MoS2 –OH Bilayer-Mediated Growth of Inch-Sized Monolayer MoS2 on Arbitrary Substrates

Zhu, Juntong; Xu, Hao; Zou, Guifu; Zhang, Wan; Chai, Ruiqing; Choi, Jinho; Wu, Jiang; Liu, Huiyun; Shen, Guozhen; Fan, Hongyou

doi:10.1021/jacs.9b00047

Title: MoS₂ –OH Bilayer-Mediated Growth of Inch-Sized Monolayer MoS₂ on Arbitrary Substrates

Journal Article · 07 March 2019 · Journal of the American Chemical Society

DOI: https://doi.org/10.1021/jacs.9b00047 · OSTI ID:1526212

Zhu, Juntong ^[1];

^[2];

^[1]; Zhang, Wan ^[1]; Chai, Ruiqing ^[3];

^[1]; Wu, Jiang ^[4]; Liu, Huiyun ^[2];

^[3];

^[5]

Soochow University, Suzhou (China)
University College London (United Kingdom)
Chinese Academy of Sciences (CAS), Beijing (China)
University College London (United Kingdom); University of Electronic Science and Technology of China Chengdu, Sichuan (China)
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Univ. of New Mexico, Albuquerque, NM (United States)

Due to remarkable electronic property, optical transparency, and mechanical flexibility, monolayer molybdenum disulfide (MoS₂) has been demonstrated to be promising for electronic and optoelectronic devices. To date, the growth of high-quality and large-scale monolayer MoS₂ has been one of the main challenges for practical applications. In this paper, we present a MoS₂–OH bilayer-mediated method that can fabricate inch-sized monolayer MoS₂ on arbitrary substrates. This approach relies on a layer of hydroxide groups (-OH) that are preferentially attached to the (001) surface of MoS₂ to form a MoS₂–OH bilayer structure for growth of large-area monolayer MoS₂ during the growth process. Specifically, the hydroxide layer impedes vertical growth of MoS₂ layers along the [001] zone axis, promoting the monolayer growth of MoS₂, constrains growth of the MoS₂ monolayer only in the lateral direction into larger area, and effectively reduces sulfur vacancies and defects according to density functional theory calculations. Finally, the hydroxide groups advantageously prevent the MoS₂ from interface oxidation in air, rendering high-quality MoS₂ monolayers with carrier mobility up to ~30 cm² V^–1 s^–1. Using this approach, inch-sized uniform monolayer MoS₂ has been fabricated on the sapphire and mica and high-quality monolayer MoS₂ of single-crystalline domains exceeding 200 μm has been grown on various substrates including amorphous SiO₂ and quartz and crystalline Si, SiC, Si₃N₄, and graphene Finally, this method provides a new opportunity for the monolayer growth of other two-dimensional transition metal dichalcogenides such as WS₂ and MoSe₂.

View Accepted Manuscript (DOE)

Cite

Export

Save

Research Organization:: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22); USDOE National Nuclear Security Administration (NNSA)

Grant/Contract Number:: AC04-94AL85000; AC52-06NA25396; NA0003525

OSTI ID:: 1526212

Report Number(s):: SAND--2019-6161J; 676097

Journal Information:: Journal of the American Chemical Society, Journal Name: Journal of the American Chemical Society Journal Issue: 13 Vol. 141; ISSN 0002-7863

Publisher:: American Chemical Society (ACS)Copyright Statement

Country of Publication:: United States

Language:: English

References (58)

