Measurement of sub-2 nm stable clusters during silane pyrolysis in a furnace aerosol reactor

Vazquez-Pufleau, Miguel; Wang, Yang; Biswas, Pratim; Thimsen, Elijah

doi:10.1063/1.5124996

Title: Measurement of sub-2 nm stable clusters during silane pyrolysis in a furnace aerosol reactor

Abstract

The initial stages of particle formation are important in several industrial and environmental systems; however, the phenomenon is not completely understood due to the inability to measure cluster size distributions. A high resolution differential mobility analyzer with an electrometer was used to map out the early stages of Si particle formation from pyrolysis of SiH4 in a furnace aerosol reactor. We detected for the first time subnanometer stable clusters from silane pyrolysis, and the diameter was measured to be about 0.7 nm. This diameter is within the range of probable sizes that the reported families of critical silane clusters could have based on their actual molecular structure. The size distributions of negative clusters are also mapped out. In addition, gas chromatography mass spectrometry, and transmission electron microscopy characterizations of the clusters and primary particles are used to assess their mechanistic roles in aerosol dynamics of the initial stages of particle formation.

Authors:

;

; Biswas, Pratim;

Publication Date:: Thu Jan 09 00:00:00 EST 2020

Sponsoring Org.:: USDOE

OSTI Identifier:: 1581842

Grant/Contract Number:: AC36-08GO28308

Resource Type:: Publisher's Accepted Manuscript

Journal Name:: Journal of Chemical Physics

Additional Journal Information:: Journal Name: Journal of Chemical Physics Journal Volume: 152 Journal Issue: 2; Journal ID: ISSN 0021-9606

Publisher:: American Institute of Physics

Country of Publication:: United States

Language:: English

Citation Formats


                    Vazquez-Pufleau, Miguel, Wang, Yang, Biswas, Pratim, and Thimsen, Elijah. Measurement of sub-2 nm stable clusters during silane pyrolysis in a furnace aerosol reactor.  United States: N. p., 2020. 
Web.  doi:10.1063/1.5124996.

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                    Vazquez-Pufleau, Miguel, Wang, Yang, Biswas, Pratim, & Thimsen, Elijah. Measurement of sub-2 nm stable clusters during silane pyrolysis in a furnace aerosol reactor.  United States.  https://doi.org/10.1063/1.5124996

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                    Vazquez-Pufleau, Miguel, Wang, Yang, Biswas, Pratim, and Thimsen, Elijah. Thu .  
"Measurement of sub-2 nm stable clusters during silane pyrolysis in a furnace aerosol reactor".  United States.  https://doi.org/10.1063/1.5124996.

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@article{osti_1581842,

  title        = {Measurement of sub-2 nm stable clusters during silane pyrolysis in a furnace aerosol reactor},

  author       = {Vazquez-Pufleau, Miguel and Wang, Yang and Biswas, Pratim and Thimsen, Elijah},

  abstractNote = {The initial stages of particle formation are important in several industrial and environmental systems; however, the phenomenon is not completely understood due to the inability to measure cluster size distributions. A high resolution differential mobility analyzer with an electrometer was used to map out the early stages of Si particle formation from pyrolysis of SiH4 in a furnace aerosol reactor. We detected for the first time subnanometer stable clusters from silane pyrolysis, and the diameter was measured to be about 0.7 nm. This diameter is within the range of probable sizes that the reported families of critical silane clusters could have based on their actual molecular structure. The size distributions of negative clusters are also mapped out. In addition, gas chromatography mass spectrometry, and transmission electron microscopy characterizations of the clusters and primary particles are used to assess their mechanistic roles in aerosol dynamics of the initial stages of particle formation.},

  doi          = {10.1063/1.5124996},

  journal      = {Journal of Chemical Physics},

  number       = 2,

  volume       = 152,

  place        = {United States},

  year         = {Thu Jan 09 00:00:00 EST 2020},

  month        = {Thu Jan 09 00:00:00 EST 2020}

}

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Title: Measurement of sub-2 nm stable clusters during silane pyrolysis in a furnace aerosol reactor

Abstract

Citation Formats

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Synthesis of magnetic thermosensitive microcontainers for enzyme immobilization journal, May 2015

Homogeneous gas-phase nucleation in silane pyrolysis journal, January 1994

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Silicon deposition from silane or disilane in a fluidized bed—Part II: Theoretical analysis and modeling journal, November 1995

Application of Half Mini DMA for sub 2nm particle size distribution measurement in an electrospray and a flame aerosol reactor journal, May 2014

The Mobility–Volume Relationship below 3.0 nm Examined by Tandem Mobility–Mass Measurement journal, March 2011

