Non-equilibrium adatom thermal state enables rapid additive nanomanufacturing
Abstract
A new state of radical thermal non-equilibrium in surface adsorbed molecules is discovered that enables rapid surface diffusion of energized adatoms with a negligible effect on the substrate surface temperature. Due to enhanced surface diffusion, growth rates can be achieved that improve the feasibility of many nanofabrication techniques. Since the adatom temperature cannot be directly measured without disturbing its thermodynamic state, the first principle hard-cube model is used to predict both the adatom effective temperature and the surface temperature in response to gaseous particle impingement in a vacuum. The validity of the approach is supported by local, spatially-resolved surface temperature measurements of the thermal response to supersonic microjet gas impingement. The ability to determine and control the adatom effective temperature, and therefore the surface diffusion rate, opens new degrees of freedom in controlling a wide range of nanofabrication processes that critically depend on surface diffusion of precursor molecules. Furthermore, this fundamental understanding has the potential to accelerate research into nanoscale fabrication and to yield the new materials with unique properties that are only accessible with nanoscale features.
- Publication Date:
- Research Org.:
- Georgia Institute of Technology, Atlanta, GA (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1594427
- Alternate Identifier(s):
- OSTI ID: 1511759
- Grant/Contract Number:
- SC0010729
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Physical Chemistry Chemical Physics. PCCP
- Additional Journal Information:
- Journal Volume: 21; Journal Issue: 20; Journal ID: ISSN 1463-9076
- Publisher:
- Royal Society of Chemistry
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 74 ATOMIC AND MOLECULAR PHYSICS; electron beam; non-equilibrium thermodynamics; gas jet
Citation Formats
Henry, Matthew R., Kim, Songkil, and Fedorov, Andrei G. Non-equilibrium adatom thermal state enables rapid additive nanomanufacturing. United States: N. p., 2019.
Web. doi:10.1039/C9CP01478K.
Henry, Matthew R., Kim, Songkil, & Fedorov, Andrei G. Non-equilibrium adatom thermal state enables rapid additive nanomanufacturing. United States. https://doi.org/10.1039/C9CP01478K
Henry, Matthew R., Kim, Songkil, and Fedorov, Andrei G. Mon .
"Non-equilibrium adatom thermal state enables rapid additive nanomanufacturing". United States. https://doi.org/10.1039/C9CP01478K. https://www.osti.gov/servlets/purl/1594427.
@article{osti_1594427,
title = {Non-equilibrium adatom thermal state enables rapid additive nanomanufacturing},
author = {Henry, Matthew R. and Kim, Songkil and Fedorov, Andrei G.},
abstractNote = {A new state of radical thermal non-equilibrium in surface adsorbed molecules is discovered that enables rapid surface diffusion of energized adatoms with a negligible effect on the substrate surface temperature. Due to enhanced surface diffusion, growth rates can be achieved that improve the feasibility of many nanofabrication techniques. Since the adatom temperature cannot be directly measured without disturbing its thermodynamic state, the first principle hard-cube model is used to predict both the adatom effective temperature and the surface temperature in response to gaseous particle impingement in a vacuum. The validity of the approach is supported by local, spatially-resolved surface temperature measurements of the thermal response to supersonic microjet gas impingement. The ability to determine and control the adatom effective temperature, and therefore the surface diffusion rate, opens new degrees of freedom in controlling a wide range of nanofabrication processes that critically depend on surface diffusion of precursor molecules. Furthermore, this fundamental understanding has the potential to accelerate research into nanoscale fabrication and to yield the new materials with unique properties that are only accessible with nanoscale features.},
doi = {10.1039/C9CP01478K},
journal = {Physical Chemistry Chemical Physics. PCCP},
number = 20,
volume = 21,
place = {United States},
year = {Mon Apr 29 00:00:00 EDT 2019},
month = {Mon Apr 29 00:00:00 EDT 2019}
}
Free Publicly Available Full Text
Publisher's Version of Record
Other availability
Search WorldCat to find libraries that may hold this journal
Cited by: 3 works
Citation information provided by
Web of Science
Web of Science
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Surface Diffusion Directed Growth of Anisotropic Graphene Domains on Different Copper Lattices
journal, February 2016
- Jung, Da Hee; Kang, Cheong; Nam, Ji Eun
- Scientific Reports, Vol. 6, Issue 1
What Controls Deposition Rate in Electron-Beam Chemical Vapor Deposition?
journal, August 2006
- White, William B.; Rykaczewski, Konrad; Fedorov, Andrei G.
- Physical Review Letters, Vol. 97, Issue 8
Analysis of electron beam induced deposition (EBID) of residual hydrocarbons in electron microscopy
journal, March 2007
- Rykaczewski, Konrad; White, William B.; Fedorov, Andrei G.
- Journal of Applied Physics, Vol. 101, Issue 5
Nanoscale structure of submicron-thick sputter-deposited Pd films: Effect of the adatoms diffusivity by the film-substrate interaction
journal, April 2017
- Torrisi, V.; Ruffino, F.
- Surface and Coatings Technology, Vol. 315
From Isolated Ions to Multilayer Functional Materials Using Ion Soft Landing
journal, November 2018
- Laskin, Julia; Johnson, Grant E.; Warneke, Jonas
- Angewandte Chemie International Edition, Vol. 57, Issue 50
Hard‐cube model analysis of gas‐surface energy accommodation
journal, January 1980
- Grimmelmann, Erik K.; Tully, John C.; Cardillo, Mark J.
