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Title: Observation of Nonlinear Standing Waves Excited by Plasma-Series-Resonance-Enhanced Harmonics in Capacitive Discharges

Authors:
; ; ; ; ;
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1511096
Grant/Contract Number:  
SC0001939
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Physical Review Letters
Additional Journal Information:
Journal Name: Physical Review Letters Journal Volume: 122 Journal Issue: 18; Journal ID: ISSN 0031-9007
Publisher:
American Physical Society
Country of Publication:
United States
Language:
English

Citation Formats

Zhao, Kai, Wen, De-Qi, Liu, Yong-Xin, Lieberman, Michael A., Economou, Demetre J., and Wang, You-Nian. Observation of Nonlinear Standing Waves Excited by Plasma-Series-Resonance-Enhanced Harmonics in Capacitive Discharges. United States: N. p., 2019. Web. doi:10.1103/PhysRevLett.122.185002.
Zhao, Kai, Wen, De-Qi, Liu, Yong-Xin, Lieberman, Michael A., Economou, Demetre J., & Wang, You-Nian. Observation of Nonlinear Standing Waves Excited by Plasma-Series-Resonance-Enhanced Harmonics in Capacitive Discharges. United States. doi:10.1103/PhysRevLett.122.185002.
Zhao, Kai, Wen, De-Qi, Liu, Yong-Xin, Lieberman, Michael A., Economou, Demetre J., and Wang, You-Nian. Tue . "Observation of Nonlinear Standing Waves Excited by Plasma-Series-Resonance-Enhanced Harmonics in Capacitive Discharges". United States. doi:10.1103/PhysRevLett.122.185002.
@article{osti_1511096,
title = {Observation of Nonlinear Standing Waves Excited by Plasma-Series-Resonance-Enhanced Harmonics in Capacitive Discharges},
author = {Zhao, Kai and Wen, De-Qi and Liu, Yong-Xin and Lieberman, Michael A. and Economou, Demetre J. and Wang, You-Nian},
abstractNote = {},
doi = {10.1103/PhysRevLett.122.185002},
journal = {Physical Review Letters},
number = 18,
volume = 122,
place = {United States},
year = {2019},
month = {5}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: 10.1103/PhysRevLett.122.185002

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Cited by: 1 work
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Works referenced in this record:

Electromagnetic field nonuniformities in large area, high-frequency capacitive plasma reactors, including electrode asymmetry effects
journal, March 2006

  • Sansonnens, L.; Howling, A. A.; Hollenstein, Ch
  • Plasma Sources Science and Technology, Vol. 15, Issue 3
  • DOI: 10.1088/0963-0252/15/3/002

Fast 2D fluid-analytical simulation of ion energy distributions and electromagnetic effects in multi-frequency capacitive discharges
journal, December 2014


Self-consistent nonlinear transmission line model of standing wave effects in a capacitive discharge
journal, May 2004

  • Chabert, P.; Raimbault, J. L.; Rax, J. M.
  • Physics of Plasmas, Vol. 11, Issue 5
  • DOI: 10.1063/1.1688334

Self-consistent simulation of very high frequency capacitively coupled plasmas
journal, May 2008


Standing wave and skin effects in large-area, high-frequency capacitive discharges
journal, June 2002

  • Lieberman, M. A.; Booth, J. P.; Chabert, P.
  • Plasma Sources Science and Technology, Vol. 11, Issue 3
  • DOI: 10.1088/0963-0252/11/3/310

Effect of the resonant growth of harmonics on the electron density in capacitively coupled plasma
journal, November 2009


Spatially resolved measurements of ion density and electron temperature in a dual-frequency capacitively coupled plasma by complete floating double probe technique
journal, January 2011

  • Jiang, Xiang-Zhan; Liu, Yong-Xin; Yang, Shuo
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 29, Issue 1
  • DOI: 10.1116/1.3520644

Sheath motion in a capacitively coupled radio frequency discharge
journal, January 1991

  • Wood, B. P.; Lieberman, M. A.; Lichtenberg, A. J.
  • IEEE Transactions on Plasma Science, Vol. 19, Issue 4
  • DOI: 10.1109/27.90327

Experimental investigation of standing wave effect in dual-frequency capacitively coupled argon discharges: role of a low-frequency source
journal, May 2018

