High Precision Detection of Change in Intermediate Range Order of Amorphous Zirconia-Doped Tantala Thin Films Due to Annealing
Abstract
Understanding the local atomic order in amorphous thin film coatings and how it relates to macroscopic performance factors, such as mechanical loss, provides an important path towards enabling the accelerated discovery and development of improved coatings. High precision x-ray scattering measurements of thin films of amorphous zirconia-doped tantala (ZrO2-Ta2O5) show systematic changes in intermediate range order (IRO) as a function of postdeposition heat treatment (annealing). Atomic modeling captures and explains these changes, and shows that the material has building blocks of metal-centered polyhedra and the effect of annealing is to alter the connections between the polyhedra. The observed changes in IRO are associated with a shift in the ratio of corner-sharing to edge-sharing polyhedra. These changes correlate with changes in mechanical loss upon annealing, and suggest that the mechanical loss can be reduced by developing a material with a designed ratio of corner-sharing to edge-sharing polyhedra.
- Authors:
-
more »
- Stanford Univ., CA (United States). E. L. Ginzton Lab.
- Univ. of Florida, Gainesville, FL (United States). Dept. of Physics and Quantum Theory Project
- Univ. of Dayton Research Inst., Dayton, OH (United States)
- Univ. of Strathclyde, Glasgow (United Kingdom). Dept. of Biomedical Engineering
- The Ohio Univ., Athens, OH (United States). Dept of Physics and Astronomy
- Colorado State Univ., Fort Collins, CO (United States). Dept. of Electrical and Computer Engineering
- California Inst. of Technology (CalTech), Pasadena, CA (United States). LIGO Lab.
- American Univ., Washington, DC (United States). Dept. of Physics
- Univ. of Glasgow, Scotland (United Kingdom). School of Physics and Astronomy
- McGill Univ., Montreal, QC (Canada). Dept of Physics
- Hobart and William Smith Colleges, Geneva, NY (United States). Dept. of Physics
- SLAC National Accelerator Lab., Menlo Park, CA (United States)
- Publication Date:
- Research Org.:
- SLAC National Accelerator Lab., Menlo Park, CA (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1560637
- Alternate Identifier(s):
- OSTI ID: 1545422
- Grant/Contract Number:
- PHY-1707866; PHY-1708175; DMR-1506836; AC02-76SF00515; 6793
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Physical Review Letters
- Additional Journal Information:
- Journal Volume: 123; Journal Issue: 4; Journal ID: ISSN 0031-9007
- Publisher:
- American Physical Society (APS)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Prasai, K., Jiang, J., Mishkin, A., Shyam, B., Angelova, S., Birney, R., Drabold, D. A., Fazio, M., Gustafson, E. K., Harry, G., Hoback, S., Hough, J., Lévesque, C., MacLaren, I., Markosyan, A., Martin, I. W., Menoni, C. S., Murray, P. G., Penn, S., Reid, S., Robie, R., Rowan, S., Schiettekatte, F., Shink, R., Turner, A., Vajente, G., Cheng, H-P., Fejer, M. M., Mehta, A., and Bassiri, R. High Precision Detection of Change in Intermediate Range Order of Amorphous Zirconia-Doped Tantala Thin Films Due to Annealing. United States: N. p., 2019.
Web. doi:10.1103/physrevlett.123.045501.
Prasai, K., Jiang, J., Mishkin, A., Shyam, B., Angelova, S., Birney, R., Drabold, D. A., Fazio, M., Gustafson, E. K., Harry, G., Hoback, S., Hough, J., Lévesque, C., MacLaren, I., Markosyan, A., Martin, I. W., Menoni, C. S., Murray, P. G., Penn, S., Reid, S., Robie, R., Rowan, S., Schiettekatte, F., Shink, R., Turner, A., Vajente, G., Cheng, H-P., Fejer, M. M., Mehta, A., & Bassiri, R. High Precision Detection of Change in Intermediate Range Order of Amorphous Zirconia-Doped Tantala Thin Films Due to Annealing. United States. https://doi.org/10.1103/physrevlett.123.045501
Prasai, K., Jiang, J., Mishkin, A., Shyam, B., Angelova, S., Birney, R., Drabold, D. A., Fazio, M., Gustafson, E. K., Harry, G., Hoback, S., Hough, J., Lévesque, C., MacLaren, I., Markosyan, A., Martin, I. W., Menoni, C. S., Murray, P. G., Penn, S., Reid, S., Robie, R., Rowan, S., Schiettekatte, F., Shink, R., Turner, A., Vajente, G., Cheng, H-P., Fejer, M. M., Mehta, A., and Bassiri, R. Tue .
