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Title: The impact of nano-bubbles on the laser performance of hafnia films deposited by oxygen assisted ion beam sputtering method

Abstract

Hafnia is a high refractive index material used in the manufacturing of dielectric coatings for next generation lasers. The formation of defects during deposition is the major barrier to realizing high laser-damage resistant coatings for future high energy density laser applications. Understanding the precursors responsible for laser-induced damage in hafnia is therefore critical. In this work, we investigate the mechanism of laser-induced damage in 90-nm thick hafnia films produced by an oxygen assisted dual ion beam sputtering (IBS) process. Under pulsed, nanosecond ultraviolet laser exposure (355 nm, 8 ns), the laser-induced damage onset is found to be strongly dependent on the amount of argon and excessive oxygen entrapped in the nanobubbles within the hafnia films. The presence of nanobubbles is revealed and confirmed by small angle X-ray scattering and scanning/transmission electron microscopy coupled with high-angle annular dark-field. The damage onset is stable initially but decreases as the energy of oxygen goes beyond 100 eV. The damage initiation is ascribed to a laser-induced plasma generation within the nanobubbles through multiphoton ionization. The results reveal that nanobubbles formed in the IBS produced coatings are a potent precursor. Although nanobubbles are commonly present in IBS films, their negative impact on laser damage resistancemore » of hafnia films has not been previously recognized. Furthermore, our findings provide a fundamental basis for the development of potential mitigation strategies required for the realization of laser damage resistant hafnia films.« less

Authors:
 [1]; ORCiD logo [1]; ORCiD logo [1]; ORCiD logo [1];  [1];  [1]; ORCiD logo [1];  [1];  [1];  [2]; ORCiD logo [2]
+ Show Author Affiliations
  1. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
  2. SUNY Polytechnic Inst., Albany, NY (United States)
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA); USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities Division
OSTI Identifier:
1580320
Alternate Identifier(s):
OSTI ID: 1580137
Report Number(s):
LLNL-JRNL-789441
Journal ID: ISSN 0003-6951; 987407
Grant/Contract Number:  
AC52-07NA27344; AC02-06CH11357
Resource Type:
Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 115; Journal Issue: 25; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Harthcock, C., Qiu, S. R., Negres, R. A., Hammons, J. A., Voisin, T., Guss, G., Martin, A. A., Stolz, C. J., Menor, M. G., Bhowmik, G., and Huang, M. The impact of nano-bubbles on the laser performance of hafnia films deposited by oxygen assisted ion beam sputtering method. United States: N. p., 2019. Web. doi:10.1063/1.5129454.
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Harthcock, C., Qiu, S. R., Negres, R. A., Hammons, J. A., Voisin, T., Guss, G., Martin, A. A., Stolz, C. J., Menor, M. G., Bhowmik, G., & Huang, M. The impact of nano-bubbles on the laser performance of hafnia films deposited by oxygen assisted ion beam sputtering method. United States. doi:10.1063/1.5129454.
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Harthcock, C., Qiu, S. R., Negres, R. A., Hammons, J. A., Voisin, T., Guss, G., Martin, A. A., Stolz, C. J., Menor, M. G., Bhowmik, G., and Huang, M. Mon . "The impact of nano-bubbles on the laser performance of hafnia films deposited by oxygen assisted ion beam sputtering method". United States. doi:10.1063/1.5129454. https://www.osti.gov/servlets/purl/1580320.
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@article{osti_1580320,
title = {The impact of nano-bubbles on the laser performance of hafnia films deposited by oxygen assisted ion beam sputtering method},
author = {Harthcock, C. and Qiu, S. R. and Negres, R. A. and Hammons, J. A. and Voisin, T. and Guss, G. and Martin, A. A. and Stolz, C. J. and Menor, M. G. and Bhowmik, G. and Huang, M.},
abstractNote = {Hafnia is a high refractive index material used in the manufacturing of dielectric coatings for next generation lasers. The formation of defects during deposition is the major barrier to realizing high laser-damage resistant coatings for future high energy density laser applications. Understanding the precursors responsible for laser-induced damage in hafnia is therefore critical. In this work, we investigate the mechanism of laser-induced damage in 90-nm thick hafnia films produced by an oxygen assisted dual ion beam sputtering (IBS) process. Under pulsed, nanosecond ultraviolet laser exposure (355 nm, 8 ns), the laser-induced damage onset is found to be strongly dependent on the amount of argon and excessive oxygen entrapped in the nanobubbles within the hafnia films. The presence of nanobubbles is revealed and confirmed by small angle X-ray scattering and scanning/transmission electron microscopy coupled with high-angle annular dark-field. The damage onset is stable initially but decreases as the energy of oxygen goes beyond 100 eV. The damage initiation is ascribed to a laser-induced plasma generation within the nanobubbles through multiphoton ionization. The results reveal that nanobubbles formed in the IBS produced coatings are a potent precursor. Although nanobubbles are commonly present in IBS films, their negative impact on laser damage resistance of hafnia films has not been previously recognized. Furthermore, our findings provide a fundamental basis for the development of potential mitigation strategies required for the realization of laser damage resistant hafnia films.},
doi = {10.1063/1.5129454},
journal = {Applied Physics Letters},
number = 25,
volume = 115,
place = {United States},
year = {2019},
month = {12}
}
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DOI:  10.1063/1.5129454
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Works referenced in this record:

