Focused-helium-ion-beam blow forming of nanostructures: radiation damage and nanofabrication
Abstract
Targeted irradiation of nanostructures by a finely focused ion beam provides routes to improved control of material modification and understanding of the physics of interactions between ion beams and nanomaterials. Here, we studied radiation damage in crystalline diamond and silicon nanostructures using a focused helium ion beam, with the former exhibiting extremely long-range ion propagation and large plastic deformation in a process visibly analogous to blow forming. We report significant dependence of damage morphology on material, geometry, and irradiation conditions (ion dose, ion energy, ion species, and location). In this work, we suggest that our approach and findings will not only improve the understanding of radiation damage in isolated nanostructures, but will also support the design of new engineering materials and devices for current and future applications in nanotechnology.
- Authors:
-
- Trinity College Dublin, Dublin (Ireland). School of Chemistry
- Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Publication Date:
- Research Org.:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1570233
- Grant/Contract Number:
- AC02-05CH11231
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Nanotechnology
- Additional Journal Information:
- Journal Volume: 31; Journal Issue: 4; Journal ID: ISSN 0957-4484
- Publisher:
- IOP Publishing
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 77 NANOSCIENCE AND NANOTECHNOLOGY
Citation Formats
Hobbs, Richard, Kim, Chungsoo, Agarwal, Akshay, Yang, Yang, Manfrinato, Vitor, Short, Michael P., Li, Ju, and Berggren, Karl K. Focused-helium-ion-beam blow forming of nanostructures: radiation damage and nanofabrication. United States: N. p., 2019.
Web. doi:10.1088/1361-6528/ab4a65.
Hobbs, Richard, Kim, Chungsoo, Agarwal, Akshay, Yang, Yang, Manfrinato, Vitor, Short, Michael P., Li, Ju, & Berggren, Karl K. Focused-helium-ion-beam blow forming of nanostructures: radiation damage and nanofabrication. United States. doi:10.1088/1361-6528/ab4a65.
Hobbs, Richard, Kim, Chungsoo, Agarwal, Akshay, Yang, Yang, Manfrinato, Vitor, Short, Michael P., Li, Ju, and Berggren, Karl K. Wed .
"Focused-helium-ion-beam blow forming of nanostructures: radiation damage and nanofabrication". United States. doi:10.1088/1361-6528/ab4a65. https://www.osti.gov/servlets/purl/1570233.
@article{osti_1570233,
title = {Focused-helium-ion-beam blow forming of nanostructures: radiation damage and nanofabrication},
author = {Hobbs, Richard and Kim, Chungsoo and Agarwal, Akshay and Yang, Yang and Manfrinato, Vitor and Short, Michael P. and Li, Ju and Berggren, Karl K.},
abstractNote = {Targeted irradiation of nanostructures by a finely focused ion beam provides routes to improved control of material modification and understanding of the physics of interactions between ion beams and nanomaterials. Here, we studied radiation damage in crystalline diamond and silicon nanostructures using a focused helium ion beam, with the former exhibiting extremely long-range ion propagation and large plastic deformation in a process visibly analogous to blow forming. We report significant dependence of damage morphology on material, geometry, and irradiation conditions (ion dose, ion energy, ion species, and location). In this work, we suggest that our approach and findings will not only improve the understanding of radiation damage in isolated nanostructures, but will also support the design of new engineering materials and devices for current and future applications in nanotechnology.},
doi = {10.1088/1361-6528/ab4a65},
journal = {Nanotechnology},
number = 4,
volume = 31,
place = {United States},
year = {2019},
month = {10}
}
Web of Science
Works referenced in this record:
Perfectly Ordered, Free-Standing Nanowire Arrays With Controllable Geometry
journal, November 2009
- Robinson, Adam Philip; Burnell, Gavin; Sahonta, Suman-Lata
- Advanced Engineering Materials, Vol. 11, Issue 11
Membrane folding by helium ion implantation for three-dimensional device fabrication
journal, January 2007
- Arora, William J.; Sijbrandij, Sybren; Stern, Lewis
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 6
Helium ion microscope generated nitrogen-vacancy centres in type Ib diamond
journal, January 2014
- McCloskey, D.; Fox, D.; O'Hara, N.
