Thermal conductance of aluminum oxy-fluoride passivation layers

doi:10.1063/1.5120028

Title: Thermal conductance of aluminum oxy-fluoride passivation layers

Abstract

Here, the thermal properties of plasma-generated aluminum oxyfluoride passivation layers at the surface of aluminum thin films are measured. The oxyfluoride layers are generated using plasmas produced in mixtures of NH₃ and SF₆ to simultaneously remove oxygen and add fluorine to the aluminum surface, an alternative approach to the more conventional two-step methods that utilize HF treatments to remove the native oxide followed by metal-fluoride (e.g., MgF₂, LiF, and AlF₃) thin film deposition that serves to protect the aluminum surface from further oxidation. Here, the change in thermal properties of the layers as a function of plasma processing time is determined. A significant reduction in thermal boundary conductance is measured with the increasing treatment time, which can be related to the increasing fluorine content in the layers. Acoustic reflection measurements suggest this reduced thermal boundary conductance is related to lower bonding strength to aluminum with increasing fluorine.

Authors:

^[1]; Boris, David R. ^[2]; Rosenberg, Samantha G. ^[3]; Walton, Scott G. ^[2];

^[1]

Univ. of Virginia, Charlottesville, VA (United States)
Naval Research Lab. (NRL), Washington, DC (United States)
Naval Research Lab. (NRL), Washington, DC (United States); Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Publication Date:: 2019-11-04

Research Org.:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:: USDOE National Nuclear Security Administration (NNSA)

OSTI Identifier:: 1574485

Report Number(s):: SAND-2019-13758J
Journal ID: ISSN 0003-6951; 681349; TRN: US2001110

Grant/Contract Number:: AC04-94AL85000

Resource Type:: Accepted Manuscript

Journal Name:: Applied Physics Letters

Additional Journal Information:: Journal Volume: 115; Journal Issue: 19; Journal ID: ISSN 0003-6951

Publisher:: American Institute of Physics (AIP)

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

Citation Formats


                    Tomko, John A., Boris, David R., Rosenberg, Samantha G., Walton, Scott G., and Hopkins, Patrick E. Thermal conductance of aluminum oxy-fluoride passivation layers.  United States: N. p., 2019. 
        Web.  doi:10.1063/1.5120028.

Copy to clipboard


                    Tomko, John A., Boris, David R., Rosenberg, Samantha G., Walton, Scott G., & Hopkins, Patrick E. Thermal conductance of aluminum oxy-fluoride passivation layers.  United States.  doi:10.1063/1.5120028.

Copy to clipboard


                    Tomko, John A., Boris, David R., Rosenberg, Samantha G., Walton, Scott G., and Hopkins, Patrick E. Mon .  
        "Thermal conductance of aluminum oxy-fluoride passivation layers".  United States.  doi:10.1063/1.5120028.  https://www.osti.gov/servlets/purl/1574485.

Copy to clipboard


                    
@article{osti_1574485,

  title        = {Thermal conductance of aluminum oxy-fluoride passivation layers},

  author       = {Tomko, John A. and Boris, David R. and Rosenberg, Samantha G. and Walton, Scott G. and Hopkins, Patrick E.},

  abstractNote = {Here, the thermal properties of plasma-generated aluminum oxyfluoride passivation layers at the surface of aluminum thin films are measured. The oxyfluoride layers are generated using plasmas produced in mixtures of NH3 and SF6 to simultaneously remove oxygen and add fluorine to the aluminum surface, an alternative approach to the more conventional two-step methods that utilize HF treatments to remove the native oxide followed by metal-fluoride (e.g., MgF2, LiF, and AlF3) thin film deposition that serves to protect the aluminum surface from further oxidation. Here, the change in thermal properties of the layers as a function of plasma processing time is determined. A significant reduction in thermal boundary conductance is measured with the increasing treatment time, which can be related to the increasing fluorine content in the layers. Acoustic reflection measurements suggest this reduced thermal boundary conductance is related to lower bonding strength to aluminum with increasing fluorine.},

  doi          = {10.1063/1.5120028},

  journal      = {Applied Physics Letters},

  number       = 19,

  volume       = 115,

  place        = {United States},

  year         = {2019},

  month        = {11}

}

Copy to clipboard

Journal Article:

