Measurement of sputtered beryllium yield and angular distribution during nanostructure growth in a helium plasma

doi:10.1063/1.5002114

Title: Measurement of sputtered beryllium yield and angular distribution during nanostructure growth in a helium plasma

Abstract

Here, the angular distribution and sputtering yield of beryllium exposed to helium plasma are estimated from analysis of line-integrated 2D imaging of Be-I line emission in a steady-state linear plasma device. As the surface nanostructure forms during plasma exposure on a ~100 s timescale (corresponding to a fluence of order 10²⁰/cm²) from nearly mono-energetic ion bombardment, a narrowing of the beryllium sputtering angle and a significant (~5×) drop in sputtering yield are observed. Lastly, these trends are found to be qualitatively consistent with modeling taking into account the effect of the surface morphology on sputtering yield and angular distribution.

Authors:

Hollmann, E. M. ^[1];

^[2]; Baldwin, M. J. ^[1]; Chrobak, C. P. ^[1]; Doerner, R. P. ^[1]; Miyamoto, M. ^[3]; Nishijima, D. ^[1]

Univ. of California, San Diego, La Jolla, CA (United States)
Universidad Nacional de Educación a Distancia (UNED), Madrid (Spain); Laboratorio Nacional de Fusion, Ciemat, Madrid (Spain)
Shimane Univ., Matsue (Japan)

Publication Date:: 2017-09-18

Research Org.:: Univ. of California, San Diego, CA (United States)

Sponsoring Org.:: USDOE Office of Science (SC)

OSTI Identifier:: 1535345

Alternate Identifier(s):: OSTI ID: 1392681

Grant/Contract Number:: FG02-07ER54912

Resource Type:: Accepted Manuscript

Journal Name:: Journal of Applied Physics

Additional Journal Information:: Journal Volume: 122; Journal Issue: 11; Journal ID: ISSN 0021-8979

Publisher:: American Institute of Physics (AIP)

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; 70 PLASMA PHYSICS AND FUSION TECHNOLOGY

Citation Formats


                    Hollmann, E. M., Alegre, D., Baldwin, M. J., Chrobak, C. P., Doerner, R. P., Miyamoto, M., and Nishijima, D. Measurement of sputtered beryllium yield and angular distribution during nanostructure growth in a helium plasma.  United States: N. p., 2017. 
        Web.  doi:10.1063/1.5002114.

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                    Hollmann, E. M., Alegre, D., Baldwin, M. J., Chrobak, C. P., Doerner, R. P., Miyamoto, M., & Nishijima, D. Measurement of sputtered beryllium yield and angular distribution during nanostructure growth in a helium plasma.  United States.  doi:10.1063/1.5002114.

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                    Hollmann, E. M., Alegre, D., Baldwin, M. J., Chrobak, C. P., Doerner, R. P., Miyamoto, M., and Nishijima, D. Mon .  
        "Measurement of sputtered beryllium yield and angular distribution during nanostructure growth in a helium plasma".  United States.  doi:10.1063/1.5002114.  https://www.osti.gov/servlets/purl/1535345.

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@article{osti_1535345,

  title        = {Measurement of sputtered beryllium yield and angular distribution during nanostructure growth in a helium plasma},

  author       = {Hollmann, E. M. and Alegre, D. and Baldwin, M. J. and Chrobak, C. P. and Doerner, R. P. and Miyamoto, M. and Nishijima, D.},

  abstractNote = {Here, the angular distribution and sputtering yield of beryllium exposed to helium plasma are estimated from analysis of line-integrated 2D imaging of Be-I line emission in a steady-state linear plasma device. As the surface nanostructure forms during plasma exposure on a ~100 s timescale (corresponding to a fluence of order 1020/cm2) from nearly mono-energetic ion bombardment, a narrowing of the beryllium sputtering angle and a significant (~5×) drop in sputtering yield are observed. Lastly, these trends are found to be qualitatively consistent with modeling taking into account the effect of the surface morphology on sputtering yield and angular distribution.},

  doi          = {10.1063/1.5002114},

  journal      = {Journal of Applied Physics},

  number       = 11,

  volume       = 122,

  place        = {United States},

  year         = {2017},

  month        = {9}

}

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DOI: 10.1063/1.5002114

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Works referenced in this record:

