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Title: Structurally Stable Manganese Alkoxide Films Grown by Hybrid Molecular Layer Deposition for Electrochemical Applications

Abstract

Hybrid molecular layer deposition (MLD) has significant potential for the creation of ultrathin electrochemically active materials, due to its ability to combine organic and inorganic species to modulate film properties. However, only a limited number of hybrid MLD processes are demonstrated with electrochemically relevant elements, such as manganese. In this work, a “manganicone” manganese hybrid MLD chemistry is developed using the precursors bis(ethylcyclopentadienyl)manganese and ethylene glycol. The resulting manganese alkoxide coordination networks are shown to have many interesting properties, including the ability to seamlessly fill high aspect ratio vias and the chemical conversion into manganese carboxylate in air over several hours at room temperature. Linear, self-saturating growth is reported. Importantly, hybrid manganicone films annealed to 480 °C in air demonstrate a greater stability to restructuring during electrochemical testing than their inorganic counterparts grown by atomic layer deposition, without reducing the activity of the reactive sites on the manganese surface. Therefore, hybrid manganese films grown by MLD have significant promise for use as catalysts for the oxygen evolution reaction and as electrodes in thin film batteries.

Authors:
ORCiD logo [1];  [1]; ORCiD logo [1];  [1];  [1];  [1];  [2];  [2]; ORCiD logo [1]
  1. Stanford Univ., CA (United States)
  2. Applied Materials, Sunnyvale, CA (United States)
Publication Date:
Research Org.:
SLAC National Accelerator Lab., Menlo Park, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
OSTI Identifier:
1560677
Alternate Identifier(s):
OSTI ID: 1557372
Grant/Contract Number:  
AC02‐76SF00515; CHE‐1607339; CHE‐1213879; ECCS‐1542152
Resource Type:
Accepted Manuscript
Journal Name:
Advanced Functional Materials
Additional Journal Information:
Journal Volume: 29; Journal Issue: 43; Journal ID: ISSN 1616-301X
Publisher:
Wiley
Country of Publication:
United States
Language:
English
Subject:
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY; 36 MATERIALS SCIENCE; catalysis; functional coatings; hybrid materials; surface modification; thin films

Citation Formats

Bergsman, David S., Baker, Jon G., Closser, Richard G., MacIsaac, Callisto, Lillethorup, Mie, Strickler, Alaina L., Azarnouche, Laurent, Godet, Ludovic, and Bent, Stacey F. Structurally Stable Manganese Alkoxide Films Grown by Hybrid Molecular Layer Deposition for Electrochemical Applications. United States: N. p., 2019. Web. https://doi.org/10.1002/adfm.201904129.
Bergsman, David S., Baker, Jon G., Closser, Richard G., MacIsaac, Callisto, Lillethorup, Mie, Strickler, Alaina L., Azarnouche, Laurent, Godet, Ludovic, & Bent, Stacey F. Structurally Stable Manganese Alkoxide Films Grown by Hybrid Molecular Layer Deposition for Electrochemical Applications. United States. https://doi.org/10.1002/adfm.201904129
Bergsman, David S., Baker, Jon G., Closser, Richard G., MacIsaac, Callisto, Lillethorup, Mie, Strickler, Alaina L., Azarnouche, Laurent, Godet, Ludovic, and Bent, Stacey F. Thu . "Structurally Stable Manganese Alkoxide Films Grown by Hybrid Molecular Layer Deposition for Electrochemical Applications". United States. https://doi.org/10.1002/adfm.201904129. https://www.osti.gov/servlets/purl/1560677.
@article{osti_1560677,
title = {Structurally Stable Manganese Alkoxide Films Grown by Hybrid Molecular Layer Deposition for Electrochemical Applications},
author = {Bergsman, David S. and Baker, Jon G. and Closser, Richard G. and MacIsaac, Callisto and Lillethorup, Mie and Strickler, Alaina L. and Azarnouche, Laurent and Godet, Ludovic and Bent, Stacey F.},
abstractNote = {Hybrid molecular layer deposition (MLD) has significant potential for the creation of ultrathin electrochemically active materials, due to its ability to combine organic and inorganic species to modulate film properties. However, only a limited number of hybrid MLD processes are demonstrated with electrochemically relevant elements, such as manganese. In this work, a “manganicone” manganese hybrid MLD chemistry is developed using the precursors bis(ethylcyclopentadienyl)manganese and ethylene glycol. The resulting manganese alkoxide coordination networks are shown to have many interesting properties, including the ability to seamlessly fill high aspect ratio vias and the chemical conversion into manganese carboxylate in air over several hours at room temperature. Linear, self-saturating growth is reported. Importantly, hybrid manganicone films annealed to 480 °C in air demonstrate a greater stability to restructuring during electrochemical testing than their inorganic counterparts grown by atomic layer deposition, without reducing the activity of the reactive sites on the manganese surface. Therefore, hybrid manganese films grown by MLD have significant promise for use as catalysts for the oxygen evolution reaction and as electrodes in thin film batteries.},
doi = {10.1002/adfm.201904129},
journal = {Advanced Functional Materials},
number = 43,
volume = 29,
place = {United States},
year = {2019},
month = {8}
}

