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Title: Methylated Poly(ethylene)imine Modified Capacitive Micromachined Ultrasonic Transducer for Measurements of CO2 and SO2 in Their Mixtures

Abstract

A gravimetric gas detection device based on surface functionalized Capacitive Micromachined Ultrasound Transducers (CMUTs) was designed, fabricated and tested for detection of carbon dioxide (CO2) and sulfur dioxide (SO2) mixtures in nitrogen. The created measurement setup of continuous data collection, integrated with an in-situ Fourier Transform Infrared (FT-IR) spectroscopy, allows for better understanding of the mechanisms and molecular interactions with the sensing layer (methylated poly(ethylene)imine) and its need of surface functionalization for multiple gas detection. During experimentation with CO2 gases, weak molecular interactions were observed in spectroscopy data. Linear sensor response to frequency shift was observed with CO2 concentrations ranging from 0.16 vol % to 1 vol %. Moreover, the Raman and FT-IR spectroscopy data showed much stronger SO2 and the polymer interactions, molecules were bound by stronger forces and irreversibly changed the polymer film properties. However, the sensor change in resonance frequency in the tested region of 1 vol % to 5 vol % SO2 showed a linear response. This effect changed not only the device resonance frequency but also affected the magnitude of electroacoustic impedance which was used for differentiating the gas mixture of CO2, SO2, in dry N2.

Authors:
ORCiD logo; ; ; ORCiD logo;
Publication Date:
Research Org.:
Georgia Inst. of Technology, Atlanta, GA (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
1544579
Alternate Identifier(s):
OSTI ID: 1611882
Grant/Contract Number:  
SC0012577
Resource Type:
Published Article
Journal Name:
Sensors
Additional Journal Information:
Journal Name: Sensors Journal Volume: 19 Journal Issue: 14; Journal ID: ISSN 1424-8220
Publisher:
MDPI AG
Country of Publication:
Switzerland
Language:
English
Subject:
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY; Chemistry; Engineering; Instruments & Instrumentation; CMUT; methylated polyethyleneimine; CO2; SO2; gravimetric detection; gas sensing

Citation Formats

Barauskas, Dovydas, Pelenis, Donatas, Vanagas, Gailius, Viržonis, Darius, and Baltrušaitis, Jonas. Methylated Poly(ethylene)imine Modified Capacitive Micromachined Ultrasonic Transducer for Measurements of CO2 and SO2 in Their Mixtures. Switzerland: N. p., 2019. Web. doi:10.3390/s19143236.
Barauskas, Dovydas, Pelenis, Donatas, Vanagas, Gailius, Viržonis, Darius, & Baltrušaitis, Jonas. Methylated Poly(ethylene)imine Modified Capacitive Micromachined Ultrasonic Transducer for Measurements of CO2 and SO2 in Their Mixtures. Switzerland. doi:10.3390/s19143236.
Barauskas, Dovydas, Pelenis, Donatas, Vanagas, Gailius, Viržonis, Darius, and Baltrušaitis, Jonas. Tue . "Methylated Poly(ethylene)imine Modified Capacitive Micromachined Ultrasonic Transducer for Measurements of CO2 and SO2 in Their Mixtures". Switzerland. doi:10.3390/s19143236.
@article{osti_1544579,
title = {Methylated Poly(ethylene)imine Modified Capacitive Micromachined Ultrasonic Transducer for Measurements of CO2 and SO2 in Their Mixtures},
author = {Barauskas, Dovydas and Pelenis, Donatas and Vanagas, Gailius and Viržonis, Darius and Baltrušaitis, Jonas},
abstractNote = {A gravimetric gas detection device based on surface functionalized Capacitive Micromachined Ultrasound Transducers (CMUTs) was designed, fabricated and tested for detection of carbon dioxide (CO2) and sulfur dioxide (SO2) mixtures in nitrogen. The created measurement setup of continuous data collection, integrated with an in-situ Fourier Transform Infrared (FT-IR) spectroscopy, allows for better understanding of the mechanisms and molecular interactions with the sensing layer (methylated poly(ethylene)imine) and its need of surface functionalization for multiple gas detection. During experimentation with CO2 gases, weak molecular interactions were observed in spectroscopy data. Linear sensor response to frequency shift was observed with CO2 concentrations ranging from 0.16 vol % to 1 vol %. Moreover, the Raman and FT-IR spectroscopy data showed much stronger SO2 and the polymer interactions, molecules were bound by stronger forces and irreversibly changed the polymer film properties. However, the sensor change in resonance frequency in the tested region of 1 vol % to 5 vol % SO2 showed a linear response. This effect changed not only the device resonance frequency but also affected the magnitude of electroacoustic impedance which was used for differentiating the gas mixture of CO2, SO2, in dry N2.},
doi = {10.3390/s19143236},
journal = {Sensors},
number = 14,
volume = 19,
place = {Switzerland},
year = {2019},
month = {7}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: 10.3390/s19143236

