Scalable Synthesis of the Transparent Conductive Oxide SrVO3

Shoham, Lishai; Baskin, Maria; Han, Myung‐Geun; Zhu, Yimei; Kornblum, Lior

doi:10.1002/aelm.201900584

Title: Scalable Synthesis of the Transparent Conductive Oxide SrVO₃

Journal Article · 22 October 2019 · Advanced Electronic Materials

DOI: https://doi.org/10.1002/aelm.201900584 · OSTI ID:1573478

Shoham, Lishai ^[1]; Baskin, Maria ^[1];

^[2]; Zhu, Yimei ^[2];

^[1]

Technion-Israel Inst. of Technology, Haifa (Israel)
Brookhaven National Lab. (BNL), Upton, NY (United States)

The correlated metal SrVO₃ is an attractive earth-abundant transparent conducting oxide (TCO), a critical component of many optoelectronic and renewable energy devices. A key challenge is to synthesize films with low resistivity, due to the prevalence of defects that cause electron scattering. In addition to the material's promise as a TCO, its interesting correlated-electron physics is often obscured by a high defect concentration, which inhibits its further development into new types of devices. A route to synthesize low-defect SrVO₃ films by scalable, industry-compatible molecular beam epitaxy (MBE) is demonstrated. The resulting films consistently exhibit a residual resistivity ratio in the excess of 10 and room temperature resistivity as low as 32 µΩ cm, an indication of their high quality and potential for applications. Analysis of the structural and electronic properties of SrVO₃ films provides insights that are applicable to other conductive oxides, and highlights a route for further improvement in their quality and low temperature performance. MBE is the only growth method that allows atomically abrupt epitaxial interfaces between oxides and semiconductors such as Si and GaAs. Such interfaces are essential for efficient charge transport that is at the heart of the performance of most optoelectronic and solar devices.

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Research Organization:: Brookhaven National Laboratory (BNL), Upton, NY (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)

Grant/Contract Number:: SC0012704

OSTI ID:: 1573478

Alternate ID(s):: OSTI ID: 1571544

Report Number(s):: BNL--212308-2019-JAAM

Journal Information:: Advanced Electronic Materials, Journal Name: Advanced Electronic Materials Journal Issue: 1 Vol. 6; ISSN 2199-160X

Publisher:: WileyCopyright Statement

Country of Publication:: United States

Language:: English

References (41)