- The Journal of Chemical Physics, Vol. 72, Issue 2
Dynamics of molecular adsorption of ethane with platinum(111): a supersonic molecular beam study
journal, February 1991
- Arumainayagam, Christopher R.; Schoofs, Gregory R.; McMaster, Mark C.
- The Journal of Physical Chemistry, Vol. 95, Issue 3
On effective properties of materials at the nano- and microscales considering surface effects
journal, July 2015
- Eremeyev, Victor A.
- Acta Mechanica, Vol. 227, Issue 1
High-Fidelity 3D-Nanoprinting via Focused Electron Beams: Computer-Aided Design (3BID)
journal, February 2018
- Fowlkes, Jason D.; Winkler, R.; Lewis, Brett B.
- ACS Applied Nano Materials, Vol. 1, Issue 3
Reference potentials for adsorption of helium, argon, methane, and krypton in high-silica zeolites
journal, August 2001
- Talu, Orhan; Myers, Alan L.
- Colloids and Surfaces A: Physicochemical and Engineering Aspects, Vol. 187-188, p. 83-93
Exploring Ag(111) Substrate for Epitaxially Growing Monolayer Stanene: A First-Principles Study
journal, July 2016
- Gao, Junfeng; Zhang, Gang; Zhang, Yong-Wei
- Scientific Reports, Vol. 6, Issue 1
High Purity Tungsten Nanostructures via Focused Electron Beam Induced Deposition with Carrier Gas Assisted Supersonic Jet Delivery of Organometallic Precursors
journal, May 2016
- Henry, Matthew R.; Kim, Songkil; Fedorov, Andrei G.
- The Journal of Physical Chemistry C, Vol. 120, Issue 19
Engineering atomic and molecular nanostructures at surfaces
journal, September 2005
- Barth, Johannes V.; Costantini, Giovanni; Kern, Klaus
- Nature, Vol. 437, Issue 7059
TiO2 thin films formation on industrial glass through self-assembly processing
journal, August 1997
- Huang, Dan; Xiao, Zhong-Dang; Gu, Jian-Hua
- Thin Solid Films, Vol. 305, Issue 1-2
Inert gas jets for growth control in electron beam induced deposition
journal, June 2011
- Henry, M. R.; Kim, S.; Rykaczewski, K.
- Applied Physics Letters, Vol. 98, Issue 26
Velocity slip of gas mixtures in free jet expansions
journal, January 1978
- Raghuraman, P.; Davidovits, P.
- Physics of Fluids, Vol. 21, Issue 9
Coordination of Iron Atoms by Tetraphenylporphyrin Monolayers and Multilayers on Ag(111) and Formation of Iron-Tetraphenylporphyrin
journal, September 2008
- Buchner, Florian; Flechtner, Ken; Bai, Yun
- The Journal of Physical Chemistry C, Vol. 112, Issue 39
Nanoscience and technology: the next revolution in the Earth sciences
journal, October 2002
- Hochella, Michael F.
- Earth and Planetary Science Letters, Vol. 203, Issue 2
Anisotropic capillary instability of silicon nanostructures under hydrogen anneal
journal, February 2012
- Barwicz, T.; Cohen, G. M.; Reuter, K. B.
- Applied Physics Letters, Vol. 100, Issue 9
Self-shadowing and surface diffusion effects in obliquely deposited thin films
journal, February 1999
- Vick, D.; Friedrich, L. J.; Dew, S. K.
- Thin Solid Films, Vol. 339, Issue 1-2
Dynamic modulation of electronic properties of graphene by localized carbon doping using focused electron beam induced deposition
journal, January 2015
- Kim, S.; Russell, M.; Henry, M.
- Nanoscale, Vol. 7, Issue 36
Plateau–Rayleigh crystal growth of periodic shells on one-dimensional substrates
journal, March 2015
- Day, Robert W.; Mankin, Max N.; Gao, Ruixuan
- Nature Nanotechnology, Vol. 10, Issue 4
Directing Matter: Toward Atomic-Scale 3D Nanofabrication
journal, May 2016
- Jesse, Stephen; Borisevich, Albina Y.; Fowlkes, Jason D.
- ACS Nano, Vol. 10, Issue 6
High-Fidelity 3D-Nanoprinting via Focused Electron Beams: Growth Fundamentals
journal, February 2018
- Winkler, R.; Lewis, B. B.; Fowlkes, J. D.
- ACS Applied Nano Materials, Vol. 1, Issue 3
Self-organizing layers from complex molecular anions
journal, May 2018
- Warneke, Jonas; McBriarty, Martin E.; Riechers, Shawn L.
- Nature Communications, Vol. 9, Issue 1
All-Atom Force Field for Molecular Dynamics Simulations on Organotransition Metal Solids and Liquids. Application to M(CO) n (M = Cr, Fe, Ni, Mo, Ru, or W) Compounds
journal, October 2013
- Bernardes, Carlos E. S.; Canongia Lopes, José. N.; da Piedade, Manuel E. Minas
- The Journal of Physical Chemistry A, Vol. 117, Issue 43
Fundamental Electron-Precursor-Solid Interactions Derived from Time-Dependent Electron-Beam-Induced Deposition Simulations and Experiments
journal, March 2010
- Fowlkes, Jason D.; Rack, Philip D.
- ACS Nano, Vol. 4, Issue 3
High-Fidelity 3D-Nanoprinting via Focused Electron Beams: Computer-Aided Design (3BID)
text, January 2018
- Fowlkes, J.; Winkler, R.; Lewis, B.
- Apollo - University of Cambridge Repository