CMOS-compatible, piezo-optomechanically tunable photonics for visible wavelengths and cryogenic temperatures

doi:10.1364/OE.27.028588

Title: CMOS-compatible, piezo-optomechanically tunable photonics for visible wavelengths and cryogenic temperatures

Abstract

We demonstrate a platform for phase and amplitude modulation in silicon nitride photonic integrated circuits via piezo-optomechanical coupling using tightly mechanically coupled aluminum nitride actuators. The platform, fabricated in a CMOS foundry, enables scalable active photonic integrated circuits for visible wavelengths, and the piezoelectric actuation functions without performance degradation down to cryogenic temperatures. As an example of the potential of the platform, we demonstrate a compact (~40 µm diameter) silicon nitride ring resonator modulator operating at 780 nm with intrinsic quality factors in excess of 1.5 million, >10 dB change in extinction ratio with 2 V applied, a switching time less than 4 ns, and a switching energy of 0.5 pJ/bit. We characterize the exemplary device at room temperature and 7 K. At 7 K, the device obtains a resistance of approximately 20 teraohms, allowing it to operate with sub-picowatt electrical power dissipation. We further demonstrate a Mach-Zehnder modulator constructed in the same platform with piezoelectrically tunable phase shifting arms, with 750 ns switching time constant and 20 nW steady-state power dissipation at room temperature.

Authors:: Stanfield, P. R.; Leenheer, A. J.; Michael, C. P.; Sims, R.; Eichenfield, M.

Publication Date:: 2019-09-20

Research Org.:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:: USDOE National Nuclear Security Administration (NNSA)

OSTI Identifier:: 1563021

Alternate Identifier(s):: OSTI ID: 1574803

Report Number(s):: SAND2019-7490J
Journal ID: ISSN 1094-4087; OPEXFF

Grant/Contract Number:: AC04-94AL85000; NA0003525

Resource Type:: Published Article

Journal Name:: Optics Express

Additional Journal Information:: Journal Name: Optics Express Journal Volume: 27 Journal Issue: 20; Journal ID: ISSN 1094-4087

Publisher:: Optical Society of America (OSA)

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING

Citation Formats


                    Stanfield, P. R., Leenheer, A. J., Michael, C. P., Sims, R., and Eichenfield, M. CMOS-compatible, piezo-optomechanically tunable photonics for visible wavelengths and cryogenic temperatures.  United States: N. p., 2019. 
        Web.  doi:10.1364/OE.27.028588.

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                    Stanfield, P. R., Leenheer, A. J., Michael, C. P., Sims, R., & Eichenfield, M. CMOS-compatible, piezo-optomechanically tunable photonics for visible wavelengths and cryogenic temperatures.  United States.  doi:10.1364/OE.27.028588.

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                    Stanfield, P. R., Leenheer, A. J., Michael, C. P., Sims, R., and Eichenfield, M. Fri .  
        "CMOS-compatible, piezo-optomechanically tunable photonics for visible wavelengths and cryogenic temperatures".  United States.  doi:10.1364/OE.27.028588.

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@article{osti_1563021,

  title        = {CMOS-compatible, piezo-optomechanically tunable photonics for visible wavelengths and cryogenic temperatures},

  author       = {Stanfield, P. R. and Leenheer, A. J. and Michael, C. P. and Sims, R. and Eichenfield, M.},

  abstractNote = {We demonstrate a platform for phase and amplitude modulation in silicon nitride photonic integrated circuits via piezo-optomechanical coupling using tightly mechanically coupled aluminum nitride actuators. The platform, fabricated in a CMOS foundry, enables scalable active photonic integrated circuits for visible wavelengths, and the piezoelectric actuation functions without performance degradation down to cryogenic temperatures. As an example of the potential of the platform, we demonstrate a compact (~40 µm diameter) silicon nitride ring resonator modulator operating at 780 nm with intrinsic quality factors in excess of 1.5 million, >10 dB change in extinction ratio with 2 V applied, a switching time less than 4 ns, and a switching energy of 0.5 pJ/bit. We characterize the exemplary device at room temperature and 7 K. At 7 K, the device obtains a resistance of approximately 20 teraohms, allowing it to operate with sub-picowatt electrical power dissipation. We further demonstrate a Mach-Zehnder modulator constructed in the same platform with piezoelectrically tunable phase shifting arms, with 750 ns switching time constant and 20 nW steady-state power dissipation at room temperature.},

