Laser ablation of polymers: a review
Abstract
ABSTRACT Laser ablation (LA), which employs a pulsed laser to remove materials from a substrate for generating micro‐/nanostructures, has tremendous applications in the fabrication of metals, ceramics, glasses and polymers. It has become a noteworthy approach for achieving various functional structures in engineering, chemistry, biology, medicine and other fields. Polymers are one such class of materials; they can be melted and vaporized at high temperature during the ablation process. A number of polymers have been researched as candidate substrates in LA, and many different structures and patterns have been realized by this method. The current states of research and progress are reviewed from basic concepts to optimal parameters, polymer types and applications. The significance of this paper is to provide a basis for follow‐up research that leads to the development of superior materials and high‐quality production through LA. In this review, we first introduce the basic concept of LA, including mechanism, laser types (millisecond, microsecond, nanosecond, picosecond and femtosecond) and influential parameters (wavelength, repetition rate, fluence and pulse duration). Then, we focus on several commonly used polymer materials and compare them in detail, including the effects of polymer properties, laser parameters and feature designs. Finally, we summarize the applications ofmore »
- Authors:
-
- Iowa State Univ., Ames, IA (United States)
- Qingdao Univ. of Science and Technology, Shandong (China)
- Publication Date:
- Research Org.:
- Sustainable Manufacturing Innovation Alliance Corp., West Henrietta, NY (United States)
- Sponsoring Org.:
- USDOE Office of Energy Efficiency and Renewable Energy (EERE), Energy Efficiency Office. Advanced Manufacturing Office
- OSTI Identifier:
- 1613480
- Alternate Identifier(s):
- OSTI ID: 1559060
- Grant/Contract Number:
- EE0007897; DE‐EE0007897
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Polymer International
- Additional Journal Information:
- Journal Volume: 68; Journal Issue: 8; Journal ID: ISSN 0959-8103
- Publisher:
- Society of Chemical Industry
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; Polymer science; lase ablation; polymer; review
Citation Formats
Ravi‐Kumar, Sandeep, Lies, Benjamin, Zhang, Xiao, Lyu, Hao, and Qin, Hantang. Laser ablation of polymers: a review. United States: N. p., 2019.
Web. doi:10.1002/pi.5834.
Ravi‐Kumar, Sandeep, Lies, Benjamin, Zhang, Xiao, Lyu, Hao, & Qin, Hantang. Laser ablation of polymers: a review. United States. https://doi.org/10.1002/pi.5834
Ravi‐Kumar, Sandeep, Lies, Benjamin, Zhang, Xiao, Lyu, Hao, and Qin, Hantang. Sat .
"Laser ablation of polymers: a review". United States. https://doi.org/10.1002/pi.5834. https://www.osti.gov/servlets/purl/1613480.
@article{osti_1613480,
title = {Laser ablation of polymers: a review},
author = {Ravi‐Kumar, Sandeep and Lies, Benjamin and Zhang, Xiao and Lyu, Hao and Qin, Hantang},
abstractNote = {ABSTRACT Laser ablation (LA), which employs a pulsed laser to remove materials from a substrate for generating micro‐/nanostructures, has tremendous applications in the fabrication of metals, ceramics, glasses and polymers. It has become a noteworthy approach for achieving various functional structures in engineering, chemistry, biology, medicine and other fields. Polymers are one such class of materials; they can be melted and vaporized at high temperature during the ablation process. A number of polymers have been researched as candidate substrates in LA, and many different structures and patterns have been realized by this method. The current states of research and progress are reviewed from basic concepts to optimal parameters, polymer types and applications. The significance of this paper is to provide a basis for follow‐up research that leads to the development of superior materials and high‐quality production through LA. In this review, we first introduce the basic concept of LA, including mechanism, laser types (millisecond, microsecond, nanosecond, picosecond and femtosecond) and influential parameters (wavelength, repetition rate, fluence and pulse duration). Then, we focus on several commonly used polymer materials and compare them in detail, including the effects of polymer properties, laser parameters and feature designs. Finally, we summarize the applications of various structures fabricated by LA in a variety of areas along with a perspective of the challenges in this research area. Overall, a thorough review of LA of several polymers is presented, which could pave the way for characterization of future novel materials. © 2019 Society of Chemical Industry},
doi = {10.1002/pi.5834},
journal = {Polymer International},
number = 8,
volume = 68,
place = {United States},
year = {Sat May 18 00:00:00 EDT 2019},
month = {Sat May 18 00:00:00 EDT 2019}
}
Web of Science
Works referenced in this record:
Near-infrared laser ablation of poly tetrafluoroethylene (Teflon) sensitized by nanoenergetic materials
journal, August 2004
- Yang, Yanqiang; Wang, Shufeng; Sun, Zhaoyong
- Applied Physics Letters, Vol. 85, Issue 9
Laser ablation for MEMS microfabrication on Si and Kapton substrates
conference, February 2003
- Lan, B.; Hong, Ming Hui; Ye, Kaidong D.
