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Title: The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective

Abstract

Sequential infiltration synthesis (SIS) is an emerging materials growth method by which inorganic metal oxides are nucleated and grown within the free volume of polymers in association with chemical functional groups in the polymer. SIS enables the growth of novel polymer-inorganic hybrid materials, porous inorganic materials, and spatially templated nanoscale devices of relevance to a host of technological applications. Although SIS borrows from the precursors and equipment of atomic layer deposition (ALD), the chemistry and physics of SIS differ in important ways. These differences arise from the permeable three-dimensional distribution of functional groups in polymers in SIS, which contrast to the typically impermeable two-dimensional distribution of active sites on solid surfaces in ALD. In SIS, metal-organic vapor-phase precursors dissolve and diffuse into polymers and interact with these functional groups through reversible complex formation and/or irreversible chemical reactions. In this perspective, we describe the thermodynamics and kinetics of SIS and attempt to disentangle the tightly coupled physical and chemical processes that underlie this method. Here, we discuss the various experimental, computational, and theoretical efforts that provide insight into SIS mechanisms and identify approaches that may fill out current gaps in knowledge and expand the utilization of SIS.

Authors:
ORCiD logo [1]; ORCiD logo [2]; ORCiD logo [2]; ORCiD logo [3]; ORCiD logo [3]; ORCiD logo [1]
  1. Univ. of Chicago, IL (United States); Argonne National Lab. (ANL), Lemont, IL (United States); Energy Frontier Research Center (EFRC), Lemont, IL (United States)
  2. Argonne National Lab. (ANL), Lemont, IL (United States)
  3. Energy Frontier Research Center (EFRC), Lemont, IL (United States); Argonne National Lab. (ANL), Lemont, IL (United States)
Publication Date:
Research Org.:
Energy Frontier Research Centers (EFRC) (United States). Advanced Materials for Energy-Water Systems (AMEWS); Argonne National Laboratory (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities Division
OSTI Identifier:
1592570
Alternate Identifier(s):
OSTI ID: 1574546
Grant/Contract Number:  
AC02-06CH11357
Resource Type:
Accepted Manuscript
Journal Name:
Journal of Chemical Physics
Additional Journal Information:
Journal Volume: 151; Journal Issue: 19; Journal ID: ISSN 0021-9606
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY

Citation Formats

Waldman, Ruben Z., Mandia, David J., Yanguas-Gil, Angel, Martinson, Alex B. F., Elam, Jeffrey W., and Darling, Seth B. The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective. United States: N. p., 2019. Web. doi:10.1063/1.5128108.
Waldman, Ruben Z., Mandia, David J., Yanguas-Gil, Angel, Martinson, Alex B. F., Elam, Jeffrey W., & Darling, Seth B. The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective. United States. https://doi.org/10.1063/1.5128108
Waldman, Ruben Z., Mandia, David J., Yanguas-Gil, Angel, Martinson, Alex B. F., Elam, Jeffrey W., and Darling, Seth B. Tue . "The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective". United States. https://doi.org/10.1063/1.5128108. https://www.osti.gov/servlets/purl/1592570.
@article{osti_1592570,
title = {The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective},
author = {Waldman, Ruben Z. and Mandia, David J. and Yanguas-Gil, Angel and Martinson, Alex B. F. and Elam, Jeffrey W. and Darling, Seth B.},
abstractNote = {Sequential infiltration synthesis (SIS) is an emerging materials growth method by which inorganic metal oxides are nucleated and grown within the free volume of polymers in association with chemical functional groups in the polymer. SIS enables the growth of novel polymer-inorganic hybrid materials, porous inorganic materials, and spatially templated nanoscale devices of relevance to a host of technological applications. Although SIS borrows from the precursors and equipment of atomic layer deposition (ALD), the chemistry and physics of SIS differ in important ways. These differences arise from the permeable three-dimensional distribution of functional groups in polymers in SIS, which contrast to the typically impermeable two-dimensional distribution of active sites on solid surfaces in ALD. In SIS, metal-organic vapor-phase precursors dissolve and diffuse into polymers and interact with these functional groups through reversible complex formation and/or irreversible chemical reactions. In this perspective, we describe the thermodynamics and kinetics of SIS and attempt to disentangle the tightly coupled physical and chemical processes that underlie this method. Here, we discuss the various experimental, computational, and theoretical efforts that provide insight into SIS mechanisms and identify approaches that may fill out current gaps in knowledge and expand the utilization of SIS.},
doi = {10.1063/1.5128108},
journal = {Journal of Chemical Physics},
number = 19,
volume = 151,
place = {United States},
year = {Tue Nov 19 00:00:00 EST 2019},
month = {Tue Nov 19 00:00:00 EST 2019}
}