Free Publicly Available Full Text

Accepted Manuscript (DOE)

Publisher's Version of Record

DOI: 10.1063/1.5120028

Other availability

Search WorldCat to find libraries that may hold this journal

Citation Metrics:

Cited by: 1 work

Citation information provided by
Web of Science

Save / Share:

Export Metadata

Save to My Library

Works referenced in this record:

Metal Fluorides as Lithium-Ion Battery Materials: An Atomic Layer Deposition Perspective
journal, August 2018

Mäntymäki, Miia; Ritala, Mikko; Leskelä, Markku
Coatings, Vol. 8, Issue 8
DOI: 10.3390/coatings8080277

Energy confinement and thermal boundary conductance effects on short-pulsed thermal ablation thresholds in thin films
journal, July 2017

Tomko, John A.; Giri, Ashutosh; Donovan, Brian F.
Physical Review B, Vol. 96, Issue 1
DOI: 10.1103/PhysRevB.96.014108

Electron beam generated plasmas for the processing of graphene
journal, August 2017

Walton, S. G.; Hernández, S. C.; Boris, D. R.
Journal of Physics D: Applied Physics, Vol. 50, Issue 35
DOI: 10.1088/1361-6463/aa7d12

Thermal Boundary Conductance: A Materials Science Perspective
journal, July 2016

Monachon, Christian; Weber, Ludger; Dames, Chris
Annual Review of Materials Research, Vol. 46, Issue 1
DOI: 10.1146/annurev-matsci-070115-031719

Ion irradiation of the native oxide/silicon surface increases the thermal boundary conductance across aluminum/silicon interfaces
journal, July 2014

Gorham, Caroline S.; Hattar, Khalid; Cheaito, Ramez
Physical Review B, Vol. 90, Issue 2
DOI: 10.1103/PhysRevB.90.024301

Electron Beam Generated Plasmas for Ultra Low T _e Processing
journal, January 2015

Walton, S. G.; Boris, D. R.; Hernández, S. C.
ECS Journal of Solid State Science and Technology, Vol. 4, Issue 6
DOI: 10.1149/2.0071506jss

Manipulating Thermal Conductance at Metal–Graphene Contacts via Chemical Functionalization
journal, January 2012

Hopkins, Patrick E.; Baraket, Mira; Barnat, Edward V.
Nano Letters, Vol. 12, Issue 2
DOI: 10.1021/nl203060j

Thermal Response of Metals to Ultrashort-Pulse Laser Excitation
journal, December 1988

Corkum, P. B.; Brunel, F.; Sherman, N. K.
Physical Review Letters, Vol. 61, Issue 25
DOI: 10.1103/PhysRevLett.61.2886

Thermal Analysis of High-Power Flip-Chip-Bonded Photodiodes
journal, October 2017

Shen, Yang; Gaskins, John; Xie, Xiaojun
Journal of Lightwave Technology, Vol. 35, Issue 19
DOI: 10.1109/JLT.2017.2736884

Atomic fluorine densities in electron beam generated plasmas: A high ion to radical ratio source for etching with atomic level precision
journal, January 2017

Boris, David R.; Petrova, Tzvetelina B.; Petrov, George M.
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 35, Issue 1
DOI: 10.1116/1.4971416

Atomic Layer Deposition of AlF ₃ Using Trimethylaluminum and Hydrogen Fluoride
journal, June 2015

Lee, Younghee; DuMont, Jaime W.; Cavanagh, Andrew S.
The Journal of Physical Chemistry C, Vol. 119, Issue 25
DOI: 10.1021/acs.jpcc.5b02625

Study of plasma-polyethylene interactions using electron beam-generated plasmas produced in Ar/SF6 mixtures
journal, January 2010

Walton, S. G.; Lock, E. H.; Ni, A.
Journal of Applied Polymer Science
DOI: 10.1002/app.32249

Bonding and pressure-tunable interfacial thermal conductance
journal, November 2011

Shen, Meng; Evans, William J.; Cahill, David
Physical Review B, Vol. 84, Issue 19
DOI: 10.1103/PhysRevB.84.195432

Catastrophic optical mirror damage in diode lasers monitored during single-pulse operation
journal, May 2009

Ziegler, Mathias; Tomm, Jens W.; Reeber, David
Applied Physics Letters, Vol. 94, Issue 19
DOI: 10.1063/1.3133339