Novel AMP surface treatment for improving optical fiber strength and laser gain (Conference Presentation)
conference, January 2019

  • VanBlarcom, Diana; Drachenberg, Derrek R.; Monticelli, Marcus V.
  • Laser-Induced Damage in Optical Materials 2018: 50th Anniversary Conference
  • DOI: 10.1117/12.2501563

Laser-induced breakdown of gases
journal, May 1975

Non-destructive characterisation of porous low-k dielectric films
journal, October 2002

Influence of longitudinal mode beating on laser-induced damage in fused silica
journal, January 2014

  • Diaz, R.; Chambonneau, M.; Courchinoux, R.
  • Optics Letters, Vol. 39, Issue 3
  • DOI: 10.1364/OL.39.000674

Investigation of the electronic and physical properties of defect structures responsible for laser-induced damage in DKDP crystals
journal, January 2010

  • Demos, Stavros G.; DeMange, Paul; Negres, Raluca A.
  • Optics Express, Vol. 18, Issue 13
  • DOI: 10.1364/OE.18.013788

Control of extended high-voltage electric discharges in atmospheric air by UV KrF-laser radiation
journal, March 2011

Wavelength Dependence of Laser-Induced Damage: Determining the Damage Initiation Mechanisms
journal, September 2003

Charged species profiles in oxygen plasma
journal, August 2000

  • Berezhnoj, S. V.; Shin, C. B.; Buddemeier, U.
  • Applied Physics Letters, Vol. 77, Issue 6
  • DOI: 10.1063/1.1306637

Frequency Dependence of Optically Induced GAS Breakdown
journal, November 1965

  • Buscher, Harold T.; Tomlinson, Richard G.; Damon, Edward K.
  • Physical Review Letters, Vol. 15, Issue 22
  • DOI: 10.1103/PhysRevLett.15.847

Laser-induced damage of nodular defects in dielectric multilayer coatings
journal, December 2018

In situ controlled modification of the helium density in single helium-filled nanobubbles
journal, March 2014

  • David, M. -L.; Alix, K.; Pailloux, F.
  • Journal of Applied Physics, Vol. 115, Issue 12
  • DOI: 10.1063/1.4869213

Laser damage resistance of hafnia thin films deposited by electron beam deposition, reactive low voltage ion plating, and dual ion beam sputtering
journal, November 2007

  • Gallais, Laurent; Capoulade, Jérémie; Natoli, Jean-Yves
  • Applied Optics, Vol. 47, Issue 13
  • DOI: 10.1364/AO.47.00C107

