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Title: The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective

Authors:
ORCiD logo [1]; ORCiD logo [2]; ORCiD logo [2]; ORCiD logo [3]; ORCiD logo [4]; ORCiD logo [5]
  1. Pritzker School of Molecular Engineering, The University of Chicago, Chicago, Illinois 60637, USA, Chemical Sciences and Engineering Division, Argonne National Laboratory, Lemont, Illinois 60439, USA, Advanced Materials for Energy-Water Systems (AMEWS) Energy Frontier Research Center (EFRC), Lemont, Illinois 60439, USA
  2. Applied Materials Division, Argonne National Laboratory, Lemont, Illinois 60439, USA
  3. Advanced Materials for Energy-Water Systems (AMEWS) Energy Frontier Research Center (EFRC), Lemont, Illinois 60439, USA, Materials Science Division, Argonne National Laboratory, Lemont, Illinois 60439, USA
  4. Advanced Materials for Energy-Water Systems (AMEWS) Energy Frontier Research Center (EFRC), Lemont, Illinois 60439, USA, Applied Materials Division, Argonne National Laboratory, Lemont, Illinois 60439, USA, Center for Molecular Engineering, Argonne National Laboratory, Lemont, Illinois 60439, USA
  5. Pritzker School of Molecular Engineering, The University of Chicago, Chicago, Illinois 60637, USA, Chemical Sciences and Engineering Division, Argonne National Laboratory, Lemont, Illinois 60439, USA, Advanced Materials for Energy-Water Systems (AMEWS) Energy Frontier Research Center (EFRC), Lemont, Illinois 60439, USA, Center for Molecular Engineering, Argonne National Laboratory, Lemont, Illinois 60439, USA
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1574546
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Chemical Physics
Additional Journal Information:
Journal Name: Journal of Chemical Physics Journal Volume: 151 Journal Issue: 19; Journal ID: ISSN 0021-9606
Publisher:
American Institute of Physics
Country of Publication:
United States
Language:
English

Citation Formats

Waldman, Ruben Z., Mandia, David J., Yanguas-Gil, Angel, Martinson, Alex B. F., Elam, Jeffrey W., and Darling, Seth B. The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective. United States: N. p., 2019. Web. doi:10.1063/1.5128108.
Waldman, Ruben Z., Mandia, David J., Yanguas-Gil, Angel, Martinson, Alex B. F., Elam, Jeffrey W., & Darling, Seth B. The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective. United States. doi:10.1063/1.5128108.
Waldman, Ruben Z., Mandia, David J., Yanguas-Gil, Angel, Martinson, Alex B. F., Elam, Jeffrey W., and Darling, Seth B. Thu . "The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective". United States. doi:10.1063/1.5128108.
@article{osti_1574546,
title = {The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective},
author = {Waldman, Ruben Z. and Mandia, David J. and Yanguas-Gil, Angel and Martinson, Alex B. F. and Elam, Jeffrey W. and Darling, Seth B.},
abstractNote = {},
doi = {10.1063/1.5128108},
journal = {Journal of Chemical Physics},
number = 19,
volume = 151,
place = {United States},
year = {2019},
month = {11}
}

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Works referenced in this record:

Free Volume Profiles at Polymer–Solid Interfaces Probed by Focused Slow Positron Beam
journal, February 2015


Infiltrated Zinc Oxide in Poly(methyl methacrylate): An Atomic Cycle Growth Study
journal, December 2016

  • Ocola, Leonidas E.; Connolly, Aine; Gosztola, David J.
  • The Journal of Physical Chemistry C, Vol. 121, Issue 3
  • DOI: 10.1021/acs.jpcc.6b08007

Area selective atomic layer deposition of titanium dioxide: Effect of precursor chemistry
journal, January 2006

  • Sinha, Ashwini; Hess, Dennis W.; Henderson, Clifford L.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 24, Issue 6
  • DOI: 10.1116/1.2359728

Metal Oxide Heterostructure Array via Spatially Controlled–Growth within Block Copolymer Templates
journal, October 2019


Metal ALD and pulsed CVD: Fundamental reactions and links with solution chemistry
journal, December 2013

  • Emslie, David J. H.; Chadha, Preeti; Price, Jeffrey S.
  • Coordination Chemistry Reviews, Vol. 257, Issue 23-24
  • DOI: 10.1016/j.ccr.2013.07.010