Prospects for Thermal Atomic Layer Etching Using Sequential, Self-Limiting Fluorination and Ligand-Exchange Reactions
journal, May 2016

George, Steven M.; Lee, Younghee
ACS Nano, Vol. 10, Issue 5
DOI: 10.1021/acsnano.6b02991

Modeling the Chemical Mechanism of the Thermal Atomic Layer Etch of Aluminum Oxide: A Density Functional Theory Study of Reactions during HF Exposure
journal, August 2018

Kondati Natarajan, Suresh; Elliott, Simon D.
Chemistry of Materials, Vol. 30, Issue 17
DOI: 10.1021/acs.chemmater.8b01930

Picosecond ultrasonics study of the modification of interfacial bonding by ion implantation
journal, May 1998

Tas, G.; Loomis, J. J.; Maris, H. J.
Applied Physics Letters, Vol. 72, Issue 18
DOI: 10.1063/1.121276

The influence of interface bonding on thermal transport through solid–liquid interfaces
journal, June 2013

Harikrishna, Hari; Ducker, William A.; Huxtable, Scott T.
Applied Physics Letters, Vol. 102, Issue 25
DOI: 10.1063/1.4812749

Thermal optimization of 1.55 μm OP-VECSEL with hybrid metal–metamorphic mirror for single-mode high power operation
journal, January 2008

Tourrenc, Jean-Philippe; Bouchoule, Sophie; Khadour, Aghiad
Optical and Quantum Electronics, Vol. 40, Issue 2-4
DOI: 10.1007/s11082-007-9174-5

Thermal conductance of metal–diamond interfaces at high pressure
journal, March 2015

Hohensee, Gregory T.; Wilson, R. B.; Cahill, David G.
Nature Communications, Vol. 6, Issue 1
DOI: 10.1038/ncomms7578

Thermal conductivity of κ-Al2O3 and α-Al2O3 wear-resistant coatings
journal, June 1998

Cahill, David G.; Lee, S. -M.; Selinder, Torbjörn I.
Journal of Applied Physics, Vol. 83, Issue 11
DOI: 10.1063/1.367500

Vacuum evaporated films of aluminum fluoride
journal, January 1970

Heitmann, Walter
Thin Solid Films, Vol. 5, Issue 1
DOI: 10.1016/0040-6090(70)90052-0

Analysis of heat flow in layered structures for time-domain thermoreflectance
journal, December 2004

Cahill, David G.
Review of Scientific Instruments, Vol. 75, Issue 12
DOI: 10.1063/1.1819431

Protected and enhanced aluminum mirrors for the VUV
journal, December 2013

Wilbrandt, S.; Stenzel, O.; Nakamura, H.
Applied Optics, Vol. 53, Issue 4
DOI: 10.1364/AO.53.00A125

Effects of chemical bonding on heat transport across interfaces
journal, April 2012

Losego, Mark D.; Grady, Martha E.; Sottos, Nancy R.
Nature Materials, Vol. 11, Issue 6
DOI: 10.1038/nmat3303

Optical properties of fluoride thin films deposited by RF magnetron sputtering
journal, January 2006

Iwahori, Koichiro; Furuta, Masahiro; Taki, Yusuke
Applied Optics, Vol. 45, Issue 19
DOI: 10.1364/AO.45.004598

Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low T _e plasma sources
journal, January 2016

Jagtiani, Ashish V.; Miyazoe, Hiroyuki; Chang, Josephine
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 34, Issue 1
DOI: 10.1116/1.4936622

Nanoscale Wetting and Energy Transmission at Solid/Liquid Interfaces
journal, January 2019

Tomko, John A.; Olson, David H.; Giri, Ashutosh
Langmuir, Vol. 35, Issue 6
DOI: 10.1021/acs.langmuir.8b03675

Lower limit to the thermal conductivity of disordered crystals
journal, September 1992

Cahill, David G.; Watson, S. K.; Pohl, R. O.
Physical Review B, Vol. 46, Issue 10, p. 6131-6140
DOI: 10.1103/PhysRevB.46.6131

Thermal boundary resistance
journal, July 1989

Swartz, E. T.; Pohl, R. O.
Reviews of Modern Physics, Vol. 61, Issue 3, p. 605-668
DOI: 10.1103/RevModPhys.61.605

