Tile-and-trim micro-resonator array fabrication optimized for high multiplexing factors

McKenney, Christopher M.; Austermann, Jason E.; Beall, James A.; Dober, Bradley J.; Duff, Shannon M.; Gao, Jiansong; Hilton, Gene C.; Hubmayr, Johannes; Li, Dale; Ullom, Joel N.; Van Lanen, Jeff L.; Vissers, Michael R.

doi:10.1063/1.5037301

Title: Tile-and-trim micro-resonator array fabrication optimized for high multiplexing factors

Journal Article · 13 February 2019 · Review of Scientific Instruments

DOI: https://doi.org/10.1063/1.5037301 · OSTI ID:1504725

McKenney, Christopher M. ^[1];

^[1]; Beall, James A. ^[1]; Dober, Bradley J. ^[1]; Duff, Shannon M. ^[1]; Gao, Jiansong ^[1]; Hilton, Gene C. ^[1]; Hubmayr, Johannes ^[1]; Li, Dale ^[2]; Ullom, Joel N. ^[1]; Van Lanen, Jeff L. ^[1]; Vissers, Michael R. ^[1]

National Inst. of Standards and Technology (NIST), Boulder, CO (United States)
SLAC National Accelerator Lab.(SLAC), Menlo Park, CA (United States)

We present a superconducting micro-resonator array fabrication method that is scalable and reconfigurable and has been optimized for high multiplexing factors. The method uses uniformly sized tiles patterned on stepper photolithography reticles as the building blocks of an array. We exhibit this technique on a 101-element microwave kinetic inductance detector (MKID) array made from a titanium-nitride superconducting film. Characterization reveals 1.5% maximum fractional frequency spacing deviations caused primarily by material parameters that vary smoothly across the wafer. Yet, local deviations demonstrate a Gaussian distribution in fractional frequency spacing with a standard deviation of 2.7 × 10^-3. We exploit this finding to increase the yield of the BLAST-TNG 250 μm production wafer by placing resonators in the array close in both physical and frequency space. This array consists of 1836 polarization-sensitive MKIDs wired in three multiplexing groups. We present the array design and show that the achieved yield is consistent with our model of frequency collisions and is comparable to what has been achieved in other low temperature detector technologies.

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Research Organization:: SLAC National Accelerator Lab.(SLAC), Menlo Park, CA (United States)

Sponsoring Organization:: USDOE

Grant/Contract Number:: AC02-76SF00515

OSTI ID:: 1504725

Journal Information:: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 2 Vol. 90; ISSN 0034-6748

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited By (3)

A Microwave SQUID Multiplexer Optimized for Bolometric Applications Dober, B.; Ahmed, Z.; Arnold, K. arXiv https://doi.org/10.48550/arxiv.2010.07998	text	January 2020
Sub-Kelvin Thermometer for On-Chip Measurements of Microwave Devices Utilizing Two-Level Systems in Superconducting Microresonators Wheeler, J.; Vissers, M. R.; Malnou, M. arXiv https://doi.org/10.48550/arxiv.2011.07043	text	January 2020
Wideband on-chip terahertz spectrometer based on a superconducting filterbank Endo, Akira; Karatsu, Kenichi; Laguna, Alejandro Pascual Journal of Astronomical Telescopes, Instruments, and Systems, Vol. 5, Issue 03 https://doi.org/10.1117/1.jatis.5.3.035004	journal	June 2019

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