Title: The Velociprobe: An ultrafast hard X-ray nanoprobe for high-resolution ptychographic imaging

Abstract

Motivated by the advanced photon source upgrade, a new hard X-ray microscope called "Velociprobe" has been recently designed and built for fast ptychographic imaging with high spatial resolution. We are addressing the challenges of high-resolution and fast scanning with novel hardware designs, advanced motion controls, and new data acquisition strategies, including the use of high-bandwidth interferometric measurements. The use of granite, air-bearing-supported stages provides the necessary long travel ranges for coarse motion to accommodate real samples and variable energy operation while remaining highly stable during fine scanning. Scanning the low-mass zone plate enables high-speed and high-precision motion of the probe over the sample. With an advanced control algorithm implemented in a closed-loop feedback system, the setup achieves a position resolution (3σ) of 2 nm. The instrument performance is evaluated by 2D fly-scan ptychography with our developed data acquisition strategies. A spatial resolution of 8.8 nm has been demonstrated on a Au test sample with a detector continuous frame rate of 200 Hz. Using a higher flux X-ray source provided by double-multilayer monochromator, we achieve 10 nm resolution for an integrated circuit sample in an ultrafast scan with a detector's full continuous frame rate of 3000 Hz (0.33 ms per exposure),more » resulting in an outstanding imaging rate of 9 x 10⁴ resolution elements per second« less

Authors:

Deng, Junjing  ^[1];

• Search DOE PAGES for author "Deng, Junjing"
• Search DOE PAGES for ORCID "0000-0003-4472-3385"
• Search orcid.org for ORCID "0000-0003-4472-3385"

Preissner, Curt  ^[1];

• Search DOE PAGES for author "Preissner, Curt"
• Search DOE PAGES for ORCID "0000-0001-7107-358X"
• Search orcid.org for ORCID "0000-0001-7107-358X"

Klug, Jeffrey A.  ^[1];

• Search DOE PAGES for author "Klug, Jeffrey A."
• Search DOE PAGES for ORCID "0000-0002-1130-5569"
• Search orcid.org for ORCID "0000-0002-1130-5569"

Mashrafi, Sheikh ^[1]; Roehrig, Christian ^[1]; Jiang, Yi  ^[1];

• Search DOE PAGES for author "Jiang, Yi"
• Search DOE PAGES for ORCID "0000-0002-2807-1324"
• Search orcid.org for ORCID "0000-0002-2807-1324"

Yao, Yudong ^[1]; Wojcik, Michael ^[1]; Wyman, Max D. ^[1]; Vine, David ^[1]; Yue, Ke ^[1]; Chen, Si ^[1]; Mooney, Tim ^[1]; Wang, Maoyu ^[2]; Feng, Zhenxing  ^[2];

• Search DOE PAGES for author "Feng, Zhenxing"
• Search DOE PAGES for ORCID "0000-0001-7598-5076"
• Search orcid.org for ORCID "0000-0001-7598-5076"

Jin, Dafei ^[1]; Cai, Zhonghou ^[1]; Lai, Barry ^[1]; Vogt, Stefan ^[1]

---

+ Show Author Affiliations

1. Argonne National Lab. (ANL), Lemont, IL (United States)
2. Oregon State Univ., Corvallis, OR (United States)

Publication Date:

2019-08-15

Research Org.:

Argonne National Lab. (ANL), Argonne, IL (United States)

Sponsoring Org.:

USDOE Office of Science (SC); U.S. Department of National Intelligence - Intelligence Advanced Research Projects Activity (IARPA)

OSTI Identifier:

1565795

Alternate Identifier(s):

OSTI ID: 1557375

Grant/Contract Number:  

AC02-06CH11357; 2015-153-N0

Resource Type:

Accepted Manuscript

Journal Name:

Review of Scientific Instruments

Additional Journal Information:

Journal Volume: 90; Journal Issue: 8; Journal ID: ISSN 0034-6748

Publisher:

American Institute of Physics (AIP)

Country of Publication:

United States

Language:

English

Subject:

36 MATERIALS SCIENCE; 47 OTHER INSTRUMENTATION