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Title: Study on an effective one-dimensional ion-beam figuring method

Abstract

Ion-beam figuring (IBF) is a precise surface finishing technique used for the production of ultra-precision optical surfaces. In this study, we propose an effective one-dimensional IBF (1D-IBF) method approaching sub-nanometer root mean square (RMS) convergence for flat and spherical mirrors. Our process contains three key aspects. First, to minimize the misalignment of the coordinate systems between the metrology and the IBF hardware, a mirror holder is used to integrate both the sample mirror and the beam removal function (BRF) mirror. In this way, the coordinate relationship can be calculated using the measured BRF center. Second, we propose a novel constrained linear least-squares (CLLS) dwell time calculation algorithm combined with a coarse-to-fine scheme to ensure that the resultant nonnegative dwell time closely and smoothly duplicates the required removal amount. Third, considering the possible errors induced by the translation stage, we propose a dwell time slicing strategy to divide the dwell time into smaller time slices. Experiments using our approaches are performed on flat and spherical mirrors as demonstrations. Measurement results from the nano-accuracy surface profiler (NSP) show that the residual profile errors are reduced to sub-nanometer RMS for both types of mirrors while the surface roughness is not affected by themore » figuring process, demonstrating the effectiveness of the proposed 1D-IBF method for 1D high-precision optics fabrication.« less

Authors:
ORCiD logo; ORCiD logo; ; ; ; ;
Publication Date:
Research Org.:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
OSTI Identifier:
1512553
Alternate Identifier(s):
OSTI ID: 1543406
Report Number(s):
BNL-211885-2019-JAAM
Journal ID: ISSN 1094-4087; OPEXFF
Grant/Contract Number:  
BNL LDRD 17-016; SC0012704
Resource Type:
Published Article
Journal Name:
Optics Express
Additional Journal Information:
Journal Name: Optics Express Journal Volume: 27 Journal Issue: 11; Journal ID: ISSN 1094-4087
Publisher:
Optical Society of America
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Wang, Tianyi, Huang, Lei, Vescovi, Matthew, Kuhne, Dennis, Tayabaly, Kashmira, Bouet, Nathalie, and Idir, Mourad. Study on an effective one-dimensional ion-beam figuring method. United States: N. p., 2019. Web. doi:10.1364/OE.27.015368.
Wang, Tianyi, Huang, Lei, Vescovi, Matthew, Kuhne, Dennis, Tayabaly, Kashmira, Bouet, Nathalie, & Idir, Mourad. Study on an effective one-dimensional ion-beam figuring method. United States. doi:10.1364/OE.27.015368.
Wang, Tianyi, Huang, Lei, Vescovi, Matthew, Kuhne, Dennis, Tayabaly, Kashmira, Bouet, Nathalie, and Idir, Mourad. Tue . "Study on an effective one-dimensional ion-beam figuring method". United States. doi:10.1364/OE.27.015368.
@article{osti_1512553,
title = {Study on an effective one-dimensional ion-beam figuring method},
author = {Wang, Tianyi and Huang, Lei and Vescovi, Matthew and Kuhne, Dennis and Tayabaly, Kashmira and Bouet, Nathalie and Idir, Mourad},
abstractNote = {Ion-beam figuring (IBF) is a precise surface finishing technique used for the production of ultra-precision optical surfaces. In this study, we propose an effective one-dimensional IBF (1D-IBF) method approaching sub-nanometer root mean square (RMS) convergence for flat and spherical mirrors. Our process contains three key aspects. First, to minimize the misalignment of the coordinate systems between the metrology and the IBF hardware, a mirror holder is used to integrate both the sample mirror and the beam removal function (BRF) mirror. In this way, the coordinate relationship can be calculated using the measured BRF center. Second, we propose a novel constrained linear least-squares (CLLS) dwell time calculation algorithm combined with a coarse-to-fine scheme to ensure that the resultant nonnegative dwell time closely and smoothly duplicates the required removal amount. Third, considering the possible errors induced by the translation stage, we propose a dwell time slicing strategy to divide the dwell time into smaller time slices. Experiments using our approaches are performed on flat and spherical mirrors as demonstrations. Measurement results from the nano-accuracy surface profiler (NSP) show that the residual profile errors are reduced to sub-nanometer RMS for both types of mirrors while the surface roughness is not affected by the figuring process, demonstrating the effectiveness of the proposed 1D-IBF method for 1D high-precision optics fabrication.},
doi = {10.1364/OE.27.015368},
journal = {Optics Express},
number = 11,
volume = 27,
place = {United States},
year = {2019},
month = {5}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: 10.1364/OE.27.015368

Citation Metrics:
Cited by: 5 works
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Figures / Tables:

Fig. 1 Fig. 1: The 1D-IBF hardware used in this study. (a) The multi-layer deposition system at NSLS-II optical metrology and fabrication group. (b) The rectangular grid installed to modify the shape of the ion beam.

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Works referenced in this record:

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    Works referencing / citing this record:

    Ion beam figuring and optical metrology system for synchrotron x-ray mirrors
    conference, September 2019

    • Hand, Matthew; Alcock, Simon G.; Hillman, Michael
    • Advances in Metrology for X-Ray and EUV Optics VIII
    • DOI: 10.1117/12.2528463