Scanning microwave imaging of optically patterned Ge2Sb2Te5
Abstract
The measurement of inhomogeneous conductivity in optically crystallized, amorphous Ge2Sb2Te5 (GST) films is demonstrated via scanning microwave impedance microscopy (MIM). Qualitative consistency with expectations is demonstrated in spots crystallized by focused coherent light at various intensities, exposure times, and film thicknesses. The characterization of process imperfections is demonstrated when a mask is used to optically pattern the nanoscale features of crystalline GST in the amorphous film. In conclusion, these measurements show the ability of MIM to resolve partial crystallization, patterning faults, and other details in optically patterned GST.
- Authors:
-
- Stanford Univ., Stanford, CA (United States)
- SLAC National Accelerator Lab., Menlo Park, CA (United States)
- SLAC National Accelerator Lab., Menlo Park, CA (United States); Univ. of Ottawa, Ottawa, ON (Canada)
- SLAC National Accelerator Lab., Menlo Park, CA (United States); European XFEL, Schenefeld (Germany)
- Publication Date:
- Research Org.:
- SLAC National Accelerator Laboratory (SLAC), Menlo Park, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1504493
- Grant/Contract Number:
- AC02-76SF00515; DMR1305731; GBMF4536
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Applied Physics Letters
- Additional Journal Information:
- Journal Volume: 114; Journal Issue: 9; Journal ID: ISSN 0003-6951
- Publisher:
- American Institute of Physics (AIP)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Johnston, Scott R., Ng, Edwin, Fong, Scott W., Mok, Walter Y., Park, Jeongwon, Zalden, Peter, Sakdinawat, Anne, Wong, H. -S. Philip, Mabuchi, Hideo, and Shen, Zhi -Xun. Scanning microwave imaging of optically patterned Ge2Sb2Te5. United States: N. p., 2019.
Web. doi:10.1063/1.5052018.
Johnston, Scott R., Ng, Edwin, Fong, Scott W., Mok, Walter Y., Park, Jeongwon, Zalden, Peter, Sakdinawat, Anne, Wong, H. -S. Philip, Mabuchi, Hideo, & Shen, Zhi -Xun. Scanning microwave imaging of optically patterned Ge2Sb2Te5. United States. https://doi.org/10.1063/1.5052018
Johnston, Scott R., Ng, Edwin, Fong, Scott W., Mok, Walter Y., Park, Jeongwon, Zalden, Peter, Sakdinawat, Anne, Wong, H. -S. Philip, Mabuchi, Hideo, and Shen, Zhi -Xun. Fri .
"Scanning microwave imaging of optically patterned Ge2Sb2Te5". United States. https://doi.org/10.1063/1.5052018. https://www.osti.gov/servlets/purl/1504493.
@article{osti_1504493,
title = {Scanning microwave imaging of optically patterned Ge2Sb2Te5},
author = {Johnston, Scott R. and Ng, Edwin and Fong, Scott W. and Mok, Walter Y. and Park, Jeongwon and Zalden, Peter and Sakdinawat, Anne and Wong, H. -S. Philip and Mabuchi, Hideo and Shen, Zhi -Xun},
abstractNote = {The measurement of inhomogeneous conductivity in optically crystallized, amorphous Ge2Sb2Te5 (GST) films is demonstrated via scanning microwave impedance microscopy (MIM). Qualitative consistency with expectations is demonstrated in spots crystallized by focused coherent light at various intensities, exposure times, and film thicknesses. The characterization of process imperfections is demonstrated when a mask is used to optically pattern the nanoscale features of crystalline GST in the amorphous film. In conclusion, these measurements show the ability of MIM to resolve partial crystallization, patterning faults, and other details in optically patterned GST.},
doi = {10.1063/1.5052018},
journal = {Applied Physics Letters},
number = 9,
volume = 114,
place = {United States},
year = {Fri Mar 08 00:00:00 EST 2019},
month = {Fri Mar 08 00:00:00 EST 2019}
}
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Works referenced in this record:
Microstructure-dependent DC set switching behaviors of Ge–Sb–Te-based phase-change random access memory devices accessed by in situ TEM
journal, June 2015
- Baek, Kyungjoon; Song, Kyung; Son, Sung Kyu
- NPG Asia Materials, Vol. 7, Issue 6
Characterization of phase change memory materials using phase change bridge devices
journal, September 2009
- Krebs, Daniel; Raoux, Simone; Rettner, Charles T.
- Journal of Applied Physics, Vol. 106, Issue 5
Reversible optical switching of highly confined phonon–polaritons with an ultrathin phase-change material
journal, May 2016
- Li, Peining; Yang, Xiaosheng; Maß, Tobias W. W.
- Nature Materials, Vol. 15, Issue 8
Electronic, optical and thermal properties of the hexagonal and rocksalt-like Ge 2 Sb 2 Te 5 chalcogenide from first-principle calculations
journal, September 2011
- Tsafack, Thierry; Piccinini, Enrico; Lee, Bong-Sub
- Journal of Applied Physics, Vol. 110, Issue 6
Imaging the Three-Dimensional Conductive Channel in Filamentary-Based Oxide Resistive Switching Memory
journal, November 2015
- Celano, Umberto; Goux, Ludovic; Degraeve, Robin
- Nano Letters, Vol. 15, Issue 12
Laser induced crystallization of amorphous Ge2Sb2Te5 films
journal, March 2001
- Weidenhof, V.; Friedrich, I.; Ziegler, S.
- Journal of Applied Physics, Vol. 89, Issue 6
Density changes upon crystallization of Ge2Sb2.04Te4.74 films
journal, January 2002
- Njoroge, Walter K.; Wöltgens, Han-Willem; Wuttig, Matthias
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 20, Issue 1
Direct observation of amorphous to crystalline phase transitions in nanoparticle arrays of phase change materials
journal, November 2007
- Raoux, Simone; Rettner, Charles T.; Jordan-Sweet, Jean L.