Surface Composition, Chemistry, and Structure of Polystyrene Modified by Electron-Beam-Generated Plasma
journal, June 2010

Lock, Evgeniya H.; Petrovykh, Dmitri Y.; Mack, Paul
Langmuir, Vol. 26, Issue 11
DOI: 10.1021/la9046337

A theoretical model for multiple‐pulse laser‐induced damage to metal mirrors
journal, October 1983

Lee, C. S.; Koumvakalis, N.; Bass, M.
Journal of Applied Physics, Vol. 54, Issue 10
DOI: 10.1063/1.331794

Surface generation and detection of phonons by picosecond light pulses
journal, September 1986

Thomsen, C.; Grahn, H. T.; Maris, H. J.
Physical Review B, Vol. 34, Issue 6
DOI: 10.1103/PhysRevB.34.4129

Thermal Transport across Solid Interfaces with Nanoscale Imperfections: Effects of Roughness, Disorder, Dislocations, and Bonding on Thermal Boundary Conductance
journal, January 2013

Hopkins, Patrick E.
ISRN Mechanical Engineering, Vol. 2013
DOI: 10.1155/2013/682586

Theoretical overview of the large-area plasma processing system (LAPPS)
journal, July 2000

Manheimer, Wallace M.; Fernsler, Richard F.; Lampe, Martin
Plasma Sources Science and Technology, Vol. 9, Issue 3
DOI: 10.1088/0963-0252/9/3/316

Measuring the electron density, temperature, and electronegativity in electron beam-generated plasmas produced in argon/SF ₆ mixtures
journal, April 2015

Boris, D. R.; Fernsler, R. F.; Walton, S. G.
Plasma Sources Science and Technology, Vol. 24, Issue 2
DOI: 10.1088/0963-0252/24/2/025032

Temperature Dependence of AlF3 Protection on Far-UV Al Mirrors
journal, July 2019

Gutiérrez-Luna, Nuria; Perea-Abarca, Belén; Espinosa-Yáñez, Lucía
Coatings, Vol. 9, Issue 7
DOI: 10.3390/coatings9070428

Precise control of ion and radical production using electron beam generated plasmas
journal, November 2018

Boris, David R.; Walton, Scott G.
Journal of Vacuum Science & Technology A, Vol. 36, Issue 6
DOI: 10.1116/1.5053615

A Review of Experimental and Computational Advances in Thermal Boundary Conductance and Nanoscale Thermal Transport across Solid Interfaces
journal, August 2019

Giri, Ashutosh; Hopkins, Patrick E.
Advanced Functional Materials
DOI: 10.1002/adfm.201903857

Study of photoresist etching and roughness formation in electron-beam generated plasmas
journal, January 2007

Orf, Bryan J.; Walton, Scott G.; Leonhardt, Darrin
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 3
DOI: 10.1116/1.2732741

Characterization of AlF_3 thin films at 193 nm by thermal evaporation
journal, January 2005

Lee, Cheng-Chung; Liu, Ming-Chung; Kaneko, Masaaki
Applied Optics, Vol. 44, Issue 34
DOI: 10.1364/AO.44.007333

Influence of interfacial properties on thermal transport at gold:silicon contacts
journal, February 2013

Duda, J. C.; Yang, C. -Y. P.; Foley, B. M.
Applied Physics Letters, Vol. 102, Issue 8
DOI: 10.1063/1.4793431

The influence of magnetic field on electron beam generated plasmas
journal, June 2015

Petrov, G. M.; Boris, D. R.; Lock, E. H.
Journal of Physics D: Applied Physics, Vol. 48, Issue 27
DOI: 10.1088/0022-3727/48/27/275202

Similar Records in DOE PAGES and OSTI.GOV collections:

Thermal atomic layer etching of crystalline aluminum nitride using sequential, self-limiting hydrogen fluoride and Sn(acac){sub 2} reactions and enhancement by H{sub 2} and Ar plasmas

Journal Article Johnson, Nicholas R. ; Sun, Huaxing ; Sharma, Kashish ; ... - Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films

