Ultraviolet/ozone and oxygen plasma treatments for improving the contact of carbon nanotube thin film transistors

Journal Article · 31 May 2018 · Science Bulletin

DOI: https://doi.org/10.1016/j.scib.2018.05.029 · OSTI ID:1562957

Huang, Qi; Xia, Jiye; Zhao, Jie; Dong, Guodong; Liu, Fang; Meng, Hu; Liang, Xuelei

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• Sponsoring Organization: USDOE Office of Electricity (OE), Advanced Grid Research & Development. Power Systems Engineering Research
• OSTI ID: 1562957
• Journal Information: Science Bulletin, Journal Name: Science Bulletin Journal Issue: 12 Vol. 63; ISSN 2095-9273
• Publisher: ElsevierCopyright Statement
• Country of Publication: China
• Language: English