Critical Behavior of Metal-Insulator Transition in La 1 − x Sr x VO 3 Miyasaka, S.; Okuda, T.; Tokura, Y. Physical Review Letters, Vol. 85, Issue 25 https://doi.org/10.1103/PhysRevLett.85.5388	journal	December 2000
Evolution des propriétés cristallographiques, electriques et magnétiques au sein du système La1−xSrxVO3 Dougier, Patrick; Hagenmuller, Paul Journal of Solid State Chemistry, Vol. 15, Issue 2 https://doi.org/10.1016/0022-4596(75)90239-X	journal	October 1975
A heterojunction modulation-doped Mott transistor Son, Junwoo; Rajan, Siddharth; Stemmer, Susanne arXiv https://doi.org/10.48550/arxiv.1109.5299	text	January 2011
Molecular beam epitaxy of SrTiO3 with a growth window Jalan, Bharat; Moetakef, Pouya; Stemmer, Susanne Applied Physics Letters, Vol. 95, Issue 3 https://doi.org/10.1063/1.3184767	journal	July 2009
Hybrid molecular beam epitaxy for the growth of stoichiometric BaSnO ₃ Prakash, Abhinav; Dewey, John; Yun, Hwanhui Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 33, Issue 6 https://doi.org/10.1116/1.4933401	journal	November 2015
Metal-insulator transitions Paesler, Michael Journal of Non-Crystalline Solids, Vol. 130, Issue 1 https://doi.org/10.1016/0022-3093(91)90162-y	journal	June 1991
Correlated metals as transparent conductors Zhang, Lei; Zhou, Yuanjun; Guo, Lu Nature Materials, Vol. 15, Issue 2 https://doi.org/10.1038/nmat4493	journal	December 2015
Frontiers in the Growth of Complex Oxide Thin Films: Past, Present, and Future of Hybrid MBE Brahlek, Matthew; Gupta, Arnab Sen; Lapano, Jason Advanced Functional Materials, Vol. 28, Issue 9 https://doi.org/10.1002/adfm.201702772	journal	December 2017
Accessing a growth window for SrVO3 thin films Brahlek, Matthew; Zhang, Lei; Eaton, Craig Applied Physics Letters, Vol. 107, Issue 14 https://doi.org/10.1063/1.4932198	journal	October 2015
A silicon-based photocathode for water reduction with an epitaxial SrTiO3 protection layer and a nanostructured catalyst Ji, Li; McDaniel, Martin D.; Wang, Shijun Nature Nanotechnology, Vol. 10, Issue 1 https://doi.org/10.1038/nnano.2014.277	journal	December 2014
Taming the Mott Transition for a Novel Mott Transistor Inoue, Isao H.; Rozenberg, Marcelo J. Advanced Functional Materials, Vol. 18, Issue 16 https://doi.org/10.1002/adfm.200800558	journal	August 2008
Epitaxial integration and properties of SrRuO ₃ on silicon Wang, Zhe; Nair, Hari P.; Correa, Gabriela C. APL Materials, Vol. 6, Issue 8 https://doi.org/10.1063/1.5041940	journal	August 2018
High Carrier Mobility, Electrical Conductivity, and Optical Transmittance in Epitaxial SrVO ₃ Thin Films Mirjolet, Mathieu; Sánchez, Florencio; Fontcuberta, Josep Advanced Functional Materials, Vol. 29, Issue 14 https://doi.org/10.1002/adfm.201808432	journal	February 2019
Transport at the Epitaxial Interface between Germanium and Functional Oxides Kornblum, Lior; Morales-Acosta, Mayra D.; Jin, Eric N. Advanced Materials Interfaces, Vol. 2, Issue 18 https://doi.org/10.1002/admi.201500193	journal	October 2015
A heterojunction modulation-doped Mott transistor Son, Junwoo; Rajan, Siddharth; Stemmer, Susanne Journal of Applied Physics, Vol. 110, Issue 8 https://doi.org/10.1063/1.3651612	journal	October 2011
Enhanced electrical and magnetic properties in La _0.7 Sr _0.3 MnO ₃ thin films deposited on CaTiO ₃ -buffered silicon substrates Adamo, C.; Méchin, L.; Heeg, T. APL Materials, Vol. 3, Issue 6 https://doi.org/10.1063/1.4915486	journal	June 2015
Multi-stage pulsed laser deposition of high quality epitaxial ultra-thin SrTiO3 on Si substrates Diaz-Fernandez, Daniel; Spreitzer, Matjaž; Parkelj, Tjaša Applied Surface Science, Vol. 455 https://doi.org/10.1016/j.apsusc.2018.05.173	journal	October 2018
Chemical and electronic structure analysis of a SrTiO3 (001)/p-Ge (001) hydrogen evolution photocathode Stoerzinger, Kelsey A.; Du, Yingge; Spurgeon, Steven R. MRS Communications, Vol. 8, Issue 02 https://doi.org/10.1557/mrc.2018.38	journal	March 2018
Solar hydrogen production using epitaxial SrTiO ₃ on a GaAs photovoltaic Kornblum, L.; Fenning, D. P.; Faucher, J. Energy & Environmental Science, Vol. 10, Issue 1 https://doi.org/10.1039/C6EE03170F	journal	January 2017
Highly Conductive SrVO ₃ as a Bottom Electrode for Functional Perovskite Oxides Moyer, Jarrett A.; Eaton, Craig; Engel-Herbert, Roman Advanced Materials, Vol. 25, Issue 26 https://doi.org/10.1002/adma.201300900	journal	May 2013
Two-Dimensional Mott Insulators in SrVO ₃ Ultrathin Films Gu, Man; Wolf, Stuart A.; Lu, Jiwei Advanced Materials Interfaces, Vol. 1, Issue 7 https://doi.org/10.1002/admi.201300126	journal	June 2014
Oxide heterostructures for high density 2D electron gases on GaAs Kornblum, Lior; Faucher, Joseph; Morales-Acosta, Mayra D. Journal of Applied Physics, Vol. 123, Issue 2 https://doi.org/10.1063/1.5004576	journal	January 2018
