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Title: High Precision Detection of Change in Intermediate Range Order of Amorphous Zirconia-Doped Tantala Thin Films Due to Annealing

Abstract

Understanding the local atomic order in amorphous thin film coatings and how it relates to macroscopic performance factors, such as mechanical loss, provides an important path towards enabling the accelerated discovery and development of improved coatings. High precision x-ray scattering measurements of thin films of amorphous zirconia-doped tantala (ZrO2-Ta2O5) show systematic changes in intermediate range order (IRO) as a function of postdeposition heat treatment (annealing). Atomic modeling captures and explains these changes, and shows that the material has building blocks of metal-centered polyhedra and the effect of annealing is to alter the connections between the polyhedra. The observed changes in IRO are associated with a shift in the ratio of corner-sharing to edge-sharing polyhedra. These changes correlate with changes in mechanical loss upon annealing, and suggest that the mechanical loss can be reduced by developing a material with a designed ratio of corner-sharing to edge-sharing polyhedra.

Authors:
 [1];  [2];  [2];  [3];  [4];  [4];  [5];  [6];  [7];  [8];  [8];  [9];  [10];  [9];  [1];  [9];  [6];  [9];  [11];  [4] more »;  [9];  [9];  [10];  [10];  [9];  [7];  [2];  [1];  [12];  [1] « less
+ Show Author Affiliations
  1. Stanford Univ., CA (United States). E. L. Ginzton Lab.
  2. Univ. of Florida, Gainesville, FL (United States). Dept. of Physics and Quantum Theory Project
  3. Univ. of Dayton Research Inst., Dayton, OH (United States)
  4. Univ. of Strathclyde, Glasgow (United Kingdom). Dept. of Biomedical Engineering
  5. The Ohio Univ., Athens, OH (United States). Dept of Physics and Astronomy
  6. Colorado State Univ., Fort Collins, CO (United States). Dept. of Electrical and Computer Engineering
  7. California Inst. of Technology (CalTech), Pasadena, CA (United States). LIGO Lab.
  8. American Univ., Washington, DC (United States). Dept. of Physics
  9. Univ. of Glasgow, Scotland (United Kingdom). School of Physics and Astronomy
  10. McGill Univ., Montreal, QC (Canada). Dept of Physics
  11. Hobart and William Smith Colleges, Geneva, NY (United States). Dept. of Physics
  12. SLAC National Accelerator Lab., Menlo Park, CA (United States)
Publication Date:
Research Org.:
SLAC National Accelerator Lab., Menlo Park, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
OSTI Identifier:
1560637
Alternate Identifier(s):
OSTI ID: 1545422
Grant/Contract Number:  
PHY-1707866; PHY-1708175; DMR-1506836; AC02-76SF00515; 6793
Resource Type:
Accepted Manuscript
Journal Name:
Physical Review Letters
Additional Journal Information:
Journal Volume: 123; Journal Issue: 4; Journal ID: ISSN 0031-9007
Publisher:
American Physical Society (APS)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Prasai, K., Jiang, J., Mishkin, A., Shyam, B., Angelova, S., Birney, R., Drabold, D. A., Fazio, M., Gustafson, E. K., Harry, G., Hoback, S., Hough, J., Lévesque, C., MacLaren, I., Markosyan, A., Martin, I. W., Menoni, C. S., Murray, P. G., Penn, S., Reid, S., Robie, R., Rowan, S., Schiettekatte, F., Shink, R., Turner, A., Vajente, G., Cheng, H-P., Fejer, M. M., Mehta, A., and Bassiri, R. High Precision Detection of Change in Intermediate Range Order of Amorphous Zirconia-Doped Tantala Thin Films Due to Annealing. United States: N. p., 2019. Web. doi:10.1103/physrevlett.123.045501.
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Prasai, K., Jiang, J., Mishkin, A., Shyam, B., Angelova, S., Birney, R., Drabold, D. A., Fazio, M., Gustafson, E. K., Harry, G., Hoback, S., Hough, J., Lévesque, C., MacLaren, I., Markosyan, A., Martin, I. W., Menoni, C. S., Murray, P. G., Penn, S., Reid, S., Robie, R., Rowan, S., Schiettekatte, F., Shink, R., Turner, A., Vajente, G., Cheng, H-P., Fejer, M. M., Mehta, A., & Bassiri, R. High Precision Detection of Change in Intermediate Range Order of Amorphous Zirconia-Doped Tantala Thin Films Due to Annealing. United States. doi:https://doi.org/10.1103/physrevlett.123.045501
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Prasai, K., Jiang, J., Mishkin, A., Shyam, B., Angelova, S., Birney, R., Drabold, D. A., Fazio, M., Gustafson, E. K., Harry, G., Hoback, S., Hough, J., Lévesque, C., MacLaren, I., Markosyan, A., Martin, I. W., Menoni, C. S., Murray, P. G., Penn, S., Reid, S., Robie, R., Rowan, S., Schiettekatte, F., Shink, R., Turner, A., Vajente, G., Cheng, H-P., Fejer, M. M., Mehta, A., and Bassiri, R. Tue . "High Precision Detection of Change in Intermediate Range Order of Amorphous Zirconia-Doped Tantala Thin Films Due to Annealing". United States. doi:https://doi.org/10.1103/physrevlett.123.045501. https://www.osti.gov/servlets/purl/1560637.
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@article{osti_1560637,
title = {High Precision Detection of Change in Intermediate Range Order of Amorphous Zirconia-Doped Tantala Thin Films Due to Annealing},
author = {Prasai, K. and Jiang, J. and Mishkin, A. and Shyam, B. and Angelova, S. and Birney, R. and Drabold, D. A. and Fazio, M. and Gustafson, E. K. and Harry, G. and Hoback, S. and Hough, J. and Lévesque, C. and MacLaren, I. and Markosyan, A. and Martin, I. W. and Menoni, C. S. and Murray, P. G. and Penn, S. and Reid, S. and Robie, R. and Rowan, S. and Schiettekatte, F. and Shink, R. and Turner, A. and Vajente, G. and Cheng, H-P. and Fejer, M. M. and Mehta, A. and Bassiri, R.},
abstractNote = {Understanding the local atomic order in amorphous thin film coatings and how it relates to macroscopic performance factors, such as mechanical loss, provides an important path towards enabling the accelerated discovery and development of improved coatings. High precision x-ray scattering measurements of thin films of amorphous zirconia-doped tantala (ZrO2-Ta2O5) show systematic changes in intermediate range order (IRO) as a function of postdeposition heat treatment (annealing). Atomic modeling captures and explains these changes, and shows that the material has building blocks of metal-centered polyhedra and the effect of annealing is to alter the connections between the polyhedra. The observed changes in IRO are associated with a shift in the ratio of corner-sharing to edge-sharing polyhedra. These changes correlate with changes in mechanical loss upon annealing, and suggest that the mechanical loss can be reduced by developing a material with a designed ratio of corner-sharing to edge-sharing polyhedra.},
doi = {10.1103/physrevlett.123.045501},
journal = {Physical Review Letters},
number = 4,
volume = 123,
place = {United States},
year = {2019},
month = {7}
}
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Works referenced in this record:

