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Title: Environmental influences on autocollimator-based angle and form metrology

Abstract

Deflectometric profilometers are indispensable tools for the precision form measurement of beam-shaping optics of synchrotrons and x-ray free electron lasers. They are used in metrology labs for x-ray optics worldwide and are crucial for providing measurement accuracy dictated by the form tolerances for modern state-of-the-art x-ray optics. Deflectometric profilometers use surface slope (angle) to assess form, and they utilize commercial autocollimators for the contactless slope measurement. In this contribution, we discuss the influences of environmental parameters, such as temperature and air pressure, including their gradients, on high-accuracy metrology with autocollimators in profilometers. They can cause substantial systematic errors in form measurement, especially in the case of large and strongly curved optical surfaces of high dynamic range. Relative angle and form measuring errors of the order of 10 -4 are to be expected. We characterize environmental influences by extended theoretical and experimental investigations and derive strategies for correcting them. Additionally, we report on the possibility to minimize the contributions of some errors by the application of sophisticated experimental arrangements and methods. We aim at approaching fundamental limits in autocollimator-based slope and form metrology.

Authors:
ORCiD logo [1]; ORCiD logo [2];  [1]; ORCiD logo [1];  [1]; ORCiD logo [3];  [3]
  1. Physikalisch-Technische Bundesanstalt, Braunschweig (Germany)
  2. Czech Metrology Inst. (Czech Republic)
  3. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Materials Sciences & Engineering Division
OSTI Identifier:
1542367
Grant/Contract Number:  
AC02-05CH11231
Resource Type:
Accepted Manuscript
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 90; Journal Issue: 2; Journal ID: ISSN 0034-6748
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English

Citation Formats

Geckeler, Ralf D., Křen, Petr, Just, Andreas, Schumann, Matthias, Krause, Michael, Lacey, Ian, and Yashchuk, Valeriy V. Environmental influences on autocollimator-based angle and form metrology. United States: N. p., 2019. Web. doi:10.1063/1.5057402.
Geckeler, Ralf D., Křen, Petr, Just, Andreas, Schumann, Matthias, Krause, Michael, Lacey, Ian, & Yashchuk, Valeriy V. Environmental influences on autocollimator-based angle and form metrology. United States. doi:10.1063/1.5057402.
Geckeler, Ralf D., Křen, Petr, Just, Andreas, Schumann, Matthias, Krause, Michael, Lacey, Ian, and Yashchuk, Valeriy V. Thu . "Environmental influences on autocollimator-based angle and form metrology". United States. doi:10.1063/1.5057402.
@article{osti_1542367,
title = {Environmental influences on autocollimator-based angle and form metrology},
author = {Geckeler, Ralf D. and Křen, Petr and Just, Andreas and Schumann, Matthias and Krause, Michael and Lacey, Ian and Yashchuk, Valeriy V.},
abstractNote = {Deflectometric profilometers are indispensable tools for the precision form measurement of beam-shaping optics of synchrotrons and x-ray free electron lasers. They are used in metrology labs for x-ray optics worldwide and are crucial for providing measurement accuracy dictated by the form tolerances for modern state-of-the-art x-ray optics. Deflectometric profilometers use surface slope (angle) to assess form, and they utilize commercial autocollimators for the contactless slope measurement. In this contribution, we discuss the influences of environmental parameters, such as temperature and air pressure, including their gradients, on high-accuracy metrology with autocollimators in profilometers. They can cause substantial systematic errors in form measurement, especially in the case of large and strongly curved optical surfaces of high dynamic range. Relative angle and form measuring errors of the order of 10-4 are to be expected. We characterize environmental influences by extended theoretical and experimental investigations and derive strategies for correcting them. Additionally, we report on the possibility to minimize the contributions of some errors by the application of sophisticated experimental arrangements and methods. We aim at approaching fundamental limits in autocollimator-based slope and form metrology.},
doi = {10.1063/1.5057402},
journal = {Review of Scientific Instruments},
number = 2,
volume = 90,
place = {United States},
year = {2019},
month = {2}
}

Journal Article:
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This content will become publicly available on February 14, 2020
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