- LAMP 2002: International Congress on Laser Advanced Materials Processing, SPIE Proceedings
Ablation of nylon-6,6 with UV and IR lasers
journal, February 1995
- Skordoulis, C. D.; Makropoulou, M.; Serafetinides, A. A.
- Applied Surface Science, Vol. 86, Issue 1-4
Pulsed-laser ablation of polytetrafluoroethylene (PTFE) at various wavelengths
journal, November 2003
- Huber, N.; Heitz, J.; Bäuerle, D.
- The European Physical Journal Applied Physics, Vol. 25, Issue 1
Laser Ablation and Laser-Hybrid Ablation Processes: A Review
journal, May 2015
- Ahmed, Naveed; Darwish, Saied; Alahmari, Abdulrehman M.
- Materials and Manufacturing Processes, Vol. 31, Issue 9
Mass spectroscopic identification of wavelength dependent UV laser photoablation fragments from polymethylmethacrylate
journal, November 1986
- Estler, R. C.; Nogar, N. S.
- Applied Physics Letters, Vol. 49, Issue 18
Laser ablation of polymers
journal, May 1986
- Yeh, J. T. C.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 4, Issue 3
Velocity distribution of molecular fragments from polymethylmethacrylate irradiated with UV laser pulses
journal, January 1986
- Danielzik, B.; Fabricius, N.; Röwekamp, M.
- Applied Physics Letters, Vol. 48, Issue 3
The autofluorescence of plastic materials and chips measured under laser irradiation
journal, January 2005
- Piruska, Aigars; Nikcevic, Irena; Lee, Se Hwan
- Lab on a Chip, Vol. 5, Issue 12
Interstitial laser-induced thermotherapy: Influence of carbonization on lesion size
journal, January 1998
- Sturesson, Christian
- Lasers in Surgery and Medicine, Vol. 22, Issue 1
Pulsed laser ablation of solids: transition from normal vaporization to phase explosion
journal, August 2001
- Bulgakova, N. M.; Bulgakov, A. V.
- Applied Physics A Materials Science & Processing, Vol. 73, Issue 2
Laser ablation and micromachining with ultrashort laser pulses
journal, January 1997
- Liu, X.; Du, D.; Mourou, G.
- IEEE Journal of Quantum Electronics, Vol. 33, Issue 10
Ultra-short pulsed laser PDMS thin-layer separation and micro-fabrication
journal, April 2009
- Huang, Huan; Guo, Zhixiong
- Journal of Micromechanics and Microengineering, Vol. 19, Issue 5
Excimer Laser Surgery of the Cornea
journal, December 1983
- Trokel, Stephen L.; Srinivasan, R.; Braren, Bodil
- American Journal of Ophthalmology, Vol. 96, Issue 6
Photothermal three-dimensional fabrication of polymers using diode-pumped solid state lasers
journal, July 2004
- Chang, Won Seok
- Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 3, Issue 3
Time-resolved ablation-site photography of XeCl-laser irradiated polyimid
journal, March 1989
- Simon, P.
