DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Predicting damage production in monoatomic and multi-elemental targets using stopping and range of ions in matter code: Challenges and recommendations

Abstract

The computer code, Stopping and Range of Ions in Matter (SRIM), is widely used to describe energetic processes of ion-solid interactions; its predictive power relies on the accuracy of energy loss/transfer and collision processes being considered. While the SRIM code is commonly applied in radiation effects research to predict damage production and in the semiconductor industry to estimate ion range and dopant concentration profiles, two challenges exist that affect its use: (1) inconsistency in estimations of atomic displacements between full-cascade and quick (modified Kinchin–Pease) options and (2) overestimation of electronic stopping power for slow heavy ions in light targets (e.g., Be and Si) or in compound targets containing light elements (e.g., C, N and O in carbides, nitrides and oxides). Based on a literature review and our experimental investigations, we discuss the underlying reasons for the discrepancies, clarify the physical limitations of the SRIM predictions, and, more importantly, provide recommendations to address the two challenges.

Authors:
;
Publication Date:
Research Org.:
Energy Frontier Research Centers (EFRC) (United States). Energy Dissipation to Defect Evolution (EDDE); Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
OSTI Identifier:
1532570
Alternate Identifier(s):
OSTI ID: 1564111
Grant/Contract Number:  
AC05-00OR22725
Resource Type:
Published Article
Journal Name:
Current Opinion in Solid State and Materials Science
Additional Journal Information:
Journal Name: Current Opinion in Solid State and Materials Science Journal Volume: 23 Journal Issue: 4; Journal ID: ISSN 1359-0286
Publisher:
Elsevier
Country of Publication:
United Kingdom
Language:
English
Subject:
36 MATERIALS SCIENCE; Ion-solid interaction; Stopping power; Damage profile; Displacements; Full-cascade simulations

Citation Formats

Weber, William J., and Zhang, Yanwen. Predicting damage production in monoatomic and multi-elemental targets using stopping and range of ions in matter code: Challenges and recommendations. United Kingdom: N. p., 2019. Web. doi:10.1016/j.cossms.2019.06.001.
Weber, William J., & Zhang, Yanwen. Predicting damage production in monoatomic and multi-elemental targets using stopping and range of ions in matter code: Challenges and recommendations. United Kingdom. https://doi.org/10.1016/j.cossms.2019.06.001
Weber, William J., and Zhang, Yanwen. Thu . "Predicting damage production in monoatomic and multi-elemental targets using stopping and range of ions in matter code: Challenges and recommendations". United Kingdom. https://doi.org/10.1016/j.cossms.2019.06.001.
@article{osti_1532570,
title = {Predicting damage production in monoatomic and multi-elemental targets using stopping and range of ions in matter code: Challenges and recommendations},
author = {Weber, William J. and Zhang, Yanwen},
abstractNote = {The computer code, Stopping and Range of Ions in Matter (SRIM), is widely used to describe energetic processes of ion-solid interactions; its predictive power relies on the accuracy of energy loss/transfer and collision processes being considered. While the SRIM code is commonly applied in radiation effects research to predict damage production and in the semiconductor industry to estimate ion range and dopant concentration profiles, two challenges exist that affect its use: (1) inconsistency in estimations of atomic displacements between full-cascade and quick (modified Kinchin–Pease) options and (2) overestimation of electronic stopping power for slow heavy ions in light targets (e.g., Be and Si) or in compound targets containing light elements (e.g., C, N and O in carbides, nitrides and oxides). Based on a literature review and our experimental investigations, we discuss the underlying reasons for the discrepancies, clarify the physical limitations of the SRIM predictions, and, more importantly, provide recommendations to address the two challenges.},
doi = {10.1016/j.cossms.2019.06.001},
journal = {Current Opinion in Solid State and Materials Science},
number = 4,
volume = 23,
place = {United Kingdom},
year = {Thu Aug 01 00:00:00 EDT 2019},
month = {Thu Aug 01 00:00:00 EDT 2019}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
https://doi.org/10.1016/j.cossms.2019.06.001