Two-dimensional electron gas oxide remote doping of Si(001) Jin, Eric N.; Kakekhani, Arvin; Ismail-Beigi, Sohrab Physical Review Materials, Vol. 2, Issue 11 https://doi.org/10.1103/PhysRevMaterials.2.115001	journal	November 2018
Mapping growth windows in quaternary perovskite oxide systems by hybrid molecular beam epitaxy Brahlek, Matthew; Zhang, Lei; Zhang, Hai-Tian Applied Physics Letters, Vol. 109, Issue 10 https://doi.org/10.1063/1.4962388	journal	September 2016
Control of High Quality SrVO ₃ Electrode in Oxidizing Atmosphere Bérini, Bruno; Demange, Valérie; Bouttemy, Muriel Advanced Materials Interfaces, Vol. 3, Issue 18 https://doi.org/10.1002/admi.201600274	journal	July 2016
Growth of SrVO ₃ thin films by hybrid molecular beam epitaxy Eaton, Craig; Moyer, Jarrett A.; Alipour, Hamideh M. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 33, Issue 6 https://doi.org/10.1116/1.4927439	journal	November 2015
Growth of SrTiO ₃ on Si(001) by hybrid molecular beam epitaxy : Growth of SrTiO Zhang, Lei; Engel-Herbert, Roman physica status solidi (RRL) - Rapid Research Letters, Vol. 8, Issue 11 https://doi.org/10.1002/pssr.201409383	journal	September 2014
Metals amassing transparency Poeppelmeier, Kenneth R.; Rondinelli, James M. Nature Materials, Vol. 15, Issue 2 https://doi.org/10.1038/nmat4523	journal	December 2015
Etude des proprietes magnetiques, electriques et optiques des phases de structure perovskite SrVO2.90 et SrVO3 Dougier, Patrick; Fan, John C. C.; Goodenough, John B. Journal of Solid State Chemistry, Vol. 14, Issue 3 https://doi.org/10.1016/0022-4596(75)90029-8	journal	July 1975
Hysteretic electrical transport in BaTiO ₃ /Ba ₁₋ _x Sr _x TiO ₃ /Ge heterostructures Ngai, J. H.; Kumah, D. P.; Ahn, C. H. Applied Physics Letters, Vol. 104, Issue 6 https://doi.org/10.1063/1.4864648	journal	February 2014
RHEED Intensity Oscillations for the Stoichiometric Growth of SrTiO₃ Thin Films by Reactive Molecular Beam Epitaxy Haeni, J. H.; Theis, C. D.; Schlom, D. G. Journal of Electroceramics, Vol. 4, Issue 2/3, p. 385-391 https://doi.org/10.1023/A:1009947517710	journal	January 2000
Surface Characterizations and Selective Etching of Sr‐Rich Segregation on Top of SrVO ₃ Thin‐Films Grown by Pulsed Laser Deposition Bourlier, Yoan; Frégnaux, Mathieu; Bérini, Bruno ChemNanoMat, Vol. 5, Issue 5 https://doi.org/10.1002/cnma.201900017	journal	March 2019
Complex plume stoichiometry during pulsed laser deposition of SrVO ₃ at low oxygen pressures Wang, Jun; Rijnders, Guus; Koster, Gertjan Applied Physics Letters, Vol. 113, Issue 22 https://doi.org/10.1063/1.5049792	journal	November 2018
Synthesis science of SrRuO ₃ and CaRuO ₃ epitaxial films with high residual resistivity ratios Nair, Hari P.; Liu, Yang; Ruf, Jacob P. APL Materials, Vol. 6, Issue 4 https://doi.org/10.1063/1.5023477	journal	April 2018
Continuously Tuning Epitaxial Strains by Thermal Mismatch Zhang, Lei; Yuan, Yakun; Lapano, Jason ACS Nano, Vol. 12, Issue 2 https://doi.org/10.1021/acsnano.7b07539	journal	January 2018
Growth of homoepitaxial SrTiO3 thin films by molecular-beam epitaxy Brooks, C. M.; Kourkoutis, L. Fitting; Heeg, T. Applied Physics Letters, Vol. 94, Issue 16 https://doi.org/10.1063/1.3117365	journal	April 2009
Thermoelectric response in the incoherent transport region near Mott transition: The case study of La 1 − x Sr x VO 3 Uchida, M.; Oishi, K.; Matsuo, M. Physical Review B, Vol. 83, Issue 16 https://doi.org/10.1103/PhysRevB.83.165127	journal	April 2011
Adsorption-controlled growth and the influence of stoichiometry on electronic transport in hybrid molecular beam epitaxy-grown BaSnO ₃ films Prakash, Abhinav; Xu, Peng; Wu, Xuewang Journal of Materials Chemistry C, Vol. 5, Issue 23 https://doi.org/10.1039/C7TC00190H	journal	January 2017
Self-regulated growth of LaVO3 thin films by hybrid molecular beam epitaxy Zhang, Hai-Tian; Dedon, Liv R.; Martin, Lane W. Applied Physics Letters, Vol. 106, Issue 23 https://doi.org/10.1063/1.4922213	journal	June 2015
Metal-insulator transitions Imada, Masatoshi; Fujimori, Atsushi; Tokura, Yoshinori Reviews of Modern Physics, Vol. 70, Issue 4, p. 1039-1263 https://doi.org/10.1103/RevModPhys.70.1039	journal	October 1998
Improving the structural quality and electrical resistance of SrTiO ₃ thin films on Si (001) via a two-step anneal Zhang, Lei; Wang, Yaqiang; Engel-Herbert, Roman Journal of Applied Physics, Vol. 119, Issue 4 https://doi.org/10.1063/1.4939760	journal	January 2016

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Title: Scalable Synthesis of the Transparent Conductive Oxide SrVO3

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References (41)

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Title: Scalable Synthesis of the Transparent Conductive Oxide SrVO₃