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Title: A high bandwidth microelectromechanical system-based nanopositioner for scanning tunneling microscopy

Abstract

Limited Z-axis bandwidth of piezotube scanners used in conventional Scanning Tunneling Microscopes (STMs) has been a major limiting factor in achieving high scan speeds in STM applications. Slow Z-axis dynamics of typical piezotube scanners combined with the weight of the STM tip/tip holder assembly, that the scanner has to carry, substantially limit the achievable Z-axis bandwidth in both imaging and lithography modes. To tackle this issue, we introduce a high bandwidth microelectromechanical-system-based nanopositioner to be integrated into an existing STM scanner. The device is designed to replace the STM tip and fine Z-positioning mechanisms in the conventional STM setup, while providing an order of magnitude higher bandwidth in Z axis. The device is microfabricated using double silicon-on-isolator technology, and standard cleanroom processes. Experiments show that tunneling current between the device tip and a highly ordered pyrolytic graphite sample can be successfully established and maintained in air using the proposed device in a feedback loop. Results suggest that the proposed device uniquely combines a very high resolution and a large stroke with a substantially larger Z-axis bandwidth compared to that of conventional STM piezotube scanners, enabling higher scanning speeds in STM operations.

Authors:
ORCiD logo [1]; ORCiD logo [1]; ORCiD logo [1]
+ Show Author Affiliations
  1. Univ. of Texas-Dallas, Richardson, TX (United States)
Publication Date:
Research Org.:
Univ. of Texas at Dallas, Richardson, TX (United States)
Sponsoring Org.:
USDOE Office of Energy Efficiency and Renewable Energy (EERE), Energy Efficiency Office. Advanced Manufacturing Office
OSTI Identifier:
1548310
Alternate Identifier(s):
OSTI ID: 1545907
Grant/Contract Number:  
EE0008322
Resource Type:
Accepted Manuscript
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 90; Journal Issue: 7; Journal ID: ISSN 0034-6748
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; Scanning Tunneling Microscopy; MEMS; Nanopositioner; In-plane tip

Citation Formats

Alipour, Afshin, Coskun, M. Bulut, and Moheimani, S. O. Reza. A high bandwidth microelectromechanical system-based nanopositioner for scanning tunneling microscopy. United States: N. p., 2019. Web. doi:10.1063/1.5109900.
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Alipour, Afshin, Coskun, M. Bulut, & Moheimani, S. O. Reza. A high bandwidth microelectromechanical system-based nanopositioner for scanning tunneling microscopy. United States. doi:10.1063/1.5109900.
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Alipour, Afshin, Coskun, M. Bulut, and Moheimani, S. O. Reza. Wed . "A high bandwidth microelectromechanical system-based nanopositioner for scanning tunneling microscopy". United States. doi:10.1063/1.5109900. https://www.osti.gov/servlets/purl/1548310.
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@article{osti_1548310,
title = {A high bandwidth microelectromechanical system-based nanopositioner for scanning tunneling microscopy},
author = {Alipour, Afshin and Coskun, M. Bulut and Moheimani, S. O. Reza},
abstractNote = {Limited Z-axis bandwidth of piezotube scanners used in conventional Scanning Tunneling Microscopes (STMs) has been a major limiting factor in achieving high scan speeds in STM applications. Slow Z-axis dynamics of typical piezotube scanners combined with the weight of the STM tip/tip holder assembly, that the scanner has to carry, substantially limit the achievable Z-axis bandwidth in both imaging and lithography modes. To tackle this issue, we introduce a high bandwidth microelectromechanical-system-based nanopositioner to be integrated into an existing STM scanner. The device is designed to replace the STM tip and fine Z-positioning mechanisms in the conventional STM setup, while providing an order of magnitude higher bandwidth in Z axis. The device is microfabricated using double silicon-on-isolator technology, and standard cleanroom processes. Experiments show that tunneling current between the device tip and a highly ordered pyrolytic graphite sample can be successfully established and maintained in air using the proposed device in a feedback loop. Results suggest that the proposed device uniquely combines a very high resolution and a large stroke with a substantially larger Z-axis bandwidth compared to that of conventional STM piezotube scanners, enabling higher scanning speeds in STM operations.},
doi = {10.1063/1.5109900},
journal = {Review of Scientific Instruments},
number = 7,
volume = 90,
place = {United States},
year = {2019},
month = {7}
}
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DOI:  10.1063/1.5109900
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