Thermal atomic layer etching (ALE) of crystalline aluminum nitride (AlN) films was demonstrated using sequential, self-limiting reactions with hydrogen fluoride (HF) and tin(II) acetylacetonate [Sn(acac){sub 2}] as the reactants. Film thicknesses were monitored versus number of ALE reaction cycles at 275 °C using in situ spectroscopic ellipsometry (SE). A low etch rate of ∼0.07 Å/cycle was measured during etching of the first 40 Å of the film. This small etch rate corresponded with the AlO{sub x}N{sub y} layer on the AlN film. The etch rate then increased to ∼0.36 Å/cycle for the pure AlN films. In situ SE experiments established the HF and Sn(acac){submore »« less
DOI: 10.1116/1.4959779
Ion-assisted deposition of optical thin films. Doctoral thesis

Technical Report Targove, J D

The columnar microstructure of most thermally evaporated thin films detrimentally affects many of their properties through a reduction in packing density. In this work, the author investigated ion-assisted deposition as a means of disrupting this columnar growth for a number of coating materials. A Kaufman hot-cathode ion source bombarded thermally evaporated films with low-energy (<1000 eV) positive ions during deposition in a cryopumped box coater. The author investigated MgF/sub 2/, Na/sub 3/AlF/sub 6/, AlF/sub 3/, LaF/sub 3/,CeF/sub 3/,NdF/sub 3/,Al/sub 2/O/sub 3/, and AlN. Argon ion bombardment of the fluoride coatings increased their packing densities dramatically. He achieved packing densities nearmore »« less
Thin air-plasma-treated alkali fluoride layers for improved hole extraction in copper phthalocyanine/C70-based solar cells

Journal Article Xiao, Teng ; Cui, Weipan ; Cai, Min ; ... - Journal of Photonics for Energy

Alkali fluorides, mostly LiF and CsF, are well-known to improve electron injection/extraction in organic light-emitting diodes (OLEDs) and organic solar cells (OSCs). They are also utilized, though to a lesser extent, for hole injection in OLEDs. Here we demonstrate a new role for such fluorides in enhancing OSCs’ hole extraction.We show that an ultrathin air-plasmatreated alkali fluoride layer between the indium tin oxide (ITO) anode and the active layer in copper phthalocyanine ðCuPcÞ∕C70-based OSCs increases the short circuit current by up to ∼17% for cells with LiF and ∼7% for cells with NaF or CsF. The effects of the fluoridemore »« less
DOI: 10.1117/1.JPE.2.021006
Desorption and sublimation kinetics for fluorinated aluminum nitride surfaces

Journal Article King, Sean W., E-mail: sean.king@intel.com ; Davis, Robert F. ; Nemanich, Robert J. - Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films

The adsorption and desorption of halogen and other gaseous species from surfaces is a key fundamental process for both wet chemical and dry plasma etch and clean processes utilized in nanoelectronic fabrication processes. Therefore, to increase the fundamental understanding of these processes with regard to aluminum nitride (AlN) surfaces, temperature programmed desorption (TPD) and x-ray photoelectron spectroscopy (XPS) have been utilized to investigate the desorption kinetics of water (H{sub 2}O), fluorine (F{sub 2}), hydrogen (H{sub 2}), hydrogen fluoride (HF), and other related species from aluminum nitride thin film surfaces treated with an aqueous solution of buffered hydrogen fluoride (BHF) dilutedmore »« less
DOI: 10.1116/1.4891650
Metal atom oxidation lasers

Technical Report Rice, W W ; Beattie, W H ; DeKoker, J G ; ...

Exploding wire and film techniques for metal atom production have been extraordinarily successful in producing laser action from exothermic exchange reactions of the form M + XY yields MX* + Y. To date, lasing has been observed from CO, TiO, VO, ZrO, MoO, TaO, WO, UO, LiF, CF, MgF, AlF, TiF, VF, FeF, NiF, CuF, ZnF, ZrF, MoF, AgF, TaF, WF, PtF, AuF, and UF molecules in the ir region of the spectrum. Explosively shocked metal structures have been used to provide jets of metal atoms that have also produced lasing from MgF. This result corroborates the assertion that themore »« less

Similar Records

Title: Thermal conductance of aluminum oxy-fluoride passivation layers

Abstract

Citation Formats

Metal Fluorides as Lithium-Ion Battery Materials: An Atomic Layer Deposition Perspective journal, August 2018