  doi          = {10.1364/OE.27.028588},

  journal      = {Optics Express},

  number       = 20,

  volume       = 27,

  place        = {United States},

  year         = {2019},

  month        = {9}

}

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DOI: 10.1364/OE.27.028588

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Title: CMOS-compatible, piezo-optomechanically tunable photonics for visible wavelengths and cryogenic temperatures

Abstract

Citation Formats

Perturbation theory for Maxwell’s equations with shifting material boundaries journal, June 2002

Low-loss integrated photonics for the blue and ultraviolet regime journal, February 2019

Bi-directional conversion between microwave and optical frequencies in a piezoelectric optomechanical device journal, July 2016

Piezoelectric actuation of silica-on-silicon waveguide devices journal, October 1998

Stress-optic modulator in TriPleX platform using a piezoelectric lead zirconate titanate (PZT) thin film journal, January 2015

Quantum electromechanics on silicon nitride nanomembranes journal, August 2016

Acousto-optic modulation of a photonic crystal nanocavity with Lamb waves in microwave K band journal, November 2015

Aluminum nitride nanophotonic circuits operating at ultraviolet wavelengths journal, March 2014

Thermo-Optic Characterization of Silicon Nitride Resonators for Cryogenic Photonic Circuits journal, June 2016

Lithium niobate piezo-optomechanical crystals journal, January 2019

Optical properties and residual stress in aluminum nitride films prepared by alternating-current dual reactive magnetron sputtering journal, January 2011

Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages journal, September 2018

Sub-optical wavelength acoustic wave modulation of integrated photonic resonators at microwave frequencies journal, November 2014

Erratum: Hybrid polymer/sol–gel waveguide modulations with exceptionally large electro–optic coefficients journal, July 2007

Acousto-optical modulation of thin film lithium niobate waveguide devices journal, January 2019

Optical Characteristics of Amorphous Silicon Nitride Thin Films Prepared by Electron Cyclotron Resonance Plasma Chemical Vapor Deposition journal, May 1994

Accurate measurement of scattering and absorption loss in microphotonic devices journal, January 2007

Design of tunable GHz-frequency optomechanical crystal resonators journal, January 2016

Low-loss waveguides on Y-cut thin film lithium niobate: towards acousto-optic applications journal, January 2019

Large-scale broadband digital silicon photonic switches with vertical adiabatic couplers journal, January 2016

Translational MEMS Platform for Planar Optical Switching Fabrics journal, June 2019

Phase tuning by length contraction journal, January 2018

Low hydrogen content stoichiometric silicon nitride films deposited by plasma‐enhanced chemical vapor deposition journal, August 1991

Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators journal, April 2016

Nano-opto-electro-mechanical switch based on a four-waveguide directional coupler journal, January 2017

Piezoelectric actuation of aluminum nitride contour mode optomechanical resonators journal, January 2015

Thickness dependence of the properties of highly c -axis textured AlN thin films journal, March 2004

Aluminum nitride electro-optic phase shifter for backend integration on silicon journal, January 2016

Submicron silicon waveguide optical switch driven by microelectromechanical actuator journal, March 2008

Ultra-low-power stress-optics modulator for microwave photonics conference, February 2017

Influence of growth temperature and scandium concentration on piezoelectric response of scandium aluminum nitride alloy thin films journal, October 2009

Electromechanical Brillouin scattering in integrated optomechanical waveguides journal, January 2019

Bistability in silicon microring resonator based on strain induced by a piezoelectric lead zirconate titanate thin film journal, April 2012

Electromechanical Brillouin scattering in integrated planar photonics journal, August 2019

Operation of high-speed silicon photonic micro-disk modulators at cryogenic temperatures journal, January 2017

Large-scale silicon photonic switches with movable directional couplers journal, January 2015

Low-Loss, Silicon Integrated, Aluminum Nitride Photonic Circuits and Their Use for Electro-Optic Signal Processing journal, June 2012

