skip to main content
DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Synthesis of volatile, reactive coinage metal 5,5-bicyclic amidinates with enhanced thermal stability for chemical vapor deposition

Abstract

Coinage metal bicyclic amidinates for chemical vapor deposition.

Authors:
ORCiD logo [1]; ORCiD logo [1]; ORCiD logo [2]; ORCiD logo [1]; ORCiD logo [1]; ORCiD logo [3]
  1. Department of Chemistry and Chemical Biology, Harvard University, Cambridge, USA
  2. Harvard John A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, USA
  3. Department of Chemistry and Chemical Biology, Harvard University, Cambridge, USA, Harvard John A. Paulson School of Engineering and Applied Sciences
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1511063
Grant/Contract Number:  
AC36-08GO28308
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Dalton Transactions
Additional Journal Information:
Journal Name: Dalton Transactions Journal Volume: 48 Journal Issue: 20; Journal ID: ISSN 1477-9226
Publisher:
Royal Society of Chemistry (RSC)
Country of Publication:
United Kingdom
Language:
English

Citation Formats

Tong, Liuchuan, Davis, Luke M., Gong, Xian, Feng, Jun, Beh, Eugene S., and Gordon, Roy G. Synthesis of volatile, reactive coinage metal 5,5-bicyclic amidinates with enhanced thermal stability for chemical vapor deposition. United Kingdom: N. p., 2019. Web. doi:10.1039/C9DT01202H.
Tong, Liuchuan, Davis, Luke M., Gong, Xian, Feng, Jun, Beh, Eugene S., & Gordon, Roy G. Synthesis of volatile, reactive coinage metal 5,5-bicyclic amidinates with enhanced thermal stability for chemical vapor deposition. United Kingdom. doi:10.1039/C9DT01202H.
Tong, Liuchuan, Davis, Luke M., Gong, Xian, Feng, Jun, Beh, Eugene S., and Gordon, Roy G. Tue . "Synthesis of volatile, reactive coinage metal 5,5-bicyclic amidinates with enhanced thermal stability for chemical vapor deposition". United Kingdom. doi:10.1039/C9DT01202H.
@article{osti_1511063,
title = {Synthesis of volatile, reactive coinage metal 5,5-bicyclic amidinates with enhanced thermal stability for chemical vapor deposition},
author = {Tong, Liuchuan and Davis, Luke M. and Gong, Xian and Feng, Jun and Beh, Eugene S. and Gordon, Roy G.},
abstractNote = {Coinage metal bicyclic amidinates for chemical vapor deposition.},
doi = {10.1039/C9DT01202H},
journal = {Dalton Transactions},
number = 20,
volume = 48,
place = {United Kingdom},
year = {2019},
month = {5}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: 10.1039/C9DT01202H

Save / Share:

Works referenced in this record:

New Liquid Precursors for the Metal-organic CVD of Gold Films
journal, February 2013

  • Parkhomenko, Roman G.; Turgambaeva, Asiya E.; Morozova, Natalia B.
  • Chemical Vapor Deposition, Vol. 19, Issue 1-3
  • DOI: 10.1002/cvde.201207022

Synthesis of 5,5-Bicyclic Amidines as Ligands for Thermally Stable Vapor Deposition Precursors
journal, April 2017


Synthesis of Cu(II) aminoalkoxide complexes and their unusual thermolysis to Cu(0)
journal, April 2004


Group 11 Amidinates and Guanidinates: Potential Precursors for Vapour Deposition
journal, June 2011

  • Whitehorne, Todd J. J.; Coyle, Jason P.; Mahmood, Ahsan
  • European Journal of Inorganic Chemistry, Vol. 2011, Issue 21
  • DOI: 10.1002/ejic.201100262

Multinuclear Copper(I) and Silver(I) Amidinate Complexes: Synthesis, Luminescence, and CS 2 Insertion Reactivity
journal, October 2014