Determination of the concentration of surface hydroxyl groups on metal oxide films by a quantitative XPS method McCafferty, E.; Wightman, J. P. Surface and Interface Analysis, Vol. 26, Issue 8 https://doi.org/10.1002/(SICI)1096-9918(199807)26:8<549::AID-SIA396>3.0.CO;2-Q	journal	July 1998
Synthesis of Millimeter-Scale Transition Metal Dichalcogenides Single Crystals Gong, Yongji; Ye, Gonglan; Lei, Sidong Advanced Functional Materials, Vol. 26, Issue 12 https://doi.org/10.1002/adfm.201504633	journal	February 2016
Synthesis of Large-Area MoS₂ Atomic Layers with Chemical Vapor Deposition Lee, Yi-Hsien; Zhang, Xin-Quan; Zhang, Wenjing Advanced Materials, Vol. 24, Issue 17, p. 2320-2325 https://doi.org/10.1002/adma.201104798	journal	March 2012
High Detectivity and Transparent Few‐Layer MoS ₂ /Glassy‐Graphene Heterostructure Photodetectors Xu, Hao; Han, Xiaoyu; Dai, Xiao Advanced Materials, Vol. 30, Issue 13 https://doi.org/10.1002/adma.201706561	journal	January 2018
Semiempirical GGA-type density functional constructed with a long-range dispersion correction Grimme, Stefan Journal of Computational Chemistry, Vol. 27, Issue 15, p. 1787-1799 https://doi.org/10.1002/jcc.20495	journal	January 2006
Fabrication of Single- and Multilayer MoS2 Film-Based Field-Effect Transistors for Sensing NO at Room Temperature Li, Hai; Yin, Zongyou; He, Qiyuan Small, Vol. 8, Issue 1 https://doi.org/10.1002/smll.201101016	journal	October 2011
Large-Area Vapor-Phase Growth and Characterization of MoS₂ Atomic Layers on a SiO₂ Substrate Zhan, Yongjie; Liu, Zheng; Najmaei, Sina Small, Vol. 8, Issue 7, p. 966-971 https://doi.org/10.1002/smll.201102654	journal	February 2012
Crystal phase control in two-dimensional materials Wang, Jialiang; Wei, Yang; Li, Hai Science China Chemistry, Vol. 61, Issue 10 https://doi.org/10.1007/s11426-018-9326-y	journal	September 2018
Surface OH group governing adsorption properties of metal oxide films Takeda, Satoshi; Fukawa, Makoto; Hayashi, Yasuo Thin Solid Films, Vol. 339, Issue 1-2 https://doi.org/10.1016/S0040-6090(98)01152-3	journal	February 1999
XPS investigation of preferential sputtering of S from MoS2 and determination of MoSx stoichiometry from Mo and S peak positions Baker, M. A.; Gilmore, R.; Lenardi, C. Applied Surface Science, Vol. 150, Issue 1-4 https://doi.org/10.1016/S0169-4332(99)00253-6	journal	August 1999
Two-Dimensional Metal Nanomaterials: Synthesis, Properties, and Applications Chen, Ye; Fan, Zhanxi; Zhang, Zhicheng Chemical Reviews, Vol. 118, Issue 13 https://doi.org/10.1021/acs.chemrev.7b00727	journal	June 2018
Chemisorption of Hydroxide on 2D Materials from DFT Calculations: Graphene versus Hexagonal Boron Nitride Grosjean, Benoit; Pean, Clarisse; Siria, Alessandro The Journal of Physical Chemistry Letters, Vol. 7, Issue 22 https://doi.org/10.1021/acs.jpclett.6b02248	journal	November 2016
A Facile Space-Confined Solid-Phase Sulfurization Strategy for Growth of High-Quality Ultrathin Molybdenum Disulfide Single Crystals Li, Dawei; Xiao, Zhiyong; Mu, Sai Nano Letters, Vol. 18, Issue 3 https://doi.org/10.1021/acs.nanolett.7b05473	journal	January 2018
Substrate Facet Effect on the Growth of Monolayer MoS ₂ on Au Foils Shi, Jianping; Zhang, Xiaona; Ma, Donglin ACS Nano, Vol. 9, Issue 4 https://doi.org/10.1021/acsnano.5b00081	journal	February 2015