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Works referenced in this record:

Capacitive micromachined ultrasonic transducer (CMUT) as a chemical sensor for DMMP detection
journal, December 2011

  • Park, Kwan Kyu; Lee, Hyunjoo; Kupnik, Mario
  • Sensors and Actuators B: Chemical, Vol. 160, Issue 1
  • DOI: 10.1016/j.snb.2011.09.036

Thermodynamics of CO2 Adsorption on Polyethyleneimine Mesoporous Silica and Activated Carbon
journal, January 2017

  • Mj, Al Marri; Ka, Al Saad; Ma, Saad
  • Journal of Physical Chemistry & Biophysics, Vol. 07, Issue 01
  • DOI: 10.4172/2161-0398.1000239

The mechanics of spin coating of polymer films
journal, January 1988


AFM, SECM and QCM as useful analytical tools in the characterization of enzyme-based bioanalytical platforms
journal, January 2010

  • Casero, Elena; Vázquez, Luis; Parra-Alfambra, Ana María
  • The Analyst, Vol. 135, Issue 8
  • DOI: 10.1039/c0an00120a

Carbon Dioxide Capture from the Air Using a Polyamine Based Regenerable Solid Adsorbent
journal, December 2011

  • Goeppert, Alain; Czaun, Miklos; May, Robert B.
  • Journal of the American Chemical Society, Vol. 133, Issue 50, p. 20164-20167
  • DOI: 10.1021/ja2100005

Fourier transform infrared spectrometry
journal, October 1983


Void-free direct bonding of CMUT arrays with single crystalline plates and pull-in insulation
conference, July 2013

  • Christiansen, Thomas Lehrmann; Hansen, Ole; Johnsen, Mathias Dahl
  • 2013 IEEE International Ultrasonics Symposium (IUS)
  • DOI: 10.1109/ULTSYM.2013.0443

A Low-Noise Oscillator based on a Multi-Membrane CMUT for High Sensitivity Resonant Chemical Sensors
conference, January 2009

  • Lee, H. J.; Park, K. K.; Cristman, P.
  • 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS)
  • DOI: 10.1109/MEMSYS.2009.4805494

Thin-film bulk acoustic resonators and filters using ZnO and lead-zirconium-titanate thin films
journal, April 2001

  • Su, Q. -X.; Kirby, P.; Komuro, E.
  • IEEE Transactions on Microwave Theory and Techniques, Vol. 49, Issue 4
  • DOI: 10.1109/22.915462

Nanomechanical gas sensing with nonlinear resonant cantilevers
journal, September 2014


Fabricating capacitive micromachined ultrasonic transducers with wafer-bonding technology
journal, April 2003

  • Yongli Huang, ; Ergun, A. S.; Haggstrom, E.
  • Journal of Microelectromechanical Systems, Vol. 12, Issue 2
  • DOI: 10.1109/JMEMS.2003.809968

Enhanced sensitivity of SAW gas sensor coated molecularly imprinted polymer incorporating high frequency stability oscillator
journal, August 2007


Functionalization layers for CO2 sensing using capacitive micromachined ultrasonic transducers
journal, November 2012


Greenhouse Gas Molecule CO 2 Detection Using a Capacitive Micromachined Ultrasound Transducer
journal, June 2016


Vibrational frequencies of sulfur dioxide. Determination and application
journal, May 1970

  • Briggs, A. Gordon
  • Journal of Chemical Education, Vol. 47, Issue 5
  • DOI: 10.1021/ed047p391

A room temperature supramolecular-based quartz crystal microbalance (QCM) methane gas sensor
journal, August 2009

  • Sun, Ping; Jiang, Yadong; Xie, Guangzhong
  • Sensors and Actuators B: Chemical, Vol. 141, Issue 1
  • DOI: 10.1016/j.snb.2009.06.012

Gas sensors based on gravimetric detection—A review
journal, December 2011


Nonlinear equivalent circuit model for circular CMUTs in uncollapsed and collapsed mode
conference, October 2012