Energy confinement and thermal boundary conductance effects on short-pulsed thermal ablation thresholds in thin films journal, July 2017

Electron beam generated plasmas for the processing of graphene journal, August 2017

Thermal Boundary Conductance: A Materials Science Perspective journal, July 2016

Ion irradiation of the native oxide/silicon surface increases the thermal boundary conductance across aluminum/silicon interfaces journal, July 2014

Electron Beam Generated Plasmas for Ultra Low T e Processing journal, January 2015

Manipulating Thermal Conductance at Metal–Graphene Contacts via Chemical Functionalization journal, January 2012

Thermal Response of Metals to Ultrashort-Pulse Laser Excitation journal, December 1988

Thermal Analysis of High-Power Flip-Chip-Bonded Photodiodes journal, October 2017

Atomic fluorine densities in electron beam generated plasmas: A high ion to radical ratio source for etching with atomic level precision journal, January 2017

Atomic Layer Deposition of AlF 3 Using Trimethylaluminum and Hydrogen Fluoride journal, June 2015

Study of plasma-polyethylene interactions using electron beam-generated plasmas produced in Ar/SF6 mixtures journal, January 2010

Bonding and pressure-tunable interfacial thermal conductance journal, November 2011

Catastrophic optical mirror damage in diode lasers monitored during single-pulse operation journal, May 2009

Prospects for Thermal Atomic Layer Etching Using Sequential, Self-Limiting Fluorination and Ligand-Exchange Reactions journal, May 2016

Modeling the Chemical Mechanism of the Thermal Atomic Layer Etch of Aluminum Oxide: A Density Functional Theory Study of Reactions during HF Exposure journal, August 2018

Picosecond ultrasonics study of the modification of interfacial bonding by ion implantation journal, May 1998

The influence of interface bonding on thermal transport through solid–liquid interfaces journal, June 2013

Thermal optimization of 1.55 μm OP-VECSEL with hybrid metal–metamorphic mirror for single-mode high power operation journal, January 2008

Thermal conductance of metal–diamond interfaces at high pressure journal, March 2015

Thermal conductivity of κ-Al2O3 and α-Al2O3 wear-resistant coatings journal, June 1998

Vacuum evaporated films of aluminum fluoride journal, January 1970

Analysis of heat flow in layered structures for time-domain thermoreflectance journal, December 2004

Protected and enhanced aluminum mirrors for the VUV journal, December 2013

Effects of chemical bonding on heat transport across interfaces journal, April 2012

Optical properties of fluoride thin films deposited by RF magnetron sputtering journal, January 2006

Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low T e plasma sources journal, January 2016

Nanoscale Wetting and Energy Transmission at Solid/Liquid Interfaces journal, January 2019

Lower limit to the thermal conductivity of disordered crystals journal, September 1992

Thermal boundary resistance journal, July 1989

Surface Composition, Chemistry, and Structure of Polystyrene Modified by Electron-Beam-Generated Plasma journal, June 2010

A theoretical model for multiple‐pulse laser‐induced damage to metal mirrors journal, October 1983

Surface generation and detection of phonons by picosecond light pulses journal, September 1986

Thermal Transport across Solid Interfaces with Nanoscale Imperfections: Effects of Roughness, Disorder, Dislocations, and Bonding on Thermal Boundary Conductance journal, January 2013

Theoretical overview of the large-area plasma processing system (LAPPS) journal, July 2000

Measuring the electron density, temperature, and electronegativity in electron beam-generated plasmas produced in argon/SF 6 mixtures journal, April 2015

Temperature Dependence of AlF3 Protection on Far-UV Al Mirrors journal, July 2019

Precise control of ion and radical production using electron beam generated plasmas journal, November 2018

A Review of Experimental and Computational Advances in Thermal Boundary Conductance and Nanoscale Thermal Transport across Solid Interfaces journal, August 2019

Study of photoresist etching and roughness formation in electron-beam generated plasmas journal, January 2007

Characterization of AlF_3 thin films at 193 nm by thermal evaporation journal, January 2005

Influence of interfacial properties on thermal transport at gold:silicon contacts journal, February 2013

The influence of magnetic field on electron beam generated plasmas journal, June 2015

Metal Fluorides as Lithium-Ion Battery Materials: An Atomic Layer Deposition Perspective
journal, August 2018