Suppression of Crystallization of Tantalum Oxide Thin Film by Doping with Zirconium
journal, January 2005

  • Tewg, Jun-Yen; Kuo, Yue; Lu, Jiang
  • Electrochemical and Solid-State Letters, Vol. 8, Issue 1
  • DOI: 10.1149/1.1836122

Structure of Amorphous Tantalum Oxide and Titania-Doped Tantala: 17 O NMR Results for Sol–Gel and Ion-Beam-Sputtered Materials
journal, August 2011

  • Kim, Namjun; Stebbins, Jonathan F.
  • Chemistry of Materials, Vol. 23, Issue 15
  • DOI: 10.1021/cm200630m

Unified interatomic potential for zircon, zirconia and silica systems
journal, January 2009

  • Yu, Jianguo; Devanathan, Ram; Weber, William J.
  • Journal of Materials Chemistry, Vol. 19, Issue 23
  • DOI: 10.1039/b902767j

Molecular-dynamics investigations of conformational fluctuations and low-energy vibrational excitations in a -Si:H
journal, February 1996

Measurement and Modeling of Short and Medium Range Order in Amorphous Ta2O5 Thin Films
journal, August 2016

  • Shyam, Badri; Stone, Kevin H.; Bassiri, Riccardo
  • Scientific Reports, Vol. 6, Issue 1
  • DOI: 10.1038/srep32170