- Applied Physics B Photophysics and Laser Chemistry, Vol. 48, Issue 3
Optical and photochemical factors which influence etching of polymers by ablative photodecomposition
journal, May 1985
- Braren, Bodil
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 3, Issue 3
Development and origin of conical structures on XeCl laser ablated polyimide
journal, August 1986
- Dyer, P. E.; Jenkins, S. D.; Sidhu, J.
- Applied Physics Letters, Vol. 49, Issue 8
Femtosecond pulsed laser ablation and deposition of thin films of polytetrafluoroethylene
journal, January 2004
- Womack, Melissa; Vendan, Monica; Molian, Pal
- Applied Surface Science, Vol. 221, Issue 1-4
Femtosecond laser ablation of polytetrafluoroethylene (Teflon) in ambient air
journal, May 2003
- Wang, Z. B.; Hong, M. H.; Lu, Y. F.
- Journal of Applied Physics, Vol. 93, Issue 10
Laser ablation of titanium alloy under a thin and flowing water layer
journal, February 2015
- Tangwarodomnukun, V.; Likhitangsuwat, P.; Tevinpibanphan, O.
- International Journal of Machine Tools and Manufacture, Vol. 89
Time resolved transmission studies of poly(methyl methacrylate) films during ultraviolet laser ablative photodecomposition
journal, March 1987
- Davis, G. M.; Gower, M. C.
- Journal of Applied Physics, Vol. 61, Issue 5
Polymer microfabrication methods for microfluidic analytical applications
journal, January 2000
- Becker, Holger; Gärtner, Claudia
- Electrophoresis, Vol. 21, Issue 1
New perspectives for direct PDMS microfabrication using a CD-DVD laser
journal, January 2013
- Hautefeuille, M.; Cabriales, L.; Pimentel-Domínguez, R.
- Lab on a Chip, Vol. 13, Issue 24
Dopant-induced ablation of poly(methyl methacrylate) by a 308-nm excimer laser
journal, March 1987
- Masuhara, Hiroshi.; Hiraoka, Hiroyuki.; Domen, Kazunami.
- Macromolecules, Vol. 20, Issue 2
XeCl excimer laser ablation of a polyethersulfone film: Dependence of periodic microstructures on a polarized beam
journal, November 1990
- Niino, Hiroyuki; Shimoyama, Masashi; Yabe, Akira
- Applied Physics Letters, Vol. 57, Issue 22
The effect of pulse repetition rate on laser ablation of polyimide and polymethylmethacrylate-based polymers
journal, May 1996
- Burns, F. C.; Cain, Stephen R.
- Journal of Physics D: Applied Physics, Vol. 29, Issue 5
Laser surface modification of PEEK
journal, September 2012
- Riveiro, A.; Soto, R.; Comesaña, R.
- Applied Surface Science, Vol. 258, Issue 23
Mass spectroscopic studies of the ArF-laser photoablation of polystyrene
journal, October 1987
- Feldmann, D.; Kutzner, J.; Laukemper, J.
- Applied Physics B Photophysics and Laser Chemistry, Vol. 44, Issue 2
Direct synthesis of sp-bonded carbon chains on graphite surface by femtosecond laser irradiation
journal, September 2007
- Hu, A.; Rybachuk, M.; Lu, Q. -B.
- Applied Physics Letters, Vol. 91, Issue 13
The effect of ultrafast laser wavelength on ablation properties and implications on sample introduction in inductively coupled plasma mass spectrometry
journal, July 2013
- LaHaye, N. L.; Harilal, S. S.; Diwakar, P. K.
- Journal of Applied Physics, Vol. 114, Issue 2
Chirped fiber Bragg gratings for WDM chromatic dispersion compensation in multispan 10-Gb/s transmission
journal, January 1999
- Riant, I.; Gurib, S.; Gourhant, J.
