron-beam shaping journal, January 2019

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Highly efficient electron vortex beams generated by nanofabricated phase holograms
journal, January 2014

Dichroism in the Interaction between Vortex Electron Beams, Plasmons, and Molecules
journal, August 2014

Probing the localization of magnetic dichroism by atomic-size astigmatic and vortex electron beams
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Sculpturing the electron wave function using nanoscale phase masks
journal, September 2014

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journal, April 2018

Origins and demonstrations of electrons with orbital angular momentum
journal, February 2017

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Gas-assisted focused electron beam and ion beam processing and fabrication
journal, January 2008

How to Manipulate Nanoparticles with an Electron Beam?
journal, November 2012

Focused electron beam induced deposition as a tool to create electron vortices
journal, January 2016

Realization of electron vortices with large orbital angular momentum using miniature holograms fabricated by electron beam lithography
journal, February 2017

Interpretable and Efficient Interferometric Contrast in Scanning Transmission Electron Microscopy with a Diffraction-Grating Beam Splitter
journal, December 2018

Complex Spatial Filtering with Binary Masks
journal, January 1966

Diffraction of 0.5keV electrons from free-standing transmission gratings
journal, March 2006

Innovative Phase Plates for Beam Shaping
journal, August 2014

Grating mirror for diffraction of electrons
journal, December 2018

Efficient linear phase contrast in scanning transmission electron microscopy with matched illumination and detector interferometry
journal, February 2016

Laguerre–Gauss and Hermite–Gauss soft X-ray states generated using diffractive optics
journal, January 2019

Characteristics of gas-assisted focused ion beam etching
journal, March 1993

Computer generated holograms: an historical review
journal, January 1987

Aberration corrected STEM by means of diffraction gratings
journal, November 2017

Spherical aberration correction in a scanning transmission electron microscope using a sculpted thin film
journal, June 2018

Demonstration of a 2 × 2 programmable phase plate for electrons
journal, July 2018

Waves and Quanta
journal, October 1923

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journal, August 2017

Efficient diffractive phase optics for electrons
journal, September 2014

Holography with a neutron interferometer
journal, January 2016

Wave–particle duality of C60 molecules
journal, October 1999

Towards a holographic approach to spherical aberration correction in scanning transmission electron microscopy
journal, January 2017

A tunable path-separated electron interferometer with an amplitude-dividing grating beamsplitter
journal, December 2018

Phase masks for electron microscopy fabricated by thermal scanning probe lithography
journal, December 2019

Production and application of electron vortex beams
journal, September 2010

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journal, January 2011

Projected potential profiles across interfaces obtained by reconstructing the exit face wave function from through focal series
journal, April 2006

Nanostructuring of electron beams
journal, January 2019

A measurement of electron-wall interactions using transmission diffraction from nanofabricated gratings
journal, October 2006

Fabrication of phase masks from amorphous carbon thin films for electron-beam shaping
journal, January 2019

Coiling free electron matter waves
journal, April 2019