  • Aydogdu, Elif; Ozgurluk, Alper; Oguz, H. Kagan
  • 2012 IEEE International Ultrasonics Symposium
  • DOI: 10.1109/ULTSYM.2012.0247

Chemical etch rates in HF solutions as a function of thickness of thermal SiO 2 and buried SiO 2 formed by oxygen implantation
journal, May 1991

  • Vanheusden, K.; Stesmans, A.
  • Journal of Applied Physics, Vol. 69, Issue 9
  • DOI: 10.1063/1.348882

Techniques of cryogenic reactive ion etching in silicon for fabrication of sensors
journal, September 2009

  • Henry, M. David; Welch, Colin; Scherer, Axel
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 27, Issue 5
  • DOI: 10.1116/1.3196790

Distinguishing chemicals using CMUT chemical sensor array and artificial neural networks
conference, September 2014

  • Stedman, Quintin; Park, Kwan-Kyu; Khuri-Yakub, Butrus T.
  • 2014 IEEE International Ultrasonics Symposium (IUS)
  • DOI: 10.1109/ULTSYM.2014.0041

Etching SiO[sub 2] Films in Aqueous 0.49% HF
journal, January 1996

  • Somashekhar, Ambika
  • Journal of The Electrochemical Society, Vol. 143, Issue 9
  • DOI: 10.1149/1.1837122

Gas chemical sensitivity of a CMOS MEMS cantilever functionalized via evaporation driven assembly
journal, May 2014

  • Dorsey, K. L.; Bedair, S. S.; Fedder, G. K.
  • Journal of Micromechanics and Microengineering, Vol. 24, Issue 7
  • DOI: 10.1088/0960-1317/24/7/075001

Sensitivity Optimization of Wafer Bonded Gravimetric CMUT Sensors
journal, December 2018

  • Molgaard, Mathias J. G.; Hansen, Jesper M. F.; Jakobsen, Mogens H.
  • Journal of Microelectromechanical Systems, Vol. 27, Issue 6
  • DOI: 10.1109/JMEMS.2018.2868864

An 8-channel CMUT chemical sensor array on a single chip
conference, September 2017

  • Stedman, Quintin; Park, Kwan Kyu; Khuri-Yakub, Butrus T.
  • 2017 IEEE International Ultrasonics Symposium (IUS)
  • DOI: 10.1109/ULTSYM.2017.8092345

Cryogenic etch process development for profile control of high aspect-ratio submicron silicon trenches
journal, January 2007

  • Pruessner, Marcel W.; Rabinovich, William S.; Stievater, Todd H.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 1
  • DOI: 10.1116/1.2402151

A Low-Power Wireless Multichannel Gas Sensing System Based on a Capacitive Micromachined Ultrasonic Transducer (CMUT) Array
journal, February 2019

  • Seok, Chunkyun; Mahmud, Marzana Mantasha; Kumar, Mohit
  • IEEE Internet of Things Journal, Vol. 6, Issue 1
  • DOI: 10.1109/JIOT.2018.2861330

Technology-driven layer-by-layer assembly of nanofilms
journal, April 2015


Surface micromachined capacitive ultrasonic transducers
journal, May 1998

  • Ladabaum, I.; Soh, H. T.
  • IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 45, Issue 3
  • DOI: 10.1109/58.677612

Investigation into Mass Loading Sensitivity of Sezawa Wave Mode-Based Surface Acoustic Wave Sensors
journal, February 2013


Combined colorimetric and gravimetric CMUT sensor for detection of benzyl methyl ketone
journal, December 2018

  • Mølgaard, Mathias J. G.; Laustsen, Milan; Jakobsen, Mogens H.
  • Sensors and Actuators B: Chemical, Vol. 275
  • DOI: 10.1016/j.snb.2018.07.136

Fabrication of nanoelectromechanical systems via the integration of high surface area glancing angle deposition thin films
journal, May 2014

  • Westwood, J. N.; Sauer, V. T. K.; Kwan, J. K.
  • Journal of Micromechanics and Microengineering, Vol. 24, Issue 6
  • DOI: 10.1088/0960-1317/24/6/065021

A novel equivalent circuit model for CMUTs
conference, September 2009


Progresses on the theory and application of quartz crystal microbalance
journal, September 2016

  • Qiao, Xiaoxi; Zhang, Xiangjun; Tian, Yu
  • Applied Physics Reviews, Vol. 3, Issue 3
  • DOI: 10.1063/1.4963312

