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Title: Focused-helium-ion-beam blow forming of nanostructures: radiation damage and nanofabrication

Abstract

Targeted irradiation of nanostructures by a finely focused ion beam provides routes to improved control of material modification and understanding of the physics of interactions between ion beams and nanomaterials. Here, we studied radiation damage in crystalline diamond and silicon nanostructures using a focused helium ion beam, with the former exhibiting extremely long-range ion propagation and large plastic deformation in a process visibly analogous to blow forming. We report significant dependence of damage morphology on material, geometry, and irradiation conditions (ion dose, ion energy, ion species, and location). We anticipate that our method and findings will not only improve the understanding of radiation damage in isolated nanostructures, but will also support the design of new engineering materials and devices for current and future applications in nanotechnology.

Authors:
ORCiD logo [1];  [2]; ORCiD logo [2];  [3];  [2];  [2];  [2]; ORCiD logo [2]
  1. Trinity College Dublin, Dublin (Ireland). School of Chemistry
  2. Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)
  3. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1570233
Grant/Contract Number:  
AC02-05CH11231
Resource Type:
Accepted Manuscript
Journal Name:
Nanotechnology
Additional Journal Information:
Journal Name: Nanotechnology; Journal ID: ISSN 0957-4484
Publisher:
IOP Publishing
Country of Publication:
United States
Language:
English

Citation Formats

Hobbs, Richard, Kim, Chungsoo, Agarwal, Akshay, Yang, Yang, Manfrinato, Vitor, Short, Michael P., Li, Ju, and Berggren, Karl K. Focused-helium-ion-beam blow forming of nanostructures: radiation damage and nanofabrication. United States: N. p., 2019. Web. doi:10.1088/1361-6528/ab4a65.
Hobbs, Richard, Kim, Chungsoo, Agarwal, Akshay, Yang, Yang, Manfrinato, Vitor, Short, Michael P., Li, Ju, & Berggren, Karl K. Focused-helium-ion-beam blow forming of nanostructures: radiation damage and nanofabrication. United States. doi:10.1088/1361-6528/ab4a65.
Hobbs, Richard, Kim, Chungsoo, Agarwal, Akshay, Yang, Yang, Manfrinato, Vitor, Short, Michael P., Li, Ju, and Berggren, Karl K. Wed . "Focused-helium-ion-beam blow forming of nanostructures: radiation damage and nanofabrication". United States. doi:10.1088/1361-6528/ab4a65.
@article{osti_1570233,
title = {Focused-helium-ion-beam blow forming of nanostructures: radiation damage and nanofabrication},
author = {Hobbs, Richard and Kim, Chungsoo and Agarwal, Akshay and Yang, Yang and Manfrinato, Vitor and Short, Michael P. and Li, Ju and Berggren, Karl K.},
abstractNote = {Targeted irradiation of nanostructures by a finely focused ion beam provides routes to improved control of material modification and understanding of the physics of interactions between ion beams and nanomaterials. Here, we studied radiation damage in crystalline diamond and silicon nanostructures using a focused helium ion beam, with the former exhibiting extremely long-range ion propagation and large plastic deformation in a process visibly analogous to blow forming. We report significant dependence of damage morphology on material, geometry, and irradiation conditions (ion dose, ion energy, ion species, and location). We anticipate that our method and findings will not only improve the understanding of radiation damage in isolated nanostructures, but will also support the design of new engineering materials and devices for current and future applications in nanotechnology.},
doi = {10.1088/1361-6528/ab4a65},
journal = {Nanotechnology},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {10}
}

Journal Article:
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This content will become publicly available on October 2, 2020
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