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Title: Substrate damage and incorporation of sapphire into barium hexaferrite films deposited by aerosol deposition

Abstract

Barium Hexaferrite (BaM) grown on sapphire substrate by aerosol deposition is investigated in a subtractive wedge series to determine the extent of energetic substrate damage and indentation. Energy dispersive x-ray spectroscopy (EDS) mapping reveals Al2O3 particulates ejected from the substrate surface during growth. The concentration of particles is higher at the substrate-film interface but persists throughout the 6 mu m thick film. An estimate of the indentation depth (similar to 600 nm) was agreed upon using two EDS techniques (line scan analysis and substrate surface reconstruction by areal integration). X-ray diffraction patterns show peak polycrystalline Al2O3 intensity in 1.5 mu m thick wedges and a decrease at higher thicknesses, confirming that Al2O3 particulate density decreases further from the substrate. Here, magnetic characterization showed decreased magnetic moment compared to bulk and thickness dependence consistent with the fractional increase of Al2O3 content in the films. X-ray absorption at the Fe L3 edge suggests a reduction of material close to the surface, but this reduction appears secondary in magnitude to the effect of damage from deposition.

Authors:
 [1];  [1];  [1];  [1];  [2];  [3]; ORCiD logo [4]; ORCiD logo [1]
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  1. Univ. of Alabama, Tuscaloosa, AL (United States)
  2. Argonne National Lab. (ANL), Lemont, IL (United States)
  3. Korean Inst. of Materials Science, Changwon (Korea)
  4. Naval Research Lab., Washington, D.C (United States)
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities Division
OSTI Identifier:
1582015
Grant/Contract Number:  
AC02-06CH11357
Resource Type:
Accepted Manuscript
Journal Name:
Journal of the American Ceramic Society
Additional Journal Information:
Journal Volume: 103; Journal Issue: 3; Journal ID: ISSN 0002-7820
Publisher:
American Ceramic Society
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; X-ray absorption spectroscopy; aerosol deposition; electron microscopy; substrate deformation; thin films

Citation Formats

Ranjit, Smriti, Law, Ka Ming, Budhathoki, Sujan, Allred, Jared M., Rosenberg, Richard A., Park, Dong‐Soo, Johnson, Scooter, and Hauser, Adam J. Substrate damage and incorporation of sapphire into barium hexaferrite films deposited by aerosol deposition. United States: N. p., 2019. Web. https://doi.org/10.1111/jace.16864.
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Ranjit, Smriti, Law, Ka Ming, Budhathoki, Sujan, Allred, Jared M., Rosenberg, Richard A., Park, Dong‐Soo, Johnson, Scooter, & Hauser, Adam J. Substrate damage and incorporation of sapphire into barium hexaferrite films deposited by aerosol deposition. United States. https://doi.org/10.1111/jace.16864
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Ranjit, Smriti, Law, Ka Ming, Budhathoki, Sujan, Allred, Jared M., Rosenberg, Richard A., Park, Dong‐Soo, Johnson, Scooter, and Hauser, Adam J. Sun . "Substrate damage and incorporation of sapphire into barium hexaferrite films deposited by aerosol deposition". United States. https://doi.org/10.1111/jace.16864. https://www.osti.gov/servlets/purl/1582015.
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@article{osti_1582015,
title = {Substrate damage and incorporation of sapphire into barium hexaferrite films deposited by aerosol deposition},
author = {Ranjit, Smriti and Law, Ka Ming and Budhathoki, Sujan and Allred, Jared M. and Rosenberg, Richard A. and Park, Dong‐Soo and Johnson, Scooter and Hauser, Adam J.},
abstractNote = {Barium Hexaferrite (BaM) grown on sapphire substrate by aerosol deposition is investigated in a subtractive wedge series to determine the extent of energetic substrate damage and indentation. Energy dispersive x-ray spectroscopy (EDS) mapping reveals Al2O3 particulates ejected from the substrate surface during growth. The concentration of particles is higher at the substrate-film interface but persists throughout the 6 mu m thick film. An estimate of the indentation depth (similar to 600 nm) was agreed upon using two EDS techniques (line scan analysis and substrate surface reconstruction by areal integration). X-ray diffraction patterns show peak polycrystalline Al2O3 intensity in 1.5 mu m thick wedges and a decrease at higher thicknesses, confirming that Al2O3 particulate density decreases further from the substrate. Here, magnetic characterization showed decreased magnetic moment compared to bulk and thickness dependence consistent with the fractional increase of Al2O3 content in the films. X-ray absorption at the Fe L3 edge suggests a reduction of material close to the surface, but this reduction appears secondary in magnitude to the effect of damage from deposition.},
doi = {10.1111/jace.16864},
journal = {Journal of the American Ceramic Society},
number = 3,
volume = 103,
place = {United States},
year = {2019},
month = {10}
}
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Journal Article:
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https://doi.org/10.1111/jace.16864
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Figures / Tables:

Figure 1 Figure 1: SEM and EDS analysis of BaM film on a-plane sapphire substrate a) cross-section SEM image showing aerosol deposited film on sapphire substrate, b) Element map of Ba, Fe, Al, O of the area selected on the SEM image, map shows uniform composition of the elements in the filmmore » including few traces of aluminum from the substrate, c)EDS line scan along the white line on the SEM micrograph showing the elements of the sample and Cu resulting from the Cu tape used to mount the sample, and d) Linescan in atomic% showing the concentration of Al mixed in the deposited film.« less
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