Pushing the Envelope of In Situ Transmission Electron Microscopy Ramachandramoorthy, Rajaprakash; Bernal, Rodrigo; Espinosa, Horacio D. ACS Nano, Vol. 9, Issue 5 https://doi.org/10.1021/acsnano.5b01391	journal	May 2015
Large Work Function Modulation of Monolayer MoS ₂ by Ambient Gases Lee, Si Young; Kim, Un Jeong; Chung, JaeGwan ACS Nano, Vol. 10, Issue 6 https://doi.org/10.1021/acsnano.6b01742	journal	May 2016
Modification of Vapor Phase Concentrations in MoS ₂ Growth Using a NiO Foam Barrier Lim, Yee-Fun; Priyadarshi, Kumar; Bussolotti, Fabio ACS Nano, Vol. 12, Issue 2 https://doi.org/10.1021/acsnano.7b07682	journal	January 2018
In Situ Heating TEM Study of Onion-like WS ₂ and MoS ₂ Nanostructures Obtained via MOCVD Zink, Nicole; Therese, Helen Annal; Pansiot, Julien Chemistry of Materials, Vol. 20, Issue 1 https://doi.org/10.1021/cm061867k	journal	December 2007
MoS₂ Nanoparticles Grown on Graphene An Advanced Catalyst for the Hydrogen Evolution Reaction Li, Yanguang; Wang, Hailiang; Xie, Liming Journal of the American Chemical Society, Vol. 133, Issue 19, p. 7296-7299 https://doi.org/10.1021/ja201269b	journal	May 2011
Controlled Synthesis of Highly Crystalline MoS ₂ Flakes by Chemical Vapor Deposition Wang, Xinsheng; Feng, Hongbin; Wu, Yongmin Journal of the American Chemical Society, Vol. 135, Issue 14 https://doi.org/10.1021/ja4013485	journal	March 2013
Oxygen-Assisted Chemical Vapor Deposition Growth of Large Single-Crystal and High-Quality Monolayer MoS ₂ Chen, Wei; Zhao, Jing; Zhang, Jing Journal of the American Chemical Society, Vol. 137, Issue 50 https://doi.org/10.1021/jacs.5b10519	journal	December 2015
Chemical Vapor Deposition of Large-Size Monolayer MoSe ₂ Crystals on Molten Glass Chen, Jianyi; Zhao, Xiaoxu; Tan, Sherman J. R. Journal of the American Chemical Society, Vol. 139, Issue 3 https://doi.org/10.1021/jacs.6b12156	journal	January 2017
Li-Ion Intercalation in Thermal Oxide Thin Films of MoO ₃ as Studied by XPS, RBS, and NRA Światowska-Mrowiecka, Jolanta; de Diesbach, Soline; Maurice, Vincent The Journal of Physical Chemistry C, Vol. 112, Issue 29 https://doi.org/10.1021/jp800147f	journal	June 2008
Growth of Large-Area and Highly Crystalline MoS₂ Thin Layers on Insulating Substrates Liu, Keng-Ku; Zhang, Wenjing; Lee, Yi-Hsien Nano Letters, Vol. 12, Issue 3, p. 1538-1544 https://doi.org/10.1021/nl2043612	journal	February 2012
High Performance Multilayer MoS₂Transistors with Scandium Contacts Das, Saptarshi; Chen, Hong-Yan; Penumatcha, Ashish Verma Nano Letters, Vol. 13, Issue 1, p. 100-105 https://doi.org/10.1021/nl303583v	journal	December 2012
Interlayer Breathing and Shear Modes in Few-Trilayer MoS ₂ and WSe ₂ Zhao, Yanyuan; Luo, Xin; Li, Hai Nano Letters, Vol. 13, Issue 3 https://doi.org/10.1021/nl304169w	journal	February 2013
Electroluminescence in Single Layer MoS₂ Sundaram, R. S.; Engel, M.; Lombardo, A. Nano Letters, Vol. 13, Issue 4, p. 1416-1421 https://doi.org/10.1021/nl400516a	journal	March 2013
Anomalous Lattice Vibrations of Single- and Few-Layer MoS ₂ Lee, Changgu; Yan, Hugen; Brus, Louis E. ACS Nano, Vol. 4, Issue 5 https://doi.org/10.1021/nn1003937	journal	March 2010
