High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers
- Authors:
- Publication Date:
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1598368
- Grant/Contract Number:
- Professional Research and Teaching Leave; AC52-07NA27344; AC03-76F00098
- Resource Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Optics Letters
- Additional Journal Information:
- Journal Name: Optics Letters Journal Volume: 45 Journal Issue: 4; Journal ID: ISSN 0146-9592
- Publisher:
- Optical Society of America
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Rebellato, Jennifer, Soufli, Regina, Meltchakov, Evgueni, Gullikson, Eric, de Rossi, Sébastien, and Delmotte, Franck. High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers. United States: N. p., 2020.
Web. doi:10.1364/OL.384734.
Rebellato, Jennifer, Soufli, Regina, Meltchakov, Evgueni, Gullikson, Eric, de Rossi, Sébastien, & Delmotte, Franck. High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers. United States. https://doi.org/10.1364/OL.384734
Rebellato, Jennifer, Soufli, Regina, Meltchakov, Evgueni, Gullikson, Eric, de Rossi, Sébastien, and Delmotte, Franck. Mon .
"High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers". United States. https://doi.org/10.1364/OL.384734.
@article{osti_1598368,
title = {High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers},
author = {Rebellato, Jennifer and Soufli, Regina and Meltchakov, Evgueni and Gullikson, Eric and de Rossi, Sébastien and Delmotte, Franck},
abstractNote = {},
doi = {10.1364/OL.384734},
journal = {Optics Letters},
number = 4,
volume = 45,
place = {United States},
year = {2020},
month = {2}
}
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https://doi.org/10.1364/OL.384734
https://doi.org/10.1364/OL.384734
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Cited by: 1 work
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Works referenced in this record:
Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings
journal, July 2012
- Soufli, Regina; Fernández-Perea, Mónica; Baker, Sherry L.
- Applied Physics Letters, Vol. 101, Issue 4
Stable Multilayer Reflective Coatings for λ(HeI) = 58.4 nm for the KORTES Solar Telescope
journal, February 2019
- Polkovnikov, V. N.; Chkhalo, N. I.; Meltchakov, E.
- Technical Physics Letters, Vol. 45, Issue 2
Recent developments in EUV reflectometry at the Advanced Light Source
conference, August 2001
- Gullikson, Eric M.; Mrowka, Stanley; Kaufmann, Benjamin B.
- 26th Annual International Symposium on Microlithography, SPIE Proceedings
Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region
journal, January 2012
- Fernández-Perea, Mónica; Soufli, Regina; Robinson, Jeff C.
- Optics Express, Vol. 20, Issue 21
Amorphous silicon carbide coatings for extreme ultraviolet optics
journal, January 1988
- Kortright, J. B.; Windt, David L.
- Applied Optics, Vol. 27, Issue 14
High-resolution, high-flux, user friendly VLS beamline at the ALS for the 50–1300eV energy region
journal, May 1998
- Underwood, J. H.; Gullikson, E. M.
- Journal of Electron Spectroscopy and Related Phenomena, Vol. 92, Issue 1-3
Enhanced reflectivity and stability of Sc/Si multilayers
conference, January 2004
- Yulin, Sergiy A.; Schaefers, Franz; Feigl, Torsten
- Optical Science and Technology, SPIE's 48th Annual Meeting, SPIE Proceedings
Efficient method for the determination of extreme-ultraviolet optical constants in reactive materials: application to scandium and titanium
journal, January 2004
- Uspenskii, Yu. A.; Seely, John F.; Popov, N. L.
- Journal of the Optical Society of America A, Vol. 21, Issue 2
Extreme Ultraviolet Multilayer Nanostructures and Their Application to Solar Plasma Observations: A Review
journal, January 2019
- Corso, Alain J.; Pelizzo, Maria G.
- Journal of Nanoscience and Nanotechnology, Vol. 19, Issue 1
X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92
journal, July 1993
- Henke, B. L.; Gullikson, E. M.; Davis, J. C.
- Atomic Data and Nuclear Data Tables, Vol. 54, Issue 2, p. 181-342
Normal-incidence silicon–gadolinium multilayers for imaging at 63 nm wavelength
journal, January 2008
- Kjornrattanawanich, Benjawan; Windt, David L.; Seely, John F.
- Optics Letters, Vol. 33, Issue 9
Single and multi-channel Al-based multilayer systems for space applications in EUV range
conference, May 2013
- Meltchakov, E.; De Rossi, S.; Mercier, R.
- SPIE Optics + Optoelectronics, SPIE Proceedings
SiC/Tb and Si/Tb multilayer coatings for extreme ultraviolet solar imaging
journal, January 2006
- Kjornrattanawanich, Benjawan; Windt, David L.; Seely, John F.
- Applied Optics, Vol. 45, Issue 8
Multilayer optics for coherent EUV/X-ray laser sources
conference, September 2015
- Delmotte, F.; Dehlinger, M.; Bourassin-Bouchet, Ch.
- SPIE Optical Engineering + Applications, SPIE Proceedings
IMD—Software for modeling the optical properties of multilayer films
journal, January 1998
- Windt, David L.
- Computers in Physics, Vol. 12, Issue 4
Development of Al-based multilayer optics for EUV
journal, October 2009
- Meltchakov, E.; Hecquet, C.; Roulliay, M.
- Applied Physics A, Vol. 98, Issue 1
Study of normal incidence of three-component multilayer mirrors in the range 20–40 nm
journal, January 2005
- Gautier, Julien; Delmotte, Franck; Roulliay, Marc
- Applied Optics, Vol. 44, Issue 3
Tri-material multilayer coatings with high reflectivity and wide bandwidth for 25 to 50 nm extreme ultraviolet light
journal, January 2009
- Aquila, A.; Salmassi, F.; Liu, Yanwei
- Optics Express, Vol. 17, Issue 24