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Title: Reduced atomic shadowing in HiPIMS: Role of the thermalized metal ions

Authors:
; ; ;
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1549406
Grant/Contract Number:  
AC02-05CH11231
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Applied Surface Science
Additional Journal Information:
Journal Name: Applied Surface Science Journal Volume: 433 Journal Issue: C; Journal ID: ISSN 0169-4332
Publisher:
Elsevier
Country of Publication:
Netherlands
Language:
English

Citation Formats

Oliveira, João Carlos, Ferreira, Fábio, Anders, André, and Cavaleiro, Albano. Reduced atomic shadowing in HiPIMS: Role of the thermalized metal ions. Netherlands: N. p., 2018. Web. doi:10.1016/j.apsusc.2017.10.133.
Oliveira, João Carlos, Ferreira, Fábio, Anders, André, & Cavaleiro, Albano. Reduced atomic shadowing in HiPIMS: Role of the thermalized metal ions. Netherlands. doi:10.1016/j.apsusc.2017.10.133.
Oliveira, João Carlos, Ferreira, Fábio, Anders, André, and Cavaleiro, Albano. Thu . "Reduced atomic shadowing in HiPIMS: Role of the thermalized metal ions". Netherlands. doi:10.1016/j.apsusc.2017.10.133.
@article{osti_1549406,
title = {Reduced atomic shadowing in HiPIMS: Role of the thermalized metal ions},
author = {Oliveira, João Carlos and Ferreira, Fábio and Anders, André and Cavaleiro, Albano},
abstractNote = {},
doi = {10.1016/j.apsusc.2017.10.133},
journal = {Applied Surface Science},
number = C,
volume = 433,
place = {Netherlands},
year = {2018},
month = {3}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: 10.1016/j.apsusc.2017.10.133

Citation Metrics:
Cited by: 4 works
Citation information provided by
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