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Title: High Precision Detection of Change in Intermediate Range Order of Amorphous Zirconia-Doped Tantala Thin Films Due to Annealing

Abstract

Understanding the local atomic order in amorphous thin film coatings and how it relates to macroscopic performance factors, such as mechanical loss, provides an important path towards enabling the accelerated discovery and development of improved coatings. High precision x-ray scattering measurements of thin films of amorphous zirconia-doped tantala (ZrO 2-Ta 2O 5) show systematic changes in intermediate range order (IRO) as a function of postdeposition heat treatment (annealing). Atomic modeling captures and explains these changes, and shows that the material has building blocks of metal-centered polyhedra and the effect of annealing is to alter the connections between the polyhedra. The observed changes in IRO are associated with a shift in the ratio of corner-sharing to edge-sharing polyhedra. These changes correlate with changes in mechanical loss upon annealing, and suggest that the mechanical loss can be reduced by developing a material with a designed ratio of corner-sharing to edge-sharing polyhedra.

Authors:
 [1];  [2];  [2];  [3];  [4];  [4];  [5];  [6];  [7];  [8];  [8];  [9];  [10];  [9];  [1];  [9];  [6];  [9];  [11];  [4] more »;  [9];  [9];  [10];  [10];  [9];  [7];  [2];  [1];  [12];  [1] « less
+ Show Author Affiliations
  1. Stanford Univ., CA (United States). E. L. Ginzton Lab.
  2. Univ. of Florida, Gainesville, FL (United States). Dept. of Physics and Quantum Theory Project
  3. Univ. of Dayton Research Inst., Dayton, OH (United States)
  4. Univ. of Strathclyde, Glasgow (United Kingdom). Dept. of Biomedical Engineering
  5. The Ohio Univ., Athens, OH (United States). Dept of Physics and Astronomy
  6. Colorado State Univ., Fort Collins, CO (United States). Dept. of Electrical and Computer Engineering
  7. California Inst. of Technology (CalTech), Pasadena, CA (United States). LIGO Lab.
  8. American Univ., Washington, DC (United States). Dept. of Physics
  9. Univ. of Glasgow, Scotland (United Kingdom). School of Physics and Astronomy
  10. McGill Univ., Montreal, QC (Canada). Dept of Physics
  11. Hobart and William Smith Colleges, Geneva, NY (United States). Dept. of Physics
  12. SLAC National Accelerator Lab., Menlo Park, CA (United States)
Publication Date:
Research Org.:
SLAC National Accelerator Lab., Menlo Park, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1560637
Alternate Identifier(s):
OSTI ID: 1545422
Grant/Contract Number:  
[PHY-1707866; PHY-1708175; DMR-1506836; AC02-76SF00515; 6793]
Resource Type:
Accepted Manuscript
Journal Name:
Physical Review Letters
Additional Journal Information:
[ Journal Volume: 123; Journal Issue: 4]; Journal ID: ISSN 0031-9007
Publisher:
American Physical Society (APS)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Prasai, K., Jiang, J., Mishkin, A., Shyam, B., Angelova, S., Birney, R., Drabold, D. A., Fazio, M., Gustafson, E. K., Harry, G., Hoback, S., Hough, J., Lévesque, C., MacLaren, I., Markosyan, A., Martin, I. W., Menoni, C. S., Murray, P. G., Penn, S., Reid, S., Robie, R., Rowan, S., Schiettekatte, F., Shink, R., Turner, A., Vajente, G., Cheng, H-P., Fejer, M. M., Mehta, A., and Bassiri, R. High Precision Detection of Change in Intermediate Range Order of Amorphous Zirconia-Doped Tantala Thin Films Due to Annealing. United States: N. p., 2019. Web. doi:10.1103/physrevlett.123.045501.
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Prasai, K., Jiang, J., Mishkin, A., Shyam, B., Angelova, S., Birney, R., Drabold, D. A., Fazio, M., Gustafson, E. K., Harry, G., Hoback, S., Hough, J., Lévesque, C., MacLaren, I., Markosyan, A., Martin, I. W., Menoni, C. S., Murray, P. G., Penn, S., Reid, S., Robie, R., Rowan, S., Schiettekatte, F., Shink, R., Turner, A., Vajente, G., Cheng, H-P., Fejer, M. M., Mehta, A., & Bassiri, R. High Precision Detection of Change in Intermediate Range Order of Amorphous Zirconia-Doped Tantala Thin Films Due to Annealing. United States. doi:10.1103/physrevlett.123.045501.
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Prasai, K., Jiang, J., Mishkin, A., Shyam, B., Angelova, S., Birney, R., Drabold, D. A., Fazio, M., Gustafson, E. K., Harry, G., Hoback, S., Hough, J., Lévesque, C., MacLaren, I., Markosyan, A., Martin, I. W., Menoni, C. S., Murray, P. G., Penn, S., Reid, S., Robie, R., Rowan, S., Schiettekatte, F., Shink, R., Turner, A., Vajente, G., Cheng, H-P., Fejer, M. M., Mehta, A., and Bassiri, R. Tue . "High Precision Detection of Change in Intermediate Range Order of Amorphous Zirconia-Doped Tantala Thin Films Due to Annealing". United States. doi:10.1103/physrevlett.123.045501.
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@article{osti_1560637,
title = {High Precision Detection of Change in Intermediate Range Order of Amorphous Zirconia-Doped Tantala Thin Films Due to Annealing},
author = {Prasai, K. and Jiang, J. and Mishkin, A. and Shyam, B. and Angelova, S. and Birney, R. and Drabold, D. A. and Fazio, M. and Gustafson, E. K. and Harry, G. and Hoback, S. and Hough, J. and Lévesque, C. and MacLaren, I. and Markosyan, A. and Martin, I. W. and Menoni, C. S. and Murray, P. G. and Penn, S. and Reid, S. and Robie, R. and Rowan, S. and Schiettekatte, F. and Shink, R. and Turner, A. and Vajente, G. and Cheng, H-P. and Fejer, M. M. and Mehta, A. and Bassiri, R.},
abstractNote = {Understanding the local atomic order in amorphous thin film coatings and how it relates to macroscopic performance factors, such as mechanical loss, provides an important path towards enabling the accelerated discovery and development of improved coatings. High precision x-ray scattering measurements of thin films of amorphous zirconia-doped tantala (ZrO2-Ta2O5) show systematic changes in intermediate range order (IRO) as a function of postdeposition heat treatment (annealing). Atomic modeling captures and explains these changes, and shows that the material has building blocks of metal-centered polyhedra and the effect of annealing is to alter the connections between the polyhedra. The observed changes in IRO are associated with a shift in the ratio of corner-sharing to edge-sharing polyhedra. These changes correlate with changes in mechanical loss upon annealing, and suggest that the mechanical loss can be reduced by developing a material with a designed ratio of corner-sharing to edge-sharing polyhedra.},
doi = {10.1103/physrevlett.123.045501},
journal = {Physical Review Letters},
number = [4],
volume = [123],
place = {United States},
year = {2019},
month = {7}
}
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DOI:  10.1103/physrevlett.123.045501
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