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Works referenced in this record:

Reversible High-Capacity Si Nanocomposite Anodes for Lithium-ion Batteries Enabled by Molecular Layer Deposition
journal, December 2013

  • Piper, Daniela Molina; Travis, Jonathan J.; Young, Matthias
  • Advanced Materials, Vol. 26, Issue 10
  • DOI: 10.1002/adma.201304714

Shape-controlled synthesis of manganese oxide nanoplates by a polyol-based precursor route
journal, April 2010


Highly Conductive and Transparent Hybrid Organic–Inorganic Zincone Thin Films Using Atomic and Molecular Layer Deposition
journal, November 2012

  • Yoon, Byunghoon; Lee, Byoung H.; George, Steven M.
  • The Journal of Physical Chemistry C, Vol. 116, Issue 46
  • DOI: 10.1021/jp3057477

Pyrolysis of Titanicone Molecular Layer Deposition Films as Precursors for Conducting TiO 2 /Carbon Composite Films
journal, August 2013

  • Abdulagatov, Aziz I.; Terauds, Kalvis E.; Travis, Jonathan J.
  • The Journal of Physical Chemistry C, Vol. 117, Issue 34
  • DOI: 10.1021/jp4051947

Applications of ALD MnO to electrochemical water splitting
journal, January 2015

  • Pickrahn, Katie L.; Gorlin, Yelena; Seitz, Linsey C.
  • Physical Chemistry Chemical Physics, Vol. 17, Issue 21
  • DOI: 10.1039/C5CP00843C

Remarkable Capacity Retention of Nanostructured Manganese Oxide upon Cycling as an Electrode Material for Supercapacitor
journal, March 2009

  • Ragupathy, P.; Park, Dae Hoon; Campet, Guy
  • The Journal of Physical Chemistry C, Vol. 113, Issue 15
  • DOI: 10.1021/jp811407q

A review of atomic layer deposition providing high performance lithium sulfur batteries
journal, January 2017


Ultrathin highly porous alumina films prepared by alucone ABC molecular layer deposition (MLD)
journal, March 2013


A Bifunctional Nonprecious Metal Catalyst for Oxygen Reduction and Water Oxidation
journal, October 2010

  • Gorlin, Yelena; Jaramillo, Thomas F.
  • Journal of the American Chemical Society, Vol. 132, Issue 39, p. 13612-13614
  • DOI: 10.1021/ja104587v

Alucone Alloys with Tunable Properties Using Alucone Molecular Layer Deposition and Al 2 O 3 Atomic Layer Deposition
journal, February 2012

  • Lee, Byoung H.; Yoon, Byunghoon; Anderson, Virginia R.
  • The Journal of Physical Chemistry C, Vol. 116, Issue 5
  • DOI: 10.1021/jp209003h

Benchmarking nanoparticulate metal oxide electrocatalysts for the alkaline water oxidation reaction
journal, January 2016

  • Jung, Suho; McCrory, Charles C. L.; Ferrer, Ivonne M.
  • Journal of Materials Chemistry A, Vol. 4, Issue 8
  • DOI: 10.1039/C5TA07586F

Safe and Durable High-Temperature Lithium–Sulfur Batteries via Molecular Layer Deposited Coating
journal, May 2016


Active MnO x Electrocatalysts Prepared by Atomic Layer Deposition for Oxygen Evolution and Oxygen Reduction Reactions
journal, June 2012

  • Pickrahn, Katie L.; Park, Sang Wook; Gorlin, Yelena
  • Advanced Energy Materials, Vol. 2, Issue 10
  • DOI: 10.1002/aenm.201200230