In situ spectroscopic ellipsometry as a versatile tool for studying atomic layer deposition
journal, March 2009


Interface and surface effects on the glass-transition temperature in thin polymer films
journal, January 1994

  • Keddie, Joseph L.; Jones, Richard A. L.; Cory, Rachel A.
  • Faraday Discussions, Vol. 98
  • DOI: 10.1039/fd9949800219

Characterization of polymer thin films with small‐angle X‐ray scattering under grazing incidence (GISAXS)
journal, September 2002

  • Smilgies, Detlef‐M.; Busch, Peter; Papadakis, Christine M.
  • Synchrotron Radiation News, Vol. 15, Issue 5
  • DOI: 10.1080/08940880208602975

Conductive Polymer–Inorganic Hybrid Materials through Synergistic Mutual Doping of the Constituents
journal, August 2017

  • Wang, Weike; Chen, Chaoqiu; Tollan, Christopher
  • ACS Applied Materials & Interfaces, Vol. 9, Issue 33
  • DOI: 10.1021/acsami.7b09270

Effect of Polymer Microstructure on the Nucleation Behavior of Alumina via Atomic Layer Deposition
journal, July 2014

  • Padbury, Richard P.; Jur, Jesse S.
  • The Journal of Physical Chemistry C, Vol. 118, Issue 32
  • DOI: 10.1021/jp506456y

In Situ Raman Spectroscopic Study of Al-Infiltrated Spider Dragline Silk under Tensile Deformation
journal, September 2014

  • Lee, Seung-Mo; Pippel, Eckhard; Moutanabbir, Oussama
  • ACS Applied Materials & Interfaces, Vol. 6, Issue 19
  • DOI: 10.1021/am5041797

Tuning the Tensile Strength of Cellulose through Vapor-Phase Metalation
journal, December 2014

  • Gregorczyk, Keith E.; Pickup, David F.; Sanz, Miren Garcia
  • Chemistry of Materials, Vol. 27, Issue 1
  • DOI: 10.1021/cm503724c

Mechanism of Metal Oxide Deposition from Atomic Layer Deposition inside Nonreactive Polymer Matrices: Effects of Polymer Crystallinity and Temperature
journal, April 2016


Initiation of atomic layer deposition of metal oxides on polymer substrates by water plasma pretreatment
journal, January 2012

  • Steven Brandt, E.; Grace, Jeremy M.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 30, Issue 1
  • DOI: 10.1116/1.3666026

Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process
journal, June 2005

  • Puurunen, Riikka L.
  • Journal of Applied Physics, Vol. 97, Issue 12, Article No. 121301
  • DOI: 10.1063/1.1940727

A Route to Nanoscopic Materials via Sequential Infiltration Synthesis on Block Copolymer Templates
journal, May 2011

  • Peng, Qing; Tseng, Yu-Chih; Darling, Seth B.
  • ACS Nano, Vol. 5, Issue 6, p. 4600-4606
  • DOI: 10.1021/nn2003234

PEALD of SiO 2 and Al 2 O 3 Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads
journal, February 2018

  • Gebhard, Maximilian; Mai, Lukas; Banko, Lars
  • ACS Applied Materials & Interfaces, Vol. 10, Issue 8
  • DOI: 10.1021/acsami.7b14916

Quantitative in situ infrared analysis of reactions between trimethylaluminum and polymers during Al2O3 atomic layer deposition
journal, January 2012

  • Gong, Bo; Parsons, Gregory N.
  • Journal of Materials Chemistry, Vol. 22, Issue 31
  • DOI: 10.1039/c2jm32343e

Suppressing the Thermal and Ultraviolet Sensitivity of Kevlar by Infiltration and Hybridization with ZnO
journal, November 2017


Rapid Synthesis of Nanoporous Conformal Coatings via Plasma-Enhanced Sequential Infiltration of a Polymer Template
journal, November 2017


Enhanced Lithographic Imaging Layer Meets Semiconductor Manufacturing Specification a Decade Early
journal, April 2012

  • Tseng, Yu-Chih; Mane, Anil U.; Elam, Jeffrey W.
  • Advanced Materials, Vol. 24, Issue 19, p. 2608-2613
  • DOI: 10.1002/adma.201104871

