The impact of nano-bubbles on the laser performance of hafnia films deposited by oxygen assisted ion beam sputtering method
Abstract
Hafnia is a high refractive index material used in the manufacturing of dielectric coatings for next generation lasers. The formation of defects during deposition is the major barrier to realizing high laser-damage resistant coatings for future high energy density laser applications. Understanding the precursors responsible for laser-induced damage in hafnia is therefore critical. In this work, we investigate the mechanism of laser-induced damage in 90-nm thick hafnia films produced by an oxygen assisted dual ion beam sputtering (IBS) process. Under pulsed, nanosecond ultraviolet laser exposure (355 nm, 8 ns), the laser-induced damage onset is found to be strongly dependent on the amount of argon and excessive oxygen entrapped in the nanobubbles within the hafnia films. The presence of nanobubbles is revealed and confirmed by small angle X-ray scattering and scanning/transmission electron microscopy coupled with high-angle annular dark-field. The damage onset is stable initially but decreases as the energy of oxygen goes beyond 100 eV. The damage initiation is ascribed to a laser-induced plasma generation within the nanobubbles through multiphoton ionization. The results reveal that nanobubbles formed in the IBS produced coatings are a potent precursor. Although nanobubbles are commonly present in IBS films, their negative impact on laser damage resistancemore »
- Authors:
-
[1];
[1];
[1];
[1];
[2]
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- SUNY Polytechnic Inst., Albany, NY (United States)
- Publication Date:
- Research Org.:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA); USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities Division
- OSTI Identifier:
- 1580320
- Alternate Identifier(s):
- OSTI ID: 1580137
- Report Number(s):
- LLNL-JRNL-789441
Journal ID: ISSN 0003-6951; 987407; TRN: US2102684
- Grant/Contract Number:
- AC52-07NA27344; AC02-06CH11357
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Applied Physics Letters
- Additional Journal Information:
- Journal Volume: 115; Journal Issue: 25; Journal ID: ISSN 0003-6951
- Publisher:
- American Institute of Physics (AIP)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Harthcock, C., Qiu, S. R., Negres, R. A., Hammons, J. A., Voisin, T., Guss, G., Martin, A. A., Stolz, C. J., Menor, M. G., Bhowmik, G., and Huang, M. The impact of nano-bubbles on the laser performance of hafnia films deposited by oxygen assisted ion beam sputtering method. United States: N. p., 2019.
Web. doi:10.1063/1.5129454.
Harthcock, C., Qiu, S. R., Negres, R. A., Hammons, J. A., Voisin, T., Guss, G., Martin, A. A., Stolz, C. J., Menor, M. G., Bhowmik, G., & Huang, M. The impact of nano-bubbles on the laser performance of hafnia films deposited by oxygen assisted ion beam sputtering method. United States. https://doi.org/10.1063/1.5129454
Harthcock, C., Qiu, S. R., Negres, R. A., Hammons, J. A., Voisin, T., Guss, G., Martin, A. A., Stolz, C. J., Menor, M. G., Bhowmik, G., and Huang, M. Mon .
"The impact of nano-bubbles on the laser performance of hafnia films deposited by oxygen assisted ion beam sputtering method". United States. https://doi.org/10.1063/1.5129454. https://www.osti.gov/servlets/purl/1580320.