Laser plasma-induced damage characteristics of Ta 2 O 5 films
journal, January 2019

  • Chen, Hongyuan; Feng, Guoying; Fan, Weixing
  • Optical Materials Express, Vol. 9, Issue 7
  • DOI: 10.1364/OME.9.003132

Optical properties of oxygen vacancies in HfO 2 thin films studied by absorption and luminescence spectroscopy
journal, January 2018

  • Papernov, S.; Brunsman, M. D.; Oliver, J. B.
  • Optics Express, Vol. 26, Issue 13
  • DOI: 10.1364/OE.26.017608

Oxygen defect induced photoluminescence of HfO2 thin films
journal, July 2008

  • Ni, Jie; Zhou, Qin; Li, Zhengcao
  • Applied Physics Letters, Vol. 93, Issue 1
  • DOI: 10.1063/1.2952288

Threshold characteristics of ultraviolet and near infrared nanosecond laser induced plasmas
journal, September 2016

  • Dumitrache, Ciprian; Limbach, Christopher M.; Yalin, Azer P.
  • Physics of Plasmas, Vol. 23, Issue 9
  • DOI: 10.1063/1.4963248

Research on the laser damage performance of high reflection coatings at 355 nm
conference, July 2013

  • Zhu, Meiping; Shao, Jianda; Yi, Kui
  • SPIE/SIOM Pacific Rim Laser Damage: Optical Materials for High-Power Lasers, SPIE Proceedings
  • DOI: 10.1117/12.2020859

Laser induced breakdown of Ar, N2 and O2 gases using 1.064, 0.532, 0.355 and 0.266 μm radiation
journal, December 1996

  • Sircar, Amit; Dwivedi, Rajesh K.; Thareja, R. K.
  • Applied Physics B Laser and Optics, Vol. 63, Issue 6
  • DOI: 10.1007/BF01831003

Ion beam sputtering of Ag – Angular and energetic distributions of sputtered and scattered particles
journal, December 2013

  • Feder, René; Bundesmann, Carsten; Neumann, Horst
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 316
  • DOI: 10.1016/j.nimb.2013.09.007

Wavelength dependence of the mechanisms governing the formation of nanosecond laser-induced damage in fused silica
journal, January 2018

  • Chambonneau, Maxime; Rullier, Jean-Luc; Grua, Pierre
  • Optics Express, Vol. 26, Issue 17
  • DOI: 10.1364/OE.26.021819

Improving laser damage resistance of 355  nm high-reflective coatings by co-evaporated interfaces
journal, January 2016

  • Xing, Huanbin; Zhu, Meiping; Chai, Yingjie
  • Optics Letters, Vol. 41, Issue 6
  • DOI: 10.1364/OL.41.001253

High dielectric constant oxides
journal, December 2004

  • Robertson, J.
  • The European Physical Journal Applied Physics, Vol. 28, Issue 3, p. 265-291
  • DOI: 10.1051/epjap:2004206

Real-time atomistic observation of structural phase transformations in individual hafnia nanorods
journal, May 2017

  • Hudak, Bethany M.; Depner, Sean W.; Waetzig, Gregory R.
  • Nature Communications, Vol. 8, Issue 1
  • DOI: 10.1038/ncomms15316

Argon solubility and diffusion in silica glass: Implications for the solution behavior of molecular gases
journal, January 1991

Searching for optimal mitigation geometries for laser-resistant multilayer high-reflector coatings
journal, January 2011

  • Qiu, S. Roger; Wolfe, Justin E.; Monterrosa, Anthony M.
  • Applied Optics, Vol. 50, Issue 9
  • DOI: 10.1364/AO.50.00C373

Synthesis of tin oxide films by dual ion beam sputtering using Sn target and oxygen ion beam
journal, February 1999

HfO2 films with high laser damage threshold
journal, January 2000

Structural and optical modification in hafnium oxide thin films related to the momentum parameter transferred by ion beam assistance
journal, October 1999

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