Materials discovery and design using machine learning
journal, September 2017


Direct fabrication of high aspect-ratio metal oxide nanopatterns via sequential infiltration synthesis in lithographically defined SU-8 templates
journal, November 2015

  • Nam, Chang-Yong; Stein, Aaron; Kisslinger, Kim
  • Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 33, Issue 6
  • DOI: 10.1116/1.4929508

Second‐Order Transition Temperatures and Related Properties of Polystyrene. I. Influence of Molecular Weight
journal, June 1950

  • Fox, Thomas G.; Flory, Paul J.
  • Journal of Applied Physics, Vol. 21, Issue 6
  • DOI: 10.1063/1.1699711

Structural Evolution of Molybdenum Disulfide Prepared by Atomic Layer Deposition for Realization of Large Scale Films in Microelectronic Applications
journal, July 2018

  • Letourneau, Steven; Young, Matthias J.; Bedford, Nicholas M.
  • ACS Applied Nano Materials, Vol. 1, Issue 8
  • DOI: 10.1021/acsanm.8b00798

Atomic pair distribution functions analysis of disordered low-Z materials
journal, January 2013

  • Petkov, V.; Ren, Y.; Kabekkodu, S.
  • Physical Chemistry Chemical Physics, Vol. 15, Issue 22
  • DOI: 10.1039/c2cp43378h

Block-Co-polymer-Assisted Synthesis of All Inorganic Highly Porous Heterostructures with Highly Accessible Thermally Stable Functional Centers
journal, July 2019

  • She, Yunlong; Goodman, Emmett D.; Lee, Jihyung
  • ACS Applied Materials & Interfaces, Vol. 11, Issue 33
  • DOI: 10.1021/acsami.9b09991

Three-dimensional electroactive ZnO nanomesh directly derived from hierarchically self-assembled block copolymer thin films
journal, January 2019

  • Subramanian, Ashwanth; Doerk, Gregory; Kisslinger, Kim
  • Nanoscale, Vol. 11, Issue 19
  • DOI: 10.1039/C9NR00206E

Post-directed-self-assembly membrane fabrication for in situ analysis of block copolymer structures
journal, September 2016


Simulating the atomic layer deposition of alumina from first principles
journal, January 2004

  • Elliott, Simon D.; Greer, James C.
  • Journal of Materials Chemistry, Vol. 14, Issue 21
  • DOI: 10.1039/b405776g

Dual-mode free volume model for diffusion of gas molecules in glassy polymers
journal, August 1997


A modular reactor design for in situ synchrotron x-ray investigation of atomic layer deposition processes
journal, November 2015

  • Klug, Jeffrey A.; Weimer, Matthew S.; Emery, Jonathan D.
  • Review of Scientific Instruments, Vol. 86, Issue 11
  • DOI: 10.1063/1.4934807

Sequential Infiltration Synthesis of Al2O3 in Polyethersulfone Membranes
journal, September 2018


Recent progress of atomic layer deposition on polymeric materials
journal, January 2017


Ultrahigh Elastic Strain Energy Storage in Metal-Oxide-Infiltrated Patterned Hybrid Polymer Nanocomposites
journal, November 2017


Motion of sorbed gases in polymers
journal, January 1993


Infiltration Synthesis of Diverse Metal Oxide Nanostructures from Epoxidized Diene–Styrene Block Copolymer Templates
journal, February 2019

  • Yi, Daniel H.; Nam, Chang-Yong; Doerk, Gregory
  • ACS Applied Polymer Materials, Vol. 1, Issue 4
  • DOI: 10.1021/acsapm.8b00138

Directed Self-Assembly of Triblock Copolymer on Chemical Patterns for Sub-10-nm Nanofabrication via Solvent Annealing
journal, July 2016


Effect of Nanostructured Domains in Self-Assembled Block Copolymer Films on Sequential Infiltration Synthesis
journal, November 2017


Control of Micro- and Mesopores in Carbon Nanofibers and Hollow Carbon Nanofibers Derived from Cellulose Diacetate via Vapor Phase Infiltration of Diethyl Zinc
journal, September 2018


Mesoporous Metal Oxides by Vapor Infiltration and Atomic Layer Deposition on Ordered Surfactant Polymer Films
journal, July 2012

  • Gong, Bo; Kim, Do Han; Parsons, Gregory N.
  • Langmuir, Vol. 28, Issue 32
  • DOI: 10.1021/la302027b