@article{osti_1580320,
title = {The impact of nano-bubbles on the laser performance of hafnia films deposited by oxygen assisted ion beam sputtering method},
author = {Harthcock, C. and Qiu, S. R. and Negres, R. A. and Hammons, J. A. and Voisin, T. and Guss, G. and Martin, A. A. and Stolz, C. J. and Menor, M. G. and Bhowmik, G. and Huang, M.},
abstractNote = {Hafnia is a high refractive index material used in the manufacturing of dielectric coatings for next generation lasers. The formation of defects during deposition is the major barrier to realizing high laser-damage resistant coatings for future high energy density laser applications. Understanding the precursors responsible for laser-induced damage in hafnia is therefore critical. In this work, we investigate the mechanism of laser-induced damage in 90-nm thick hafnia films produced by an oxygen assisted dual ion beam sputtering (IBS) process. Under pulsed, nanosecond ultraviolet laser exposure (355 nm, 8 ns), the laser-induced damage onset is found to be strongly dependent on the amount of argon and excessive oxygen entrapped in the nanobubbles within the hafnia films. The presence of nanobubbles is revealed and confirmed by small angle X-ray scattering and scanning/transmission electron microscopy coupled with high-angle annular dark-field. The damage onset is stable initially but decreases as the energy of oxygen goes beyond 100 eV. The damage initiation is ascribed to a laser-induced plasma generation within the nanobubbles through multiphoton ionization. The results reveal that nanobubbles formed in the IBS produced coatings are a potent precursor. Although nanobubbles are commonly present in IBS films, their negative impact on laser damage resistance of hafnia films has not been previously recognized. Furthermore, our findings provide a fundamental basis for the development of potential mitigation strategies required for the realization of laser damage resistant hafnia films.},
doi = {10.1063/1.5129454},
journal = {Applied Physics Letters},
number = 25,
volume = 115,
place = {United States},
year = {2019},
month = {12}
}
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Works referenced in this record:
Novel AMP surface treatment for improving optical fiber strength and laser gain (Conference Presentation)
conference, January 2019
- VanBlarcom, Diana; Drachenberg, Derrek R.; Monticelli, Marcus V.
- Laser-Induced Damage in Optical Materials 2018: 50th Anniversary Conference
Laser-induced breakdown of gases
journal, May 1975
- Morgan, C. G.
- Reports on Progress in Physics, Vol. 38, Issue 5
Near-ultraviolet absorption and nanosecond-pulse-laser damage in HfO 2 monolayers studied by submicrometer-resolution photothermal heterodyne imaging and atomic force microscopy
journal, June 2011
- Papernov, S.; Tait, A.; Bittle, W.
- Journal of Applied Physics, Vol. 109, Issue 11
Non-destructive characterisation of porous low-k dielectric films
journal, October 2002
- Baklanov, M. R.; Mogilnikov, K. P.
- Microelectronic Engineering, Vol. 64, Issue 1-4
Influence of longitudinal mode beating on laser-induced damage in fused silica
journal, January 2014
- Diaz, R.; Chambonneau, M.; Courchinoux, R.
- Optics Letters, Vol. 39, Issue 3
Investigation of the electronic and physical properties of defect structures responsible for laser-induced damage in DKDP crystals
journal, January 2010
- Demos, Stavros G.; DeMange, Paul; Negres, Raluca A.
- Optics Express, Vol. 18, Issue 13
Control of extended high-voltage electric discharges in atmospheric air by UV KrF-laser radiation
journal, March 2011
- Zvorykin, V. D.; Levchenko, A. O.; Ustinovskii, N. N.
- Quantum Electronics, Vol. 41, Issue 3
Wavelength Dependence of Laser-Induced Damage: Determining the Damage Initiation Mechanisms
journal, September 2003
- Carr, C. W.; Radousky, H. B.; Demos, S. G.
- Physical Review Letters, Vol. 91, Issue 12
Charged species profiles in oxygen plasma
journal, August 2000
- Berezhnoj, S. V.; Shin, C. B.; Buddemeier, U.
- Applied Physics Letters, Vol. 77, Issue 6
Frequency Dependence of Optically Induced GAS Breakdown
journal, November 1965
- Buscher, Harold T.; Tomlinson, Richard G.; Damon, Edward K.
- Physical Review Letters, Vol. 15, Issue 22
Laser-induced damage of nodular defects in dielectric multilayer coatings
journal, December 2018
- Zhang, Jinlong; Jiao, Hongfei; Ma, Bin
- Optical Engineering, Vol. 57, Issue 12
In situ controlled modification of the helium density in single helium-filled nanobubbles
journal, March 2014
- David, M. -L.; Alix, K.; Pailloux, F.