  • Lane, Andrew C.; Vollmer, Matthew V.; Laber, Charles H.
  • Inorganic Chemistry, Vol. 53, Issue 21
  • DOI: 10.1021/ic501694d

Synthesis and Characterization of Volatile, Thermally Stable, Reactive Transition Metal Amidinates
journal, December 2003

  • Lim, Booyong S.; Rahtu, Antti; Park, Jin-Seong
  • Inorganic Chemistry, Vol. 42, Issue 24
  • DOI: 10.1021/ic0345424

Synthesis and X-ray structures of silver and gold guanidinate-like complexes. A Au( ii ) complex with a 2.47 Å Au–Au distance
journal, January 2003

  • Irwin, Michael D.; Abdou, Hanan E.; Mohamed, Ahmed A.
  • Chem. Commun., Issue 23
  • DOI: 10.1039/B309724M

Remarkably Volatile Copper(II) Complexes of N,N -Unsymmetrically Substituted 1,3-Diketimines as Precursors for Cu Metal Deposition via CVD or ALD
journal, July 2005

  • Park, Kyung-Ho; Marshall, Will J.
  • Journal of the American Chemical Society, Vol. 127, Issue 26
  • DOI: 10.1021/ja051158s

Tetranuclear Gold(I) Clusters with Nitrogen Donor Ligands: Luminescence and X-Ray Structure of Gold(I) Naphthyl Amidinate Complex
journal, December 2004

  • Abdou, Hanan E.; Mohamed, Ahmed A.; L�pez-de-Luzuriaga, Jos� M.
  • Journal of Cluster Science, Vol. 15, Issue 4
  • DOI: 10.1007/s10876-004-5764-6

Gold(I) Formamidinate Clusters: The Structure, Luminescence, and Electrochemistry of the Tetranuclear, Base-Free [Au 4 (ArNC(H)NAr) 4 ]
journal, September 2003


Chemical vapor deposition of silver
journal, September 1995

  • Yuan, Zheng; Dryden, Neil H.; Vittal, Jagadese J.
  • Chemistry of Materials, Vol. 7, Issue 9
  • DOI: 10.1021/cm00057a019

Synthesis and X-ray Structures of Dinuclear and Trinuclear Gold(I) and Dinuclear Gold(II) Amidinate Complexes
journal, January 2005

  • Abdou, Hanan E.; Mohamed, Ahmed A.; Fackler, John P.
  • Inorganic Chemistry, Vol. 44, Issue 2
  • DOI: 10.1021/ic048855q

Chemical vapour deposition of copper or silver from the precursors [M(hfac)(CNMe)][M = Cu, Ag; hfac = CF 3 C(O)CHC(O)CF 3 ]
journal, January 1995

  • Yuan, Zheng; Dryden, Neil H.; Li, Xiaorong
  • J. Mater. Chem., Vol. 5, Issue 2
  • DOI: 10.1039/JM9950500303

Synthesis and Thermal Chemistry of Copper (I) Guanidinates
journal, January 2008

  • Coyle, Jason P.; Monillas, Wesley H.; Yap, Glenn P. A.
  • Inorganic Chemistry, Vol. 47, Issue 2
  • DOI: 10.1021/ic701317y

Direct-Liquid-Injection Chemical Vapor Deposition of Nickel Nitride Films and Their Reduction to Nickel Films
journal, May 2010

  • Li, Zhefeng; Gordon, Roy G.; Pallem, Venkateswara
  • Chemistry of Materials, Vol. 22, Issue 10
  • DOI: 10.1021/cm903636j

Dinuclear and Tetranuclear Gold−Nitrogen Complexes. Solvent Influences on Oxidation and Nuclearity of Gold Guanidinate Derivatives
journal, December 2007

  • Mohamed, Ahmed A.; Mayer, Andrew P.; Abdou, Hanan E.
  • Inorganic Chemistry, Vol. 46, Issue 26
  • DOI: 10.1021/ic701399s

