Reduced atomic shadowing in HiPIMS: Role of the thermalized metal ions
Journal Article
·
· Applied Surface Science
- Sponsoring Organization:
- USDOE
- Grant/Contract Number:
- AC02-05CH11231
- OSTI ID:
- 1549406
- Journal Information:
- Applied Surface Science, Journal Name: Applied Surface Science Vol. 433 Journal Issue: C; ISSN 0169-4332
- Publisher:
- ElsevierCopyright Statement
- Country of Publication:
- Netherlands
- Language:
- English
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