Focused-helium-ion-beam blow forming of nanostructures: radiation damage and nanofabrication

doi:10.1088/1361-6528/ab4a65

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Title: Focused-helium-ion-beam blow forming of nanostructures: radiation damage and nanofabrication

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Abstract

Targeted irradiation of nanostructures by a finely focused ion beam provides routes to improved control of material modification and understanding of the physics of interactions between ion beams and nanomaterials. Here, we studied radiation damage in crystalline diamond and silicon nanostructures using a focused helium ion beam, with the former exhibiting extremely long-range ion propagation and large plastic deformation in a process visibly analogous to blow forming. We report significant dependence of damage morphology on material, geometry, and irradiation conditions (ion dose, ion energy, ion species, and location). We anticipate that our method and findings will not only improve the understanding of radiation damage in isolated nanostructures, but will also support the design of new engineering materials and devices for current and future applications in nanotechnology.

Authors:

^[1]; Kim, Chungsoo ^[2];

^[2]; Yang, Yang ^[3]; Manfrinato, Vitor ^[2]; Short, Michael P. ^[2]; Li, Ju ^[2];

^[2]

Trinity College Dublin, Dublin (Ireland). School of Chemistry
Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)

Publication Date:: 2019-10-02

Research Org.:: Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)

Sponsoring Org.:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)

OSTI Identifier:: 1570233

Grant/Contract Number:: AC02-05CH11231

Resource Type:: Accepted Manuscript

Journal Name:: Nanotechnology

Additional Journal Information:: Journal Name: Nanotechnology; Journal ID: ISSN 0957-4484

Publisher:: IOP Publishing

Country of Publication:: United States

Language:: English

Citation Formats


                    Hobbs, Richard, Kim, Chungsoo, Agarwal, Akshay, Yang, Yang, Manfrinato, Vitor, Short, Michael P., Li, Ju, and Berggren, Karl K. Focused-helium-ion-beam blow forming of nanostructures: radiation damage and nanofabrication.  United States: N. p., 2019. 
        Web.  doi:10.1088/1361-6528/ab4a65.

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                    Hobbs, Richard, Kim, Chungsoo, Agarwal, Akshay, Yang, Yang, Manfrinato, Vitor, Short, Michael P., Li, Ju, & Berggren, Karl K. Focused-helium-ion-beam blow forming of nanostructures: radiation damage and nanofabrication.  United States.  doi:10.1088/1361-6528/ab4a65.

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                    Hobbs, Richard, Kim, Chungsoo, Agarwal, Akshay, Yang, Yang, Manfrinato, Vitor, Short, Michael P., Li, Ju, and Berggren, Karl K. Wed .  
        "Focused-helium-ion-beam blow forming of nanostructures: radiation damage and nanofabrication".  United States.  doi:10.1088/1361-6528/ab4a65.

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@article{osti_1570233,

  title        = {Focused-helium-ion-beam blow forming of nanostructures: radiation damage and nanofabrication},

  author       = {Hobbs, Richard and Kim, Chungsoo and Agarwal, Akshay and Yang, Yang and Manfrinato, Vitor and Short, Michael P. and Li, Ju and Berggren, Karl K.},

  abstractNote = {Targeted irradiation of nanostructures by a finely focused ion beam provides routes to improved control of material modification and understanding of the physics of interactions between ion beams and nanomaterials. Here, we studied radiation damage in crystalline diamond and silicon nanostructures using a focused helium ion beam, with the former exhibiting extremely long-range ion propagation and large plastic deformation in a process visibly analogous to blow forming. We report significant dependence of damage morphology on material, geometry, and irradiation conditions (ion dose, ion energy, ion species, and location). We anticipate that our method and findings will not only improve the understanding of radiation damage in isolated nanostructures, but will also support the design of new engineering materials and devices for current and future applications in nanotechnology.},

  doi          = {10.1088/1361-6528/ab4a65},

  journal      = {Nanotechnology},

  number       = ,

  volume       = ,

  place        = {United States},

  year         = {2019},

  month        = {10}

}

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