A high bandwidth microelectromechanical system-based nanopositioner for scanning tunneling microscopy
Abstract
Limited Z-axis bandwidth of piezotube scanners used in conventional Scanning Tunneling Microscopes (STMs) has been a major limiting factor in achieving high scan speeds in STM applications. Slow Z-axis dynamics of typical piezotube scanners combined with the weight of the STM tip/tip holder assembly, that the scanner has to carry, substantially limit the achievable Z-axis bandwidth in both imaging and lithography modes. To tackle this issue, we introduce a high bandwidth microelectromechanical-system-based nanopositioner to be integrated into an existing STM scanner. The device is designed to replace the STM tip and fine Z-positioning mechanisms in the conventional STM setup, while providing an order of magnitude higher bandwidth in Z axis. The device is microfabricated using double silicon-on-isolator technology, and standard cleanroom processes. Experiments show that tunneling current between the device tip and a highly ordered pyrolytic graphite sample can be successfully established and maintained in air using the proposed device in a feedback loop. Results suggest that the proposed device uniquely combines a very high resolution and a large stroke with a substantially larger Z-axis bandwidth compared to that of conventional STM piezotube scanners, enabling higher scanning speeds in STM operations.
- Authors:
-
- Univ. of Texas-Dallas, Richardson, TX (United States)
- Publication Date:
- Research Org.:
- Univ. of Texas at Dallas, Richardson, TX (United States)
- Sponsoring Org.:
- USDOE Office of Energy Efficiency and Renewable Energy (EERE), Energy Efficiency Office. Advanced Manufacturing Office
- OSTI Identifier:
- 1548310
- Alternate Identifier(s):
- OSTI ID: 1545907
- Grant/Contract Number:
- EE0008322
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Review of Scientific Instruments
- Additional Journal Information:
- Journal Volume: 90; Journal Issue: 7; Journal ID: ISSN 0034-6748
- Publisher:
- American Institute of Physics (AIP)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; Scanning Tunneling Microscopy; MEMS; Nanopositioner; In-plane tip
Citation Formats
Alipour, Afshin, Coskun, M. Bulut, and Moheimani, S. O. Reza. A high bandwidth microelectromechanical system-based nanopositioner for scanning tunneling microscopy. United States: N. p., 2019.
Web. doi:10.1063/1.5109900.
Alipour, Afshin, Coskun, M. Bulut, & Moheimani, S. O. Reza. A high bandwidth microelectromechanical system-based nanopositioner for scanning tunneling microscopy. United States. https://doi.org/10.1063/1.5109900
Alipour, Afshin, Coskun, M. Bulut, and Moheimani, S. O. Reza. Wed .
"A high bandwidth microelectromechanical system-based nanopositioner for scanning tunneling microscopy". United States. https://doi.org/10.1063/1.5109900. https://www.osti.gov/servlets/purl/1548310.
@article{osti_1548310,
title = {A high bandwidth microelectromechanical system-based nanopositioner for scanning tunneling microscopy},
author = {Alipour, Afshin and Coskun, M. Bulut and Moheimani, S. O. Reza},
abstractNote = {Limited Z-axis bandwidth of piezotube scanners used in conventional Scanning Tunneling Microscopes (STMs) has been a major limiting factor in achieving high scan speeds in STM applications. Slow Z-axis dynamics of typical piezotube scanners combined with the weight of the STM tip/tip holder assembly, that the scanner has to carry, substantially limit the achievable Z-axis bandwidth in both imaging and lithography modes. To tackle this issue, we introduce a high bandwidth microelectromechanical-system-based nanopositioner to be integrated into an existing STM scanner. The device is designed to replace the STM tip and fine Z-positioning mechanisms in the conventional STM setup, while providing an order of magnitude higher bandwidth in Z axis. The device is microfabricated using double silicon-on-isolator technology, and standard cleanroom processes. Experiments show that tunneling current between the device tip and a highly ordered pyrolytic graphite sample can be successfully established and maintained in air using the proposed device in a feedback loop. Results suggest that the proposed device uniquely combines a very high resolution and a large stroke with a substantially larger Z-axis bandwidth compared to that of conventional STM piezotube scanners, enabling higher scanning speeds in STM operations.},
doi = {10.1063/1.5109900},
journal = {Review of Scientific Instruments},
number = 7,
volume = 90,
place = {United States},
year = {2019},
month = {7}
}
Figures / Tables:

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