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Title: High-gain leaky surface acoustic wave amplifier in epitaxial InGaAs on lithium niobate heterostructure

Abstract

Active surface acoustic wave components have the potential to transform RF front ends by consolidating functionalities that currently occur across multiple chip technologies, leading to reduced insertion loss from converting back and forth between acoustic and electronic domains in addition to improved size and power efficiency. This letter reflects a significant advance in these active devices with a compact, high-gain, and low-power leaky surface acoustic wave amplifier based on the acoustoelectric effect. Devices use an acoustically thin semi-insulating InGaAs surface film on a YX lithium niobate substrate to achieve exceptionally high acoustoelectric interaction strength via an epitaxial In0.53Ga0.47As(P)/InP quaternary layer structure and wafer-scale bonding. Here, we demonstrate 1.9 dB of gain per acoustic wavelength and power consumption of 90 mW for 30 dB of electronic gain. Despite the strong intrinsic leaky propagation loss, 5 dB of terminal gain is obtained for a semiconductor that is only 338 μm long due to state-of-the-art heterogenous integration and an improved material platform.

Authors:
 [1];  [1];  [1];  [1];  [1];  [1];  [1];  [1];  [1]
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  1. Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1529154
Alternate Identifier(s):
OSTI ID: 1529412
Report Number(s):
SAND-2019-4833J
Journal ID: ISSN 0003-6951; 675132
Grant/Contract Number:  
AC04-94AL85000
Resource Type:
Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 114; Journal Issue: 25; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Hackett, L., Siddiqui, A., Dominguez, D., Douglas, J. K., Tauke-Pedretti, A., Friedmann, T., Peake, G., Arterburn, S., and Eichenfield, M. High-gain leaky surface acoustic wave amplifier in epitaxial InGaAs on lithium niobate heterostructure. United States: N. p., 2019. Web. doi:10.1063/1.5108724.
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Hackett, L., Siddiqui, A., Dominguez, D., Douglas, J. K., Tauke-Pedretti, A., Friedmann, T., Peake, G., Arterburn, S., & Eichenfield, M. High-gain leaky surface acoustic wave amplifier in epitaxial InGaAs on lithium niobate heterostructure. United States. doi:https://doi.org/10.1063/1.5108724
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Hackett, L., Siddiqui, A., Dominguez, D., Douglas, J. K., Tauke-Pedretti, A., Friedmann, T., Peake, G., Arterburn, S., and Eichenfield, M. Tue . "High-gain leaky surface acoustic wave amplifier in epitaxial InGaAs on lithium niobate heterostructure". United States. doi:https://doi.org/10.1063/1.5108724. https://www.osti.gov/servlets/purl/1529154.
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@article{osti_1529154,
title = {High-gain leaky surface acoustic wave amplifier in epitaxial InGaAs on lithium niobate heterostructure},
author = {Hackett, L. and Siddiqui, A. and Dominguez, D. and Douglas, J. K. and Tauke-Pedretti, A. and Friedmann, T. and Peake, G. and Arterburn, S. and Eichenfield, M.},
abstractNote = {Active surface acoustic wave components have the potential to transform RF front ends by consolidating functionalities that currently occur across multiple chip technologies, leading to reduced insertion loss from converting back and forth between acoustic and electronic domains in addition to improved size and power efficiency. This letter reflects a significant advance in these active devices with a compact, high-gain, and low-power leaky surface acoustic wave amplifier based on the acoustoelectric effect. Devices use an acoustically thin semi-insulating InGaAs surface film on a YX lithium niobate substrate to achieve exceptionally high acoustoelectric interaction strength via an epitaxial In0.53Ga0.47As(P)/InP quaternary layer structure and wafer-scale bonding. Here, we demonstrate 1.9 dB of gain per acoustic wavelength and power consumption of 90 mW for 30 dB of electronic gain. Despite the strong intrinsic leaky propagation loss, 5 dB of terminal gain is obtained for a semiconductor that is only 338 μm long due to state-of-the-art heterogenous integration and an improved material platform.},
doi = {10.1063/1.5108724},
journal = {Applied Physics Letters},
number = 25,
volume = 114,
place = {United States},
year = {2019},
month = {6}
}
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Journal Article:
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DOI:  https://doi.org/10.1063/1.5108724
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Figures / Tables:

FIG. 1 FIG. 1: (a) A cross-sectional schematic of the device, which consists of a 100 nm thick InGaAs layer with DC contacts integrated in a YX LiNbO3 delay line. (b) Schematic and (c) atomic force microscope scan of the initial epitaxial stack before bonding to the LiNbO3 and further processing. (d)more » Microscope image of the fabricated device with (e) an image of the interdigital transducers and DC contact. (f) Camera image of the 3 inch LiNbO3 wafer after fabricating arrays of devices. The bonded 2 inch InP wafer is indicated by the dashed blue line. The expected amplifier response with (g) no applied bias and (h) a drift voltage sufficient for gain.« less
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