- Journal of Applied Physics, Vol. 115, Issue 12
Laser damage resistance of hafnia thin films deposited by electron beam deposition, reactive low voltage ion plating, and dual ion beam sputtering
journal, November 2007
- Gallais, Laurent; Capoulade, Jérémie; Natoli, Jean-Yves
- Applied Optics, Vol. 47, Issue 13
Laser plasma-induced damage characteristics of Ta 2 O 5 films
journal, January 2019
- Chen, Hongyuan; Feng, Guoying; Fan, Weixing
- Optical Materials Express, Vol. 9, Issue 7
Optical properties of oxygen vacancies in HfO 2 thin films studied by absorption and luminescence spectroscopy
journal, January 2018
- Papernov, S.; Brunsman, M. D.; Oliver, J. B.
- Optics Express, Vol. 26, Issue 13
Oxygen defect induced photoluminescence of HfO2 thin films
journal, July 2008
- Ni, Jie; Zhou, Qin; Li, Zhengcao
- Applied Physics Letters, Vol. 93, Issue 1
Threshold characteristics of ultraviolet and near infrared nanosecond laser induced plasmas
journal, September 2016
- Dumitrache, Ciprian; Limbach, Christopher M.; Yalin, Azer P.
- Physics of Plasmas, Vol. 23, Issue 9
Research on the laser damage performance of high reflection coatings at 355 nm
conference, July 2013
- Zhu, Meiping; Shao, Jianda; Yi, Kui
- SPIE/SIOM Pacific Rim Laser Damage: Optical Materials for High-Power Lasers, SPIE Proceedings
Laser induced breakdown of Ar, N2 and O2 gases using 1.064, 0.532, 0.355 and 0.266 μm radiation
journal, December 1996
- Sircar, Amit; Dwivedi, Rajesh K.; Thareja, R. K.
- Applied Physics B Laser and Optics, Vol. 63, Issue 6
Ion beam sputtering of Ag – Angular and energetic distributions of sputtered and scattered particles
journal, December 2013
- Feder, René; Bundesmann, Carsten; Neumann, Horst
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 316
Wavelength dependence of the mechanisms governing the formation of nanosecond laser-induced damage in fused silica
journal, January 2018
- Chambonneau, Maxime; Rullier, Jean-Luc; Grua, Pierre
- Optics Express, Vol. 26, Issue 17
Improving laser damage resistance of 355 nm high-reflective coatings by co-evaporated interfaces
journal, January 2016
- Xing, Huanbin; Zhu, Meiping; Chai, Yingjie
- Optics Letters, Vol. 41, Issue 6
High dielectric constant oxides
journal, December 2004
- Robertson, J.
- The European Physical Journal Applied Physics, Vol. 28, Issue 3, p. 265-291
Real-time atomistic observation of structural phase transformations in individual hafnia nanorods
journal, May 2017
- Hudak, Bethany M.; Depner, Sean W.; Waetzig, Gregory R.
- Nature Communications, Vol. 8, Issue 1
Argon solubility and diffusion in silica glass: Implications for the solution behavior of molecular gases
journal, January 1991
- Carroll, M. R.; Stolper, E. M.
- Geochimica et Cosmochimica Acta, Vol. 55, Issue 1
Searching for optimal mitigation geometries for laser-resistant multilayer high-reflector coatings
journal, January 2011
- Qiu, S. Roger; Wolfe, Justin E.; Monterrosa, Anthony M.
- Applied Optics, Vol. 50, Issue 9
Synthesis of tin oxide films by dual ion beam sputtering using Sn target and oxygen ion beam
journal, February 1999
- Choe, Yong-Sahm; Chung, Jae-Ho; Kim, Dae-Seung
- Surface and Coatings Technology, Vol. 112, Issue 1-3
Effects of structural defects on laser-induced damage of 355-nm high-reflective coatings sputtered on etched substrates
journal, March 2019
- Guo, Kesheng; Wang, Yanzhi; Chen, Ruiyi
- Optical Materials, Vol. 89
HfO2 films with high laser damage threshold
journal, January 2000
- Alvisi, M.; Di Giulio, M.; Marrone, S. G.
- Thin Solid Films, Vol. 358, Issue 1-2
Structural and optical modification in hafnium oxide thin films related to the momentum parameter transferred by ion beam assistance
journal, October 1999
- Alvisi, M.; Scaglione, S.; Martelli, S.
- Thin Solid Films, Vol. 354, Issue 1-2