Single-Layer MoS₂ Phototransistors Yin, Zongyou; Li, Hai; Li, Hong ACS Nano, Vol. 6, Issue 1, p. 74-80 https://doi.org/10.1021/nn2024557	journal	December 2011
Electric Stress-Induced Threshold Voltage Instability of Multilayer MoS ₂ Field Effect Transistors Cho, Kyungjune; Park, Woanseo; Park, Juhun ACS Nano, Vol. 7, Issue 9 https://doi.org/10.1021/nn402348r	journal	August 2013
Surface-Energy-Assisted Perfect Transfer of Centimeter-Scale Monolayer and Few-Layer MoS ₂ Films onto Arbitrary Substrates Gurarslan, Alper; Yu, Yifei; Su, Liqin ACS Nano, Vol. 8, Issue 11 https://doi.org/10.1021/nn5057673	journal	November 2014
The chemistry of two-dimensional layered transition metal dichalcogenide nanosheets Chhowalla, Manish; Shin, Hyeon Suk; Eda, Goki Nature Chemistry, Vol. 5, Issue 4, p. 263-275 https://doi.org/10.1038/nchem.1589	journal	April 2013
Direct TEM observations of growth mechanisms of two-dimensional MoS2 flakes Fei, Linfeng; Lei, Shuijin; Zhang, Wei-Bing Nature Communications, Vol. 7, Issue 1 https://doi.org/10.1038/ncomms12206	journal	July 2016
Superfast assembly and synthesis of gold nanostructures using nanosecond low-temperature compression via magnetic pulsed power Li, Binsong; Bian, Kaifu; Lane, J. Matthew D. Nature Communications, Vol. 8, Issue 1 https://doi.org/10.1038/ncomms14778	journal	March 2017
Repeated growth and bubbling transfer of graphene with millimetre-size single-crystal grains using platinum Gao, Libo; Ren, Wencai; Xu, Huilong Nature Communications, Vol. 3, Issue 1 https://doi.org/10.1038/ncomms1702	journal	January 2012
Stress-induced phase transformation and optical coupling of silver nanoparticle superlattices into mechanically stable nanowires Li, Binsong; Wen, Xiaodong; Li, Ruipeng Nature Communications, Vol. 5, Issue 1 https://doi.org/10.1038/ncomms5179	journal	June 2014
Evolution of interlayer coupling in twisted molybdenum disulfide bilayers Liu, Kaihui; Zhang, Liming; Cao, Ting Nature Communications, Vol. 5, Issue 1 https://doi.org/10.1038/ncomms5966	journal	September 2014
Two-dimensional flexible nanoelectronics Akinwande, Deji; Petrone, Nicholas; Hone, James Nature Communications, Vol. 5, Issue 1 https://doi.org/10.1038/ncomms6678	journal	December 2014
Exploring atomic defects in molybdenum disulphide monolayers Hong, Jinhua; Hu, Zhixin; Probert, Matt Nature Communications, Vol. 6, Issue 1 https://doi.org/10.1038/ncomms7293	journal	February 2015
Large-area synthesis of high-quality and uniform monolayer WS2 on reusable Au foils Gao, Yang; Liu, Zhibo; Sun, Dong-Ming Nature Communications, Vol. 6, Issue 1 https://doi.org/10.1038/ncomms9569	journal	October 2015
Vapour phase growth and grain boundary structure of molybdenum disulphide atomic layers Najmaei, Sina; Liu, Zheng; Zhou, Wu Nature Materials, Vol. 12, Issue 8, p. 754-759 https://doi.org/10.1038/nmat3673	journal	June 2013
Electronics and optoelectronics of two-dimensional transition metal dichalcogenides Wang, Qing Hua; Kalantar-Zadeh, Kourosh; Kis, Andras Nature Nanotechnology, Vol. 7, Issue 11, p. 699-712 https://doi.org/10.1038/nnano.2012.193	journal	November 2012
Janus monolayers of transition metal dichalcogenides Lu, Ang-Yu; Zhu, Hanyu; Xiao, Jun Nature Nanotechnology, Vol. 12, Issue 8 https://doi.org/10.1038/nnano.2017.100	journal	May 2017