Tin oxide nanostructure fabrication via sequential infiltration synthesis in block copolymer thin films
journal, December 2019

  • Barick, Barun K.; Simon, Assaf; Weisbord, Inbal
  • Journal of Colloid and Interface Science, Vol. 557
  • DOI: 10.1016/j.jcis.2019.09.044

Water Absorption of Poly(methyl methacrylate) Measured by Vertical Interference Microscopy
journal, July 2012

  • N’Diaye, Mambaye; Pascaretti-Grizon, Florence; Massin, Philippe
  • Langmuir, Vol. 28, Issue 31
  • DOI: 10.1021/la302260a

Insight on the Sequential Vapor Infiltration Mechanisms of Trimethylaluminum with Poly(methyl methacrylate), Poly(vinylpyrrolidone), and Poly(acrylic acid)
journal, May 2019

  • Hill, Grant T.; Lee, Dennis T.; Williams, Philip S.
  • The Journal of Physical Chemistry C, Vol. 123, Issue 26
  • DOI: 10.1021/acs.jpcc.9b02153

Template-polymer commensurability and directed self-assembly block copolymer lithography
journal, February 2015

  • Sunday, Daniel F.; Ashley, Elizabeth; Wan, Lei
  • Journal of Polymer Science Part B: Polymer Physics, Vol. 53, Issue 8
  • DOI: 10.1002/polb.23675

Improved Mechanical Stability of Dried Collagen Membrane after Metal Infiltration
journal, July 2010

  • Lee, Seung-Mo; Pippel, Eckhard; Moutanabbir, Oussama
  • ACS Applied Materials & Interfaces, Vol. 2, Issue 8
  • DOI: 10.1021/am100438b

Tungsten atomic layer deposition on polymers
journal, July 2008

  • Wilson, C. A.; McCormick, J. A.; Cavanagh, A. S.
  • Thin Solid Films, Vol. 516, Issue 18, p. 6175-6185
  • DOI: 10.1016/j.tsf.2007.11.086

Vapor phase infiltration: from a bioinspired process to technologic application, a prospective review
journal, July 2018


Investigating Sequential Vapor Infiltration Synthesis on Block-Copolymer-Templated Titania Nanoarrays
journal, March 2016

  • Ishchenko, Olga M.; Krishnamoorthy, Sivashankar; Valle, Nathalie
  • The Journal of Physical Chemistry C, Vol. 120, Issue 13
  • DOI: 10.1021/acs.jpcc.5b10415

Transport behavior of atomic layer deposition precursors through polymer masking layers: Influence on area selective atomic layer deposition
journal, January 2007

  • Sinha, Ashwini; Hess, Dennis W.; Henderson, Clifford L.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 5
  • DOI: 10.1116/1.2782546

Transfer of self-aligned spacer patterns for single-digit nanofabrication
journal, February 2015


Mechanisms and reactions during atomic layer deposition on polymers
journal, December 2013

  • Parsons, Gregory N.; Atanasov, Sarah E.; Dandley, Erinn C.
  • Coordination Chemistry Reviews, Vol. 257, Issue 23-24
  • DOI: 10.1016/j.ccr.2013.07.001

Self-assembly of single dielectric nanoparticle layers and integration in polymer-based solar cells
journal, August 2012

  • Allen, Jonathan E.; Ray, Biswajit; Khan, M. Ryyan
  • Applied Physics Letters, Vol. 101, Issue 6
  • DOI: 10.1063/1.4744928

Room-Temperature Atomic Layer Deposition of Platinum
journal, April 2013

  • Mackus, Adriaan J. M.; Garcia-Alonso, Diana; Knoops, Harm C. M.
  • Chemistry of Materials, Vol. 25, Issue 9
  • DOI: 10.1021/cm400274n

Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers
journal, September 2010

  • Peng, Qing; Tseng, Yu-Chih; Darling, Seth B.
  • Advanced Materials, Vol. 22, Issue 45, p. 5129-5133
  • DOI: 10.1002/adma.201002465

Influence of Subsurface Hybrid Material Growth on the Mechanical Properties of Atomic Layer Deposited Thin Films on Polymers
journal, May 2013

  • Sun, Yujie; Padbury, Richard P.; Akyildiz, Halil I.
  • Chemical Vapor Deposition, Vol. 19, Issue 4-6
  • DOI: 10.1002/cvde.201207042

