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Title: High-Q suspended optical resonators in 3C silicon carbide obtained by thermal annealing

Abstract

We fabricate suspended single-mode optical waveguides and ring resonators in 3C silicon carbide (SiC) that operate at telecommunication wavelength, and leverage post-fabrication thermal annealing to minimize optical propagation losses. Annealed optical resonators yield quality factors of over 41,000, which corresponds to a propagation loss of 7 dB/cm, and is a significant improvement over the 24 dB/cm in the case of the non-annealed chip. This improvement is attributed to the enhancement of SiC crystallinity and a significant reduction of waveguide surface roughness, from 2.4 nm to below 1.7 nm. The latter is attributed to surface layer oxide growth during the annealing step. We confirm that the thermo-optic coefficient, an important parameter governing high-power and temperature-dependent performance of SiC, does not vary with annealing and is comparable to that of bulk SiC. Our annealing-based approach, which is especially suitable for suspended structures, offers a straightforward way to realize high-performance 3C-SiC integrated circuits.

Authors:
; ORCiD logo; ; ; ; ; ;
Publication Date:
Research Org.:
California Institute of Technology (CalTech), Pasadena, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
1598400
Alternate Identifier(s):
OSTI ID: 1803635
Grant/Contract Number:  
SC0019219
Resource Type:
Published Article
Journal Name:
Optics Express
Additional Journal Information:
Journal Name: Optics Express Journal Volume: 28 Journal Issue: 4; Journal ID: ISSN 1094-4087
Publisher:
Optical Society of America
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; Optics

Citation Formats

Powell, Keith, Shams-Ansari, Amirhassan, Desai, Smit, Austin, Mitchell, Deng, Jiangdong, Sinclair, Neil, Lončar, Marko, and Yi, Xiaoke. High-Q suspended optical resonators in 3C silicon carbide obtained by thermal annealing. United States: N. p., 2020. Web. doi:10.1364/OE.381601.
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Powell, Keith, Shams-Ansari, Amirhassan, Desai, Smit, Austin, Mitchell, Deng, Jiangdong, Sinclair, Neil, Lončar, Marko, & Yi, Xiaoke. High-Q suspended optical resonators in 3C silicon carbide obtained by thermal annealing. United States. https://doi.org/10.1364/OE.381601
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Powell, Keith, Shams-Ansari, Amirhassan, Desai, Smit, Austin, Mitchell, Deng, Jiangdong, Sinclair, Neil, Lončar, Marko, and Yi, Xiaoke. Fri . "High-Q suspended optical resonators in 3C silicon carbide obtained by thermal annealing". United States. https://doi.org/10.1364/OE.381601.
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@article{osti_1598400,
title = {High-Q suspended optical resonators in 3C silicon carbide obtained by thermal annealing},
author = {Powell, Keith and Shams-Ansari, Amirhassan and Desai, Smit and Austin, Mitchell and Deng, Jiangdong and Sinclair, Neil and Lončar, Marko and Yi, Xiaoke},
abstractNote = {We fabricate suspended single-mode optical waveguides and ring resonators in 3C silicon carbide (SiC) that operate at telecommunication wavelength, and leverage post-fabrication thermal annealing to minimize optical propagation losses. Annealed optical resonators yield quality factors of over 41,000, which corresponds to a propagation loss of 7 dB/cm, and is a significant improvement over the 24 dB/cm in the case of the non-annealed chip. This improvement is attributed to the enhancement of SiC crystallinity and a significant reduction of waveguide surface roughness, from 2.4 nm to below 1.7 nm. The latter is attributed to surface layer oxide growth during the annealing step. We confirm that the thermo-optic coefficient, an important parameter governing high-power and temperature-dependent performance of SiC, does not vary with annealing and is comparable to that of bulk SiC. Our annealing-based approach, which is especially suitable for suspended structures, offers a straightforward way to realize high-performance 3C-SiC integrated circuits.},
doi = {10.1364/OE.381601},
journal = {Optics Express},
number = 4,
volume = 28,
place = {United States},
year = {2020},
month = {2}
}
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