skip to main content
DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Transfer of Graphene with Protective Oxide Layers

Abstract

Transfer of graphene, grown by chemical vapor deposition (CVD), to a substrate of choice, typically involves the deposition of a polymeric layer (for example, poly(methyl methacrylate) (PMMA), or polydimethylsiloxane, PDMS). These polymers are quite hard to remove without leaving some residues behind. One method to improve the graphene transfer is to coat the graphene with a thin protective oxide layer, followed by the deposition of a very thin polymer layer on top of the oxide layer (much thinner than the usual thickness), followed by a more aggressive polymeric removal method, thus leaving the graphene intact. At the same time, having an oxide layer on graphene may serve applications, such as channeled transistors or sensing devices. Here, we study the transfer of graphene with a protective thin oxide layer grown by atomic layer deposition (ALD). We follow the transfer process from the graphene growth stage through oxide deposition until completion. We report on the nucleation growth process of oxides on graphene, their resultant strain and their optical transmission.

Authors:
 [1];  [2];  [2];  [2]; ORCiD logo [2];  [2];  [2]
  1. New Jersey Inst. of Technology (NJIT), Newark, NJ (United States)
  2. Argonne National Lab. (ANL), Argonne, IL (United States)
Publication Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1572724
Grant/Contract Number:  
AC02-06CH11357
Resource Type:
Accepted Manuscript
Journal Name:
ChemEngineering
Additional Journal Information:
Journal Volume: 2; Journal Issue: 4; Journal ID: ISSN 2305-7084
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; Atomic Layer Deposition (ALD); Oxide layer deposition on graphene; Raman spectroscopy of graphene; Thin oxide films; Transfer of 24 graphene

Citation Formats

Grebel, Haim, Stan, Liliana, Sumant, Anirudha, Liu, Yuzi, Gosztola, David, Ocola, Leonidas, and Fisher, Brandon. Transfer of Graphene with Protective Oxide Layers. United States: N. p., 2018. Web. doi:10.3390/chemengineering2040058.
Grebel, Haim, Stan, Liliana, Sumant, Anirudha, Liu, Yuzi, Gosztola, David, Ocola, Leonidas, & Fisher, Brandon. Transfer of Graphene with Protective Oxide Layers. United States. doi:10.3390/chemengineering2040058.
Grebel, Haim, Stan, Liliana, Sumant, Anirudha, Liu, Yuzi, Gosztola, David, Ocola, Leonidas, and Fisher, Brandon. Mon . "Transfer of Graphene with Protective Oxide Layers". United States. doi:10.3390/chemengineering2040058. https://www.osti.gov/servlets/purl/1572724.
@article{osti_1572724,
title = {Transfer of Graphene with Protective Oxide Layers},
author = {Grebel, Haim and Stan, Liliana and Sumant, Anirudha and Liu, Yuzi and Gosztola, David and Ocola, Leonidas and Fisher, Brandon},
abstractNote = {Transfer of graphene, grown by chemical vapor deposition (CVD), to a substrate of choice, typically involves the deposition of a polymeric layer (for example, poly(methyl methacrylate) (PMMA), or polydimethylsiloxane, PDMS). These polymers are quite hard to remove without leaving some residues behind. One method to improve the graphene transfer is to coat the graphene with a thin protective oxide layer, followed by the deposition of a very thin polymer layer on top of the oxide layer (much thinner than the usual thickness), followed by a more aggressive polymeric removal method, thus leaving the graphene intact. At the same time, having an oxide layer on graphene may serve applications, such as channeled transistors or sensing devices. Here, we study the transfer of graphene with a protective thin oxide layer grown by atomic layer deposition (ALD). We follow the transfer process from the graphene growth stage through oxide deposition until completion. We report on the nucleation growth process of oxides on graphene, their resultant strain and their optical transmission.},
doi = {10.3390/chemengineering2040058},
journal = {ChemEngineering},
number = 4,
volume = 2,
place = {United States},
year = {2018},
month = {12}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record

Save / Share:

Works referenced in this record:

Raman spectroscopy of graphene and graphite: Disorder, electron–phonon coupling, doping and nonadiabatic effects
journal, July 2007


Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates
journal, June 2002


Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends
journal, January 2013

  • Miikkulainen, Ville; Leskelä, Markku; Ritala, Mikko
  • Journal of Applied Physics, Vol. 113, Issue 2, Article No. 021301
  • DOI: 10.1063/1.4757907