Two-dimensional material nanophotonics Xia, Fengnian; Wang, Han; Xiao, Di Nature Photonics, Vol. 8, Issue 12 https://doi.org/10.1038/nphoton.2014.271	journal	November 2014
Batch production of 6-inch uniform monolayer molybdenum disulfide catalyzed by sodium in glass Yang, Pengfei; Zou, Xiaolong; Zhang, Zhepeng Nature Communications, Vol. 9, Issue 1 https://doi.org/10.1038/s41467-018-03388-5	journal	March 2018
High phase-purity 1T′-MoS2- and 1T′-MoSe2-layered crystals Yu, Yifu; Nam, Gwang-Hyeon; He, Qiyuan Nature Chemistry, Vol. 10, Issue 6 https://doi.org/10.1038/s41557-018-0035-6	journal	April 2018
Controlled Scalable Synthesis of Uniform, High-Quality Monolayer and Few-layer MoS2 Films Yu, Yifei; Li, Chun; Liu, Yi Scientific Reports, Vol. 3, Issue 1 https://doi.org/10.1038/srep01866	journal	May 2013
Direct observation of carbon nanostructure growth at liquid–solid interfaces Fei, Lin-feng; Sun, Tie-yu; Lu, Wei Chem. Commun., Vol. 50, Issue 7 https://doi.org/10.1039/C3CC46264A	journal	January 2014
Recent advances in controlled synthesis of two-dimensional transition metal dichalcogenides via vapour deposition techniques Shi, Yumeng; Li, Henan; Li, Lain-Jong Chemical Society Reviews, Vol. 44, Issue 9 https://doi.org/10.1039/C4CS00256C	journal	January 2015
The stability of the hydroxylated (0001) surface of α-Al2O3 Łodziana, Z.; Nørskov, J. K.; Stoltze, P. The Journal of Chemical Physics, Vol. 118, Issue 24 https://doi.org/10.1063/1.1574798	journal	June 2003
Projector augmented-wave method Blöchl, P. E. Physical Review B, Vol. 50, Issue 24, p. 17953-17979 https://doi.org/10.1103/PhysRevB.50.17953	journal	December 1994
Efficient iterative schemes for ab initio total-energy calculations using a plane-wave basis set Kresse, G.; Furthmüller, J. Physical Review B, Vol. 54, Issue 16, p. 11169-11186 https://doi.org/10.1103/PhysRevB.54.11169	journal	October 1996
From ultrasoft pseudopotentials to the projector augmented-wave method Kresse, G.; Joubert, D. Physical Review B, Vol. 59, Issue 3, p. 1758-1775 https://doi.org/10.1103/PhysRevB.59.1758	journal	January 1999
Generalized Gradient Approximation Made Simple Perdew, John P.; Burke, Kieron; Ernzerhof, Matthias Physical Review Letters, Vol. 77, Issue 18, p. 3865-3868 https://doi.org/10.1103/PhysRevLett.77.3865	journal	October 1996
Pressure compression of CdSe nanoparticles into luminescent nanowires Li, Binsong; Bian, Kaifu; Zhou, Xiaowang Science Advances, Vol. 3, Issue 5 https://doi.org/10.1126/sciadv.1602916	journal	May 2017
Atomically thin two-dimensional organic-inorganic hybrid perovskites Dou, L.; Wong, A. B.; Yu, Y. Science, Vol. 349, Issue 6255 https://doi.org/10.1126/science.aac7660	journal	September 2015
Robust epitaxial growth of two-dimensional heterostructures, multiheterostructures, and superlattices Zhang, Zhengwei; Chen, Peng; Duan, Xidong Science, Vol. 357, Issue 6353 https://doi.org/10.1126/science.aan6814	journal	August 2017
Effect of contaminations and surface preparation on the work function of single layer MoS ₂ Ochedowski, Oliver; Marinov, Kolyo; Scheuschner, Nils Beilstein Journal of Nanotechnology, Vol. 5 https://doi.org/10.3762/bjnano.5.32	journal	January 2014