Citation Metrics:
Cited by: 116 works
Citation information provided by
Web of Science

Figures / Tables:

Fig. 1 Fig. 1: TRIM-predicted damage energy profiles (left axis) from both the full-cascade and quick modes, along with corresponding predicted displacement profiles based on the NRT model: (a) 10 MeV Fe in Fe-10%Cr, (b) 5 MeV Ni in Ni, (c) 50 keV Ni ions in Ni, and (d) 3 MeV Aumore » ions in Ni. The integrated number of total NRT displacements for each ion-target combination for full-cascade and quick TRIM simulations are included in the legend.« less

Save / Share:

Works referenced in this record:

Range parameters of heavy ions implanted into Be films
journal, January 1990

  • Grande, P. L.; Behar, M.; Biersack, J. P.
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 45, Issue 1-4
  • DOI: 10.1016/0168-583X(90)90925-K

Electronic stopping powers for heavy ions in SiC and SiO 2
journal, January 2014

  • Jin, K.; Zhang, Y.; Zhu, Z.
  • Journal of Applied Physics, Vol. 115, Issue 4
  • DOI: 10.1063/1.4861642

Ion implantation of silicon carbide
journal, January 2002

  • Hallén, A.; Janson, M. S.; Kuznetsov, A. Yu
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 186, Issue 1-4
  • DOI: 10.1016/S0168-583X(01)00880-1

A note on integral equations of the kinchin-pease type
journal, January 1969


Misconceptions impairing the validity of the stopping power tables in the SRIM library and suggestions for doing better in the future
journal, August 2016

  • Wittmaack, Klaus
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 380
  • DOI: 10.1016/j.nimb.2016.04.057

Expanded PASS stopping code
journal, December 2019

  • Schinner, A.; Sigmund, P.
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 460
  • DOI: 10.1016/j.nimb.2018.10.047

Calculations of nuclear stopping, ranges, and straggling in the low-energy region
journal, March 1977


Electronic stopping power of Ti, V and Cr ions in Ge and Au at 150–500 keV/u energies
journal, December 2017

  • Linares, R.; Ribas, R. V.; Oliveira, J. R. B.
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 413
  • DOI: 10.1016/j.nimb.2017.09.030

A Monte Carlo computer program for the transport of energetic ions in amorphous targets
journal, August 1980


High-precision measurement of electronic stopping powers for heavy ions using high-resolution time-of-flight spectrometry
journal, November 2002

  • Zhang, Yanwen
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 196, Issue 1-2
  • DOI: 10.1016/S0168-583X(02)01246-6

Historical review of computer simulation of radiation effects in materials
journal, July 2019


Applications of ion beam analysis in biology and medicine, a review
journal, December 1988

  • Maenhaut, Willy
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 35, Issue 3-4
  • DOI: 10.1016/0168-583X(88)90300-X

Ion beam coolers in nuclear physics
journal, January 2003

  •  yst , Juha; Jokinen, Ari; Collaboration, The EXOTRAPS
  • Journal of Physics B: Atomic, Molecular and Optical Physics, Vol. 36, Issue 3
  • DOI: 10.1088/0953-4075/36/3/315

The stopping of energetic ions in solids
journal, January 1980


SRIM – The stopping and range of ions in matter (2010)
journal, June 2010

  • Ziegler, James F.; Ziegler, M. D.; Biersack, J. P.
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 268, Issue 11-12
  • DOI: 10.1016/j.nimb.2010.02.091

Effects of implantation temperature on damage accumulation in Al-implanted 4H–SiC
journal, April 2004

  • Zhang, Y.; Weber, W. J.; Jiang, W.
  • Journal of Applied Physics, Vol. 95, Issue 8
  • DOI: 10.1063/1.1666974

Materials modification with ion beams
journal, May 1986


MeV Au ion irradiation in silicon and nanocrystalline zirconia film deposited on silicon substrate
journal, September 2012