Free Volume and Density Gradients of Amorphous Polymer Surfaces As Determined by Use of a Pulsed Low-Energy Positron Lifetime Beam and PVT Data
journal, June 2004

  • Algers, John; Suzuki, Ryoichi; Ohdaira, Toshiyuki
  • Macromolecules, Vol. 37, Issue 11
  • DOI: 10.1021/ma0359335

Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition
journal, September 2018


Studying the effects of chemistry and geometry on DSA hole-shrink process in three-dimensions
journal, July 2018


Ozone-Based Sequential Infiltration Synthesis of Al 2 O 3 Nanostructures in Symmetric Block Copolymer
journal, November 2016

  • Frascaroli, Jacopo; Cianci, Elena; Spiga, Sabina
  • ACS Applied Materials & Interfaces, Vol. 8, Issue 49
  • DOI: 10.1021/acsami.6b11340

Self-Limiting Film Growth of Transparent Conducting In 2 O 3 by Atomic Layer Deposition using Trimethylindium and Water Vapor
journal, July 2011

  • Lee, Do-Joong; Kwon, Jang-Yeon; Lee, Jae Il
  • The Journal of Physical Chemistry C, Vol. 115, Issue 31
  • DOI: 10.1021/jp2024389

Sorption and transport studies of water in Kapton polymide. I
journal, March 1985

  • Yang, D. K.; Koros, W. J.; Hopfenberg, H. B.
  • Journal of Applied Polymer Science, Vol. 30, Issue 3
  • DOI: 10.1002/app.1985.070300313

Directed self-assembly of high-chi block copolymer for nano fabrication of bit patterned media via solvent annealing
journal, September 2016


Multifunctional UV and Gas Sensors Based on Vertically Nanostructured Zinc Oxide: Volume Versus Surface Effect
journal, May 2019

  • Ocola, Leonidas E.; Wang, Yale; Divan, Ralu
  • Sensors, Vol. 19, Issue 9
  • DOI: 10.3390/s19092061

An Alternative Route Towards Metal-Polymer Hybrid Materials Prepared by Vapor-Phase Processing
journal, June 2011

  • Lee, Seung-Mo; Ischenko, Vladislav; Pippel, Eckhard
  • Advanced Functional Materials, Vol. 21, Issue 16
  • DOI: 10.1002/adfm.201100384

Characterizing the Three-Dimensional Structure of Block Copolymers via Sequential Infiltration Synthesis and Scanning Transmission Electron Tomography
journal, May 2015

  • Segal-Peretz, Tamar; Winterstein, Jonathan; Doxastakis, Manolis
  • ACS Nano, Vol. 9, Issue 5
  • DOI: 10.1021/acsnano.5b01013

Quantum chemical study of the mechanism of aluminum oxide atomic layer deposition
journal, May 2002

  • Widjaja, Yuniarto; Musgrave, Charles B.
  • Applied Physics Letters, Vol. 80, Issue 18
  • DOI: 10.1063/1.1473237

Molecular Mechanisms of Aluminum Oxide Thin Film Growth on Polystyrene during Atomic Layer Deposition
journal, November 2010

  • Puttaswamy, Manjunath; Haugshøj, Kenneth Brian; Højslet Christensen, Leif
  • Chemistry - A European Journal, Vol. 16, Issue 47
  • DOI: 10.1002/chem.201001888

Atomic Layer Deposition of Platinum Thin Films
journal, May 2003

  • Aaltonen, Titta; Ritala, Mikko; Sajavaara, Timo
  • Chemistry of Materials, Vol. 15, Issue 9, p. 1924-1928
  • DOI: 10.1021/cm021333t

Properties and Applications of Vapor Infiltration into Polymeric Substrates
journal, October 2018


Dependence of the glass transition temperature of poly(methyl methacrylate) on tacticity and molecular weight
journal, April 1966


Electrical and structural properties of ZnO synthesized via infiltration of lithographically defined polymer templates
journal, November 2015

  • Nam, Chang-Yong; Stein, Aaron; Kisslinger, Kim
  • Applied Physics Letters, Vol. 107, Issue 20
  • DOI: 10.1063/1.4935793

Trimethylaluminum Diffusion in PMMA Thin Films during Sequential Infiltration Synthesis: In Situ Dynamic Spectroscopic Ellipsometric Investigation
journal, August 2018