"High Precision Detection of Change in Intermediate Range Order of Amorphous Zirconia-Doped Tantala Thin Films Due to Annealing". United States. https://doi.org/10.1103/physrevlett.123.045501. https://www.osti.gov/servlets/purl/1560637.
@article{osti_1560637,
title = {High Precision Detection of Change in Intermediate Range Order of Amorphous Zirconia-Doped Tantala Thin Films Due to Annealing},
author = {Prasai, K. and Jiang, J. and Mishkin, A. and Shyam, B. and Angelova, S. and Birney, R. and Drabold, D. A. and Fazio, M. and Gustafson, E. K. and Harry, G. and Hoback, S. and Hough, J. and Lévesque, C. and MacLaren, I. and Markosyan, A. and Martin, I. W. and Menoni, C. S. and Murray, P. G. and Penn, S. and Reid, S. and Robie, R. and Rowan, S. and Schiettekatte, F. and Shink, R. and Turner, A. and Vajente, G. and Cheng, H-P. and Fejer, M. M. and Mehta, A. and Bassiri, R.},
abstractNote = {Understanding the local atomic order in amorphous thin film coatings and how it relates to macroscopic performance factors, such as mechanical loss, provides an important path towards enabling the accelerated discovery and development of improved coatings. High precision x-ray scattering measurements of thin films of amorphous zirconia-doped tantala (ZrO2-Ta2O5) show systematic changes in intermediate range order (IRO) as a function of postdeposition heat treatment (annealing). Atomic modeling captures and explains these changes, and shows that the material has building blocks of metal-centered polyhedra and the effect of annealing is to alter the connections between the polyhedra. The observed changes in IRO are associated with a shift in the ratio of corner-sharing to edge-sharing polyhedra. These changes correlate with changes in mechanical loss upon annealing, and suggest that the mechanical loss can be reduced by developing a material with a designed ratio of corner-sharing to edge-sharing polyhedra.},
doi = {10.1103/physrevlett.123.045501},
journal = {Physical Review Letters},
number = 4,
volume = 123,
place = {United States},
year = {2019},
month = {7}
}
Web of Science
Works referenced in this record:
Suppression of Crystallization of Tantalum Oxide Thin Film by Doping with Zirconium
journal, January 2005
- Tewg, Jun-Yen; Kuo, Yue; Lu, Jiang
- Electrochemical and Solid-State Letters, Vol. 8, Issue 1
Structure of Amorphous Tantalum Oxide and Titania-Doped Tantala: 17 O NMR Results for Sol–Gel and Ion-Beam-Sputtered Materials
journal, August 2011
- Kim, Namjun; Stebbins, Jonathan F.
- Chemistry of Materials, Vol. 23, Issue 15
Unified interatomic potential for zircon, zirconia and silica systems
journal, January 2009
- Yu, Jianguo; Devanathan, Ram; Weber, William J.
- Journal of Materials Chemistry, Vol. 19, Issue 23
Molecular-dynamics investigations of conformational fluctuations and low-energy vibrational excitations in a -Si:H
journal, February 1996
- Fedders, P. A.; Drabold, D. A.
- Physical Review B, Vol. 53, Issue 7
Measurement and Modeling of Short and Medium Range Order in Amorphous Ta2O5 Thin Films
journal, August 2016
- Shyam, Badri; Stone, Kevin H.; Bassiri, Riccardo
- Scientific Reports, Vol. 6, Issue 1
Audio-Band Frequency-Dependent Squeezing for Gravitational-Wave Detectors
journal, January 2016
- Oelker, Eric; Isogai, Tomoki; Miller, John
- Physical Review Letters, Vol. 116, Issue 4
Molecular dynamics modeling of mechanical loss in amorphous tantala and titania-doped tantala
journal, January 2016
- Trinastic, Jonathan P.; Hamdan, Rashid; Billman, Chris
- Physical Review B, Vol. 93, Issue 1
Bond-orientational order in liquids and glasses
journal, July 1983
- Steinhardt, Paul J.; Nelson, David R.; Ronchetti, Marco
- Physical Review B, Vol. 28, Issue 2
Inversion of diffraction data for amorphous materials
journal, September 2016
- Pandey, Anup; Biswas, Parthapratim; Drabold, D. A.
- Scientific Reports, Vol. 6, Issue 1
Medium-range structural order in covalent amorphous solids
journal, December 1991
- Elliott, S. R.
- Nature, Vol. 354, Issue 6353
Topics in the theory of amorphous materials
journal, March 2009
- Drabold, D. A.