Aluminum nitride as a new material for chip-scale optomechanics and nonlinear optics journal, September 2012

Effect of precursors on propagation loss for plasma-enhanced chemical vapor deposition of SiN_x:H waveguides journal, January 2016

Perturbation theory for Maxwell’s equations with shifting material boundaries
journal, June 2002

Low-loss integrated photonics for the blue and ultraviolet regime
journal, February 2019

Bi-directional conversion between microwave and optical frequencies in a piezoelectric optomechanical device
journal, July 2016

Piezoelectric actuation of silica-on-silicon waveguide devices
journal, October 1998

Stress-optic modulator in TriPleX platform using a piezoelectric lead zirconate titanate (PZT) thin film
journal, January 2015

Quantum electromechanics on silicon nitride nanomembranes
journal, August 2016

Acousto-optic modulation of a photonic crystal nanocavity with Lamb waves in microwave K band
journal, November 2015

Aluminum nitride nanophotonic circuits operating at ultraviolet wavelengths
journal, March 2014

Thermo-Optic Characterization of Silicon Nitride Resonators for Cryogenic Photonic Circuits
journal, June 2016

Lithium niobate piezo-optomechanical crystals
journal, January 2019

Optical properties and residual stress in aluminum nitride films prepared by alternating-current dual reactive magnetron sputtering
journal, January 2011

Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages
journal, September 2018

Sub-optical wavelength acoustic wave modulation of integrated photonic resonators at microwave frequencies
journal, November 2014

Erratum: Hybrid polymer/sol–gel waveguide modulations with exceptionally large electro–optic coefficients
journal, July 2007

Acousto-optical modulation of thin film lithium niobate waveguide devices
journal, January 2019

Optical Characteristics of Amorphous Silicon Nitride Thin Films Prepared by Electron Cyclotron Resonance Plasma Chemical Vapor Deposition
journal, May 1994

Accurate measurement of scattering and absorption loss in microphotonic devices
journal, January 2007

Design of tunable GHz-frequency optomechanical crystal resonators
journal, January 2016

Low-loss waveguides on Y-cut thin film lithium niobate: towards acousto-optic applications
journal, January 2019

Large-scale broadband digital silicon photonic switches with vertical adiabatic couplers
journal, January 2016

Translational MEMS Platform for Planar Optical Switching Fabrics
journal, June 2019

Phase tuning by length contraction
journal, January 2018

Low hydrogen content stoichiometric silicon nitride films deposited by plasma‐enhanced chemical vapor deposition
journal, August 1991

Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators
journal, April 2016

Nano-opto-electro-mechanical switch based on a four-waveguide directional coupler
journal, January 2017

Piezoelectric actuation of aluminum nitride contour mode optomechanical resonators
journal, January 2015

Thickness dependence of the properties of highly c -axis textured AlN thin films
journal, March 2004

Aluminum nitride electro-optic phase shifter for backend integration on silicon
journal, January 2016

Submicron silicon waveguide optical switch driven by microelectromechanical actuator
journal, March 2008

Ultra-low-power stress-optics modulator for microwave photonics
conference, February 2017

Influence of growth temperature and scandium concentration on piezoelectric response of scandium aluminum nitride alloy thin films
journal, October 2009

Electromechanical Brillouin scattering in integrated optomechanical waveguides
journal, January 2019

Bistability in silicon microring resonator based on strain induced by a piezoelectric lead zirconate titanate thin film
journal, April 2012

Electromechanical Brillouin scattering in integrated planar photonics
journal, August 2019

Operation of high-speed silicon photonic micro-disk modulators at cryogenic temperatures
journal, January 2017

Large-scale silicon photonic switches with movable directional couplers
journal, January 2015

Low-Loss, Silicon Integrated, Aluminum Nitride Photonic Circuits and Their Use for Electro-Optic Signal Processing
journal, June 2012

Aluminum nitride as a new material for chip-scale optomechanics and nonlinear optics
journal, September 2012

Effect of precursors on propagation loss for plasma-enhanced chemical vapor deposition of SiN_x:H waveguides
journal, January 2016