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Title: A numerical study on the material removal and phase transformation in the nanometric cutting of silicon

Authors:
; ; ;
Publication Date:
Sponsoring Org.:
USDOE Office of Electricity Delivery and Energy Reliability (OE), Power Systems Engineering Research and Development (R&D) (OE-10)
OSTI Identifier:
1548208
Grant/Contract Number:  
2016YFB1102203
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Applied Surface Science
Additional Journal Information:
Journal Name: Applied Surface Science Journal Volume: 455 Journal Issue: C; Journal ID: ISSN 0169-4332
Publisher:
Elsevier
Country of Publication:
Netherlands
Language:
English

Citation Formats

Wang, Jinshi, Zhang, Xiaodong, Fang, Fengzhou, and Chen, Rongtai. A numerical study on the material removal and phase transformation in the nanometric cutting of silicon. Netherlands: N. p., 2018. Web. doi:10.1016/j.apsusc.2018.05.091.
Wang, Jinshi, Zhang, Xiaodong, Fang, Fengzhou, & Chen, Rongtai. A numerical study on the material removal and phase transformation in the nanometric cutting of silicon. Netherlands. doi:10.1016/j.apsusc.2018.05.091.
Wang, Jinshi, Zhang, Xiaodong, Fang, Fengzhou, and Chen, Rongtai. Mon . "A numerical study on the material removal and phase transformation in the nanometric cutting of silicon". Netherlands. doi:10.1016/j.apsusc.2018.05.091.
@article{osti_1548208,
title = {A numerical study on the material removal and phase transformation in the nanometric cutting of silicon},
author = {Wang, Jinshi and Zhang, Xiaodong and Fang, Fengzhou and Chen, Rongtai},
abstractNote = {},
doi = {10.1016/j.apsusc.2018.05.091},
journal = {Applied Surface Science},
number = C,
volume = 455,
place = {Netherlands},
year = {2018},
month = {10}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: 10.1016/j.apsusc.2018.05.091

Citation Metrics:
Cited by: 3 works
Citation information provided by
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