- Applied Physics Letters, Vol. 104, Issue 3
Combinatorial development of bulk metallic glasses
journal, April 2014
- Ding, Shiyan; Liu, Yanhui; Li, Yanglin
- Nature Materials, Vol. 13, Issue 5
Helium focused ion beam fabricated plasmonic antennas with sub-5 nm gaps
journal, September 2013
- Scholder, Olivier; Jefimovs, Konstantins; Shorubalko, Ivan
- Nanotechnology, Vol. 24, Issue 39
MEMS/NEMS based on mono-, nano-, and ultrananocrystalline diamond films
journal, June 2014
- Sumant, Anirudha V.; Auciello, Orlando; Liao, Meiyong
- MRS Bulletin, Vol. 39, Issue 6
Diamond nonlinear photonics
journal, April 2014
- Hausmann, B. J. M.; Bulu, I.; Venkataraman, V.
- Nature Photonics, Vol. 8, Issue 5
Fabrication of Ultrathin Single‐Crystal Diamond Membranes
journal, December 2008
- Fairchild, Barbara A.; Olivero, Paolo; Rubanov, Sergey
- Advanced Materials, Vol. 20, Issue 24
Damage accumulation in diamond during ion implantation
journal, February 2015
- Khmelnitsky, Roman A.; Dravin, Valeriy A.; Tal, Alexey A.
- Journal of Materials Research, Vol. 30, Issue 9
Turning PMMA Nanofibers into Graphene Nanoribbons by In Situ Electron Beam Irradiation
journal, September 2008
- Duan, Huigao; Xie, Erqing; Han, Li
- Advanced Materials, Vol. 20, Issue 17
Wrinkled hard skins on polymers created by focused ion beam
journal, January 2007
- Moon, M. -W.; Lee, S. H.; Sun, J. -Y.
- Proceedings of the National Academy of Sciences, Vol. 104, Issue 4
Helium Implantation Effects on the Compressive Response of Cu Nanopillars
journal, November 2012
- Guo, Qiang; Landau, Peri; Hosemann, Peter
- Small, Vol. 9, Issue 5
An interbubble fracture mechanism of blister formation on helium-irradiated metals
journal, October 1977
- Evans, J. H.
- Journal of Nuclear Materials, Vol. 68, Issue 2
Designs for a quantum electron microscope
journal, May 2016
- Kruit, P.; Hobbs, R. G.; Kim, C-S.
- Ultramicroscopy, Vol. 164
Subsurface damage from helium ions as a function of dose, beam energy, and dose rate
journal, January 2009
- Livengood, Richard; Tan, Shida; Greenzweig, Yuval
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 27, Issue 6
Amorphous silicon exhibits a glass transition
journal, October 2004
- Hedler, André; Klaumünzer, Siegfried Ludwig; Wesch, Werner
- Nature Materials, Vol. 3, Issue 11
Formation of ordered helium pores in amorphous silicon subjected to low-energy helium ion irradiation
journal, January 2003
- Reutov, V. F.; Sokhatskii, A. S.
- Technical Physics, Vol. 48, Issue 1
Scanning-helium-ion-beam lithography with hydrogen silsesquioxane resist
journal, January 2009
- Winston, D.; Cord, B. M.; Ming, B.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 27, Issue 6
Tailoring the properties of copper nanowires by ion beam irradiation
journal, February 2016
- Kumar, Narinder; Kumar, Rajesh; Kumar, Sushil
- Radiation Physics and Chemistry, Vol. 119
In Situ Mitigation of Subsurface and Peripheral Focused Ion Beam Damage via Simultaneous Pulsed Laser Heating
journal, February 2016
- Stanford, Michael G.; Lewis, Brett B.; Iberi, Vighter
- Small, Vol. 12, Issue 13
Mechanism for the Amorphisation of Diamond
journal, March 2012
- Fairchild, Barbara A.; Rubanov, Sergey; Lau, Desmond W. M.
- Advanced Materials, Vol. 24, Issue 15
SRIM – The stopping and range of ions in matter (2010)
journal, June 2010
- Ziegler, James F.; Ziegler, M. D.; Biersack, J. P.