Study of the CMUT operation in microfluidic application
conference, October 2012

  • Vanagas, Gailius; Barauskas, Dovydas; Virzonis, Darius
  • 2012 IEEE International Ultrasonics Symposium
  • DOI: 10.1109/ULTSYM.2012.0455

CO 2 and SO 2 Interactions with Methylated Poly(ethylenimine)-Functionalized Capacitive Micromachined Ultrasonic Transducers (CMUTs): Gas Sensing and Degradation Mechanism
journal, June 2019

  • Barauskas, Dovydas; Park, Sang Jae; Pelenis, Donatas
  • ACS Applied Electronic Materials, Vol. 1, Issue 7
  • DOI: 10.1021/acsaelm.9b00151

Fabricating capacitive micromachined ultrasonic transducers with direct wafer-bonding and LOCOS technology
conference, January 2008

  • Park, K. K.; Lee, H. J.; Kupnik, M.
  • 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems
  • DOI: 10.1109/MEMSYS.2008.4443662

Fabrication and characterization of surface micromachined capacitive ultrasonic immersion transducers
journal, March 1999

  • Xuecheng Jin, ; Ladabaum, I.; Degertekin, F. L.
  • Journal of Microelectromechanical Systems, Vol. 8, Issue 1
  • DOI: 10.1109/84.749409

Equivalent circuit-based analysis of CMUT cell dynamics in arrays
journal, May 2013

  • Oguz, H. Kagan; Atalar, A.; Koymen, H.
  • IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 60, Issue 5
  • DOI: 10.1109/TUFFC.2013.2660

Clouds unfazed by haze
journal, June 2017


Etch rates for micromachining processing-part II
journal, December 2003

  • Williams, K.R.; Gupta, K.; Wasilik, M.
  • Journal of Microelectromechanical Systems, Vol. 12, Issue 6, p. 761-778
  • DOI: 10.1109/JMEMS.2003.820936

CMUT as a chemical sensor for DMMP detection
conference, May 2008

  • Lee, Hyunjoo J.; Park, Kwan Kyu; Oralkan, Omer
  • 2008 IEEE International Frequency Control Symposium
  • DOI: 10.1109/FREQ.2008.4623034

Performance of polymer solar cells fabricated by dip coating process
journal, April 2012


Resonant gravimetric immunosensing based on capacitive micromachined ultrasound transducers
journal, April 2014

  • Virzonis, Darius; Vanagas, Gailius; Ramanaviciene, Almira
  • Microchimica Acta, Vol. 181, Issue 13-14
  • DOI: 10.1007/s00604-014-1244-3

Analytically calculating membrane displacement and the equivalent circuit model of a circular CMUT cell
conference, November 2008

  • Wygant, Ira O.; Kupnik, Mario; Khuri-Yakub, Butrus T.
  • 2008 IEEE Ultrasonics Symposium (IUS)
  • DOI: 10.1109/ULTSYM.2008.0522

Linear and nonlinear equivalent circuit modeling of CMUTs
journal, December 2005

  • Lohfink, A.; Eccardt, P. -C.
  • IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 52, Issue 12
  • DOI: 10.1109/TUFFC.2005.1563260

Spin coating of very thin polymer films
journal, March 1994


An improved lumped element nonlinear circuit model for a circular CMUT cell
journal, August 2012

  • Koymen, Hayrettin; Atalar, Abdullah; Aydogdu, Elif
  • IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 59, Issue 8
  • DOI: 10.1109/TUFFC.2012.2383

Agriculture and greenhouse gases, a common tragedy. A review
journal, September 2012


A Multichannel Oscillator for a Resonant Chemical Sensor System
journal, October 2014

  • Lee, Hyunjoo Jenny; Park, Kwan Kyu; Oralkan, Omer
  • IEEE Transactions on Industrial Electronics, Vol. 61, Issue 10
  • DOI: 10.1109/TIE.2014.2300031

Greenhouse gas mitigation potentials in the livestock sector
journal, March 2016

  • Herrero, Mario; Henderson, Benjamin; Havlík, Petr
  • Nature Climate Change, Vol. 6, Issue 5
  • DOI: 10.1038/nclimate2925

Carbon Dioxide Absorption by Polyethylenimine-Functionalized Nanocarbons: A Kinetic Study
journal, January 2015

  • Andreoli, Enrico; Cullum, Laurie; Barron, Andrew R.
  • Industrial & Engineering Chemistry Research, Vol. 54, Issue 3
  • DOI: 10.1021/ie504277s

Highly sensitive detection of DMMP using a CMUT-based chemical sensor
conference, November 2010