Silver metal organic chemical vapor deposition for advanced silver metallization
journal, December 2005


Atomic layer deposition of transition metals
journal, October 2003

  • Lim, Booyong S.; Rahtu, Antti; Gordon, Roy G.
  • Nature Materials, Vol. 2, Issue 11
  • DOI: 10.1038/nmat1000

The gold–hydrogen bond, Au–H, and the hydrogen bond to gold, Au⋯H–X
journal, January 2014

  • Schmidbaur, Hubert; Raubenheimer, Helgard G.; Dobrzańska, Liliana
  • Chem. Soc. Rev., Vol. 43, Issue 1
  • DOI: 10.1039/C3CS60251F

Atomic Layer Deposition: An Overview
journal, January 2010

  • George, Steven M.
  • Chemical Reviews, Vol. 110, Issue 1, p. 111-131
  • DOI: 10.1021/cr900056b

Synthesis and Characterization of Copper(I) Amidinates as Precursors for Atomic Layer Deposition (ALD) of Copper Metal
journal, March 2005

  • Li, Zhengwen; Barry, Seán T.; Gordon, Roy G.
  • Inorganic Chemistry, Vol. 44, Issue 6
  • DOI: 10.1021/ic048492u

Studies of metal chelates with the novel ligand 2,2,7-trimethyl-3,5-octanedione
journal, January 1985


Luminescent gold(I) macrocycles with diphosphine and 4,4′-bipyridyl ligands
journal, January 2000

  • Brandys, Marie-Claude; Jennings, Michael C.; Puddephatt, Richard J.
  • Journal of the Chemical Society, Dalton Transactions, Issue 24
  • DOI: 10.1039/b005251p

Atomic Layer Epitaxy of Copper
journal, January 1998

  • Mårtensson, Per
  • Journal of The Electrochemical Society, Vol. 145, Issue 8
  • DOI: 10.1149/1.1838738

Crystal and molecular structures of two silver(I) amidinates, including an unexpected co-crystal with a lithium amidinate
journal, November 2016

  • Wang, Sida; Harmgarth, Nicole; Liebing, Phil
  • Acta Crystallographica Section E Crystallographic Communications, Vol. 72, Issue 12
  • DOI: 10.1107/S2056989016017680

A brief review of atomic layer deposition: from fundamentals to applications
journal, June 2014


Preventing thermolysis: precursor design for volatile copper compounds
journal, January 2012

  • Coyle, Jason P.; Kurek, Agnieszka; Pallister, Peter J.
  • Chemical Communications, Vol. 48, Issue 84
  • DOI: 10.1039/c2cc35415b

Synthesis and Structural Characterization of a Series of Group 11 2,2-Dialkyl-1,3-dicyclohexylguanidinate Complexes
journal, January 2014

  • Adas, Sonya K.; Ocana, Jesus A.; Bunge, Scott D.
  • Australian Journal of Chemistry, Vol. 67, Issue 7
  • DOI: 10.1071/CH14134

Atomic Layer Deposition of Noble Metals and Their Oxides
journal, September 2013

  • Hämäläinen, Jani; Ritala, Mikko; Leskelä, Markku
  • Chemistry of Materials, Vol. 26, Issue 1
  • DOI: 10.1021/cm402221y

Thermally Robust Gold and Silver Iminopyrrolidinates for Chemical Vapor Deposition of Metal Films
journal, November 2013

  • Coyle, Jason P.; Gordon, Peter G.; Wells, Adam P.
  • Chemistry of Materials, Vol. 25, Issue 22
  • DOI: 10.1021/cm402658c

Experimental and theoretical studies of the copper(I) and silver(I) dinuclear N,N'-di-p-tolylformamidinato complexes
journal, October 1988

  • Cotton, F. Albert.; Feng, Xuejun.; Matusz, Marek.
  • Journal of the American Chemical Society, Vol. 110, Issue 21
  • DOI: 10.1021/ja00229a021