  • Chang, Yongqin; Zhang, Yanwen; Zhu, Zihua
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 286
  • DOI: 10.1016/j.nimb.2012.01.017

Damage evolution on Sm and O sublattices in Au-implanted samarium titanate pyrochlore
journal, March 2004

  • Zhang, Y.; Weber, W. J.; Shutthanandan, V.
  • Journal of Applied Physics, Vol. 95, Issue 5
  • DOI: 10.1063/1.1644891

Elastic recoil detection analysis with heavy ions
journal, May 1994

  • Assmann, W.; Huber, H.; Steinhausen, Ch.
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 89, Issue 1-4
  • DOI: 10.1016/0168-583X(94)95159-4

Primary radiation damage: A review of current understanding and models
journal, December 2018


Displacement energy surface in 3C and 6H SiC
journal, April 2000


Langevin Dynamics with Spatial Correlations as a Model for Electron-Phonon Coupling
journal, May 2018


Note on measuring electronic stopping of slow ions
journal, November 2017

  • Sigmund, P.; Schinner, A.
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 410
  • DOI: 10.1016/j.nimb.2017.08.011

Ion beam irradiation of nanostructures – A 3D Monte Carlo simulation code
journal, October 2011

  • Borschel, C.; Ronning, C.
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 269, Issue 19
  • DOI: 10.1016/j.nimb.2011.07.004

Quick calculation of damage for ion irradiation: implementation in Iradina and comparisons to SRIM
journal, January 2019

  • Crocombette, Jean-Paul; Van Wambeke, Christian
  • EPJ Nuclear Sciences & Technologies, Vol. 5
  • DOI: 10.1051/epjn/2019003

Range parameters study of Pb and Au implanted into SiC films
journal, February 1992

  • Fichtner, P. F. P.; Behar, M.; Fink, D.
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 64, Issue 1-4
  • DOI: 10.1016/0168-583X(92)95555-6

The Displacement of Atoms in Solids by Radiation
journal, January 1955


Damage and microstructure evolution in GaN under Au ion irradiation
journal, February 2010


Atomic scale simulation of defect production in irradiated 3C-SiC
journal, September 2001

  • Devanathan, R.; Weber, W. J.; Gao, F.
  • Journal of Applied Physics, Vol. 90, Issue 5
  • DOI: 10.1063/1.1389523

The influence of the scattering law on the radiation damage displacement cascade
journal, October 1965


Advanced techniques for characterization of ion beam modified materials
journal, February 2015

  • Zhang, Yanwen; Debelle, Aurélien; Boulle, Alexandre
  • Current Opinion in Solid State and Materials Science, Vol. 19, Issue 1
  • DOI: 10.1016/j.cossms.2014.09.007

The stopping of ions in compounds
journal, December 1988

  • Ziegler, J. F.; Manoyan, J. M.
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 35, Issue 3-4
  • DOI: 10.1016/0168-583X(88)90273-X

Tridyn — A TRIM simulation code including dynamic composition changes
journal, March 1984

  • Möller, W.; Eckstein, W.
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 2, Issue 1-3
  • DOI: 10.1016/0168-583X(84)90321-5

Is electronic stopping of ions velocity-proportional in the velocity-proportional regime?
journal, February 2019

  • Sigmund, P.; Schinner, A.
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 440
  • DOI: 10.1016/j.nimb.2018.10.031

Damage profile and ion distribution of slow heavy ions in compounds
journal, May 2009

  • Zhang, Yanwen; Bae, In-Tae; Sun, Kai
  • Journal of Applied Physics, Vol. 105, Issue 10
  • DOI: 10.1063/1.3118582

Heavy-ion range profiles and associated damage distributions
journal, April 1972


Improving atomic displacement and replacement calculations with physically realistic damage models
journal, March 2018


Radiation Effects in Structural Materials
journal, August 1979


Displacement damage in silicon carbide irradiated in fission reactors
journal, May 2004


Electronic stopping in oxides beyond Bragg additivity
journal, January 2018

  • Sigmund, P.; Schinner, A.
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 415
  • DOI: 10.1016/j.nimb.2017.11.023

