A numerical study on the material removal and phase transformation in the nanometric cutting of silicon
Journal Article
·
· Applied Surface Science
Not Available
- Sponsoring Organization:
- USDOE Office of Electricity (OE), Advanced Grid Research & Development. Power Systems Engineering Research
- OSTI ID:
- 1548208
- Journal Information:
- Applied Surface Science, Journal Name: Applied Surface Science Journal Issue: C Vol. 455; ISSN 0169-4332
- Publisher:
- ElsevierCopyright Statement
- Country of Publication:
- Netherlands
- Language:
- English
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