- The European Physical Journal B, Vol. 68, Issue 1
Effects of annealing on the structure of ion beam sputtered amorphous tantalum oxide: Oxygen-17 NMR spectra and relaxation times
journal, October 2013
- Kim, Namjun; Stebbins, Jonathan F.
- Journal of Non-Crystalline Solids, Vol. 378
Unified interatomic potential and energy barrier distributions for amorphous oxides
journal, October 2013
- Trinastic, J. P.; Hamdan, R.; Wu, Y.
- The Journal of Chemical Physics, Vol. 139, Issue 15
Thermal noise from optical coatings in gravitational wave detectors
journal, January 2006
- Harry, Gregory M.; Armandula, Helena; Black, Eric
- Applied Optics, Vol. 45, Issue 7
Medium range structural order in amorphous tantala spatially resolved with changes to atomic structure by thermal annealing
journal, April 2016
- Hart, Martin J.; Bassiri, Riccardo; Borisenko, Konstantin B.
- Journal of Non-Crystalline Solids, Vol. 438
Structure and bonding in photodiffused amorphous Ag- thin films
journal, December 1988
- Fischer-Colbrie, A.; Bienenstock, A.; Fuoss, P. H.
- Physical Review B, Vol. 38, Issue 17
Amorphous tantala and its relationship with the molten state
journal, April 2018
- Alderman, O. L. G.; Benmore, C. J.; Neuefeind, J.
- Physical Review Materials, Vol. 2, Issue 4
Structural modelling of glasses using reverse Monte Carlo simulation
journal, March 1990
- Keen, D. A.; McGreevy, R. L.
- Nature, Vol. 344, Issue 6265
Order within disorder: The atomic structure of ion-beam sputtered amorphous tantala (a-Ta 2 O 5 )
journal, March 2015
- Bassiri, Riccardo; Liou, Franklin; Abernathy, Matthew R.
- APL Materials, Vol. 3, Issue 3
Titania-doped tantala/silica coatings for gravitational-wave detection
journal, December 2006
- Harry, Gregory M.; Abernathy, Matthew R.; Becerra-Toledo, Andres E.
- Classical and Quantum Gravity, Vol. 24, Issue 2
Effect of heat treatment on mechanical dissipation in Ta 2 O 5 coatings
journal, October 2010
- Martin, I. W.; Bassiri, R.; Nawrodt, R.
- Classical and Quantum Gravity, Vol. 27, Issue 22
Medium-range order in amorphous materials
journal, December 1988
- Červinka, Ladislav
- Journal of Non-Crystalline Solids, Vol. 106, Issue 1-3
Elastic properties of several amorphous solids and disordered crystals below 100 K
journal, March 1996
- Topp, K. A.; Cahill, David G.
- Zeitschrift für Physik B Condensed Matter, Vol. 101, Issue 2
PDFgetX2: a GUI-driven program to obtain the pair distribution function from X-ray powder diffraction data
journal, July 2004
- Qiu, Xiangyun; Thompson, Jeroen W.; Billinge, Simon J. L.
- Journal of Applied Crystallography, Vol. 37, Issue 4, p. 678-678
Beyond the second generation of laser-interferometric gravitational wave observatories
journal, June 2012
- Hild, S.
- Classical and Quantum Gravity, Vol. 29, Issue 12
Optimization by Simulated Annealing
journal, May 1983
- Kirkpatrick, S.; Gelatt, C. D.; Vecchi, M. P.
- Science, Vol. 220, Issue 4598
Probing the atomic structure of amorphous Ta2O5 coatings
journal, January 2011
- Bassiri, R.; Borisenko, K. B.; Cockayne, D. J. H.
- Applied Physics Letters, Vol. 98, Issue 3
An Atomic Clock with 10-18 Instability
journal, August 2013
- Hinkley, N.; Sherman, J. A.; Phillips, N. B.
- Science, Vol. 341, Issue 6151
Effect of elevated substrate temperature deposition on the mechanical losses in tantala thin film coatings
journal, February 2018
- Vajente, G.; Birney, R.; Ananyeva, A.
- Classical and Quantum Gravity, Vol. 35, Issue 7
Works referencing / citing this record:
Investigation of effects of assisted ion bombardment on mechanical loss of sputtered tantala thin films for gravitational wave interferometers
journal, December 2019
- Yang, Le; Randel, Emmett; Vajente, Gabriele
- Physical Review D, Vol. 100, Issue 12
Thermal noise from icy mirrors in gravitational wave detectors
journal, August 2019
- Steinlechner, Jessica; Martin, Iain W.
- Physical Review Research, Vol. 1, Issue 1