Enhancement Effect of Noble Metals on Manganese Oxide for the Oxygen Evolution Reaction
journal, September 2015

  • Seitz, Linsey C.; Hersbach, Thomas J. P.; Nordlund, Dennis
  • The Journal of Physical Chemistry Letters, Vol. 6, Issue 20
  • DOI: 10.1021/acs.jpclett.5b01928

Molecular Layer Deposition of Functional Thin Films for Advanced Lithographic Patterning
journal, January 2011

  • Zhou, Han; Bent, Stacey F.
  • ACS Applied Materials & Interfaces, Vol. 3, Issue 2
  • DOI: 10.1021/am1010805

XPS and AFM analysis of antifouling PEG interfaces for microfabricated silicon biosensors
journal, September 2004

  • Sharma, Sadhana; Johnson, Robert W.; Desai, Tejal A.
  • Biosensors and Bioelectronics, Vol. 20, Issue 2
  • DOI: 10.1016/j.bios.2004.01.034

Heat-transport mechanisms in molecular building blocks of inorganic/organic hybrid superlattices
journal, March 2016


A high-energy sulfur cathode in carbonate electrolyte by eliminating polysulfides via solid-phase lithium-sulfur transformation
journal, October 2018


Creating Highly Active Atomic Layer Deposited NiO Electrocatalysts for the Oxygen Evolution Reaction
journal, June 2015

  • Nardi, Katie L.; Yang, Nuoya; Dickens, Colin F.
  • Advanced Energy Materials, Vol. 5, Issue 17
  • DOI: 10.1002/aenm.201500412

Molecular layer deposition of “titanicone”, a titanium-based hybrid material, as an electrode for lithium-ion batteries
journal, January 2016

  • Van de Kerckhove, Kevin; Mattelaer, Felix; Deduytsche, Davy
  • Dalton Transactions, Vol. 45, Issue 3
  • DOI: 10.1039/C5DT03840E

Thermomechanical properties of aluminum alkoxide (alucone) films created using molecular layer deposition
journal, October 2009


Surface Chemistry for Molecular Layer Deposition of Organic and Hybrid Organic−Inorganic Polymers
journal, April 2009

  • George, Steven M.; Yoon, Byunghoon; Dameron, Arrelaine A.
  • Accounts of Chemical Research, Vol. 42, Issue 4
  • DOI: 10.1021/ar800105q

Deposition of MnO Anode and MnO 2 Cathode Thin Films by Plasma Enhanced Atomic Layer Deposition Using the Mn(thd) 3 Precursor
journal, May 2015


Nature of Activated Manganese Oxide for Oxygen Evolution
journal, November 2015

  • Huynh, Michael; Shi, Chenyang; Billinge, Simon J. L.
  • Journal of the American Chemical Society, Vol. 137, Issue 47
  • DOI: 10.1021/jacs.5b06382

Atomic layer deposition for electrochemical energy generation and storage systems
journal, January 2012

  • Peng, Qing; Lewis, Jay S.; Hoertz, Paul G.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 30, Issue 1
  • DOI: 10.1116/1.3672027

Understanding Interactions between Manganese Oxide and Gold That Lead to Enhanced Activity for Electrocatalytic Water Oxidation
journal, March 2014

  • Gorlin, Yelena; Chung, Chia-Jung; Benck, Jesse D.
  • Journal of the American Chemical Society, Vol. 136, Issue 13
  • DOI: 10.1021/ja407581w

Atomic Layer Deposition of Spinel Lithium Manganese Oxide by Film-Body-Controlled Lithium Incorporation for Thin-Film Lithium-Ion Batteries
journal, December 2013

  • Miikkulainen, Ville; Ruud, Amund; Østreng, Erik
  • The Journal of Physical Chemistry C, Vol. 118, Issue 2
  • DOI: 10.1021/jp409399y

In Situ X-ray Absorption Spectroscopy Investigation of a Bifunctional Manganese Oxide Catalyst with High Activity for Electrochemical Water Oxidation and Oxygen Reduction
journal, June 2013

  • Gorlin, Yelena; Lassalle-Kaiser, Benedikt; Benck, Jesse D.
  • Journal of the American Chemical Society, Vol. 135, Issue 23
  • DOI: 10.1021/ja3104632

Deposition of Organic- Inorganic Hybrid Materials by Atomic Layer Deposition
conference, January 2008