Molybdenum angular sputtering distribution under low energy xenon ion bombardment
journal, September 2006

Oyarzabal, E.; Yu, J. H.; Doerner, R. P.
Journal of Applied Physics, Vol. 100, Issue 6
DOI: 10.1063/1.2336502

Properties of BeD molecules in edge plasma relevant conditions
journal, October 2008

Nishijima, D.; Doerner, R. P.; Baldwin, M. J.
Plasma Physics and Controlled Fusion, Vol. 50, Issue 12
DOI: 10.1088/0741-3335/50/12/125007

Improved ERO modelling for spectroscopy of physically and chemically assisted eroded beryllium from the JET-ILW
journal, December 2016

Borodin, D.; Brezinsek, S.; Borodkina, I.
Nuclear Materials and Energy, Vol. 9
DOI: 10.1016/j.nme.2016.08.013

Ray tracing simulation for radiation trapping of the He I resonance transitions in a linear plasma device
journal, June 2009

Kajita, Shin; Nishijima, Daisuke; Hollmann, Eric M.
Physics of Plasmas, Vol. 16, Issue 6
DOI: 10.1063/1.3157248

Energy and angular distributions of sputtered atoms at normal incidence
journal, November 1991

Yamamura, Y.; Takiguchi, T.; Ishida, M.
Radiation Effects and Defects in Solids, Vol. 118, Issue 3
DOI: 10.1080/10420159108221362

Plasma temperature rise toward the plasma-facing surface
journal, August 2015

Nishijima, D.; Doerner, R. P.; Seraydarian, R. P.
Journal of Nuclear Materials, Vol. 463
DOI: 10.1016/j.jnucmat.2014.10.083

Be I and Be II spectroscopy in divertor plasma relevant conditions
journal, July 2013

Nishijima, D.; Doerner, R. P.; Seraydarian, R. P.
Journal of Nuclear Materials, Vol. 438
DOI: 10.1016/j.jnucmat.2013.01.276

Erosion behavior and surface characterization of beryllium under high-flux deuterium plasma bombardment
journal, February 1997

Won, J.; Spada, F. E.; Boivin, R.
Journal of Nuclear Materials, Vol. 241-243
DOI: 10.1016/S0022-3115(97)80203-6

A Monte Carlo computer program for the transport of energetic ions in amorphous targets
journal, August 1980

Biersack, J. P.; Haggmark, L. G.
Nuclear Instruments and Methods, Vol. 174, Issue 1-2, p. 257-269
DOI: 10.1016/0029-554X(80)90440-1

Plasma-induced morphology of beryllium targets exposed in PISCES-B
journal, December 2014

Doerner, R. P.; Baldwin, M. J.; Nishijima, D.
Journal of Nuclear Materials, Vol. 455, Issue 1-3
DOI: 10.1016/j.jnucmat.2014.02.010

Modelling of beryllium erosion–redeposition on ITER first wall panels
journal, August 2011

Carpentier, S.; Pitts, R. A.; Stangeby, P. C.
Journal of Nuclear Materials, Vol. 415, Issue 1
DOI: 10.1016/j.jnucmat.2010.10.081

Experimental identification for physical mechanism of fiber-form nanostructure growth on metal surfaces with helium plasma irradiation
journal, November 2015

Takamura, S.; Uesugi, Y.
Applied Surface Science, Vol. 356
DOI: 10.1016/j.apsusc.2015.08.112

Tungsten nano-tendril growth in the Alcator C-Mod divertor
journal, March 2012

Wright, G. M.; Brunner, D.; Baldwin, M. J.
Nuclear Fusion, Vol. 52, Issue 4
DOI: 10.1088/0029-5515/52/4/042003

Spectroscopic determination of the singly ionized helium density in low electron temperature plasmas mixed with helium in a linear divertor plasma simulator
journal, October 2007

Nishijima, D.; Doerner, R. P.; Baldwin, M. J.
Physics of Plasmas, Vol. 14, Issue 10
DOI: 10.1063/1.2786063

