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Title: Tile-and-trim micro-resonator array fabrication optimized for high multiplexing factors

Abstract

We present a superconducting micro-resonator array fabrication method that is scalable and reconfigurable and has been optimized for high multiplexing factors. The method uses uniformly sized tiles patterned on stepper photolithography reticles as the building blocks of an array. We exhibit this technique on a 101-element microwave kinetic inductance detector (MKID) array made from a titanium-nitride superconducting film. Characterization reveals 1.5% maximum fractional frequency spacing deviations caused primarily by material parameters that vary smoothly across the wafer. Yet, local deviations demonstrate a Gaussian distribution in fractional frequency spacing with a standard deviation of 2.7 × 10 -3. We exploit this finding to increase the yield of the BLAST-TNG 250 μm production wafer by placing resonators in the array close in both physical and frequency space. This array consists of 1836 polarization-sensitive MKIDs wired in three multiplexing groups. We present the array design and show that the achieved yield is consistent with our model of frequency collisions and is comparable to what has been achieved in other low temperature detector technologies.

Authors:
 [1]; ORCiD logo [1];  [1];  [1];  [1];  [1];  [1];  [1];  [2];  [1];  [1];  [1]
  1. National Inst. of Standards and Technology (NIST), Boulder, CO (United States)
  2. SLAC National Accelerator Lab.(SLAC), Menlo Park, CA (United States)
Publication Date:
Research Org.:
SLAC National Accelerator Lab.(SLAC), Menlo Park, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1504725
Grant/Contract Number:  
AC02-76SF00515
Resource Type:
Accepted Manuscript
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 90; Journal Issue: 2; Journal ID: ISSN 0034-6748
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; 36 MATERIALS SCIENCE

Citation Formats

McKenney, Christopher M., Austermann, Jason E., Beall, James A., Dober, Bradley J., Duff, Shannon M., Gao, Jiansong, Hilton, Gene C., Hubmayr, Johannes, Li, Dale, Ullom, Joel N., Van Lanen, Jeff L., and Vissers, Michael R.. Tile-and-trim micro-resonator array fabrication optimized for high multiplexing factors. United States: N. p., 2019. Web. doi:10.1063/1.5037301.
McKenney, Christopher M., Austermann, Jason E., Beall, James A., Dober, Bradley J., Duff, Shannon M., Gao, Jiansong, Hilton, Gene C., Hubmayr, Johannes, Li, Dale, Ullom, Joel N., Van Lanen, Jeff L., & Vissers, Michael R.. Tile-and-trim micro-resonator array fabrication optimized for high multiplexing factors. United States. doi:10.1063/1.5037301.
McKenney, Christopher M., Austermann, Jason E., Beall, James A., Dober, Bradley J., Duff, Shannon M., Gao, Jiansong, Hilton, Gene C., Hubmayr, Johannes, Li, Dale, Ullom, Joel N., Van Lanen, Jeff L., and Vissers, Michael R.. Wed . "Tile-and-trim micro-resonator array fabrication optimized for high multiplexing factors". United States. doi:10.1063/1.5037301.
@article{osti_1504725,
title = {Tile-and-trim micro-resonator array fabrication optimized for high multiplexing factors},
author = {McKenney, Christopher M. and Austermann, Jason E. and Beall, James A. and Dober, Bradley J. and Duff, Shannon M. and Gao, Jiansong and Hilton, Gene C. and Hubmayr, Johannes and Li, Dale and Ullom, Joel N. and Van Lanen, Jeff L. and Vissers, Michael R.},
abstractNote = {We present a superconducting micro-resonator array fabrication method that is scalable and reconfigurable and has been optimized for high multiplexing factors. The method uses uniformly sized tiles patterned on stepper photolithography reticles as the building blocks of an array. We exhibit this technique on a 101-element microwave kinetic inductance detector (MKID) array made from a titanium-nitride superconducting film. Characterization reveals 1.5% maximum fractional frequency spacing deviations caused primarily by material parameters that vary smoothly across the wafer. Yet, local deviations demonstrate a Gaussian distribution in fractional frequency spacing with a standard deviation of 2.7 × 10-3. We exploit this finding to increase the yield of the BLAST-TNG 250 μm production wafer by placing resonators in the array close in both physical and frequency space. This array consists of 1836 polarization-sensitive MKIDs wired in three multiplexing groups. We present the array design and show that the achieved yield is consistent with our model of frequency collisions and is comparable to what has been achieved in other low temperature detector technologies.},
doi = {10.1063/1.5037301},
journal = {Review of Scientific Instruments},
number = 2,
volume = 90,
place = {United States},
year = {2019},
month = {2}
}

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