- IEEE Journal of Selected Topics in Quantum Electronics, Vol. 5, Issue 5
Laser ablation of poly(ethylene terephthalate)
journal, May 1997
- Watanabe, Hirosuke; Yamamoto, Masahide
- Journal of Applied Polymer Science, Vol. 64, Issue 6
Ablation of polyethylene terephthalate at 266 nm
journal, January 2002
- Mansour, N.; Ghaleh, K. J.
- Applied Physics A, Vol. 74, Issue 1
Effect of laser beam scanning mode on material removal efficiency in laser ablation for micromachining of glass
journal, February 2015
- Wang, Z. K.; Seow, W. L.; Wang, X. C.
- Journal of Laser Applications, Vol. 27, Issue S2
Experimental studies and thermal modelling of 1064- and 532-nm Nd:YVO4 micro-laser ablation of polyimide
journal, February 2005
- Dyer, P. E.; Pervolaraki, M.; Lippert, T.
- Applied Physics A, Vol. 80, Issue 3
Infrared laser ablation of polymers
journal, August 1978
- Cozzens, Robert F.; Fox, Robert B.
- Polymer Engineering and Science, Vol. 18, Issue 11
CO 2 -laser micromachining of PMMA: the effect of polymer molecular weight
journal, August 2008
- Nayak, Nimai C.; Lam, Y. C.; Yue, C. Y.
- Journal of Micromechanics and Microengineering, Vol. 18, Issue 9
Effect of optical pulse duration on the XeCl laser ablation of polymers and biological tissue
journal, June 1987
- Taylor, R. S.; Singleton, D. L.; Paraskevopoulos, G.
- Applied Physics Letters, Vol. 50, Issue 25
Effects of the absorption coefficient on resonant infrared laser ablation of poly(ethylene glycol)
journal, January 2009
- Johnson, S. L.; Schriver, K. E.; Haglund, R. F.
- Journal of Applied Physics, Vol. 105, Issue 2
Bisphenol A Sensors on Polyimide Fabricated by Laser Direct Writing for Onsite River Water Monitoring at Attomolar Concentration
journal, July 2016
- Cheng, Cheng; Wang, Shutong; Wu, Jayne
- ACS Applied Materials & Interfaces, Vol. 8, Issue 28
Vacuum Deposited Thin Films Using a Ruby Laser
journal, January 1965
- Smith, Howard M.; Turner, A. F.
- Applied Optics, Vol. 4, Issue 1
Evidence for the Thermal Nature of Laser-Induced Polymer Ablation
journal, May 1987
- Dijkkamp, D.; Gozdz, A. S.; Venkatesan, T.
- Physical Review Letters, Vol. 58, Issue 20
The effect of debris formation on the morphology of excimer laser ablated polymers
journal, September 1988
- Taylor, R. S.; Leopold, K. E.; Singleton, D. L.
- Journal of Applied Physics, Vol. 64, Issue 5
Laser ablation of UHMWPE-polyethylene by 438 nm high energy pulsed laser
journal, April 2004
- Torrisi, L.; Gammino, S.; Mezzasalma, A. M.
- Applied Surface Science, Vol. 227, Issue 1-4
Underwater excimer laser ablation of polymers
journal, May 2008
- Elaboudi, I.; Lazare, S.; Belin, C.
- Applied Physics A, Vol. 92, Issue 4
The Spectrographic Determination of Trace Elements Using a Three-Step Filter and the Respektra Calculator
journal, January 1962
- Chamberlain, G. T.
- Applied Spectroscopy, Vol. 16, Issue 1
Dependence of photoetching rates of polymers at 193 nm on optical absorption depth
journal, January 1986
- Cole, H. S.; Liu, Y. S.; Philipp, H. R.
- Applied Physics Letters, Vol. 48, Issue 1
Polymers designed for laser ablation-influence of photochemical properties
journal, September 2002
- Lippert, T.; Dickinson, J. T.; Hauer, M.