Impact of surface morphology on sputtering during high-fluence plasma exposure
journal, April 2014

Doerner, R. P.; Nishijima, D.; Schwarz-Selinger, T.
Physica Scripta, Vol. T159
DOI: 10.1088/0031-8949/2014/T159/014040

Omegatron mass spectrometer for analysis of ion concentrations in hydrogenic plasmas
journal, January 2001

Hollmann, E. M.; Antar, G.; Doerner, R. P.
Review of Scientific Instruments, Vol. 72, Issue 1
DOI: 10.1063/1.1310594

Determination of the optical escape factor in the He I line intensity ratio technique applied for weakly ionized plasmas
journal, April 2007

Nishijima, D.; Hollmann, E. M.
Plasma Physics and Controlled Fusion, Vol. 49, Issue 6
DOI: 10.1088/0741-3335/49/6/007

Erosion of Be as plasma-facing material
journal, November 1997

Roth, Joachim; Eckstein, Wolfgang; Guseva, Maria
Fusion Engineering and Design, Vol. 37, Issue 4
DOI: 10.1016/S0920-3796(97)00091-4

The Influence of a Beryllium Containing Plasma on the Evolution of a Mixed-Material Surface
journal, January 2004

Doerner, R. P.; Baldwin, M. J.; Schmid, K.
Physica Scripta, Vol. T111, Issue 1
DOI: 10.1238/Physica.Topical.111a00075

Microscopically nonuniform deposition and deuterium retention in the divertor in JET with ITER-like wall
journal, August 2015

Bergsåker, H.; Bykov, I.; Petersson, P.
Journal of Nuclear Materials, Vol. 463
DOI: 10.1016/j.jnucmat.2014.12.015

Erosion of beryllium under high-flux plasma impact
journal, July 2013

Doerner, R. P.; Björkas, C.; Nishijima, D.
Journal of Nuclear Materials, Vol. 438
DOI: 10.1016/j.jnucmat.2013.01.045

Investigation of mechanisms for He-I emission radial profile broadening in a weakly ionized cylindrical helium plasma with recombining edge
journal, September 2013

Hollmann, E. M.; Brandt, C.; Hudson, B.
Physics of Plasmas, Vol. 20, Issue 9
DOI: 10.1063/1.4821610

The influence of fusion-relevant D2-0.1He plasma on Be-W mixed-materials
journal, February 2017

Jepu, I.; Baldwin, M. J.; Nishijima, D.
Journal of Nuclear Materials, Vol. 484
DOI: 10.1016/j.jnucmat.2016.10.031

Atomic data for modelling fusion and astrophysical plasmas
journal, November 2002

Summers, H. P.; Badnell, N. R.; O'Mullane, M. G.
Plasma Physics and Controlled Fusion, Vol. 44, Issue 12B
DOI: 10.1088/0741-3335/44/12B/323

Solar hydrogen production with nanostructured metal oxides
journal, January 2008

van de Krol, Roel; Liang, Yongqi; Schoonman, Joop
Journal of Materials Chemistry, Vol. 18, Issue 20
DOI: 10.1039/b718969a

Nanostructuring of molybdenum and tungsten surfaces by low-energy helium ions
journal, July 2012

De Temmerman, Gregory; Bystrov, Kirill; Zielinski, Jakub J.
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 30, Issue 4
DOI: 10.1116/1.4731196

Measuring the difference between gross and net erosion
journal, August 2012

Doerner, R. P.; Nishijima, D.; Schwarz-Selinger, T.
Nuclear Fusion, Vol. 52, Issue 10
DOI: 10.1088/0029-5515/52/10/103003

Antireflection and absorption properties of silicon parabolic-shaped nanocone arrays
journal, January 2017

Xing, Yupeng; Zhang, Kailiang; Zhao, Jinshi
Optik, Vol. 128
DOI: 10.1016/j.ijleo.2016.10.020

Angular distribution of particles sputtered from Cu, Pt and Ge targets by keV Ar+ ion bombardment
journal, February 1985

