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Title: Synthesis of volatile, reactive coinage metal 5,5-bicyclic amidinates with enhanced thermal stability for chemical vapor deposition

Abstract

Coinage metal bicyclic amidinates for chemical vapor deposition.

Authors:
ORCiD logo [1]; ORCiD logo [1]; ORCiD logo [2]; ORCiD logo [1]; ORCiD logo [1]; ORCiD logo [3]
  1. Department of Chemistry and Chemical Biology, Harvard University, Cambridge, USA
  2. Harvard John A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, USA
  3. Department of Chemistry and Chemical Biology, Harvard University, Cambridge, USA, Harvard John A. Paulson School of Engineering and Applied Sciences
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1511063
Grant/Contract Number:  
AC36-08GO28308
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Dalton Transactions
Additional Journal Information:
Journal Name: Dalton Transactions; Journal ID: ISSN 1477-9226
Publisher:
Royal Society of Chemistry (RSC)
Country of Publication:
United Kingdom
Language:
English

Citation Formats

Tong, Liuchuan, Davis, Luke M., Gong, Xian, Feng, Jun, Beh, Eugene S., and Gordon, Roy G. Synthesis of volatile, reactive coinage metal 5,5-bicyclic amidinates with enhanced thermal stability for chemical vapor deposition. United Kingdom: N. p., 2019. Web. doi:10.1039/C9DT01202H.
Tong, Liuchuan, Davis, Luke M., Gong, Xian, Feng, Jun, Beh, Eugene S., & Gordon, Roy G. Synthesis of volatile, reactive coinage metal 5,5-bicyclic amidinates with enhanced thermal stability for chemical vapor deposition. United Kingdom. doi:10.1039/C9DT01202H.
Tong, Liuchuan, Davis, Luke M., Gong, Xian, Feng, Jun, Beh, Eugene S., and Gordon, Roy G. Tue . "Synthesis of volatile, reactive coinage metal 5,5-bicyclic amidinates with enhanced thermal stability for chemical vapor deposition". United Kingdom. doi:10.1039/C9DT01202H.
@article{osti_1511063,
title = {Synthesis of volatile, reactive coinage metal 5,5-bicyclic amidinates with enhanced thermal stability for chemical vapor deposition},
author = {Tong, Liuchuan and Davis, Luke M. and Gong, Xian and Feng, Jun and Beh, Eugene S. and Gordon, Roy G.},
abstractNote = {Coinage metal bicyclic amidinates for chemical vapor deposition.},
doi = {10.1039/C9DT01202H},
journal = {Dalton Transactions},
number = ,
volume = ,
place = {United Kingdom},
year = {2019},
month = {1}
}

Journal Article:
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This content will become publicly available on April 29, 2020
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Works referenced in this record:

Atomic Layer Deposition: An Overview
journal, January 2010

  • George, Steven M.
  • Chemical Reviews, Vol. 110, Issue 1, p. 111-131
  • DOI: 10.1021/cr900056b