  • Nilsen, Ola; Klepper, Karina; Nielsen, Heidi
  • 214th ECS Meeting, ECS Transactions
  • DOI: 10.1149/1.2979975

Recent Progresses and Development of Advanced Atomic Layer Deposition towards High-Performance Li-Ion Batteries
journal, October 2017


Molecular Layer Deposition of Alucone Polymer Films Using Trimethylaluminum and Ethylene Glycol
journal, May 2008

  • Dameron, A. A.; Seghete, D.; Burton, B. B.
  • Chemistry of Materials, Vol. 20, Issue 10
  • DOI: 10.1021/cm7032977

Porous carbon-modified MnO disks prepared by a microwave-polyol process and their superior lithium-ion storage properties
journal, January 2012

  • Sun, Yongming; Hu, Xianluo; Luo, Wei
  • Journal of Materials Chemistry, Vol. 22, Issue 36
  • DOI: 10.1039/c2jm32036c

The relation between structural features and electrochemical activity of MnO2 nanoparticles synthesized from a polyol-made Mn3O4 precursor
journal, March 2013

  • de A. Dias, Cristiane; de Santana, Henrique; Nobre, Marcos A. L.
  • Journal of Solid State Electrochemistry, Vol. 17, Issue 7
  • DOI: 10.1007/s10008-013-2043-1

Manganese(II)Alkoxides
journal, February 1979

  • Horvath, B.; M�seler, R.; Horvath, E. G.
  • Zeitschrift f�r anorganische und allgemeine Chemie, Vol. 449, Issue 1
  • DOI: 10.1002/zaac.19794490103

Electrode surface engineering by atomic layer deposition: A promising pathway toward better energy storage
journal, April 2016


The transformation behaviour of “alucones”, deposited by molecular layer deposition, in nanoporous Al 2 O 3 layers
journal, January 2018

  • Van de Kerckhove, Kevin; Barr, Maïssa K. S.; Santinacci, Lionel
  • Dalton Transactions, Vol. 47, Issue 16
  • DOI: 10.1039/C8DT00723C

Oxygen-Deficient Titania with Adjustable Band Positions and Defects; Molecular Layer Deposition of Hybrid Organic–Inorganic Thin Films as Precursors for Enhanced Photocatalysis
journal, February 2016

  • Sarkar, Debabrata; Ishchuk, Sergey; Taffa, Dereje Hailu
  • The Journal of Physical Chemistry C, Vol. 120, Issue 7
  • DOI: 10.1021/acs.jpcc.5b11795

Stabilizing Ni Catalysts by Molecular Layer Deposition for Harsh, Dry Reforming Conditions
journal, July 2014

  • Gould, Troy D.; Izar, Alan; Weimer, Alan W.
  • ACS Catalysis, Vol. 4, Issue 8
  • DOI: 10.1021/cs500809w

Nanoporous Nitrogen-Doped Titanium Dioxide with Excellent Photocatalytic Activity under Visible Light Irradiation Produced by Molecular Layer Deposition
journal, July 2013

  • Chen, Chaoqiu; Li, Ping; Wang, Guizhen
  • Angewandte Chemie International Edition, Vol. 52, Issue 35
  • DOI: 10.1002/anie.201302329

Oxygen Reduction Properties of Bifunctional α-Manganese Oxide Electrocatalysts in Aqueous and Organic Electrolytes
journal, October 2011

  • Benbow, E. M.; Kelly, S. P.; Zhao, L.
  • The Journal of Physical Chemistry C, Vol. 115, Issue 44
  • DOI: 10.1021/jp2055443

Manganese oxide phases and morphologies: A study on calcination temperature and atmospheric dependence
journal, January 2015

  • Augustin, Matthias; Fenske, Daniela; Bardenhagen, Ingo
  • Beilstein Journal of Nanotechnology, Vol. 6
  • DOI: 10.3762/bjnano.6.6

Organic and inorganic–organic thin film structures by molecular layer deposition: A review
journal, January 2014

  • Sundberg, Pia; Karppinen, Maarit
  • Beilstein Journal of Nanotechnology, Vol. 5
  • DOI: 10.3762/bjnano.5.123

Superior stable sulfur cathodes of Li–S batteries enabled by molecular layer deposition
journal, January 2014

  • Li, Xia; Lushington, Andrew; Liu, Jian
  • Chemical Communications, Vol. 50, Issue 68
  • DOI: 10.1039/C4CC04097J

