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Title: Estimation of Line Cross Sections Using Critical-Dimension Grazing-Incidence Small-Angle X-Ray Scattering

Abstract

Currently, the semiconductor industry is continuously pushing the limits of photolithography, with feature sizes now smaller than 10 nm. To ensure quality, it has become necessary to look beyond the conventional metrological techniques. X-ray scattering has emerged as a possible contender to determine the average shape of a line grating with subnanometer precision. Yet, to fulfill its promise, faster algorithms must also be developed to interpret and extract metrics from reciprocal-space scattering data. In this paper, we present a fast and accurate x-ray technique and analysis algorithm: critical-dimension grazing-incidence small-angle x-ray scattering (CD GISAXS). The CD GISAXS technique is used in grazing-incidence configuration with a continuous azimuthal rotation of the sample, and thus does not require high-energy x-rays to penetrate the wafer and greatly reduces the data-acquisition times, permitting analysis within the framework of the distorted-wave Born approximation.

Authors:
 [1];  [2];  [2];  [2];  [2];  [2];  [2];  [3];  [2]
+ Show Author Affiliations
  1. Brookhaven National Lab. (BNL), Upton, NY (United States)
  2. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
  3. Argonne National Lab. (ANL), Lemont, IL (United States)
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States); Argonne National Lab. (ANL), Argonne, IL (United States); Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities Division
OSTI Identifier:
1580408
Alternate Identifier(s):
OSTI ID: 1570442; OSTI ID: 1668644
Report Number(s):
BNL-219868-2020-JAAM
Journal ID: ISSN 2331-7019; PRAHB2; ark:/13030/qt6ks0c95w; TRN: US2102192
Grant/Contract Number:  
AC02-06CH11357; AC02-98CH10886; SC0012704; AC02-76SF00515; AC02-05CH11231
Resource Type:
Accepted Manuscript
Journal Name:
Physical Review Applied
Additional Journal Information:
Journal Volume: 12; Journal Issue: 4; Journal ID: ISSN 2331-7019
Publisher:
American Physical Society (APS)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 36 MATERIALS SCIENCE

Citation Formats

Freychet, Guillaume, Kumar, Dinesh, Pandolfi, Ron J., Naulleau, Patrick, Cordova, Isvar, Ercius, Peter, Song, Chengyu, Strzalka, Joseph, and Hexemer, Alexander. Estimation of Line Cross Sections Using Critical-Dimension Grazing-Incidence Small-Angle X-Ray Scattering. United States: N. p., 2019. Web. doi:10.1103/physrevapplied.12.044026.
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Freychet, Guillaume, Kumar, Dinesh, Pandolfi, Ron J., Naulleau, Patrick, Cordova, Isvar, Ercius, Peter, Song, Chengyu, Strzalka, Joseph, & Hexemer, Alexander. Estimation of Line Cross Sections Using Critical-Dimension Grazing-Incidence Small-Angle X-Ray Scattering. United States. https://doi.org/10.1103/physrevapplied.12.044026
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Freychet, Guillaume, Kumar, Dinesh, Pandolfi, Ron J., Naulleau, Patrick, Cordova, Isvar, Ercius, Peter, Song, Chengyu, Strzalka, Joseph, and Hexemer, Alexander. Fri . "Estimation of Line Cross Sections Using Critical-Dimension Grazing-Incidence Small-Angle X-Ray Scattering". United States. https://doi.org/10.1103/physrevapplied.12.044026. https://www.osti.gov/servlets/purl/1580408.
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@article{osti_1580408,
title = {Estimation of Line Cross Sections Using Critical-Dimension Grazing-Incidence Small-Angle X-Ray Scattering},
author = {Freychet, Guillaume and Kumar, Dinesh and Pandolfi, Ron J. and Naulleau, Patrick and Cordova, Isvar and Ercius, Peter and Song, Chengyu and Strzalka, Joseph and Hexemer, Alexander},
abstractNote = {Currently, the semiconductor industry is continuously pushing the limits of photolithography, with feature sizes now smaller than 10 nm. To ensure quality, it has become necessary to look beyond the conventional metrological techniques. X-ray scattering has emerged as a possible contender to determine the average shape of a line grating with subnanometer precision. Yet, to fulfill its promise, faster algorithms must also be developed to interpret and extract metrics from reciprocal-space scattering data. In this paper, we present a fast and accurate x-ray technique and analysis algorithm: critical-dimension grazing-incidence small-angle x-ray scattering (CD GISAXS). The CD GISAXS technique is used in grazing-incidence configuration with a continuous azimuthal rotation of the sample, and thus does not require high-energy x-rays to penetrate the wafer and greatly reduces the data-acquisition times, permitting analysis within the framework of the distorted-wave Born approximation.},
doi = {10.1103/physrevapplied.12.044026},
journal = {Physical Review Applied},
number = 4,
volume = 12,
place = {United States},
year = {2019},
month = {10}
}
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Journal Article:
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Publisher's Version of Record
https://doi.org/10.1103/physrevapplied.12.044026
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Figures / Tables:

FIG. 1 FIG. 1: Grazing-incidence small angle X-ray scattering with the beam along x-axis and the sample rotation along z-axis.
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Works referenced in this record:

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    Figures / Tables found in this record:

    FIG. 1 (p. 5)figure
    FIG. 2: (p. 7)figure
    FIG. 3 (p. 9)figure
    FIG. 4 (p. 11)figure
    TABLE I (p. 12)table
    FIG. 5 (p. 13)figure
    FIG. 6 (p. 14)figure
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