High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers
- Publication Date:
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1598368
- Grant/Contract Number:
- Professional Research and Teaching Leave; AC52-07NA27344; AC03-76F00098
- Resource Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Optics Letters
- Additional Journal Information:
- Journal Name: Optics Letters Journal Volume: 45 Journal Issue: 4; Journal ID: ISSN 0146-9592
- Publisher:
- Optical Society of America
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Rebellato, Jennifer, Soufli, Regina, Meltchakov, Evgueni, Gullikson, Eric, de Rossi, Sébastien, and Delmotte, Franck. High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers. United States: N. p., 2020.
Web. doi:10.1364/OL.384734.
Rebellato, Jennifer, Soufli, Regina, Meltchakov, Evgueni, Gullikson, Eric, de Rossi, Sébastien, & Delmotte, Franck. High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers. United States. doi:10.1364/OL.384734.
Rebellato, Jennifer, Soufli, Regina, Meltchakov, Evgueni, Gullikson, Eric, de Rossi, Sébastien, and Delmotte, Franck. Mon .
"High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers". United States. doi:10.1364/OL.384734.
@article{osti_1598368,
title = {High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers},
author = {Rebellato, Jennifer and Soufli, Regina and Meltchakov, Evgueni and Gullikson, Eric and de Rossi, Sébastien and Delmotte, Franck},
abstractNote = {},
doi = {10.1364/OL.384734},
journal = {Optics Letters},
number = 4,
volume = 45,
place = {United States},
year = {2020},
month = {2}
}
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DOI: 10.1364/OL.384734
DOI: 10.1364/OL.384734
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