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Title: Reduced atomic shadowing in HiPIMS: Role of the thermalized metal ions

Journal Article · · Applied Surface Science

Sponsoring Organization:
USDOE
Grant/Contract Number:
AC02-05CH11231
OSTI ID:
1549406
Journal Information:
Applied Surface Science, Journal Name: Applied Surface Science Vol. 433 Journal Issue: C; ISSN 0169-4332
Publisher:
ElsevierCopyright Statement
Country of Publication:
Netherlands
Language:
English