Focused-helium-ion-beam blow forming of nanostructures: radiation damage and nanofabrication
Abstract
Targeted irradiation of nanostructures by a finely focused ion beam provides routes to improved control of material modification and understanding of the physics of interactions between ion beams and nanomaterials. Here, we studied radiation damage in crystalline diamond and silicon nanostructures using a focused helium ion beam, with the former exhibiting extremely long-range ion propagation and large plastic deformation in a process visibly analogous to blow forming. We report significant dependence of damage morphology on material, geometry, and irradiation conditions (ion dose, ion energy, ion species, and location). In this work, we suggest that our approach and findings will not only improve the understanding of radiation damage in isolated nanostructures, but will also support the design of new engineering materials and devices for current and future applications in nanotechnology.
- Authors:
-
[1];
[2];
[2]
- Trinity College Dublin, Dublin (Ireland). School of Chemistry
- Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Publication Date:
- Research Org.:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1570233
- Grant/Contract Number:
- AC02-05CH11231
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Nanotechnology
- Additional Journal Information:
- Journal Volume: 31; Journal Issue: 4; Journal ID: ISSN 0957-4484
- Publisher:
- IOP Publishing
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 77 NANOSCIENCE AND NANOTECHNOLOGY
Citation Formats
Hobbs, Richard, Kim, Chungsoo, Agarwal, Akshay, Yang, Yang, Manfrinato, Vitor, Short, Michael P., Li, Ju, and Berggren, Karl K. Focused-helium-ion-beam blow forming of nanostructures: radiation damage and nanofabrication. United States: N. p., 2019.
Web. doi:10.1088/1361-6528/ab4a65.
Hobbs, Richard, Kim, Chungsoo, Agarwal, Akshay, Yang, Yang, Manfrinato, Vitor, Short, Michael P., Li, Ju, & Berggren, Karl K. Focused-helium-ion-beam blow forming of nanostructures: radiation damage and nanofabrication. United States. doi:10.1088/1361-6528/ab4a65.
Hobbs, Richard, Kim, Chungsoo, Agarwal, Akshay, Yang, Yang, Manfrinato, Vitor, Short, Michael P., Li, Ju, and Berggren, Karl K. Wed .
"Focused-helium-ion-beam blow forming of nanostructures: radiation damage and nanofabrication". United States. doi:10.1088/1361-6528/ab4a65. https://www.osti.gov/servlets/purl/1570233.
@article{osti_1570233,
title = {Focused-helium-ion-beam blow forming of nanostructures: radiation damage and nanofabrication},
author = {Hobbs, Richard and Kim, Chungsoo and Agarwal, Akshay and Yang, Yang and Manfrinato, Vitor and Short, Michael P. and Li, Ju and Berggren, Karl K.},
abstractNote = {Targeted irradiation of nanostructures by a finely focused ion beam provides routes to improved control of material modification and understanding of the physics of interactions between ion beams and nanomaterials. Here, we studied radiation damage in crystalline diamond and silicon nanostructures using a focused helium ion beam, with the former exhibiting extremely long-range ion propagation and large plastic deformation in a process visibly analogous to blow forming. We report significant dependence of damage morphology on material, geometry, and irradiation conditions (ion dose, ion energy, ion species, and location). In this work, we suggest that our approach and findings will not only improve the understanding of radiation damage in isolated nanostructures, but will also support the design of new engineering materials and devices for current and future applications in nanotechnology.},
doi = {10.1088/1361-6528/ab4a65},
journal = {Nanotechnology},
number = 4,
volume = 31,
place = {United States},
year = {2019},
month = {10}
}
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