Reduced atomic shadowing in HiPIMS: Role of the thermalized metal ions
- Authors:
- Publication Date:
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1549406
- Grant/Contract Number:
- AC02-05CH11231
- Resource Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Applied Surface Science
- Additional Journal Information:
- Journal Name: Applied Surface Science Journal Volume: 433 Journal Issue: C; Journal ID: ISSN 0169-4332
- Publisher:
- Elsevier
- Country of Publication:
- Netherlands
- Language:
- English
Citation Formats
Oliveira, João Carlos, Ferreira, Fábio, Anders, André, and Cavaleiro, Albano. Reduced atomic shadowing in HiPIMS: Role of the thermalized metal ions. Netherlands: N. p., 2018.
Web. doi:10.1016/j.apsusc.2017.10.133.
Oliveira, João Carlos, Ferreira, Fábio, Anders, André, & Cavaleiro, Albano. Reduced atomic shadowing in HiPIMS: Role of the thermalized metal ions. Netherlands. https://doi.org/10.1016/j.apsusc.2017.10.133
Oliveira, João Carlos, Ferreira, Fábio, Anders, André, and Cavaleiro, Albano. Thu .
"Reduced atomic shadowing in HiPIMS: Role of the thermalized metal ions". Netherlands. https://doi.org/10.1016/j.apsusc.2017.10.133.
@article{osti_1549406,
title = {Reduced atomic shadowing in HiPIMS: Role of the thermalized metal ions},
author = {Oliveira, João Carlos and Ferreira, Fábio and Anders, André and Cavaleiro, Albano},
abstractNote = {},
doi = {10.1016/j.apsusc.2017.10.133},
journal = {Applied Surface Science},
number = C,
volume = 433,
place = {Netherlands},
year = {2018},
month = {3}
}
Free Publicly Available Full Text
Publisher's Version of Record
https://doi.org/10.1016/j.apsusc.2017.10.133
https://doi.org/10.1016/j.apsusc.2017.10.133
Other availability
Cited by: 21 works
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