- Applied Surface Science, Vol. 197-198
Laser ablation of a triazene polymer studied by ns-interferometry and shadowgraphy
conference, September 2002
- Hauer, Marc; Funk, David J.; Lippert, Thomas
- International Symposium on High-Power Laser Ablation 2002, SPIE Proceedings
Femtosecond Laser Fabrication of Cavity Microball Lens (CMBL) inside a PMMA Substrate for Super-Wide Angle Imaging
journal, March 2015
- Zheng, Chong; Hu, Anming; Kihm, Kenneth D.
- Small, Vol. 11, Issue 25
Photoablation characteristics of novel polyimides synthesized for high-aspect-ratio excimer laser LIGA process
journal, January 2004
- Yang, Chii-Rong; Hsieh, Yu-Sheng; Hwang, Guang-Yeu
- Journal of Micromechanics and Microengineering, Vol. 14, Issue 4
A simple and cost-effective method for fabrication of integrated electronic-microfluidic devices using a laser-patterned PDMS layer
journal, December 2011
- Li, Ming; Li, Shunbo; Wu, Jinbo
- Microfluidics and Nanofluidics, Vol. 12, Issue 5
Deposition of Poly(methyl methacrylate) Films by UV Laser Ablation
journal, June 1995
- Blanchet, Graciela B.
- Macromolecules, Vol. 28, Issue 13
Direct writing of microlenses in polycarbonate with excimer laser ablation
journal, January 2003
- Naessens, Kris; Ottevaere, Heidi; Baets, Roel
- Applied Optics, Vol. 42, Issue 31
The effect of recoil pressure in the ablation of polycrystalline graphite by a nanosecond laser pulse
journal, May 2015
- Hoffman, Jacek
- Journal of Physics D: Applied Physics, Vol. 48, Issue 23
Ultrashort pulse laser ablation of polycarbonate and polymethylmethacrylate
journal, February 2000
- Baudach, S.; Bonse, J.; Krüger, J.
- Applied Surface Science, Vol. 154-155
Deposition of Ablation Products from UV-Laser Irradiated Polymer Surfaces
journal, January 1998
- Arenholz, E.; Kirchebner, A.; Klose, S.
- MRS Proceedings, Vol. 526
Femtosecond uv excimer laser ablation
journal, December 1987
- K�per, S.; Stuke, M.
- Applied Physics B Photophysics and Laser Chemistry, Vol. 44, Issue 4
Effect of two typical focus positions on microstructure shape and morphology in femtosecond laser multi-pulse ablation of metals
journal, December 2008
- Wang, Wenjun; Mei, Xuesong; Jiang, Gedong
- Applied Surface Science, Vol. 255, Issue 5
One-Step Production of Organized Surface Architectures on Polymeric Materials by Direct Laser Interference Patterning
journal, February 2007
- Lasagni, A. F.; Acevedo, D. F.; Barbero, C. A.
- Advanced Engineering Materials, Vol. 9, Issue 1-2
Laser-induced phase explosion: new physical problems when a condensed phase approaches the thermodynamic critical temperature
journal, December 1999
- Miotello, A.; Kelly, R.
- Applied Physics A Materials Science & Processing, Vol. 69, Issue S1
Chemical transformations of the polyimide Kapton brought about by ultraviolet laser radiation
journal, October 1995
- Srinivasan, R.; Hall, R. R.; Loehle, W. D.
- Journal of Applied Physics, Vol. 78, Issue 8
Laser ablation of parallel optical interconnect waveguides
journal, May 2006
- Van Steenberge, G.; Hendrickx, N.; Bosman, E.
- IEEE Photonics Technology Letters, Vol. 18, Issue 9
Mid-infrared erbium:YAG laser ablation of bone: The effect of laser osteotomy on bone healing
journal, January 1989
- Nelson, J. Stuart; Orenstein, Arie; Liaw, Lih-Huei L.
- Lasers in Surgery and Medicine, Vol. 9, Issue 4
Polymer jacket stripping of optical fibres by laser irradiation
journal, September 2004
- Snelling, H. V.; Walton, C. D.; Whitehead, D. J.
