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Title: Improved control of electron computer-generated holographic grating groove profiles using ion beam gas-assisted etching

Authors:
; ;
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1598750
Grant/Contract Number:  
SC0010466
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Applied Optics
Additional Journal Information:
Journal Name: Applied Optics Journal Volume: 59 Journal Issue: 6; Journal ID: ISSN 1559-128X
Publisher:
Optical Society of America
Country of Publication:
United States
Language:
English

Citation Formats

Johnson, Cameron W., Bauer, Dylan H., and McMorran, Benjamin J. Improved control of electron computer-generated holographic grating groove profiles using ion beam gas-assisted etching. United States: N. p., 2020. Web. doi:10.1364/AO.376876.
Johnson, Cameron W., Bauer, Dylan H., & McMorran, Benjamin J. Improved control of electron computer-generated holographic grating groove profiles using ion beam gas-assisted etching. United States. doi:10.1364/AO.376876.
Johnson, Cameron W., Bauer, Dylan H., and McMorran, Benjamin J. Wed . "Improved control of electron computer-generated holographic grating groove profiles using ion beam gas-assisted etching". United States. doi:10.1364/AO.376876.
@article{osti_1598750,
title = {Improved control of electron computer-generated holographic grating groove profiles using ion beam gas-assisted etching},
author = {Johnson, Cameron W. and Bauer, Dylan H. and McMorran, Benjamin J.},
abstractNote = {},
doi = {10.1364/AO.376876},
journal = {Applied Optics},
number = 6,
volume = 59,
place = {United States},
year = {2020},
month = {2}
}

Journal Article:
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