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 268, Issue 11-12
Nanoscale MRI
journal, February 2015
- Bhallamudi, Vidya Praveen; Hammel, P. Chris
- Nature Nanotechnology, Vol. 10, Issue 2
Shaping and compositional modification of zinc oxide nanowires under energetic manganese ion irradiation
journal, March 2016
- Möller, Wolfhard; Johannes, Andreas; Ronning, Carsten
- Nanotechnology, Vol. 27, Issue 17
Effects of Helium Implantation on the Tensile Properties and Microstructure of Ni 73 P 27 Metallic Glass Nanostructures
journal, August 2014
- Liontas, Rachel; Gu, X. Wendy; Fu, Engang
- Nano Letters, Vol. 14, Issue 9
Softening the ultra-stiff: Controlled variation of Young’s modulus in single-crystal diamond by ion implantation
journal, September 2016
- Battiato, A.; Lorusso, M.; Bernardi, E.
- Acta Materialia, Vol. 116
Focused helium and neon ion beam induced etching for advanced extreme ultraviolet lithography mask repair
journal, March 2014
- Gonzalez, Carlos M.; Timilsina, Rajendra; Li, Guoliang
- Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 32, Issue 2
Raman study of damage extent in graphene nanostructures carved by high energy helium ion beam
journal, June 2014
- Hang, Shuojin; Moktadir, Zakaria; Mizuta, Hiroshi
- Carbon, Vol. 72
Study of damage generation induced by focused helium ion beam in silicon
journal, May 2019
- Li, Rongrong; Zhu, Rui; Chen, Shulin
- Journal of Vacuum Science & Technology B, Vol. 37, Issue 3
Nanophotonics for quantum optics using nitrogen-vacancy centers in diamond
journal, June 2010
- Santori, C.; Barclay, P. E.; Fu, K-M C.
- Nanotechnology, Vol. 21, Issue 27
Direct and Transmission Milling of Suspended Silicon Nitride Membranes With a Focused Helium Ion Beam: Direct and transmission milling of suspended silicon nitride
journal, February 2012
- Marshall, Michael M.; Yang, Jijin; Hall, Adam R.
- Scanning, Vol. 34, Issue 2
Nanopatterning and Electrical Tuning of MoS 2 Layers with a Subnanometer Helium Ion Beam
journal, July 2015
- Fox, Daniel S.; Zhou, Yangbo; Maguire, Pierce
- Nano Letters, Vol. 15, Issue 8
Nano-structuring, surface and bulk modification with a focused helium ion beam
journal, January 2012
- Fox, Daniel; Chen, Yanhui; Faulkner, Colm C.
- Beilstein Journal of Nanotechnology, Vol. 3
Direct measurement and modelling of internal strains in ion-implanted diamond
journal, August 2013
- Bosia, F.; Argiolas, N.; Bazzan, M.
- Journal of Physics: Condensed Matter, Vol. 25, Issue 38
Ultrathin Single Crystal Diamond Nanomechanical Dome Resonators
journal, October 2011
- Zalalutdinov, Maxim K.; Ray, Matthew P.; Photiadis, Douglas M.
- Nano Letters, Vol. 11, Issue 10
The history and development of the helium ion microscope: History and development of helium ion microscope
journal, May 2011
- Economou, Nicholas P.; Notte, John A.; Thompson, William B.
- Scanning, Vol. 34, Issue 2
Nano Josephson superconducting tunnel junctions in YBa2Cu3O7–δ directly patterned with a focused helium ion beam
journal, April 2015
- Cybart, Shane A.; Cho, E. Y.; Wong, T. J.
- Nature Nanotechnology, Vol. 10, Issue 7
Diamond nitrogen-vacancy centers created by scanning focused helium ion beam and annealing
journal, August 2013
- Huang, Z.; Li, W. -D.; Santori, C.
- Applied Physics Letters, Vol. 103, Issue 8
A predictive interatomic potential for He in Cu and Nb
journal, March 2011
- Kashinath, A.; Demkowicz, M. J.
- Modelling and Simulation in Materials Science and Engineering, Vol. 19, Issue 3
Proton magnetic resonance imaging using a nitrogen–vacancy spin sensor
journal, December 2014
- Rugar, D.; Mamin, H. J.; Sherwood, M. H.
- Nature Nanotechnology, Vol. 10, Issue 2
Tailoring the properties of semiconductor nanowires using ion beams
journal, August 2010
- Ronning, C.; Borschel, C.; Geburt, S.
