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Title: Sputtering in a high-flux plasma environment

Authors:
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1550269
Grant/Contract Number:  
FG02-07ER54912
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Scripta Materialia
Additional Journal Information:
Journal Name: Scripta Materialia Journal Volume: 143 Journal Issue: C; Journal ID: ISSN 1359-6462
Publisher:
Elsevier
Country of Publication:
United States
Language:
English

Citation Formats

Doerner, R. P. Sputtering in a high-flux plasma environment. United States: N. p., 2018. Web. doi:10.1016/j.scriptamat.2017.06.045.
Doerner, R. P. Sputtering in a high-flux plasma environment. United States. doi:10.1016/j.scriptamat.2017.06.045.
Doerner, R. P. Mon . "Sputtering in a high-flux plasma environment". United States. doi:10.1016/j.scriptamat.2017.06.045.
@article{osti_1550269,
title = {Sputtering in a high-flux plasma environment},
author = {Doerner, R. P.},
abstractNote = {},
doi = {10.1016/j.scriptamat.2017.06.045},
journal = {Scripta Materialia},
number = C,
volume = 143,
place = {United States},
year = {2018},
month = {1}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: 10.1016/j.scriptamat.2017.06.045

Citation Metrics:
Cited by: 2 works
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