  • Zhao, Kai; Liu, Yong-Xin; Kawamura, E.
  • Plasma Sources Science and Technology, Vol. 27, Issue 5
  • DOI: 10.1088/1361-6595/aac242

Modeling electromagnetic effects in capacitive discharges
journal, February 2008


Stochastic heating in asymmetric capacitively coupled RF discharges
journal, September 2008


Measurement of spatial and temporal evolution of electromagnetic fields in a 100 MHz plasma source using B dot and double dipole probes
journal, May 2016

  • Lane, Barton; Campbell, Colin; Sawada, Ikuo
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 34, Issue 3
  • DOI: 10.1116/1.4943586

Enhancement of Ohmic and Stochastic Heating by Resonance Effects in Capacitive Radio Frequency Discharges: A Theoretical Approach
journal, August 2008


Ionization by Drift and Ambipolar Electric Fields in Electronegative Capacitive Radio Frequency Plasmas
journal, December 2011


Ion energy uniformity in high-frequency capacitive discharges
journal, January 2005

  • Perret, A.; Chabert, P.; Jolly, J.
  • Applied Physics Letters, Vol. 86, Issue 2
  • DOI: 10.1063/1.1848183

Abnormal Heating of Low-Energy Electrons in Low-Pressure Capacitively Coupled Discharges
journal, February 2007


Collisionless Bounce Resonance Heating in Dual-Frequency Capacitively Coupled Plasmas
journal, July 2011


Collisionless Heating in Capacitive Discharges Enhanced by Dual-Frequency Excitation
journal, May 2006


A nonlinear electromagnetics model of an asymmetrically-driven, low pressure capacitive discharge
journal, August 2017

  • Wen, De-Qi; Kawamura, E.; Lieberman, M. A.
  • Physics of Plasmas, Vol. 24, Issue 8
  • DOI: 10.1063/1.4993798

Collisionless Electron Heating by Capacitive rf Sheaths
journal, September 2001


Experimental diagnostics of plasma radial uniformity and comparisons with computational simulations in capacitive discharges
journal, February 2015


Anomalous Capacitive Sheath with Deep Radio-Frequency Electric-Field Penetration
journal, December 2002


Nonlinear series resonance and standing waves in dual-frequency capacitive discharges
journal, November 2016


Simulations of electromagnetic effects in high-frequency capacitively coupled discharges using the Darwin approximation
journal, February 2013


Self-excitation of the plasma series resonance in radio-frequency discharges: An analytical description
journal, December 2006

  • Czarnetzki, U.; Mussenbrock, T.; Brinkmann, R. P.
  • Physics of Plasmas, Vol. 13, Issue 12
  • DOI: 10.1063/1.2397043

Nonlinearity of the radio‐frequency sheath
journal, April 1996

  • Klick, Michael
  • Journal of Applied Physics, Vol. 79, Issue 7
  • DOI: 10.1063/1.361392

Spatial and frequency dependence of plasma currents in a 300 mm capacitively coupled plasma reactor
journal, October 2006

  • Miller, Paul A.; Barnat, Edward V.; Hebner, Gregory A.
  • Plasma Sources Science and Technology, Vol. 15, Issue 4
  • DOI: 10.1088/0963-0252/15/4/036

Nonlinear standing wave excitation by series resonance-enhanced harmonics in low pressure capacitive discharges
journal, August 2015


Relationship between center-peaked plasma density profiles and harmonic electromagnetic waves in very high frequency capacitively coupled plasma reactors
journal, January 2014

  • Sawada, Ikuo; Ventzek, Peter L. G.; Lane, Barton
  • Japanese Journal of Applied Physics, Vol. 53, Issue 3S2
  • DOI: 10.7567/JJAP.53.03DB01

Pressure Heating of Electrons in Capacitively Coupled rf Discharges
journal, August 1995


Frequency dependent plasma characteristics in a capacitively coupled 300 mm wafer plasma processing chamber
journal, October 2006

  • Hebner, Gregory A.; Barnat, Edward V.; Miller, Paul A.
  • Plasma Sources Science and Technology, Vol. 15, Issue 4
  • DOI: 10.1088/0963-0252/15/4/035