- physica status solidi (b), Vol. 247, Issue 10
Helium Ion Microscopy (HIM) for the imaging of biological samples at sub-nanometer resolution
journal, December 2013
- Joens, Matthew S.; Huynh, Chuong; Kasuboski, James M.
- Scientific Reports, Vol. 3, Issue 1
Exploring proximity effects and large depth of field in helium ion beam lithography: large-area dense patterns and tilted surface exposure
journal, May 2018
- Flatabø, Ranveig; Agarwal, Akshay; Hobbs, Richard
- Nanotechnology, Vol. 29, Issue 27
Doping of Graphene by Low-Energy Ion Beam Implantation: Structural, Electronic, and Transport Properties
journal, July 2015
- Willke, Philip; Amani, Julian A.; Sinterhauf, Anna
- Nano Letters, Vol. 15, Issue 8
Axial p-n Junctions Realized in Silicon Nanowires by Ion Implantation
journal, April 2009
- Hoffmann, S.; Bauer, J.; Ronning, C.
- Nano Letters, Vol. 9, Issue 4
Coherent Optical Transitions in Implanted Nitrogen Vacancy Centers
journal, March 2014
- Chu, Y.; de Leon, N. P.; Shields, B. J.
- Nano Letters, Vol. 14, Issue 4
IM3D: A parallel Monte Carlo code for efficient simulations of primary radiation displacements and damage in 3D geometry
journal, December 2015
- Li, Yong Gang; Yang, Yang; Short, Michael P.
- Scientific Reports, Vol. 5, Issue 1
Mechanism and applications of helium transmission milling in thin membranes
journal, November 2014
- Tan, Shida; Klein, Kate; Shima, Darryl
- Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 32, Issue 6
Radiation-Induced Helium Nanobubbles Enhance Ductility in Submicron-Sized Single-Crystalline Copper
journal, June 2016
- Ding, Ming-Shuai; Du, Jun-Ping; Wan, Liang
- Nano Letters, Vol. 16, Issue 7
Straightening Suspended Single Walled Carbon Nanotubes by Ion Irradiation
journal, June 2004
- Jung, Yung Joon; Homma, Yoshikazu; Vajtai, Robert
- Nano Letters, Vol. 4, Issue 6
Helium ion microscopy
journal, March 2014
- Hlawacek, Gregor; Veligura, Vasilisa; van Gastel, Raoul
- Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 32, Issue 2
Anomalous Plastic Deformation and Sputtering of Ion Irradiated Silicon Nanowires
journal, May 2015
- Johannes, Andreas; Noack, Stefan; Wesch, Werner
- Nano Letters, Vol. 15, Issue 6
Nano-beam and nano-target effects in ion radiation
journal, January 2018
- Yang, Yang; Li, Yong Gang; Short, Michael P.
- Nanoscale, Vol. 10, Issue 4
Focused helium ion beam deposited low resistivity cobalt metal lines with 10 nm resolution: implications for advanced circuit editing
journal, October 2013
- Wu, H.; Stern, L. A.; Xia, D.
- Journal of Materials Science: Materials in Electronics, Vol. 25, Issue 2
Influence of Cu ion implantation on the microstructure and cathodoluminescence of ZnS nanostructures
journal, July 2016
- Shang, L. Y.; Zhang, D.; Liu, B. Y.
- Physica E: Low-dimensional Systems and Nanostructures, Vol. 81
Focused helium-ion beam irradiation effects on electrical transport properties of few-layer WSe2: enabling nanoscale direct write homo-junctions
journal, June 2016
- Stanford, Michael G.; Pudasaini, Pushpa Raj; Belianinov, Alex
- Scientific Reports, Vol. 6, Issue 1
Diamond MEMS — a new emerging technology
journal, March 1999
- Kohn, E.; Gluche, P.; Adamschik, M.
- Diamond and Related Materials, Vol. 8, Issue 2-5
Radiation tolerance of nanostructured ZrN coatings against swift heavy ion irradiation
journal, November 2013
- Janse van Vuuren, A.; Skuratov, V. A.; Uglov, V. V.
- Journal of Nuclear Materials, Vol. 442, Issue 1-3