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Title: High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers

Authors:
ORCiD logo; ; ; ; ;
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1598368
Grant/Contract Number:  
Professional Research and Teaching Leave; AC52-07NA27344; AC03-76F00098
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Optics Letters
Additional Journal Information:
Journal Name: Optics Letters Journal Volume: 45 Journal Issue: 4; Journal ID: ISSN 0146-9592
Publisher:
Optical Society of America
Country of Publication:
United States
Language:
English

Citation Formats

Rebellato, Jennifer, Soufli, Regina, Meltchakov, Evgueni, Gullikson, Eric, de Rossi, Sébastien, and Delmotte, Franck. High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers. United States: N. p., 2020. Web. doi:10.1364/OL.384734.
Rebellato, Jennifer, Soufli, Regina, Meltchakov, Evgueni, Gullikson, Eric, de Rossi, Sébastien, & Delmotte, Franck. High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers. United States. doi:10.1364/OL.384734.
Rebellato, Jennifer, Soufli, Regina, Meltchakov, Evgueni, Gullikson, Eric, de Rossi, Sébastien, and Delmotte, Franck. Mon . "High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers". United States. doi:10.1364/OL.384734.
@article{osti_1598368,
title = {High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers},
author = {Rebellato, Jennifer and Soufli, Regina and Meltchakov, Evgueni and Gullikson, Eric and de Rossi, Sébastien and Delmotte, Franck},
abstractNote = {},
doi = {10.1364/OL.384734},
journal = {Optics Letters},
number = 4,
volume = 45,
place = {United States},
year = {2020},
month = {2}
}

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Works referenced in this record:

Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings
journal, July 2012

  • Soufli, Regina; Fernández-Perea, Mónica; Baker, Sherry L.
  • Applied Physics Letters, Vol. 101, Issue 4
  • DOI: 10.1063/1.4737649

Stable Multilayer Reflective Coatings for λ(HeI) = 58.4 nm for the KORTES Solar Telescope
journal, February 2019

  • Polkovnikov, V. N.; Chkhalo, N. I.; Meltchakov, E.
  • Technical Physics Letters, Vol. 45, Issue 2
  • DOI: 10.1134/S1063785019020147

Recent developments in EUV reflectometry at the Advanced Light Source
conference, August 2001

  • Gullikson, Eric M.; Mrowka, Stanley; Kaufmann, Benjamin B.
  • 26th Annual International Symposium on Microlithography, SPIE Proceedings
  • DOI: 10.1117/12.436712

Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region
journal, January 2012

  • Fernández-Perea, Mónica; Soufli, Regina; Robinson, Jeff C.
  • Optics Express, Vol. 20, Issue 21
  • DOI: 10.1364/OE.20.024018

Amorphous silicon carbide coatings for extreme ultraviolet optics
journal, January 1988


High-resolution, high-flux, user friendly VLS beamline at the ALS for the 50–1300eV energy region
journal, May 1998

  • Underwood, J. H.; Gullikson, E. M.
  • Journal of Electron Spectroscopy and Related Phenomena, Vol. 92, Issue 1-3
  • DOI: 10.1016/S0368-2048(98)00134-0

Enhanced reflectivity and stability of Sc/Si multilayers
conference, January 2004

  • Yulin, Sergiy A.; Schaefers, Franz; Feigl, Torsten
  • Optical Science and Technology, SPIE's 48th Annual Meeting, SPIE Proceedings
  • DOI: 10.1117/12.505582

Efficient method for the determination of extreme-ultraviolet optical constants in reactive materials: application to scandium and titanium
journal, January 2004

  • Uspenskii, Yu. A.; Seely, John F.; Popov, N. L.
  • Journal of the Optical Society of America A, Vol. 21, Issue 2
  • DOI: 10.1364/JOSAA.21.000298

Extreme Ultraviolet Multilayer Nanostructures and Their Application to Solar Plasma Observations: A Review
journal, January 2019

  • Corso, Alain J.; Pelizzo, Maria G.
  • Journal of Nanoscience and Nanotechnology, Vol. 19, Issue 1
  • DOI: 10.1166/jnn.2019.16477

X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92
journal, July 1993

  • Henke, B. L.; Gullikson, E. M.; Davis, J. C.
  • Atomic Data and Nuclear Data Tables, Vol. 54, Issue 2, p. 181-342
  • DOI: 10.1006/adnd.1993.1013

Normal-incidence silicon–gadolinium multilayers for imaging at 63 nm wavelength
journal, January 2008

  • Kjornrattanawanich, Benjawan; Windt, David L.; Seely, John F.
  • Optics Letters, Vol. 33, Issue 9
  • DOI: 10.1364/OL.33.000965

Single and multi-channel Al-based multilayer systems for space applications in EUV range
conference, May 2013

  • Meltchakov, E.; De Rossi, S.; Mercier, R.
  • SPIE Optics + Optoelectronics, SPIE Proceedings
  • DOI: 10.1117/12.2017058

SiC/Tb and Si/Tb multilayer coatings for extreme ultraviolet solar imaging
journal, January 2006

  • Kjornrattanawanich, Benjawan; Windt, David L.; Seely, John F.
  • Applied Optics, Vol. 45, Issue 8
  • DOI: 10.1364/AO.45.001765

Multilayer optics for coherent EUV/X-ray laser sources
conference, September 2015

  • Delmotte, F.; Dehlinger, M.; Bourassin-Bouchet, Ch.
  • SPIE Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.2188048

IMD—Software for modeling the optical properties of multilayer films
journal, January 1998


Development of Al-based multilayer optics for EUV
journal, October 2009


Study of normal incidence of three-component multilayer mirrors in the range 20–40 nm
journal, January 2005

  • Gautier, Julien; Delmotte, Franck; Roulliay, Marc
  • Applied Optics, Vol. 44, Issue 3
  • DOI: 10.1364/AO.44.000384

Tri-material multilayer coatings with high reflectivity and wide bandwidth for 25 to 50 nm extreme ultraviolet light
journal, January 2009