Energy confinement and thermal boundary conductance effects on short-pulsed thermal ablation thresholds in thin films
journal, July 2017

Electron beam generated plasmas for the processing of graphene
journal, August 2017

Thermal Boundary Conductance: A Materials Science Perspective
journal, July 2016

Ion irradiation of the native oxide/silicon surface increases the thermal boundary conductance across aluminum/silicon interfaces
journal, July 2014

Electron Beam Generated Plasmas for Ultra Low T _e Processing
journal, January 2015

Manipulating Thermal Conductance at Metal–Graphene Contacts via Chemical Functionalization
journal, January 2012

Thermal Response of Metals to Ultrashort-Pulse Laser Excitation
journal, December 1988

Thermal Analysis of High-Power Flip-Chip-Bonded Photodiodes
journal, October 2017

Atomic fluorine densities in electron beam generated plasmas: A high ion to radical ratio source for etching with atomic level precision
journal, January 2017

Atomic Layer Deposition of AlF ₃ Using Trimethylaluminum and Hydrogen Fluoride
journal, June 2015

Study of plasma-polyethylene interactions using electron beam-generated plasmas produced in Ar/SF6 mixtures
journal, January 2010

Bonding and pressure-tunable interfacial thermal conductance
journal, November 2011

Catastrophic optical mirror damage in diode lasers monitored during single-pulse operation
journal, May 2009

Prospects for Thermal Atomic Layer Etching Using Sequential, Self-Limiting Fluorination and Ligand-Exchange Reactions
journal, May 2016

Modeling the Chemical Mechanism of the Thermal Atomic Layer Etch of Aluminum Oxide: A Density Functional Theory Study of Reactions during HF Exposure
journal, August 2018

Picosecond ultrasonics study of the modification of interfacial bonding by ion implantation
journal, May 1998

The influence of interface bonding on thermal transport through solid–liquid interfaces
journal, June 2013

Thermal optimization of 1.55 μm OP-VECSEL with hybrid metal–metamorphic mirror for single-mode high power operation
journal, January 2008

Thermal conductance of metal–diamond interfaces at high pressure
journal, March 2015

Thermal conductivity of κ-Al2O3 and α-Al2O3 wear-resistant coatings
journal, June 1998

Vacuum evaporated films of aluminum fluoride
journal, January 1970

Analysis of heat flow in layered structures for time-domain thermoreflectance
journal, December 2004

Protected and enhanced aluminum mirrors for the VUV
journal, December 2013

Effects of chemical bonding on heat transport across interfaces
journal, April 2012

Optical properties of fluoride thin films deposited by RF magnetron sputtering
journal, January 2006

Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low T _e plasma sources
journal, January 2016

Nanoscale Wetting and Energy Transmission at Solid/Liquid Interfaces
journal, January 2019

Lower limit to the thermal conductivity of disordered crystals
journal, September 1992

Thermal boundary resistance
journal, July 1989

Surface Composition, Chemistry, and Structure of Polystyrene Modified by Electron-Beam-Generated Plasma
journal, June 2010

A theoretical model for multiple‐pulse laser‐induced damage to metal mirrors
journal, October 1983

Surface generation and detection of phonons by picosecond light pulses
journal, September 1986

Thermal Transport across Solid Interfaces with Nanoscale Imperfections: Effects of Roughness, Disorder, Dislocations, and Bonding on Thermal Boundary Conductance
journal, January 2013

Theoretical overview of the large-area plasma processing system (LAPPS)
journal, July 2000

Measuring the electron density, temperature, and electronegativity in electron beam-generated plasmas produced in argon/SF ₆ mixtures
journal, April 2015

Temperature Dependence of AlF3 Protection on Far-UV Al Mirrors
journal, July 2019

Precise control of ion and radical production using electron beam generated plasmas
journal, November 2018

A Review of Experimental and Computational Advances in Thermal Boundary Conductance and Nanoscale Thermal Transport across Solid Interfaces
journal, August 2019

Study of photoresist etching and roughness formation in electron-beam generated plasmas
journal, January 2007

Characterization of AlF_3 thin films at 193 nm by thermal evaporation
journal, January 2005

Influence of interfacial properties on thermal transport at gold:silicon contacts
journal, February 2013

The influence of magnetic field on electron beam generated plasmas
journal, June 2015