- Applied Physics A, Vol. 79, Issue 4-6
Mass Spectrometric Study of Vapor Ejected from Graphite and Other Solids by Focused Laser Beams
journal, May 1964
- Berkowitz, J.; Chupka, W. A.
- The Journal of Chemical Physics, Vol. 40, Issue 9
Surface properties of poly(ethylene terephthalate) films modified by far-ultraviolet radiation at 193nm (laser) and 185nm (low intensity)
journal, May 1986
- Lazare, Sylvain; Srinivasan, R.
- The Journal of Physical Chemistry, Vol. 90, Issue 10
Spectroscopic Ultramicroanalysis with a Laser
journal, October 1963
- Rosan, R. C.; Healy, M. K.; McNary, W. F.
- Science, Vol. 142, Issue 3589
Advanced polyimide materials: Syntheses, physical properties and applications
journal, July 2012
- Liaw, Der-Jang; Wang, Kung-Li; Huang, Ying-Chi
- Progress in Polymer Science, Vol. 37, Issue 7
On the saturation effect in the picosecond near ultraviolet laser ablation of polyimide
journal, April 1989
- Chuang, Mei‐Chen; Tam, Andrew C.
- Journal of Applied Physics, Vol. 65, Issue 7
Evidence of volume bubble creation during laser ablation of PMMA organic polymer
journal, April 2000
- Efthimiopoulos, T.; Kiagias, Ch.; Heliotis, G.
- Canadian Journal of Physics, Vol. 78, Issue 5-6
The physical mechanisms of short-pulse laser ablation
journal, February 2000
- von der Linde, D.; Sokolowski-Tinten, K.
- Applied Surface Science, Vol. 154-155
All-Polymer Photonic Devices Using Excimer Laser Micromachining
journal, February 2004
- Jiang, J.; Callender, C. L.; Noad, J. P.
- IEEE Photonics Technology Letters, Vol. 16, Issue 2
Large carbon cluster ion formation by laser ablation of polyimide and graphite
journal, November 1988
- Creasy, William R.; Brenna, J. T.
- Chemical Physics, Vol. 126, Issue 2-3
Lasers in manufacturing: a review of technologies and applications
journal, April 2015
- Bogue, Robert
- Assembly Automation, Vol. 35, Issue 2
Rapid prototyping of single-layer microfluidic PDMS devices with abrupt depth variations under non-clean-room conditions by using laser ablation and UV-curable polymer
journal, June 2017
- Yan, Zhibin; Huang, Xiaoyang; Yang, Chun
- Microfluidics and Nanofluidics, Vol. 21, Issue 6
Dynamic changes in PDMS surface morphology in femtosecond laser treatment
journal, January 2015
- Moon, Heh-Young; Sidhu, Mehra S.; Lee, Heung Soon
- Optics Express, Vol. 23, Issue 15
Surface Properties of Femtosecond Laser Ablated PMMA
journal, July 2010
- De Marco, Carmela; Eaton, Shane M.; Suriano, Raffaella
- ACS Applied Materials & Interfaces, Vol. 2, Issue 8
Laser beam machining—A review
journal, May 2008
- Dubey, Avanish Kumar; Yadava, Vinod
- International Journal of Machine Tools and Manufacture, Vol. 48, Issue 6
A study on UV laser drilling of PEEK reinforced with carbon fibers
journal, March 2012
- Romoli, L.; Fischer, F.; Kling, R.
- Optics and Lasers in Engineering, Vol. 50, Issue 3
Heat transfer and material removal in pulsed excimer‐laser‐induced ablation: Pulsewidth dependence
journal, September 1994
- D’Couto, G. C.; Babu, S. V.
- Journal of Applied Physics, Vol. 76, Issue 5
Efficient ablation of organic polymers polyether sulphone and polyether ether ketone by a TEA CO2 laser with high perforation ability
journal, May 1994
- Sumiyoshi, T.; Ninomiya, Y.; Ogasawara, H.