Audio-Band Frequency-Dependent Squeezing for Gravitational-Wave Detectors
journal, January 2016

Molecular dynamics modeling of mechanical loss in amorphous tantala and titania-doped tantala
journal, January 2016

Bond-orientational order in liquids and glasses
journal, July 1983

  • Steinhardt, Paul J.; Nelson, David R.; Ronchetti, Marco
  • Physical Review B, Vol. 28, Issue 2
  • DOI: 10.1103/PhysRevB.28.784

Inversion of diffraction data for amorphous materials
journal, September 2016

  • Pandey, Anup; Biswas, Parthapratim; Drabold, D. A.
  • Scientific Reports, Vol. 6, Issue 1
  • DOI: 10.1038/srep33731

Medium-range structural order in covalent amorphous solids
journal, December 1991

Topics in the theory of amorphous materials
journal, March 2009

Effects of annealing on the structure of ion beam sputtered amorphous tantalum oxide: Oxygen-17 NMR spectra and relaxation times
journal, October 2013

Unified interatomic potential and energy barrier distributions for amorphous oxides
journal, October 2013

  • Trinastic, J. P.; Hamdan, R.; Wu, Y.
  • The Journal of Chemical Physics, Vol. 139, Issue 15
  • DOI: 10.1063/1.4825197

Thermal noise from optical coatings in gravitational wave detectors
journal, January 2006

  • Harry, Gregory M.; Armandula, Helena; Black, Eric
  • Applied Optics, Vol. 45, Issue 7
  • DOI: 10.1364/AO.45.001569

Medium range structural order in amorphous tantala spatially resolved with changes to atomic structure by thermal annealing
journal, April 2016

Structure and bonding in photodiffused amorphous Ag- GeSe 2 thin films
journal, December 1988

Amorphous tantala and its relationship with the molten state
journal, April 2018

Structural modelling of glasses using reverse Monte Carlo simulation
journal, March 1990

  • Keen, D. A.; McGreevy, R. L.
  • Nature, Vol. 344, Issue 6265
  • DOI: 10.1038/344423a0

Order within disorder: The atomic structure of ion-beam sputtered amorphous tantala (a-Ta 2 O 5 )
journal, March 2015

  • Bassiri, Riccardo; Liou, Franklin; Abernathy, Matthew R.
  • APL Materials, Vol. 3, Issue 3
  • DOI: 10.1063/1.4913586

Titania-doped tantala/silica coatings for gravitational-wave detection
journal, December 2006

  • Harry, Gregory M.; Abernathy, Matthew R.; Becerra-Toledo, Andres E.
  • Classical and Quantum Gravity, Vol. 24, Issue 2
  • DOI: 10.1088/0264-9381/24/2/008

Effect of heat treatment on mechanical dissipation in Ta 2 O 5 coatings
journal, October 2010

Medium-range order in amorphous materials
journal, December 1988

Elastic properties of several amorphous solids and disordered crystals below 100 K
journal, March 1996

  • Topp, K. A.; Cahill, David G.
  • Zeitschrift für Physik B Condensed Matter, Vol. 101, Issue 2
  • DOI: 10.1007/s002570050205

PDFgetX2: a GUI-driven program to obtain the pair distribution function from X-ray powder diffraction data
journal, July 2004

  • Qiu, Xiangyun; Thompson, Jeroen W.; Billinge, Simon J. L.
  • Journal of Applied Crystallography, Vol. 37, Issue 4, p. 678-678
  • DOI: 10.1107/S0021889804011744

Beyond the second generation of laser-interferometric gravitational wave observatories
journal, June 2012

Optimization by Simulated Annealing
journal, May 1983

Probing the atomic structure of amorphous Ta2O5 coatings
journal, January 2011

  • Bassiri, R.; Borisenko, K. B.; Cockayne, D. J. H.
  • Applied Physics Letters, Vol. 98, Issue 3
  • DOI: 10.1063/1.3535982

An Atomic Clock with 10-18 Instability
journal, August 2013

Effect of elevated substrate temperature deposition on the mechanical losses in tantala thin film coatings
journal, February 2018

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    Works referencing / citing this record:

    Investigation of effects of assisted ion bombardment on mechanical loss of sputtered tantala thin films for gravitational wave interferometers
    journal, December 2019

    Thermal noise from icy mirrors in gravitational wave detectors
    journal, August 2019

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