Andersen, Hans Henrik; Stenum, Bjarne; Sørensen, Tom
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 6, Issue 3
DOI: 10.1016/0168-583X(85)90003-5

Response of beryllium to deuterium plasma bombardment
journal, September 1998

Doerner, R. P.; Grossman, A.; Luckhardt, S.
Journal of Nuclear Materials, Vol. 257, Issue 1
DOI: 10.1016/S0022-3115(98)00435-8

Angular distribution of atoms during the magnetron sputtering of polycrystalline targets
journal, April 2012

Martynenko, Yu. V.; Rogov, A. V.; Shul’ga, V. I.
Technical Physics, Vol. 57, Issue 4
DOI: 10.1134/S1063784212040196

Study of physical and chemical assisted physical sputtering of beryllium in the JET ITER-like wall
journal, September 2014

Brezinsek, S.; Stamp, M. F.; Nishijima, D.
Nuclear Fusion, Vol. 54, Issue 10
DOI: 10.1088/0029-5515/54/10/103001

A mechanism of surface micro-roughening by ion bombardment
journal, November 1973

Sigmund, Peter
Journal of Materials Science, Vol. 8, Issue 11
DOI: 10.1007/BF00754888

Works referencing / citing this record:

Observation of increased nanostructure cone growth on Cr due to grazing-incidence Ta seed atom deposition in a He plasma
journal, August 2019

Hollmann, E. M.; Nishijima, D.; Patino, M. I.
Journal of Applied Physics, Vol. 126, Issue 7
DOI: 10.1063/1.5110298

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Title: Measurement of sputtered beryllium yield and angular distribution during nanostructure growth in a helium plasma

Abstract

Citation Formats

Molybdenum angular sputtering distribution under low energy xenon ion bombardment journal, September 2006

Properties of BeD molecules in edge plasma relevant conditions journal, October 2008

Improved ERO modelling for spectroscopy of physically and chemically assisted eroded beryllium from the JET-ILW journal, December 2016

Ray tracing simulation for radiation trapping of the He I resonance transitions in a linear plasma device journal, June 2009

Energy and angular distributions of sputtered atoms at normal incidence journal, November 1991

Plasma temperature rise toward the plasma-facing surface journal, August 2015

Be I and Be II spectroscopy in divertor plasma relevant conditions journal, July 2013

Erosion behavior and surface characterization of beryllium under high-flux deuterium plasma bombardment journal, February 1997

A Monte Carlo computer program for the transport of energetic ions in amorphous targets journal, August 1980

Plasma-induced morphology of beryllium targets exposed in PISCES-B journal, December 2014

Modelling of beryllium erosion–redeposition on ITER first wall panels journal, August 2011

Experimental identification for physical mechanism of fiber-form nanostructure growth on metal surfaces with helium plasma irradiation journal, November 2015

Tungsten nano-tendril growth in the Alcator C-Mod divertor journal, March 2012

Spectroscopic determination of the singly ionized helium density in low electron temperature plasmas mixed with helium in a linear divertor plasma simulator journal, October 2007

Impact of surface morphology on sputtering during high-fluence plasma exposure journal, April 2014

Omegatron mass spectrometer for analysis of ion concentrations in hydrogenic plasmas journal, January 2001

Determination of the optical escape factor in the He I line intensity ratio technique applied for weakly ionized plasmas journal, April 2007

Erosion of Be as plasma-facing material journal, November 1997

The Influence of a Beryllium Containing Plasma on the Evolution of a Mixed-Material Surface journal, January 2004

Microscopically nonuniform deposition and deuterium retention in the divertor in JET with ITER-like wall journal, August 2015

Erosion of beryllium under high-flux plasma impact journal, July 2013

Investigation of mechanisms for He-I emission radial profile broadening in a weakly ionized cylindrical helium plasma with recombining edge journal, September 2013

The influence of fusion-relevant D2-0.1He plasma on Be-W mixed-materials journal, February 2017

Atomic data for modelling fusion and astrophysical plasmas journal, November 2002

Solar hydrogen production with nanostructured metal oxides journal, January 2008

Nanostructuring of molybdenum and tungsten surfaces by low-energy helium ions journal, July 2012