X-ray photoelectron spectroscopy of manganese—oxygen systems
journal, January 1975

  • Oku, Masaoki; Hirokawa, Kichinosuke; Ikeda, Shigero
  • Journal of Electron Spectroscopy and Related Phenomena, Vol. 7, Issue 5
  • DOI: 10.1016/0368-2048(75)85010-9

Molecular Layer Deposition for Surface Modification of Lithium-Ion Battery Electrodes
journal, October 2016


Molecular Layer Deposition for Energy Conversion and Storage
journal, March 2018


Sorbitol and related polyol complexes of manganese(II), -(III), and -(IV): redox and oxygenation equilibriums
journal, March 1979

  • Richens, David T.; Smith, Cecil G.; Sawyer, Donald T.
  • Inorganic Chemistry, Vol. 18, Issue 3
  • DOI: 10.1021/ic50193a035

Atomic layer deposition—Sequential self-limiting surface reactions for advanced catalyst “bottom-up” synthesis
journal, June 2016


ZnO: Hydroquinone superlattice structures fabricated by atomic/molecular layer deposition
journal, January 2014


Characterization of nano-porosity in molecular layer deposited films
journal, January 2018

  • Perrotta, Alberto; Poodt, Paul; van den Bruele, F. J. (Fieke)
  • Dalton Transactions, Vol. 47, Issue 23
  • DOI: 10.1039/C8DT01246F

Catalyst Design with Atomic Layer Deposition
journal, February 2015

  • O’Neill, Brandon J.; Jackson, David H. K.; Lee, Jechan
  • ACS Catalysis, Vol. 5, Issue 3
  • DOI: 10.1021/cs501862h

Mesoporous manganese phthalocyanine-based materials for electrochemical water oxidation via tailored templating
journal, January 2018

  • Broicher, C.; Artz, J.; Palkovits, S.
  • Catalysis Science & Technology, Vol. 8, Issue 6
  • DOI: 10.1039/C7CY02484C

An overview of highly porous oxide films with tunable thickness prepared by molecular layer deposition
journal, April 2015


A Novel Organic “Polyurea” Thin Film for Ultralong-Life Lithium-Metal Anodes via Molecular-Layer Deposition
journal, December 2018


Transformation of Organic–Inorganic Hybrid Films Obtained by Molecular Layer Deposition to Photocatalytic Layers with Enhanced Activity
journal, July 2012

  • Ishchuk, Sergey; Taffa, Dereje Hailu; Hazut, Ori
  • ACS Nano, Vol. 6, Issue 8
  • DOI: 10.1021/nn302370y

ALD/MLD processes for Mn and Co based hybrid thin films
journal, January 2016

  • Ahvenniemi, E.; Karppinen, M.
  • Dalton Transactions, Vol. 45, Issue 26
  • DOI: 10.1039/C6DT00851H

Effect of Backbone Chemistry on the Structure of Polyurea Films Deposited by Molecular Layer Deposition
journal, January 2017


Hybrid inorganic–organic superlattice structures with atomic layer deposition/molecular layer deposition
journal, January 2014

  • Tynell, Tommi; Yamauchi, Hisao; Karppinen, Maarit
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 32, Issue 1
  • DOI: 10.1116/1.4831751

Nanoengineering Heterogeneous Catalysts by Atomic Layer Deposition
journal, June 2017


Addressing Interfacial Issues in Liquid-Based and Solid-State Batteries by Atomic and Molecular Layer Deposition
journal, December 2018


Molecular layer deposition of “vanadicone”, a vanadium-based hybrid material, as an electrode for lithium-ion batteries
journal, January 2017

  • Van de Kerckhove, Kevin; Mattelaer, Felix; Dendooven, Jolien
  • Dalton Transactions, Vol. 46, Issue 14
  • DOI: 10.1039/C7DT00374A

High density plasma chemical vapor deposition gap-fill mechanisms
journal, January 2006

  • Mungekar, Hemant P.; Lee, Young S.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 24, Issue 2
  • DOI: 10.1116/1.2178364

Benchmarking Heterogeneous Electrocatalysts for the Oxygen Evolution Reaction
journal, October 2013

  • McCrory, Charles C. L.; Jung, Suho; Peters, Jonas C.
  • Journal of the American Chemical Society, Vol. 135, Issue 45
  • DOI: 10.1021/ja407115p