  • Cianci, Elena; Nazzari, Daniele; Seguini, Gabriele
  • Advanced Materials Interfaces, Vol. 5, Issue 20
  • DOI: 10.1002/admi.201801016

Mixed gas sorption in elastic solids
journal, December 1994


Greatly Increased Toughness of Infiltrated Spider Silk
journal, April 2009


Image quality and pattern transfer in directed self assembly with block-selective atomic layer deposition
journal, November 2012

  • Ruiz, Ricardo; Wan, Lei; Lille, Jeffrey
  • Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 30, Issue 6
  • DOI: 10.1116/1.4758773

Atomic Layer Deposition of Osmium
journal, December 2011

  • Hämäläinen, Jani; Sajavaara, Timo; Puukilainen, Esa
  • Chemistry of Materials, Vol. 24, Issue 1
  • DOI: 10.1021/cm201795s

Sequential Infiltration of Self-Assembled Block Copolymers: A Study by Atomic Force Microscopy
journal, January 2017

  • Lorenzoni, Matteo; Evangelio, Laura; Fernández-Regúlez, Marta
  • The Journal of Physical Chemistry C, Vol. 121, Issue 5
  • DOI: 10.1021/acs.jpcc.6b11233

Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features
journal, July 2018


Kinetics for the Sequential Infiltration Synthesis of Alumina in Poly(methyl methacrylate): An Infrared Spectroscopic Study
journal, January 2015

  • Biswas, Mahua; Libera, Joseph A.; Darling, Seth B.
  • The Journal of Physical Chemistry C, Vol. 119, Issue 26
  • DOI: 10.1021/jp511939j

Effect of the Density of Reactive Sites in P(S‐ r ‐MMA) Film during Al 2 O 3 Growth by Sequential Infiltration Synthesis
journal, April 2019

  • Caligiore, Federica E.; Nazzari, Daniele; Cianci, Elena
  • Advanced Materials Interfaces, Vol. 6, Issue 12
  • DOI: 10.1002/admi.201900503

Advancing next generation nanolithography with infiltration synthesis of hybrid nanocomposite resists
journal, January 2019

  • Tiwale, Nikhil; Subramanian, Ashwanth; Kisslinger, Kim
  • Journal of Materials Chemistry C, Vol. 7, Issue 29
  • DOI: 10.1039/c9tc02974e

Vapor Phase Infiltration of Metal Oxides into Nanoporous Polymers for Organic Solvent Separation Membranes
journal, July 2019


Tuning the Conductivity of Polyaniline through Doping by Means of Single Precursor Vapor Phase Infiltration
journal, November 2016

  • Wang, Weike; Yang, Fan; Chen, Chaoqiu
  • Advanced Materials Interfaces, Vol. 4, Issue 4
  • DOI: 10.1002/admi.201600806

Conversion of a Patterned Organic Resist into a High Performance Inorganic Hard Mask for High Resolution Pattern Transfer
journal, October 2018

  • Marneffe, Jean-François de; Chan, Boon Teik; Spieser, Martin
  • ACS Nano, Vol. 12, Issue 11
  • DOI: 10.1021/acsnano.8b05596

Atomic Layer Deposition of Metal Fluorides Using HF–Pyridine as the Fluorine Precursor
journal, March 2016


Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis
journal, July 2011

  • Tseng, Yu-Chih; Peng, Qing; Ocola, Leonidas E.
  • The Journal of Physical Chemistry C, Vol. 115, Issue 36, p. 17725-17729
  • DOI: 10.1021/jp205532e

Wafer-Scale Selective-Area Deposition of Nanoscale Metal Oxide Features Using Vapor Saturation into Patterned Poly(methyl methacrylate) Templates
journal, November 2015

  • Dandley, Erinn C.; Lemaire, Paul C.; Zhu, Zhongwei
  • Advanced Materials Interfaces, Vol. 3, Issue 2
  • DOI: 10.1002/admi.201500431

Non-native three-dimensional block copolymer morphologies
journal, December 2016

  • Rahman, Atikur; Majewski, Pawel W.; Doerk, Gregory
  • Nature Communications, Vol. 7, Issue 1
  • DOI: 10.1038/ncomms13988

New Insight into the Mechanism of Sequential Infiltration Synthesis from Infrared Spectroscopy
journal, October 2014

