High Precision Detection of Change in Intermediate Range Order of Amorphous Zirconia-Doped Tantala Thin Films Due to Annealing

Prasai, K.; Jiang, J.; Mishkin, A.; Shyam, B.; Angelova, S.; Birney, R.; Drabold, D. A.; Fazio, M.; Gustafson, E. K.; Harry, G.; Hoback, S.; Hough, J.; Lévesque, C.; MacLaren, I.; Markosyan, A.; Martin, I. W.; Menoni, C. S.; Murray, P. G.; Penn, S.; Reid, S.; Robie, R.; Rowan, S.; Schiettekatte, F.; Shink, R.; Turner, A.; Vajente, G.; Cheng, H-P.; Fejer, M. M.; Mehta, A.; Bassiri, R.

doi:10.1103/physrevlett.123.045501

Title: High Precision Detection of Change in Intermediate Range Order of Amorphous Zirconia-Doped Tantala Thin Films Due to Annealing

Journal Article · 23 July 2019 · Physical Review Letters

DOI: https://doi.org/10.1103/physrevlett.123.045501 · OSTI ID:1560637

Prasai, K. ^[1]; Jiang, J. ^[2]; Mishkin, A. ^[2]; Shyam, B. ^[3]; Angelova, S. ^[4]; Birney, R. ^[4]; Drabold, D. A. ^[5]; Fazio, M. ^[6]; Gustafson, E. K. ^[7]; Harry, G. ^[8]; Hoback, S. ^[8]; Hough, J. ^[9]; Lévesque, C. ^[10]; MacLaren, I. ^[9]; Markosyan, A. ^[1]; Martin, I. W. ^[9]; Menoni, C. S. ^[6]; Murray, P. G. ^[9]; Penn, S. ^[11]; Reid, S. ^[4] more »

Stanford Univ., CA (United States). E. L. Ginzton Lab.
Univ. of Florida, Gainesville, FL (United States). Dept. of Physics and Quantum Theory Project
Univ. of Dayton Research Inst., Dayton, OH (United States)
Univ. of Strathclyde, Glasgow (United Kingdom). Dept. of Biomedical Engineering
The Ohio Univ., Athens, OH (United States). Dept of Physics and Astronomy
Colorado State Univ., Fort Collins, CO (United States). Dept. of Electrical and Computer Engineering
California Inst. of Technology (CalTech), Pasadena, CA (United States). LIGO Lab.
American Univ., Washington, DC (United States). Dept. of Physics
Univ. of Glasgow, Scotland (United Kingdom). School of Physics and Astronomy
McGill Univ., Montreal, QC (Canada). Dept of Physics
Hobart and William Smith Colleges, Geneva, NY (United States). Dept. of Physics
SLAC National Accelerator Lab., Menlo Park, CA (United States)

Understanding the local atomic order in amorphous thin film coatings and how it relates to macroscopic performance factors, such as mechanical loss, provides an important path towards enabling the accelerated discovery and development of improved coatings. High precision x-ray scattering measurements of thin films of amorphous zirconia-doped tantala (ZrO₂-Ta₂O₅) show systematic changes in intermediate range order (IRO) as a function of postdeposition heat treatment (annealing). Atomic modeling captures and explains these changes, and shows that the material has building blocks of metal-centered polyhedra and the effect of annealing is to alter the connections between the polyhedra. The observed changes in IRO are associated with a shift in the ratio of corner-sharing to edge-sharing polyhedra. These changes correlate with changes in mechanical loss upon annealing, and suggest that the mechanical loss can be reduced by developing a material with a designed ratio of corner-sharing to edge-sharing polyhedra.

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Research Organization:: SLAC National Accelerator Laboratory (SLAC), Menlo Park, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: PHY-1707866; PHY-1708175; DMR-1506836; AC02-76SF00515; 6793

OSTI ID:: 1560637

Alternate ID(s):: OSTI ID: 1545422

Journal Information:: Physical Review Letters, Vol. 123, Issue 4; ISSN 0031-9007

Publisher:: American Physical Society (APS)Copyright Statement

Country of Publication:: United States

Language:: English

Citation Metrics:

Cited by: 21 works

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