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Title: Insights into Tungsten Chemical Mechanical Planarization: Part I. Surface Micro-Texture Evolution during Pad Break-In

Authors:
ORCiD logo; ORCiD logo; ORCiD logo; ; ORCiD logo;
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1504522
Resource Type:
Published Article
Journal Name:
ECS Journal of Solid State Science and Technology
Additional Journal Information:
Journal Name: ECS Journal of Solid State Science and Technology Journal Volume: 8 Journal Issue: 5; Journal ID: ISSN 2162-8769
Publisher:
The Electrochemical Society
Country of Publication:
United States
Language:
English

Citation Formats

Mariscal, Juan Cristobal, McAllister, Jeffrey, Sampurno, Yasa, Suarez, Jon Sierra, Borucki, Leonard, and Philipossian, Ara. Insights into Tungsten Chemical Mechanical Planarization: Part I. Surface Micro-Texture Evolution during Pad Break-In. United States: N. p., 2019. Web. doi:10.1149/2.0141905jss.
Mariscal, Juan Cristobal, McAllister, Jeffrey, Sampurno, Yasa, Suarez, Jon Sierra, Borucki, Leonard, & Philipossian, Ara. Insights into Tungsten Chemical Mechanical Planarization: Part I. Surface Micro-Texture Evolution during Pad Break-In. United States. doi:10.1149/2.0141905jss.
Mariscal, Juan Cristobal, McAllister, Jeffrey, Sampurno, Yasa, Suarez, Jon Sierra, Borucki, Leonard, and Philipossian, Ara. Tue . "Insights into Tungsten Chemical Mechanical Planarization: Part I. Surface Micro-Texture Evolution during Pad Break-In". United States. doi:10.1149/2.0141905jss.
@article{osti_1504522,
title = {Insights into Tungsten Chemical Mechanical Planarization: Part I. Surface Micro-Texture Evolution during Pad Break-In},
author = {Mariscal, Juan Cristobal and McAllister, Jeffrey and Sampurno, Yasa and Suarez, Jon Sierra and Borucki, Leonard and Philipossian, Ara},
abstractNote = {},
doi = {10.1149/2.0141905jss},
journal = {ECS Journal of Solid State Science and Technology},
number = 5,
volume = 8,
place = {United States},
year = {2019},
month = {4}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: 10.1149/2.0141905jss

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