- Applied Physics A Solids and Surfaces, Vol. 58, Issue 5
Effects of polymer properties on laser ablation behaviour
journal, September 2002
- Pham, Duy; Tonge, Livia; Cao, Jinan
- Smart Materials and Structures, Vol. 11, Issue 5
Investigation of the Machining of Titanium Components for Lightweight Vehicles
conference, April 2010
- Kuttolamadom, Mathew; Jones, Joshua; Mears, Laine
- SAE 2010 World Congress & Exhibition, SAE Technical Paper Series
Theoretical and experimental investigations into laser ablation of polyimide and copper films with 355-nm Nd:YVO4 laser
journal, June 2007
- Shin, B. S.; Oh, J. Y.; Sohn, H.
- Journal of Materials Processing Technology, Vol. 187-188
Laser fluence dependence of periodic grating structures formed on metal surfaces under femtosecond laser pulse irradiation
journal, October 2010
- Okamuro, Kiminori; Hashida, Masaki; Miyasaka, Yasuhiro
- Physical Review B, Vol. 82, Issue 16
Femtosecond laser scribing of Mo thin film on flexible substrate using axicon focused beam
journal, October 2015
- Yu, Xiaoming; Ma, Jianfeng; Lei, Shuting
- Journal of Manufacturing Processes, Vol. 20
Fabrication of embedded microball lens in PMMA with high repetition rate femtosecond fiber laser
journal, January 2015
- Zheng, Chong; Hu, Anming; Li, Ruozhou
- Optics Express, Vol. 23, Issue 13
Femtosecond Laser Backside Ablation of Gold Film on Silicon Substrate
journal, January 2016
- Lei, Shuting; Grojo, David; Ma, Jianfeng
- Procedia Manufacturing, Vol. 5
Effective deep ultraviolet photoetching of polymethyl methacrylate by an excimer laser
journal, March 1982
- Kawamura, Y.; Toyoda, K.; Namba, S.
- Applied Physics Letters, Vol. 40, Issue 5
Rapid prototyping of polymer microsystems via excimer laser ablation of polymeric moulds
journal, January 2004
- Jensen, Martin F.; McCormack, John E.; Helbo, Bjarne
- Lab on a Chip, Vol. 4, Issue 4
Dopant-induced ablation of polymers by a 308 nm excimer laser
journal, January 1988
- Hiraoka, H.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 6, Issue 1
Plume temperature in the laser ablation of polyimide films measured by infrared emission spectroscopy
journal, June 1988
- Koren, G.
- Applied Physics B Photophysics and Laser Chemistry, Vol. 46, Issue 2
Effect of ambient air pressure on debris redeposition during laser ablation of glass
journal, December 2005
- Singh, S.; Argument, M.; Tsui, Y. Y.
- Journal of Applied Physics, Vol. 98, Issue 11
Masks for laser ablation technology: New requirements and challenges
journal, January 1997
- Speidell, J. L.; Pulaski, D. P.; Patel, R. S.
- IBM Journal of Research and Development, Vol. 41, Issue 1.2
An x‐ray photoelectron spectroscopy study of poly(methylmethacrylate) and poly(α‐methylstyrene) surfaces irradiated by excimer lasers
journal, November 1986
- Burrell, M. C.; Liu, Y. S.; Cole, H. S.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 4, Issue 6
Excimer laser ablation and thermal coupling efficiency to polymer films
journal, February 1985
- Dyer, P. E.; Sidhu, J.
- Journal of Applied Physics, Vol. 57, Issue 4
Effects of wavelength, deposition rate and thickness on laser ablation deposited YSZ films on Si(100)
journal, July 1997
- Aguiar, R.; Trtik, V.; Sánchez, F.
- Thin Solid Films, Vol. 304, Issue 1-2
XeCl laser ablation of polyetheretherketone
journal, November 1990
- Dyer, P. E.; Oldershaw, G. A.; Schudel, D.