  • Biswas, Mahua; Libera, Joseph A.; Darling, Seth B.
  • Chemistry of Materials, Vol. 26, Issue 21
  • DOI: 10.1021/cm502427q

Sub-50-nm self-assembled nanotextures for enhanced broadband antireflection in silicon solar cells
journal, January 2015

  • Rahman, Atikur; Ashraf, Ahsan; Xin, Huolin
  • Nature Communications, Vol. 6, Issue 1
  • DOI: 10.1038/ncomms6963

New Insights into Sequential Infiltration Synthesis
journal, September 2015


Effect of Al 2 O 3 ALD coating and vapor infusion on the bulk mechanical response of elastic and viscoelastic polymers
journal, January 2015


Photoluminescence Mechanism and Photocatalytic Activity of Organic–Inorganic Hybrid Materials Formed by Sequential Vapor Infiltration
journal, April 2016


Chemically Enhancing Block Copolymers for Block-Selective Synthesis of Self-Assembled Metal Oxide Nanostructures
journal, December 2012

  • Kamcev, Jovan; Germack, David S.; Nykypanchuk, Dmytro
  • ACS Nano, Vol. 7, Issue 1
  • DOI: 10.1021/nn304122b

Structural analysis of complex materials using the atomic pair distribution function — a practical guide
journal, January 2003

  • Proffen, Th.; Billinge, S. J. L.; Egami, T.
  • Zeitschrift für Kristallographie - Crystalline Materials, Vol. 218, Issue 2
  • DOI: 10.1524/zkri.218.2.132.20664

Fabrication of Nanoporous Alumina Ultrafiltration Membrane with Tunable Pore Size Using Block Copolymer Templates
journal, July 2017

  • Zhou, Chun; Segal-Peretz, Tamar; Oruc, Muhammed Enes
  • Advanced Functional Materials, Vol. 27, Issue 34
  • DOI: 10.1002/adfm.201701756

Morphology visualization of P3HT:Fullerene blends by using subsurface atomic layer deposition
journal, October 2017


Nucleation and Growth during Al 2 O 3 Atomic Layer Deposition on Polymers
journal, November 2005

  • Wilson, C. A.; Grubbs, R. K.; George, S. M.
  • Chemistry of Materials, Vol. 17, Issue 23
  • DOI: 10.1021/cm050704d

Real-time sensing and metrology for atomic layer deposition processes and manufacturing
journal, January 2007

  • Henn-Lecordier, Laurent; Lei, Wei; Anderle, Mariano
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 1
  • DOI: 10.1116/1.2429672

Phase Stabilization of Al:HfO 2 Grown on In x Ga 1– x As Substrates ( x = 0, 0.15, 0.53) via Trimethylaluminum-Based Atomic Layer Deposition
journal, February 2014

  • Cianci, Elena; Molle, Alessandro; Lamperti, Alessio
  • ACS Applied Materials & Interfaces, Vol. 6, Issue 5
  • DOI: 10.1021/am405617q

Sequential Infiltration Synthesis of Electronic Materials: Group 13 Oxides via Metal Alkyl Precursors
journal, June 2019


Sequential Infiltration Synthesis for Line Edge Roughness Mitigation of EUV Resist
journal, January 2017

  • Baryshnikova, Marina; De Simone, Danilo; Knaepen, Werner
  • Journal of Photopolymer Science and Technology, Vol. 30, Issue 6
  • DOI: 10.2494/photopolymer.30.667

Effects of Residual Solvent Molecules Facilitating the Infiltration Synthesis of ZnO in a Nonreactive Polymer
journal, May 2017


Diffusion of organic vapors at low concentrations in glassy PVC, polystyrene, and PMMA
journal, April 1982


Glass Transitions of the Poly-(n-Alkyl Methacrylates)
journal, July 1957

  • Rogers, Senta; Mandelkern, Leo
  • The Journal of Physical Chemistry, Vol. 61, Issue 7
  • DOI: 10.1021/j150553a033

Characterization of water vapor transport in glassy polyacrylonitrile by combined permeation and sorption techniques
journal, April 1982


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  • Yanguas-Gil, Angel; Elam, Jeffrey W.
  • Chemical Vapor Deposition, Vol. 18, Issue 1-3, p. 46-52
  • DOI: 10.1002/cvde.201106938