A numerical study on the material removal and phase transformation in the nanometric cutting of silicon
- Authors:
- Publication Date:
- Sponsoring Org.:
- USDOE Office of Electricity (OE), Advanced Grid Research & Development. Power Systems Engineering Research
- OSTI Identifier:
- 1548208
- Grant/Contract Number:
- 2016YFB1102203
- Resource Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Applied Surface Science
- Additional Journal Information:
- Journal Name: Applied Surface Science Journal Volume: 455 Journal Issue: C; Journal ID: ISSN 0169-4332
- Publisher:
- Elsevier
- Country of Publication:
- Netherlands
- Language:
- English
Citation Formats
Wang, Jinshi, Zhang, Xiaodong, Fang, Fengzhou, and Chen, Rongtai. A numerical study on the material removal and phase transformation in the nanometric cutting of silicon. Netherlands: N. p., 2018.
Web. doi:10.1016/j.apsusc.2018.05.091.
Wang, Jinshi, Zhang, Xiaodong, Fang, Fengzhou, & Chen, Rongtai. A numerical study on the material removal and phase transformation in the nanometric cutting of silicon. Netherlands. https://doi.org/10.1016/j.apsusc.2018.05.091
Wang, Jinshi, Zhang, Xiaodong, Fang, Fengzhou, and Chen, Rongtai. Mon .
"A numerical study on the material removal and phase transformation in the nanometric cutting of silicon". Netherlands. https://doi.org/10.1016/j.apsusc.2018.05.091.
@article{osti_1548208,
title = {A numerical study on the material removal and phase transformation in the nanometric cutting of silicon},
author = {Wang, Jinshi and Zhang, Xiaodong and Fang, Fengzhou and Chen, Rongtai},
abstractNote = {},
doi = {10.1016/j.apsusc.2018.05.091},
journal = {Applied Surface Science},
number = C,
volume = 455,
place = {Netherlands},
year = {2018},
month = {10}
}
Free Publicly Available Full Text
Publisher's Version of Record
https://doi.org/10.1016/j.apsusc.2018.05.091
https://doi.org/10.1016/j.apsusc.2018.05.091
Other availability
Cited by: 11 works
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