High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers

doi:10.1364/OL.384734

This content will become publicly available on February 10, 2021

Title: High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers

Authors:

; Soufli, Regina; Meltchakov, Evgueni; Gullikson, Eric; de Rossi, Sébastien; Delmotte, Franck

Publication Date:: 2020-02-10

Sponsoring Org.:: USDOE

OSTI Identifier:: 1598368

Grant/Contract Number:: Professional Research and Teaching Leave; AC52-07NA27344; AC03-76F00098

Resource Type:: Publisher's Accepted Manuscript

Journal Name:: Optics Letters

Additional Journal Information:: Journal Name: Optics Letters Journal Volume: 45 Journal Issue: 4; Journal ID: ISSN 0146-9592

Publisher:: Optical Society of America

Country of Publication:: United States

Language:: English

Citation Formats


                    Rebellato, Jennifer, Soufli, Regina, Meltchakov, Evgueni, Gullikson, Eric, de Rossi, Sébastien, and Delmotte, Franck. High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers.  United States: N. p., 2020. 
        Web.  doi:10.1364/OL.384734.

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                    Rebellato, Jennifer, Soufli, Regina, Meltchakov, Evgueni, Gullikson, Eric, de Rossi, Sébastien, & Delmotte, Franck. High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers.  United States.  doi:10.1364/OL.384734.

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                    Rebellato, Jennifer, Soufli, Regina, Meltchakov, Evgueni, Gullikson, Eric, de Rossi, Sébastien, and Delmotte, Franck. Mon .  
        "High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers".  United States.  doi:10.1364/OL.384734.

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@article{osti_1598368,

  title        = {High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers},

  author       = {Rebellato, Jennifer and Soufli, Regina and Meltchakov, Evgueni and Gullikson, Eric and de Rossi, Sébastien and Delmotte, Franck},

  abstractNote = {},

  doi          = {10.1364/OL.384734},

  journal      = {Optics Letters},

  number       = 4,

  volume       = 45,

  place        = {United States},

  year         = {2020},

  month        = {2}

}

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DOI: 10.1364/OL.384734

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Works referenced in this record:

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Soufli, Regina; Fernández-Perea, Mónica; Baker, Sherry L.
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Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region
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Similar Records

This content will become publicly available on February 10, 2021

Title: High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers

Citation Formats

Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings journal, July 2012

Stable Multilayer Reflective Coatings for λ(HeI) = 58.4 nm for the KORTES Solar Telescope journal, February 2019

Recent developments in EUV reflectometry at the Advanced Light Source conference, August 2001

Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region journal, January 2012

Amorphous silicon carbide coatings for extreme ultraviolet optics journal, January 1988

High-resolution, high-flux, user friendly VLS beamline at the ALS for the 50–1300eV energy region journal, May 1998

Enhanced reflectivity and stability of Sc/Si multilayers conference, January 2004

Efficient method for the determination of extreme-ultraviolet optical constants in reactive materials: application to scandium and titanium journal, January 2004

Extreme Ultraviolet Multilayer Nanostructures and Their Application to Solar Plasma Observations: A Review journal, January 2019

X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92 journal, July 1993

Normal-incidence silicon–gadolinium multilayers for imaging at 63 nm wavelength journal, January 2008

Single and multi-channel Al-based multilayer systems for space applications in EUV range conference, May 2013

SiC/Tb and Si/Tb multilayer coatings for extreme ultraviolet solar imaging journal, January 2006

Multilayer optics for coherent EUV/X-ray laser sources conference, September 2015

IMD—Software for modeling the optical properties of multilayer films journal, January 1998

Development of Al-based multilayer optics for EUV journal, October 2009

Study of normal incidence of three-component multilayer mirrors in the range 20–40 nm journal, January 2005

Tri-material multilayer coatings with high reflectivity and wide bandwidth for 25 to 50 nm extreme ultraviolet light journal, January 2009

Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings
journal, July 2012

Stable Multilayer Reflective Coatings for λ(HeI) = 58.4 nm for the KORTES Solar Telescope
journal, February 2019

Recent developments in EUV reflectometry at the Advanced Light Source
conference, August 2001

Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region
journal, January 2012

Amorphous silicon carbide coatings for extreme ultraviolet optics
journal, January 1988

High-resolution, high-flux, user friendly VLS beamline at the ALS for the 50–1300eV energy region
journal, May 1998

Enhanced reflectivity and stability of Sc/Si multilayers
conference, January 2004

Efficient method for the determination of extreme-ultraviolet optical constants in reactive materials: application to scandium and titanium
journal, January 2004

Extreme Ultraviolet Multilayer Nanostructures and Their Application to Solar Plasma Observations: A Review
journal, January 2019

X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92
journal, July 1993

Normal-incidence silicon–gadolinium multilayers for imaging at 63 nm wavelength
journal, January 2008

Single and multi-channel Al-based multilayer systems for space applications in EUV range
conference, May 2013

SiC/Tb and Si/Tb multilayer coatings for extreme ultraviolet solar imaging
journal, January 2006

Multilayer optics for coherent EUV/X-ray laser sources
conference, September 2015

IMD—Software for modeling the optical properties of multilayer films
journal, January 1998

Development of Al-based multilayer optics for EUV
journal, October 2009

Study of normal incidence of three-component multilayer mirrors in the range 20–40 nm
journal, January 2005

Tri-material multilayer coatings with high reflectivity and wide bandwidth for 25 to 50 nm extreme ultraviolet light
journal, January 2009