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Title: Three-dimensional measurements of plasma parameters in an inductively coupled plasma processing chamber

Authors:
 [1];  [1]; ORCiD logo [1];  [2]; ORCiD logo [3];  [4]; ORCiD logo [4]
  1. Department of Physics, University of California, Los Angeles, California 90095, USA
  2. LAM Research Corp., Freemont, California 94538, USA
  3. Chemical Engineering Department, University of Michigan, Ann Arbor, Michigan 48109-2122, USA
  4. Electrical Engineering and Computer Science Department, University of Michigan, Ann Arbor, Michigan 48109-2122, USA
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1569095
Grant/Contract Number:  
SC0001319; SC0014132
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Physics of Plasmas
Additional Journal Information:
Journal Name: Physics of Plasmas Journal Volume: 26 Journal Issue: 10; Journal ID: ISSN 1070-664X
Publisher:
American Institute of Physics
Country of Publication:
United States
Language:
English

Citation Formats

Han, Jia, Pribyl, Patrick, Gekelman, Walter, Paterson, Alex, Lanham, Steven J., Qu, Chenhui, and Kushner, Mark J. Three-dimensional measurements of plasma parameters in an inductively coupled plasma processing chamber. United States: N. p., 2019. Web. doi:10.1063/1.5115415.
Han, Jia, Pribyl, Patrick, Gekelman, Walter, Paterson, Alex, Lanham, Steven J., Qu, Chenhui, & Kushner, Mark J. Three-dimensional measurements of plasma parameters in an inductively coupled plasma processing chamber. United States. doi:10.1063/1.5115415.
Han, Jia, Pribyl, Patrick, Gekelman, Walter, Paterson, Alex, Lanham, Steven J., Qu, Chenhui, and Kushner, Mark J. Tue . "Three-dimensional measurements of plasma parameters in an inductively coupled plasma processing chamber". United States. doi:10.1063/1.5115415.
@article{osti_1569095,
title = {Three-dimensional measurements of plasma parameters in an inductively coupled plasma processing chamber},
author = {Han, Jia and Pribyl, Patrick and Gekelman, Walter and Paterson, Alex and Lanham, Steven J. and Qu, Chenhui and Kushner, Mark J.},
abstractNote = {},
doi = {10.1063/1.5115415},
journal = {Physics of Plasmas},
number = 10,
volume = 26,
place = {United States},
year = {2019},
month = {10}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: 10.1063/1.5115415

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