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Title: Paschen's curve in microgaps with an electrode surface protrusion

Journal Article · · Applied Physics Letters
DOI: https://doi.org/10.1063/1.5045182 · OSTI ID:1540248

Paschen's curve in microgaps with a hemi-ellipsoidal protrusion on the electrode surface is examined using a two-dimensional fluid model. The breakdown voltage is identified when the discharge enters the subnormal region, according to voltage-current characteristics. It is discovered that the breakdown in a microgap with a surface protrusion on the electrode can result in a combined Paschen's curve, which transits from long-gap (distance between the cathode and anode without the presence of protrusion) behavior at low pressure to short-gap (distance between the protrusion apex to the opposite electrode) behavior at high pressure. As gas pressure decreases, the length of the optimal discharge path increases, automatically moving from the top of the protrusion to its side surface and then to the wider non-protrusion electrode gap. The effects of the protrusion height and radius as well as the discharge polarity on the Paschen's curve are viewed in detail. The effects of the protrusion aspect ratio on field enhancement are also considered. Our report provides insights into the design of microgaps with controlled breakdown voltage across many orders in pressure via engineered electrode morphology.

Research Organization:
Univ. of Michigan, Ann Arbor, MI (United States)
Sponsoring Organization:
Air Force Office of Scientific Research (AFOSR); USDOE; USDOE Office of Science (SC)
Grant/Contract Number:
SC0001939
OSTI ID:
1540248
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 5 Vol. 113; ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)Copyright Statement
Country of Publication:
United States
Language:
English

References (43)

Ueber die zum Funkenübergang in Luft, Wasserstoff und Kohlensäure bei verschiedenen Drucken erforderliche Potentialdifferenz journal January 1889
Gas Discharge Physics book January 1991
Gas discharge physics journal August 1993
Electric field non-uniformity effect on dc low pressure gas breakdown between flat electrodes journal November 2017
Template for 3D Printing a Low-Temperature Plasma Probe journal June 2016
Electricity in Gases journal August 1915
Electricity in Gases journal August 1956
The upcoming 3D-printing revolution in microfluidics journal January 2016
Predicted properties of microhollow cathode discharges in xenon journal January 2005
A mathematical model of the modified Paschen’s curve for breakdown in microscale gaps journal May 2010
An analytical formulation for the modified Paschen’s curve journal October 2010
Direct measurements and numerical simulations of gas charging in microelectromechanical system capacitive switches journal February 2012
Pre-breakdown evaluation of gas discharge mechanisms in microgaps journal April 2013
Deviations from the Paschen's law at short gap distances from 100 nm to 10  μ m in air and nitrogen journal September 2014
Breakdown of atmospheric pressure microgaps at high excitation frequencies journal May 2015
Scaling laws for gas breakdown for nanoscale to microscale gaps at atmospheric pressure journal June 2016
Fluid modeling of a high-voltage nanosecond pulsed xenon microdischarge journal July 2016
Intersection of Paschen's curves for argon journal September 2016
Effect of distribution of electric field on low-pressure gas breakdown journal February 2017
Electric field distribution and current emission in a miniaturized geometrical diode journal June 2017
Investigation of the Paschen curve for helium in the 100–1000 kV range journal September 2017
A universal theory for gas breakdown from microscale to the classical Paschen law journal November 2017
Pressure effect on a tandem hollow cathode discharge in argon journal October 2017
Understanding the scaling of electron kinetics in the transition from collisional to collisionless conditions in microscale gas discharges journal February 2018
Effect of surface protrusion on plasma sheath properties in atmospheric microdischarges journal January 2018
Gas breakdown in atmospheric pressure microgaps with a surface protrusion on the cathode journal June 2018
Low-pressure gas breakdown in uniform dc electric field journal October 2000
Two-dimensional simulations of the transition from Townsend to glow discharge and subnormal oscillations journal November 2003
Breakdown, scaling and volt–ampere characteristics of low current micro-discharges journal September 2008
The role of the field emission effect in direct-current argon discharges for the gaps ranging from 1 to 100 µ m journal November 2012
Microscale gas breakdown: ion-enhanced field emission and the modified Paschen’s curve journal November 2014
Solving the Boltzmann equation to obtain electron transport coefficients and rate coefficients for fluid models journal October 2005
Simulation of dc atmospheric pressure argon micro glow-discharge journal August 2006
Theoretical study of the electron field emission phenomena in the generation of a micrometer scale discharge journal May 2008
On the possibility of long path breakdown affecting the Paschen curves for microdischarges journal May 2012
Validity of the similarity law for the glow discharges in non-plane-parallel gaps journal October 2014
Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas journal April 2015
Cold-cathode discharges and breakdown in argon: surface and gas phase production of secondary electrons journal January 1999
Foundations of DC plasma sources journal November 2017
Experimental Study of Similarity Laws in Gas Breakdown with Repetitive Nanosecond Pulses journal February 2007
Field enhancement factor dependence on electric field and implications on microscale gas breakdown: Theory and experimental interpretation journal December 2015
Electricity in Gases journal July 1915
Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas text January 2014

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