- Applied Physics B Photophysics and Laser Chemistry, Vol. 51, Issue 5
A photothermal model for polymer ablation: chemical modification
journal, July 1993
- Cain, Stephen R.
- The Journal of Physical Chemistry, Vol. 97, Issue 29
Theory of polymer ablation
journal, December 1988
- Mahan, G. D.; Cole, H. S.; Liu, Y. S.
- Applied Physics Letters, Vol. 53, Issue 24
Direct Micromachining of Microfluidic Channels on Biodegradable Materials Using Laser Ablation
journal, June 2017
- Hsieh, Yi-Kong; Chen, Shiau-Chen; Huang, Wen-Ling
- Polymers, Vol. 9, Issue 12
Reflection of high-intensity nanosecond Nd:YAG laser pulses by metals
journal, September 2012
- Benavides, O.; Golikov, V.; Lebedeva, O.
- Applied Physics A, Vol. 112, Issue 1
A review of ultrashort pulsed laser ablation of materials
journal, February 1998
- Shirk, M. D.; Molian, P. A.
- Journal of Laser Applications, Vol. 10, Issue 1
Fibre optic jacket removal by pulsed laser ablation
journal, March 2000
- Barnier, F.; Dyer, P. E.; Monk, P.
- Journal of Physics D: Applied Physics, Vol. 33, Issue 7
A silk fabric derived carbon fibre net for transparent capacitive touch pads and all-solid supercapacitors
journal, January 2017
- Ma, D. L.; Ma, Y.; Chen, Z. W.
- J. Mater. Chem. A, Vol. 5, Issue 39
Femtosecond, picosecond and nanosecond laser ablation of solids
journal, August 1996
- Chichkov, B. N.; Momma, C.; Nolte, S.
- Applied Physics A Materials Science & Processing, Vol. 63, Issue 2
Excimer laser etching of polyimide
journal, September 1985
- Brannon, J. H.; Lankard, J. R.; Baise, A. I.
- Journal of Applied Physics, Vol. 58, Issue 5
UV laser ablation of polyetherimide embossing tools for the packaging of membranes and microchannels using sealing bosses
journal, October 2010
- Kim, Gi Dae; Rundel, Jack Thurlby; Paul, Brian Kevin
- International Journal of Precision Engineering and Manufacturing, Vol. 11, Issue 5
Customization of Poly(dimethylsiloxane) Stamps by Micromachining Using a Femtosecond-Pulsed Laser
journal, January 2003
- Wolfe, D. B.; Ashcom, J. B.; Hwang, J. C.
- Advanced Materials, Vol. 15, Issue 1
Ultraviolet laser ablation of polyimide films
journal, January 1987
- Srinivasan, R.; Braren, B.; Dreyfus, R. W.
- Journal of Applied Physics, Vol. 61, Issue 1
Excimer laser ablation of novel triazene polymers: influence of structural parameters on the ablation characteristics
journal, November 1993
- Lippert, T.; Stebani, J.; Ihlemann, J.
- The Journal of Physical Chemistry, Vol. 97, Issue 47
CO2-laser micromachining and back-end processing for rapid production of PMMA-based microfluidic systems
journal, January 2002
- Klank, Henning; Kutter, J�rg P.; Geschke, Oliver
- Lab on a Chip, Vol. 2, Issue 4
Design and fabrication of polymeric micro-optical components using excimer laser ablation
journal, February 2004
- Pan, C. T.; Shen, S. C.
- Materials Science and Technology, Vol. 20, Issue 2
Laser-induced phase explosion: new physical problems when a condensed phase approaches the thermodynamic critical temperature
journal, December 1999
- Miotello, A.; Kelly, R.
- Applied Physics A: Materials Science & Processing, Vol. 69, Issue 7
Works referencing / citing this record:
A Novel Large-Scale, Multilayer, and Facilely Aligned Micropatterning Technique Based on Flexible and Reusable SU-8 Shadow Masks
other, January 2019
- Moradi, Somayeh; Bandari, Nooshin; Bandari, Vineeth Kumar
- Weinheim : Wiley