Polyol-mediated syntheses of crystalline nanosized manganese oxides
journal, May 2014

  • Diao, Guiqiang; Chau, François; Piquemal, Jean-Yves
  • Journal of Nanoparticle Research, Vol. 16, Issue 6
  • DOI: 10.1007/s11051-014-2428-9

Iron-based inorganic–organic hybrid and superlattice thin films by ALD/MLD
journal, January 2015

  • Tanskanen, A.; Karppinen, M.
  • Dalton Transactions, Vol. 44, Issue 44
  • DOI: 10.1039/C5DT02488A

Growth and Properties of Hybrid Organic-Inorganic Metalcone Films Using Molecular Layer Deposition Techniques
journal, September 2012

  • Lee, Byoung H.; Yoon, Byunghoon; Abdulagatov, Aziz I.
  • Advanced Functional Materials, Vol. 23, Issue 5
  • DOI: 10.1002/adfm.201200370

Atomic and Molecular Layer Deposition of Hybrid Mo-Thiolate Thin Films with Enhanced Catalytic Activity
journal, April 2018

  • MacIsaac, Callisto; Schneider, Joel R.; Closser, Richard G.
  • Advanced Functional Materials, Vol. 28, Issue 26
  • DOI: 10.1002/adfm.201800852

Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends
journal, January 2013

  • Miikkulainen, Ville; Leskelä, Markku; Ritala, Mikko
  • Journal of Applied Physics, Vol. 113, Issue 2, Article No. 021301
  • DOI: 10.1063/1.4757907

Effect of Interlayer Spacing on the Activity of Layered Manganese Oxide Bilayer Catalysts for the Oxygen Evolution Reaction
journal, January 2017

  • Kang, Qing; Vernisse, Loranne; Remsing, Richard C.
  • Journal of the American Chemical Society, Vol. 139, Issue 5
  • DOI: 10.1021/jacs.6b09184

Stabilization of Supported Metal Nanoparticles Using an Ultrathin Porous Shell
journal, August 2011

  • Liang, Xinhua; Li, Jianhua; Yu, Miao
  • ACS Catalysis, Vol. 1, Issue 10
  • DOI: 10.1021/cs200257p

All-gas-phase synthesis of UiO-66 through modulated atomic layer deposition
journal, November 2016

  • Lausund, Kristian Blindheim; Nilsen, Ola
  • Nature Communications, Vol. 7, Issue 1
  • DOI: 10.1038/ncomms13578

Manganese oxide with different composition and morphology as electrocatalyst for oxygen evolution reaction
journal, October 2017

  • Sim, Hwansu; Lee, Jooyoung; Yu, Taekyung
  • Korean Journal of Chemical Engineering, Vol. 35, Issue 1
  • DOI: 10.1007/s11814-017-0247-2

Molecular Layer Deposition of Titanicone Films using TiCl 4 and Ethylene Glycol or Glycerol: Growth and Properties
journal, July 2012

  • Abdulagatov, Aziz I.; Hall, Robert A.; Sutherland, Jackson L.
  • Chemistry of Materials, Vol. 24, Issue 15
  • DOI: 10.1021/cm300162v

Pyrolysis of Alucone Molecular Layer Deposition Films Studied Using In Situ Transmission Fourier Transform Infrared Spectroscopy
journal, March 2015

  • DuMont, Jaime W.; George, Steven M.
  • The Journal of Physical Chemistry C, Vol. 119, Issue 26
  • DOI: 10.1021/jp512074n

Atomic layer deposition of MnO using Bis(ethylcyclopentadienyl)manganese and H2O
journal, August 2009


“Zincone” Zinc Oxide−Organic Hybrid Polymer Thin Films Formed by Molecular Layer Deposition
journal, March 2009

  • Peng, Qing; Gong, Bo; VanGundy, Ryan M.
  • Chemistry of Materials, Vol. 21, Issue 5
  • DOI: 10.1021/cm8020403

High Efficiency Cu-ZnO Hydrogenation Catalyst: The Tailoring of Cu-ZnO Interface Sites by Molecular Layer Deposition
journal, August 2015


Nanocoating zinc alkoxide (zincone) hybrid polymer films on particles using a fluidized bed reactor
journal, January 2012

  • Liang, Xinhua; Jiang, Ying-Bing; Weimer, Alan W.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 30, Issue 1
  • DOI: 10.1116/1.3644952