Reduced atomic shadowing in HiPIMS: Role of the thermalized metal ions

Oliveira, João Carlos; Ferreira, Fábio; Anders, André; Cavaleiro, Albano

doi:10.1016/j.apsusc.2017.10.133

Title: Reduced atomic shadowing in HiPIMS: Role of the thermalized metal ions

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Authors:: Oliveira, João Carlos; Ferreira, Fábio; Anders, André; Cavaleiro, Albano

Publication Date:: 2018-03-01

Sponsoring Org.:: USDOE

OSTI Identifier:: 1549406

Grant/Contract Number:: AC02-05CH11231

Resource Type:: Publisher's Accepted Manuscript

Journal Name:: Applied Surface Science

Additional Journal Information:: Journal Name: Applied Surface Science Journal Volume: 433 Journal Issue: C; Journal ID: ISSN 0169-4332

Publisher:: Elsevier

Country of Publication:: Netherlands

Language:: English

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                    Oliveira, João Carlos, Ferreira, Fábio, Anders, André, and Cavaleiro, Albano. Reduced atomic shadowing in HiPIMS: Role of the thermalized metal ions.  Netherlands: N. p., 2018. 
Web.  doi:10.1016/j.apsusc.2017.10.133.

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                    Oliveira, João Carlos, Ferreira, Fábio, Anders, André, & Cavaleiro, Albano. Reduced atomic shadowing in HiPIMS: Role of the thermalized metal ions.  Netherlands.  https://doi.org/10.1016/j.apsusc.2017.10.133

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                    Oliveira, João Carlos, Ferreira, Fábio, Anders, André, and Cavaleiro, Albano. Thu .  
"Reduced atomic shadowing in HiPIMS: Role of the thermalized metal ions".  Netherlands.  https://doi.org/10.1016/j.apsusc.2017.10.133.

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@article{osti_1549406,

  title        = {Reduced atomic shadowing in HiPIMS: Role of the thermalized metal ions},

  author       = {Oliveira, João Carlos and Ferreira, Fábio and Anders, André and Cavaleiro, Albano},

  abstractNote = {},

  doi          = {10.1016/j.apsusc.2017.10.133},

  journal      = {Applied Surface Science},

  number       = C,

  volume       = 433,

  place        = {Netherlands},

  year         = {2018},

  month        = {3}

}

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