Hand-held differential mobility analyzers of high resolution for 1–30nm particles: Design and fabrication considerations journal, March 2013

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A Mathematical Model of the Hydrodynamics and Gas-Phase Reactions in Silicon LPCVD in a Single-Wafer Reactor journal, January 1991

The high charge fraction of flame-generated particles in the size range below 3 nm measured by enhanced particle detectors journal, February 2017

Thermal Decomposition Mechanism of Disilane journal, April 2006

Thermochemistry and Kinetics of Silicon Hydride Cluster Formation during Thermal Decomposition of Silane journal, January 1999

Gas-phase nucleation during the thermal decomposition of silane in hydrogen journal, April 1976

Characterisation of corona-generated ions used in a Neutral cluster and Air Ion Spectrometer (NAIS)
journal, January 2011

Aerosol dynamics modeling of silicon nanoparticle formation during silane pyrolysis: a comparison of three solution methods
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An experimental and numerical study of particle nucleation and growth during low-pressure thermal decomposition of silane
journal, June 2003

Heterogeneous Decomposition of Silane in a Fixed Bed Reactor
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A numerical investigation of the effects of gas-phase particle formation on silicon film deposition from silane
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Thermal decomposition kinetics of polysilanes: Disilane, trisilane, and tetrasilane
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Measurement of Sub-2 nm Clusters of Pristine and Composite Metal Oxides during Nanomaterial Synthesis in Flame Aerosol Reactors
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Charge-Induced Unfolding of Multiply Charged Polyethylene Glycol Ions
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The effect of nanoparticle morphology in the filtration efficiency and saturation of a silicon beads fluidized bed
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Observation of incipient particle formation during flame synthesis by tandem differential mobility analysis-mass spectrometry (DMA-MS)
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The mass–mobility distributions of ions produced by a Po-210 source in air
journal, December 2015

Heterogeneous Nucleation Experiments Bridging the Scale from Molecular Ion Clusters to Nanoparticles
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Relative kinetics of nucleation and condensation of silane pyrolysis in a helium atmosphere provide mechanistic insight in the initial stages of particle formation and growth
journal, January 2020

On the pathways of aerosol formation by thermal decomposition of silane
journal, March 1997

Detailed Kinetic Modeling of Silicon Nanoparticle Formation Chemistry via Automated Mechanism Generation
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Numerical Modeling of Gas-Phase Nucleation and Particle Growth during Chemical Vapor Deposition of Silicon
journal, January 2000

Determination of gas phase protein ion densities via ion mobility analysis with charge reduction
journal, January 2011

The effect of carrier gas contaminants on the charging probability of aerosols under bipolar charging conditions
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Gas‐phase kinetics in the atmospheric pressure chemical vapor deposition of silicon from silane and disilane
journal, January 1990

Mechanism of the thermally induced gas-phase decomposition of silane: a revisitation
journal, December 1992

Development of fluidized bed reactors for silicon production
journal, December 2010

Aerosol classification by electric mobility: apparatus, theory, and applications
journal, November 1975

Silicon deposition from silane or disilane in a fluidized bed—Part I: Experimental study
journal, November 1995

Synthesis of magnetic thermosensitive microcontainers for enzyme immobilization
journal, May 2015

Homogeneous gas-phase nucleation in silane pyrolysis
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High-Resolution Mobility and Mass Spectrometry of Negative Ions Produced in a 241 Am Aerosol Charger
journal, December 2013

Silicon deposition from silane or disilane in a fluidized bed—Part II: Theoretical analysis and modeling
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Application of Half Mini DMA for sub 2nm particle size distribution measurement in an electrospray and a flame aerosol reactor
journal, May 2014

The Mobility–Volume Relationship below 3.0 nm Examined by Tandem Mobility–Mass Measurement
journal, March 2011

Hand-held differential mobility analyzers of high resolution for 1–30nm particles: Design and fabrication considerations
journal, March 2013

Relation between Electrical Mobility, Mass, and Size for Nanodrops 1–6.5 nm in Diameter in Air
journal, February 2009

Equations Governing Single and Tandem DMA Configurations and a New Lognormal Approximation to the Transfer Function
journal, April 2008

Tandem DMA Generation of Strictly Monomobile 1–3.5 nm Particle Standards
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A Mathematical Model of the Hydrodynamics and Gas-Phase Reactions in Silicon LPCVD in a Single-Wafer Reactor
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The high charge fraction of flame-generated particles in the size range below 3 nm measured by enhanced particle detectors
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Thermal Decomposition Mechanism of Disilane
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Thermochemistry and Kinetics of Silicon Hydride Cluster Formation during Thermal Decomposition of Silane
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