Design, characterization, and performance of a hard x-ray transmission microscope at the National Synchrotron Light Source II 18-ID beamline

Coburn, David Scott; Nazaretski, Evgeny; Xu, Weihe; Ge, Mingyuan; Longo, Cindy; Xu, Huijuan; Gofron, Kazimierz; Yin, Zhijian; Chen, Huang Han; Hwu, Yeukuang; Lee, Wah-Keat

doi:10.1063/1.5088124

Title: Design, characterization, and performance of a hard x-ray transmission microscope at the National Synchrotron Light Source II 18-ID beamline

Journal Article · 06 May 2019 · Review of Scientific Instruments

DOI: https://doi.org/10.1063/1.5088124 · OSTI ID:1524554

Coburn, David Scott ^[1];

^[1];

^[1]; Ge, Mingyuan ^[1]; Longo, Cindy ^[1]; Xu, Huijuan ^[1]; Gofron, Kazimierz ^[1]; Yin, Zhijian ^[1]; Chen, Huang Han ^[2]; Hwu, Yeukuang ^[2]; Lee, Wah-Keat ^[1]

Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II)
Academia Sinica, Taipei (Taiwan)

A transmission X-ray microscope (TXM) has been designed and commissioned at the 18-ID Fullfield X-ray Imaging (FXI) beamline at the National Synchrotron Light Source-II (NSLS-II). This instrument operates in the 5-11 keV range, and, with the current set of optics, is capable of 30 nm spatial resolution imaging, with a field of view (FOV) of about 40 microns. For absorption contrast, the minimum exposure time for a single projection image is about 20 ms and an entire 3D tomography data set can be acquired in under one minute. The system enables tomographic reconstructions with sub-50 nm spatial resolution without the use of markers on the sample or corrections for rotation run-outs.

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Research Organization:: Brookhaven National Laboratory (BNL), Upton, NY (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES); USDOE

Grant/Contract Number:: SC0012704

OSTI ID:: 1524554

Alternate ID(s):: OSTI ID: 1511070

Report Number(s):: BNL-211719-2019-JAAM

Journal Information:: Review of Scientific Instruments, Vol. 90, Issue 5; ISSN 0034-6748

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 20 works

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