- Journal of Applied Physics, Vol. 102, Issue 9
Thermal conductivity of phase-change material Ge2Sb2Te5
journal, October 2006
- Lyeo, Ho-Ki; Cahill, David G.; Lee, Bong-Sub
- Applied Physics Letters, Vol. 89, Issue 15
Dielectric properties of amorphous phase-change materials
journal, March 2017
- Chen, C.; Jost, P.; Volker, H.
- Physical Review B, Vol. 95, Issue 9
Measurement of crystal growth velocity in a melt-quenched phase-change material
journal, August 2013
- Salinga, Martin; Carria, Egidio; Kaldenbach, Andreas
- Nature Communications, Vol. 4, Issue 1
Batch-fabricated cantilever probes with electrical shielding for nanoscale dielectric and conductivity imaging
journal, October 2012
- Yang, Yongliang; Lai, Keji; Tang, Qiaochu
- Journal of Micromechanics and Microengineering, Vol. 22, Issue 11
Phase change materials and phase change memory
journal, August 2014
- Raoux, Simone; Xiong, Feng; Wuttig, Matthias
- MRS Bulletin, Vol. 39, Issue 8
Picosecond Electric-Field-Induced Threshold Switching in Phase-Change Materials
journal, August 2016
- Zalden, Peter; Shu, Michael J.; Chen, Frank
- Physical Review Letters, Vol. 117, Issue 6
How Supercooled Liquid Phase-Change Materials Crystallize: Snapshots after Femtosecond Optical Excitation
journal, August 2015
- Zalden, Peter; von Hoegen, Alexander; Landreman, Patrick
- Chemistry of Materials, Vol. 27, Issue 16
Nanoscale Electronic Inhomogeneity in In 2 Se 3 Nanoribbons Revealed by Microwave Impedance Microscopy
journal, March 2009
- Lai, Keji; Peng, Hailin; Kundhikanjana, Worasom
- Nano Letters, Vol. 9, Issue 3
Nanoscale microwave microscopy using shielded cantilever probes
journal, April 2011
- Lai, Keji; Kundhikanjana, Worasom; Kelly, Michael A.
- Applied Nanoscience, Vol. 1, Issue 1
Material Requirements for Reversible Phase Change Optical Recording
journal, January 1991
- Rubin, Kurt A.
- MRS Proceedings, Vol. 230
Spatially Resolved Thermometry of Resistive Memory Devices
journal, November 2017
- Yalon, Eilam; Deshmukh, Sanchit; Muñoz Rojo, Miguel
- Scientific Reports, Vol. 7, Issue 1
Phase Change Memory
journal, December 2010
- Wong, H. -S. Philip; Raoux, Simone; Kim, SangBum
- Proceedings of the IEEE, Vol. 98, Issue 12
Imaging of phase change materials below a capping layer using correlative infrared near-field microscopy and electron microscopy
journal, October 2015
- Lewin, M.; Hauer, B.; Bornhöfft, M.
- Applied Physics Letters, Vol. 107, Issue 15
Microscopic studies of fast phase transformations in GeSbTe films
journal, January 2001
- Detemple, Ralf; Friedrich, Inés; Njoroge, Walter
- MRS Proceedings, Vol. 674
Color Depth Modulation and Resolution in Phase-Change Material Nanodisplays
journal, March 2016
- Ríos, Carlos; Hosseini, Peiman; Taylor, Robert A.
- Advanced Materials, Vol. 28, Issue 23
Compound materials for reversible, phase‐change optical data storage
journal, September 1986
- Chen, M.; Rubin, K. A.; Barton, R. W.
- Applied Physics Letters, Vol. 49, Issue 9
Electrical properties of the Ge2Sb2Te5 thin films for phase change memory application
conference, January 2016
- Lazarenko, P. I.; Sherchenkov, A. A.; Kozyukhin, S. A.
- REVIEW OF PROGRESS IN QUANTITATIVE NONDESTRUCTIVE EVALUATION: Proceedings of the 35th Annual Review of Progress in Quantitative Nondestructive Evaluation, AIP Conference Proceedings
Impact of Oxidation on Ge 2 Sb 2 Te 5 and GeTe Phase-Change Properties
journal, January 2012
- Gourvest, E.; Pelissier, B.; Vallée, C.
- Journal of The Electrochemical Society, Vol. 159, Issue 4
Phase-change materials for non-volatile photonic applications
journal, August 2017
- Wuttig, M.; Bhaskaran, H.; Taubner, T.
- Nature Photonics, Vol. 11, Issue 8
Optical properties of pseudobinary GeTe, , , , and from ellipsometry and density functional theory
journal, September 2009
- Park, Jun-Woo; Eom, Seung Hwan; Lee, Hosun
- Physical Review B, Vol. 80, Issue 11
Dielectric properties of amorphous phase-change materials
text, January 2017
- Chen, C.; Jost, Peter Christian Georg; Volker, H.
- RWTH Aachen University
Nanoscale Electronic Inhomogeneity in In2Se3 Nanoribbons Revealed by Microwave Impedance Microscopy
text, January 2009
- Lai, Keji; Peng, Hailin; Kundhikanjana, Worasom
- arXiv
Picosecond electric-field-induced threshold switching in phase-change materials
text, January 2016
- Zalden, Peter; Shu, Michael J.; Chen, Frank
- arXiv
Spatially Resolved Thermometry of Resistive Memory Devices
preprint, January 2017
- Yalon, Eilam; Deshmukh, Sanchit; Rojo, Miguel Muñoz
- arXiv