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journal, October 2014

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Sub-50-nm self-assembled nanotextures for enhanced broadband antireflection in silicon solar cells
journal, January 2015

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New Insights into Sequential Infiltration Synthesis
journal, September 2015


Elemental depth profiles and plasma etching rates of positive-tone electron beam resists after sequential infiltration synthesis of alumina
journal, May 2018

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Effect of Al 2 O 3 ALD coating and vapor infusion on the bulk mechanical response of elastic and viscoelastic polymers
journal, January 2015


Photoluminescence Mechanism and Photocatalytic Activity of Organic–Inorganic Hybrid Materials Formed by Sequential Vapor Infiltration
journal, April 2016


Chemically Enhancing Block Copolymers for Block-Selective Synthesis of Self-Assembled Metal Oxide Nanostructures
journal, December 2012

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Fabrication of Nanoporous Alumina Ultrafiltration Membrane with Tunable Pore Size Using Block Copolymer Templates
journal, July 2017

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Membranes for gas separation
journal, August 2001


Efficient and controllable vapor to solid doping of the polythiophene P3HT by low temperature vapor phase infiltration
journal, January 2017

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Morphology visualization of P3HT:Fullerene blends by using subsurface atomic layer deposition
journal, October 2017


Nucleation and Growth during Al 2 O 3 Atomic Layer Deposition on Polymers
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Real-time sensing and metrology for atomic layer deposition processes and manufacturing
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Phase Stabilization of Al:HfO 2 Grown on In x Ga 1– x As Substrates ( x = 0, 0.15, 0.53) via Trimethylaluminum-Based Atomic Layer Deposition
journal, February 2014

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Sequential Infiltration Synthesis of Electronic Materials: Group 13 Oxides via Metal Alkyl Precursors
journal, June 2019


Enhanced polymeric lithography resists via sequential infiltration synthesis
journal, July 2011

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  • Journal of Materials Chemistry, Vol. 21, Issue 32, 11722-11725
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Sequential Infiltration Synthesis for Line Edge Roughness Mitigation of EUV Resist
journal, January 2017

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  • Journal of Photopolymer Science and Technology, Vol. 30, Issue 6
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Effects of Residual Solvent Molecules Facilitating the Infiltration Synthesis of ZnO in a Nonreactive Polymer
journal, May 2017


Diffusion of organic vapors at low concentrations in glassy PVC, polystyrene, and PMMA
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Glass Transitions of the Poly-(n-Alkyl Methacrylates)
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Characterization of water vapor transport in glassy polyacrylonitrile by combined permeation and sorption techniques
journal, April 1982


Sequential Infiltration Synthesis for the Design of Low Refractive Index Surface Coatings with Controllable Thickness
journal, February 2017


Gas Transport Selectivity of Ultrathin, Nanoporous, Inorganic Membranes Made from Block Copolymer Templates
journal, October 2017


Self-Limited Reaction-Diffusion in Nanostructured Substrates: Surface Coverage Dynamics and Analytic Approximations to ALD Saturation Times
journal, March 2012

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Nano Spray‐Dried Block Copolymer Nanoparticles and Their Transformation into Hybrid and Inorganic Nanoparticles
journal, March 2019

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Works referencing / citing this record:

Resolving Triblock Terpolymer Morphologies by Vapor-Phase Infiltration
journal, May 2020