Cited By (7)

Ambipolar and Robust WSe ₂ Field‐Effect Transistors Utilizing Self‐Assembled Edge Oxides Xu, Hao; Han, Xiaoyu; Liu, Wei Advanced Materials Interfaces, Vol. 7, Issue 1 https://doi.org/10.1002/admi.201901628	journal	November 2019
Vapor‐phase growth of high‐quality wafer‐scale two‐dimensional materials Tong, Xin; Liu, Keli; Zeng, Mengqi InfoMat, Vol. 1, Issue 4 https://doi.org/10.1002/inf2.12038	journal	September 2019
Spatially Bandgap-Graded MoS2(1−x)Se2x Homojunctions for Self-Powered Visible–Near-Infrared Phototransistors Xu, Hao; Zhu, Juntong; Zou, Guifu Nano-Micro Letters, Vol. 12, Issue 1 https://doi.org/10.1007/s40820-019-0361-2	journal	January 2020
Electronics from solution-processed 2D semiconductors Gao, Xiangxiang; Bian, Gang; Zhu, Jian Journal of Materials Chemistry C, Vol. 7, Issue 41 https://doi.org/10.1039/c9tc03935j	journal	January 2019
One-Step CVD Synthesis of Few-Layer SnS ₂ /MoS ₂ Vertical Heterostructures Zhao, Hongxiao; Yan, Yong; Song, Xiaohui Nano, Vol. 14, Issue 10 https://doi.org/10.1142/s1793292019501297	journal	October 2019
Quick Optical Identification of the Defect Formation in Monolayer WSe2 for Growth Optimization Fang, Long; Chen, Haitao; Yuan, Xiaoming Nanoscale Research Letters, Vol. 14, Issue 1 https://doi.org/10.1186/s11671-019-3110-z	journal	August 2019
UV-Visible Photodetector Based on I-type Heterostructure of ZnO-QDs/Monolayer MoS2 Zhou, Yong Heng; Zhang, Zhi Bin; Xu, Ping Nanoscale Research Letters, Vol. 14, Issue 1 https://doi.org/10.1186/s11671-019-3183-8	journal	December 2019

Similar Records

Deposition of AlN on WS{sub 2} (0001) substrate by atomic layer growth process

Conference · 1997 · OSTI ID:581051

Chung, J W; Ohuchi, F S

Sulfurization Engineering of One–Step Low–Temperature MoS₂ and WS₂ Thin Films for Memristor Device Applications

Journal Article · 2021 · Advanced Electronic Materials · OSTI ID:1829652

Gu, Yuqian; Serna, Martha I.; Mohan, Sivasakthya; +8 more

Chemical Vapor Deposition of Large-Size Monolayer MoSe2 Crystals on Molten Glass

Journal Article · 2017 · Journal of the American Chemical Society · OSTI ID:1362251

Chen, Jianyi; Zhao, Xiaoxu; Tan, Sherman Jun Rong; +13 more

Related Subjects

36 MATERIALS SCIENCE

Title: MoS2 –OH Bilayer-Mediated Growth of Inch-Sized Monolayer MoS2 on Arbitrary Substrates

Citation Formats

References (58)

Cited By (7)

Similar Records

Related Subjects

Title: MoS₂ –OH Bilayer-Mediated Growth of Inch-Sized Monolayer MoS₂ on Arbitrary Substrates