  • Lee, H. J.; Park, K. K.; Kupnik, M.
  • 2010 Ninth IEEE Sensors Conference (SENSORS 2010), 2010 IEEE Sensors
  • DOI: 10.1109/ICSENS.2010.5690493

Molecular blends of methylated-poly(ethylenimine) and amorphous porous organic cages for SO 2 adsorption
journal, January 2018

  • Zhu, Guanghui; Carrillo, Jan-Michael Y.; Sujan, Achintya
  • Journal of Materials Chemistry A, Vol. 6, Issue 44
  • DOI: 10.1039/C8TA02788A

Development of a Room Temperature SAW Methane Gas Sensor Incorporating a Supramolecular Cryptophane A Coating
journal, January 2016

  • Wang, Wen; Hu, Haoliang; Liu, Xinlu
  • Sensors, Vol. 16, Issue 1
  • DOI: 10.3390/s16010073

Adsorption of CO<sub>2</sub> on Polyethyleneimine 10k—<i>Mesoporous silica</i> Sorbent: XPS and TGA Studies
journal, January 2015

  • Khader, M. M.; Al-Marri, M. J.; Ali, Sardar
  • American Journal of Analytical Chemistry, Vol. 06, Issue 04
  • DOI: 10.4236/ajac.2015.64026

Room Temperature Quartz Crystal Microbalance-Based CO Sensor Using Commercial Piezoelectric Crystal Modified with Carbon Nanostructures
journal, July 2015

  • Doroodmand, Mohammad Mahdi; Sepehri, Saeideh; Poorshamsi, Tayyebeh
  • Science of Advanced Materials, Vol. 7, Issue 7
  • DOI: 10.1166/sam.2015.2055

Combined colorimetric and gravimetric CMUT sensor for detection of phenylacetone
conference, September 2017

  • Molgaard, Mathias J. G.; Laustsen, Milan; Thygesen, Ida L.
  • 2017 IEEE International Ultrasonics Symposium (IUS)
  • DOI: 10.1109/ULTSYM.2017.8091676

The mechanism of HF/H[sub 2]O chemical etching of SiO[sub 2]
journal, January 2002

  • Kang, Jeung Ku; Musgrave, Charles B.
  • The Journal of Chemical Physics, Vol. 116, Issue 1
  • DOI: 10.1063/1.1420729

Fabrication of Capacitive Micromachined Ultrasonic Transducers via Local Oxidation and Direct Wafer Bonding
journal, February 2011

  • Park, Kwan Kyu; Lee, Hyunjoo; Kupnik, Mario
  • Journal of Microelectromechanical Systems, Vol. 20, Issue 1
  • DOI: 10.1109/JMEMS.2010.2093567

Label-Free Glucose Detection Using Cantilever Sensor Technology Based on Gravimetric Detection Principles
journal, January 2013

  • Hsieh, Shuchen; Hsieh, Shu-Ling; Hsieh, Chiung-wen
  • Journal of Analytical Methods in Chemistry, Vol. 2013
  • DOI: 10.1155/2013/687265

Ink-jet printing of polymers ? from single dots to thin film libraries
journal, January 2004

  • Tekin, Emine; de Gans, Berend-Jan; Schubert, Ulrich S.
  • Journal of Materials Chemistry, Vol. 14, Issue 17
  • DOI: 10.1039/b407478e

CMUT for high sensitivity greenhouse gas sensing
conference, October 2015

  • Barauskas, Dovydas; Pelenis, Donatas; Sergalis, Gvidas
  • 2015 IEEE International Ultrasonics Symposium (IUS)
  • DOI: 10.1109/ULTSYM.2015.0472

A low-power gas sensor for environmental monitoring using a capacitive micromachined ultrasonic transducer
conference, November 2014


Design and Analysis of Film Bulk Acoustic Resonator (FBAR) Filter for RF Applications
journal, January 2012

  • Reddy, P. Ramakoti; Mohan, B. Chandra
  • International Journal of Engineering Business Management, Vol. 4
  • DOI: 10.5772/54921

Spray coating methods for polymer solar cells fabrication: A review
journal, November 2015


Supported Polytertiary Amines: Highly Efficient and Selective SO 2 Adsorbents
journal, January 2014

  • Tailor, Ritesh; Abboud, Mohamed; Sayari, Abdelhamid
  • Environmental Science & Technology, Vol. 48, Issue 3
  • DOI: 10.1021/es404135j

Film bulk acoustic resonators (FBARs) as biosensors: A review
journal, September 2018