Measuring the difference between gross and net erosion journal, August 2012

Antireflection and absorption properties of silicon parabolic-shaped nanocone arrays journal, January 2017

Angular distribution of particles sputtered from Cu, Pt and Ge targets by keV Ar+ ion bombardment journal, February 1985

Response of beryllium to deuterium plasma bombardment journal, September 1998

Angular distribution of atoms during the magnetron sputtering of polycrystalline targets journal, April 2012

Study of physical and chemical assisted physical sputtering of beryllium in the JET ITER-like wall journal, September 2014

A mechanism of surface micro-roughening by ion bombardment journal, November 1973

Observation of increased nanostructure cone growth on Cr due to grazing-incidence Ta seed atom deposition in a He plasma journal, August 2019

Molybdenum angular sputtering distribution under low energy xenon ion bombardment
journal, September 2006

Properties of BeD molecules in edge plasma relevant conditions
journal, October 2008

Improved ERO modelling for spectroscopy of physically and chemically assisted eroded beryllium from the JET-ILW
journal, December 2016

Ray tracing simulation for radiation trapping of the He I resonance transitions in a linear plasma device
journal, June 2009

Energy and angular distributions of sputtered atoms at normal incidence
journal, November 1991

Plasma temperature rise toward the plasma-facing surface
journal, August 2015

Be I and Be II spectroscopy in divertor plasma relevant conditions
journal, July 2013

Erosion behavior and surface characterization of beryllium under high-flux deuterium plasma bombardment
journal, February 1997

A Monte Carlo computer program for the transport of energetic ions in amorphous targets
journal, August 1980

Plasma-induced morphology of beryllium targets exposed in PISCES-B
journal, December 2014

Modelling of beryllium erosion–redeposition on ITER first wall panels
journal, August 2011

Experimental identification for physical mechanism of fiber-form nanostructure growth on metal surfaces with helium plasma irradiation
journal, November 2015

Tungsten nano-tendril growth in the Alcator C-Mod divertor
journal, March 2012

Spectroscopic determination of the singly ionized helium density in low electron temperature plasmas mixed with helium in a linear divertor plasma simulator
journal, October 2007

Impact of surface morphology on sputtering during high-fluence plasma exposure
journal, April 2014

Omegatron mass spectrometer for analysis of ion concentrations in hydrogenic plasmas
journal, January 2001

Determination of the optical escape factor in the He I line intensity ratio technique applied for weakly ionized plasmas
journal, April 2007

Erosion of Be as plasma-facing material
journal, November 1997

The Influence of a Beryllium Containing Plasma on the Evolution of a Mixed-Material Surface
journal, January 2004

Microscopically nonuniform deposition and deuterium retention in the divertor in JET with ITER-like wall
journal, August 2015

Erosion of beryllium under high-flux plasma impact
journal, July 2013

Investigation of mechanisms for He-I emission radial profile broadening in a weakly ionized cylindrical helium plasma with recombining edge
journal, September 2013

The influence of fusion-relevant D2-0.1He plasma on Be-W mixed-materials
journal, February 2017

Atomic data for modelling fusion and astrophysical plasmas
journal, November 2002

Solar hydrogen production with nanostructured metal oxides
journal, January 2008

Nanostructuring of molybdenum and tungsten surfaces by low-energy helium ions
journal, July 2012

Measuring the difference between gross and net erosion
journal, August 2012

Antireflection and absorption properties of silicon parabolic-shaped nanocone arrays
journal, January 2017

Angular distribution of particles sputtered from Cu, Pt and Ge targets by keV Ar+ ion bombardment
journal, February 1985

Response of beryllium to deuterium plasma bombardment
journal, September 1998

Angular distribution of atoms during the magnetron sputtering of polycrystalline targets
journal, April 2012

Study of physical and chemical assisted physical sputtering of beryllium in the JET ITER-like wall
journal, September 2014

A mechanism of surface micro-roughening by ion bombardment
journal, November 1973

Observation of increased nanostructure cone growth on Cr due to grazing-incidence Ta seed atom deposition in a He plasma
journal, August 2019