Response of strontium titanate to ion and electron irradiation
journal, May 2009


Ranges in Si and lighter mono and multi-element targets
journal, July 1995

  • Behar, M.; Fichtner, P. F. P.; Grande, P. L.
  • Materials Science and Engineering: R: Reports, Vol. 15, Issue 1-2
  • DOI: 10.1016/0927-796X(94)00176-6

On the Number of Atoms Displaced by Implanted ions or Energetic Recoil Atoms
journal, February 1969


Total displacement functions for SiC
journal, April 1997


Displacement damage cross sections for neutron-irradiated silicon carbide
journal, December 2002


Microstructural features of Al-implanted 4H–SiC
journal, April 2003

  • Wang, C. M.; Zhang, Y.; Weber, W. J.
  • Journal of Materials Research, Vol. 18, Issue 4
  • DOI: 10.1557/JMR.2003.0107

Random and channeling stopping powers of He and Li ions in Si
journal, January 2002


Reciprocity in the electronic stopping of slow ions in matter
journal, January 2008


Nuclear stopping power and its impact on the determination of electronic stopping power
conference, January 2013

  • Paul, Helmut
  • APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY: Twenty-Second International Conference, AIP Conference Proceedings
  • DOI: 10.1063/1.4802339

Ion beam analysis for the environment
journal, March 1994

  • Malmqvist, Klas G.
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 85, Issue 1-4
  • DOI: 10.1016/0168-583X(94)95791-6

On the use of SRIM for computing radiation damage exposure
journal, September 2013

  • Stoller, R. E.; Toloczko, M. B.; Was, G. S.
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 310
  • DOI: 10.1016/j.nimb.2013.05.008

IM3D: A parallel Monte Carlo code for efficient simulations of primary radiation displacements and damage in 3D geometry
journal, December 2015

  • Li, Yong Gang; Yang, Yang; Short, Michael P.
  • Scientific Reports, Vol. 5, Issue 1
  • DOI: 10.1038/srep18130

On the origin of apparent Z 1 -oscillations in low-energy heavy-ion ranges
journal, December 2016

  • Wittmaack, Klaus
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 388
  • DOI: 10.1016/j.nimb.2016.10.014

Experimental stopping powers of Al, Mg, F and O ions in ZrO2 in the 0.1–0.6MeV/u energy range
journal, June 2010

  • Msimanga, M.; Comrie, C. M.; Pineda-Vargas, C. A.
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 268, Issue 11-12
  • DOI: 10.1016/j.nimb.2010.02.071

A proposed method of calculating displacement dose rates
journal, August 1975


Computer simulation of atomic-displacement cascades in solids in the binary-collision approximation
journal, June 1974


Channeling study of lattice disorder and gold implants in gallium nitride
journal, May 2002

  • Jiang, W.; Weber, W. J.; Thevuthasan, S.
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 191, Issue 1-4
  • DOI: 10.1016/S0168-583X(02)00601-8

Space and Terrestrial Radiation Response of Silicon Carbide Power MOSFETs
conference, July 2017

  • Akturk, Akin; McGarrity, James M.; Wilkins, Richard
  • 2017 IEEE Nuclear & Space Radiation Effects Conference (NSREC): Radiation Effects Data Workshop (REDW), 2017 IEEE Radiation Effects Data Workshop (REDW)
  • DOI: 10.1109/NSREC.2017.8115467

Proton vs carbon ion beams in the definitive radiation treatment of cancer patients
journal, April 2010


Effective-charge theory for the electronic stopping of heavy ions in solids: Stripping criteria and target-electron models
journal, January 1995


Basic physics of radiation damage production
journal, October 1994


Works referencing / citing this record:

Effects of Al and Ti Additions on Irradiation Behavior of FeMnNiCr Multi-Principal-Element Alloy
journal, October 2019


Figures/Tables have been extracted from DOE-funded journal article accepted manuscripts.