Ultraviolet/ozone and oxygen plasma treatments for improving the contact of carbon nanotube thin film transistors

Huang, Qi; Xia, Jiye; Zhao, Jie; Dong, Guodong; Liu, Fang; Meng, Hu; Liang, Xuelei

doi:10.1016/j.scib.2018.05.029

Title: Ultraviolet/ozone and oxygen plasma treatments for improving the contact of carbon nanotube thin film transistors

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Authors:: Huang, Qi; Xia, Jiye; Zhao, Jie; Dong, Guodong; Liu, Fang; Meng, Hu; Liang, Xuelei

Publication Date:: Fri Jun 01 00:00:00 EDT 2018

Sponsoring Org.:: USDOE Office of Electricity (OE), Advanced Grid Research & Development. Power Systems Engineering Research

OSTI Identifier:: 1562957

Grant/Contract Number:: 2016YFA0201902

Resource Type:: Publisher's Accepted Manuscript

Journal Name:: Science Bulletin

Additional Journal Information:: Journal Name: Science Bulletin Journal Volume: 63 Journal Issue: 12; Journal ID: ISSN 2095-9273

Publisher:: Elsevier

Country of Publication:: China

Language:: English

Citation Formats


                    Huang, Qi, Xia, Jiye, Zhao, Jie, Dong, Guodong, Liu, Fang, Meng, Hu, and Liang, Xuelei. Ultraviolet/ozone and oxygen plasma treatments for improving the contact of carbon nanotube thin film transistors.  China: N. p., 2018. 
Web.  doi:10.1016/j.scib.2018.05.029.

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                    Huang, Qi, Xia, Jiye, Zhao, Jie, Dong, Guodong, Liu, Fang, Meng, Hu, & Liang, Xuelei. Ultraviolet/ozone and oxygen plasma treatments for improving the contact of carbon nanotube thin film transistors.  China.  https://doi.org/10.1016/j.scib.2018.05.029

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                    Huang, Qi, Xia, Jiye, Zhao, Jie, Dong, Guodong, Liu, Fang, Meng, Hu, and Liang, Xuelei. Fri .  
"Ultraviolet/ozone and oxygen plasma treatments for improving the contact of carbon nanotube thin film transistors".  China.  https://doi.org/10.1016/j.scib.2018.05.029.

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@article{osti_1562957,

  title        = {Ultraviolet/ozone and oxygen plasma treatments for improving the contact of carbon nanotube thin film transistors},

  author       = {Huang, Qi and Xia, Jiye and Zhao, Jie and Dong, Guodong and Liu, Fang and Meng, Hu and Liang, Xuelei},

  abstractNote = {},

  doi          = {10.1016/j.scib.2018.05.029},

  journal      = {Science Bulletin},

  number       = 12,

  volume       = 63,

  place        = {China},

  year         = {Fri Jun 01 00:00:00 EDT 2018},

  month        = {Fri Jun 01 00:00:00 EDT 2018}

}

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